JPH0487630U - - Google Patents
Info
- Publication number
- JPH0487630U JPH0487630U JP13024790U JP13024790U JPH0487630U JP H0487630 U JPH0487630 U JP H0487630U JP 13024790 U JP13024790 U JP 13024790U JP 13024790 U JP13024790 U JP 13024790U JP H0487630 U JPH0487630 U JP H0487630U
- Authority
- JP
- Japan
- Prior art keywords
- furnace body
- space
- surface treatment
- treatment apparatus
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004381 surface treatment Methods 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Description
第１図は本発明の実施例を示す縦断面図、第２
図は従来の縦型反応炉の縦断面図である。
１０……反応炉、１１……炉体、１２……ヒー
タ、１３……石英管、１５……通路、１６……口
管、１７……マニホルド、１７Ａ……搬入・搬出
口、２３……ブロワ、２４……外部配管、３０…
…開閉弁となるシヤツター、３１……シリンダ、
Ａ……空間。
Fig. 1 is a longitudinal cross-sectional view showing an embodiment of the present invention, Fig. 2 is a vertical sectional view showing an embodiment of the present invention;
The figure is a longitudinal sectional view of a conventional vertical reactor. 10... Reaction furnace, 11... Furnace body, 12... Heater, 13... Quartz tube, 15... Passage, 16... Mouth pipe, 17... Manifold, 17A... Loading/exporting port, 23... Blower, 24... External piping, 30...
... Shutter which becomes an on-off valve, 31 ... Cylinder,
A...Space.
Claims (1)
との間に空間を区画して該炉体内に挿入された反
応管、上記空間の下部を外部に連通する通路、一
端が上記空間の上部に開口する外部配管に接続さ
れた温度調節用ブロワを有し、ガス供給管を通し
て上記反応管内に処理流体を供給される表面処理
装置において、 上記外部配管中もしくは上記通路の入口に、開
閉弁を設けたことを特徴とする表面処理装置。[Claims for Utility Model Registration] A furnace body, a heater provided in the furnace body, a reaction tube inserted into the furnace body with a space defined between it and the furnace body, and a lower part of the space communicating with the outside. In the surface treatment apparatus, the temperature control blower is connected to an external piping whose one end opens to the upper part of the space, and the processing fluid is supplied into the reaction tube through the gas supply pipe, in the external piping or A surface treatment apparatus characterized in that an on-off valve is provided at the entrance of the passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13024790U JPH0487630U (en) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13024790U JPH0487630U (en) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487630U true JPH0487630U (en) | 1992-07-30 |
Family
ID=31877603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13024790U Pending JPH0487630U (en) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487630U (en) |
-
1990
- 1990-11-30 JP JP13024790U patent/JPH0487630U/ja active Pending