JPH0487721U - - Google Patents

Info

Publication number: JPH0487721U
Authority: JP; Japan
Prior art keywords: center; suction port; mist; rectifier box; mist collector
Prior art date: 1990-11-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP12807990U

Other languages

English (en)

Japanese (ja)

Other versions

JP2544655Y2 (ja

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-11-30

Filing date

1990-11-30

Publication date

1992-07-30

1990-11-30 Application filed filed Critical

1990-11-30 Priority to JP12807990U priority Critical patent/JP2544655Y2/ja

1992-07-30 Publication of JPH0487721U publication Critical patent/JPH0487721U/ja

1997-08-20 Application granted granted Critical

1997-08-20 Publication of JP2544655Y2 publication Critical patent/JP2544655Y2/ja

2005-11-30 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Landscapes

Separating Particles In Gases By Inertia (AREA)
Filtering Of Dispersed Particles In Gases (AREA)

JP12807990U 1990-11-30 1990-11-30 ミストコレクタ Expired - Fee Related JP2544655Y2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP12807990U JP2544655Y2 (ja)	1990-11-30	1990-11-30	ミストコレクタ

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP12807990U JP2544655Y2 (ja)	1990-11-30	1990-11-30	ミストコレクタ

Publications (2)

Publication Number	Publication Date
JPH0487721U true JPH0487721U (cs)	1992-07-30
JP2544655Y2 JP2544655Y2 (ja)	1997-08-20

Family

ID=31875554

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP12807990U Expired - Fee Related JP2544655Y2 (ja)	1990-11-30	1990-11-30	ミストコレクタ

Country Status (1)

Country	Link
JP (1)	JP2544655Y2 (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH10216437A (ja) *	1997-02-07	1998-08-18	Showa Denki Kk	オイルミスト除去装置
JP2014046289A (ja) *	2012-08-31	2014-03-17	Nikki Co Ltd	気体用フィルタ装置
JP2015080738A (ja) *	2013-10-21	2015-04-27	東京エレクトロン株式会社	トラップ装置及び基板処理装置

1990
- 1990-11-30 JP JP12807990U patent/JP2544655Y2/ja not_active Expired - Fee Related

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH10216437A (ja) *	1997-02-07	1998-08-18	Showa Denki Kk	オイルミスト除去装置
JP2014046289A (ja) *	2012-08-31	2014-03-17	Nikki Co Ltd	気体用フィルタ装置
JP2015080738A (ja) *	2013-10-21	2015-04-27	東京エレクトロン株式会社	トラップ装置及び基板処理装置

Also Published As

Publication number	Publication date
JP2544655Y2 (ja)	1997-08-20

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Legal Events

Date	Code	Title	Description
2004-05-11	R250	Receipt of annual fees	Free format text: JAPANESE INTERMEDIATE CODE: R250
2005-05-02	LAPS	Cancellation because of no payment of annual fees