JPH0487636U - - Google Patents
Info
- Publication number
- JPH0487636U JPH0487636U JP1990130782U JP13078290U JPH0487636U JP H0487636 U JPH0487636 U JP H0487636U JP 1990130782 U JP1990130782 U JP 1990130782U JP 13078290 U JP13078290 U JP 13078290U JP H0487636 U JPH0487636 U JP H0487636U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- furnace
- disposed
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は、本考案に係る半導体装置の実施例を
示す図、第２図は従来の半導体装置を示す図であ
る。
１，１１……炉、２，１２……炉心管、３，１
３……キヤツプ、４，１４……ボート、５，１５
……半導体ウエハー、１６……排気部、１７……
バルブ。
FIG. 1 is a diagram showing an embodiment of a semiconductor device according to the present invention, and FIG. 2 is a diagram showing a conventional semiconductor device. 1,11...Furnace, 2,12...Furnace core tube, 3,1
3...Cap, 4,14...Boat, 5,15
...Semiconductor wafer, 16...Exhaust section, 17...
valve.
Claims (1)
路に、該炉心管内のガス圧に応じて調節されたバ
ルブが配設されてなる構成の半導体装置。 A semiconductor device having a structure in which a furnace core tube is disposed in a furnace, and a valve that is adjusted according to the gas pressure in the furnace core tube is disposed in a gas exhaust path of the furnace core tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990130782U JPH0487636U (en) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990130782U JPH0487636U (en) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487636U true JPH0487636U (en) | 1992-07-30 |
Family
ID=31878097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990130782U Pending JPH0487636U (en) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487636U (en) |
-
1990
- 1990-11-30 JP JP1990130782U patent/JPH0487636U/ja active Pending
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