JPH0485729U - - Google Patents
Info
- Publication number
- JPH0485729U JPH0485729U JP1990126411U JP12641190U JPH0485729U JP H0485729 U JPH0485729 U JP H0485729U JP 1990126411 U JP1990126411 U JP 1990126411U JP 12641190 U JP12641190 U JP 12641190U JP H0485729 U JPH0485729 U JP H0485729U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric actuator
- positioning device
- measuring
- applying
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Machine Tool Units (AREA)
Description
第１図は位置決め装置の一例を示す構成図、第
２図は本考案の一実施例の圧電アクチユエータ制
御構成図、第３図は圧電アクチユエータの電気特
性図、第４図は分極監視回路の一例を示す図であ
る。
１，２，３……圧電アクチユエータ、４……圧
電アクチユエータ駆動回路、５……測長器、６…
…プリアンプ、７……分極監視回路、８……入力
クランプ回路。
Fig. 1 is a block diagram showing an example of a positioning device, Fig. 2 is a piezoelectric actuator control block diagram of an embodiment of the present invention, Fig. 3 is an electrical characteristic diagram of the piezoelectric actuator, and Fig. 4 is an example of a polarization monitoring circuit. FIG. 1, 2, 3... Piezoelectric actuator, 4... Piezoelectric actuator drive circuit, 5... Length measuring device, 6...
...Preamplifier, 7...Polarization monitoring circuit, 8...Input clamp circuit.
Claims (1)
計測する計測手段より成る位置決め装置において
、圧電アクチユエータを正負に印加し、位置決め
を行なうことを特徴とする位置決め装置。 ２ 負電圧を印加して駆動する圧電アクチユエー
タにおいて、該圧電アクチユエータの分極状態を
監視する制御手段を有することを特徴とする位置
決め装置。[Claims for Utility Model Registration] 1. A positioning device comprising a piezoelectric actuator and a measuring means for measuring the position of a moving table, characterized in that positioning is performed by applying positive and negative voltages to the piezoelectric actuator. 2. A positioning device for a piezoelectric actuator that is driven by applying a negative voltage, and further comprising a control means for monitoring the polarization state of the piezoelectric actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990126411U JPH0485729U (en) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990126411U JPH0485729U (en) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485729U true JPH0485729U (en) | 1992-07-24 |
Family
ID=31873970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990126411U Pending JPH0485729U (en) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485729U (en) |
-
1990
- 1990-11-30 JP JP1990126411U patent/JPH0485729U/ja active Pending
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