JPH0510388A - Vibration insulating device - Google Patents
Vibration insulating deviceInfo
- Publication number
- JPH0510388A JPH0510388A JP3163037A JP16303791A JPH0510388A JP H0510388 A JPH0510388 A JP H0510388A JP 3163037 A JP3163037 A JP 3163037A JP 16303791 A JP16303791 A JP 16303791A JP H0510388 A JPH0510388 A JP H0510388A
- Authority
- JP
- Japan
- Prior art keywords
- bulk material
- surface plate
- magnet
- base
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000013590 bulk material Substances 0.000 claims abstract description 47
- 239000007788 liquid Substances 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 238000001816 cooling Methods 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 238000002955 isolation Methods 0.000 claims description 2
- 238000005339 levitation Methods 0.000 abstract description 9
- QJGQUHMNIGDVPM-BJUDXGSMSA-N Nitrogen-13 Chemical compound [13N] QJGQUHMNIGDVPM-BJUDXGSMSA-N 0.000 abstract description 4
- 239000002887 superconductor Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 22
- 238000007667 floating Methods 0.000 description 8
- 239000012071 phase Substances 0.000 description 7
- 238000013016 damping Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910009203 Y-Ba-Cu-O Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Vibration Prevention Devices (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は振動絶縁装置に係り、特
に酸化物超電導物質よりなるバルク材を用いて定盤の振
動を防止する装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration insulating device, and more particularly to a device for preventing vibration of a surface plate by using a bulk material made of an oxide superconducting material.
【０００２】[0002]
【従来の技術】定盤あるいは半導体のステッパ装置や電
子顕微鏡等の各種の機器を搭載する台を床面からの振動
から防止するために、磁気力を利用する方法が知られて
いる。この方法は、定盤や機器搭載台を磁石の反発力ま
たは吸引力を利用して浮上させるもので、大別して
（イ）反発方式と（ロ）吸引方式とに分けることができ
る。 上記（イ）の反発方式は、基台と、この上に配置
される定盤や機器搭載台の対向面にそれぞれ複数個の磁
石を同極側を対向して固設し、磁石の同極の反発力を利
用して定盤や機器搭載台を基台から浮上させるもので、
一方上記（ロ）の吸引方式は、基台と、この上に配置さ
れる定盤や機器搭載台の対向面にそれぞれ複数個の磁石
を異極側を対向して固設し、そのギャップを一定に制御
する手段を設けたものである。2. Description of the Related Art There is known a method of utilizing a magnetic force in order to prevent a table for mounting various equipment such as a surface plate or a semiconductor stepper device and an electron microscope from vibration from a floor surface. In this method, the surface plate and the equipment mounting base are levitated by utilizing the repulsive force or attractive force of the magnet, and can be roughly classified into (a) repulsive method and (b) attractive method. In the repulsion method of (a) above, a plurality of magnets are fixed to the opposing surfaces of the base and the surface plate or equipment mounting table placed on the base with the same poles facing each other. Using the repulsive force of, to raise the surface plate and equipment mounting base from the base,
On the other hand, in the suction method of (b) above, a plurality of magnets are fixed to the facing surfaces of the base and the surface plate or equipment mounting base placed on the base with the opposite poles facing each other, and the gap between them is fixed. It is provided with means for constant control.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上記
（イ）の反発方式では、対向する各磁石には垂直方向の
反発力と同時に横方向の力が常に働き、対向位置で安定
しないため、横方向のずれを抑えるストッパーが必要と
なる。このため、実際には非接触型の浮上方式を維持す
ることが困難であるという問題を生ずる。また吸引方式
に比較して効率が悪いという問題もある。However, in the repulsion system of the above (a), the repulsive force in the vertical direction acts on the opposing magnets at the same time as the repulsive force in the vertical direction, which is not stable at the opposing position. It is necessary to have a stopper to prevent the slippage. Therefore, in practice, it is difficult to maintain the non-contact floating system. There is also a problem that the efficiency is lower than that of the suction method.
【０００４】一方、上記（ロ）の吸引方式では、単に吸
引力だけであると、最終的には接触してしまうため、電
磁石の反発力や吸引力を利用してギャップを一定に制御
する必要があり、一般には変位センサーを用いて浮上代
を一定に制御することが行われているが、装置およびそ
の取扱いが複雑になるという欠点がある。本発明は以上
の問題を解決するためになされたもので、構造が簡単
で、完全な非接触型の浮上方式が得られる振動絶縁装置
を提供することをその目的とする。On the other hand, in the above-mentioned suction method (b), if only the suction force is applied, the final contact will occur. Therefore, it is necessary to control the gap constant by utilizing the repulsive force and the suction force of the electromagnet. However, in general, a floating sensor is used to control the flying height to a constant level, but there is a drawback that the device and its handling are complicated. The present invention has been made to solve the above problems, and an object thereof is to provide a vibration isolator having a simple structure and capable of obtaining a complete non-contact type levitation system.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するため
に、本発明は、基台上に定盤を配置し、基台と定盤との
間に振動絶縁手段を備えた振動絶縁装置において、振動
絶縁手段に磁石と酸化物超電導物質よりなるバルク材と
の反発力を利用するもので，本願第１の考案は、基台上
に支持部材を介して複数個の磁石を固設し、定盤の磁石
と対向する位置に酸化物超電導物質よりなるバルク材を
固設するとともに、磁石の中央部にシャフトを介して定
盤の下部に固定されたコイルを配置し、定盤に配設され
た振動センサの出力信号によりコイルに制御電流を供給
する制御装置と、バルク材を液体窒素温度以下に保持す
る冷却手段を備えたものである。In order to achieve the above-mentioned object, the present invention provides a vibration isolator having a surface plate arranged on a base and a vibration insulation means provided between the base and the surface plate. In the first aspect of the present invention, a plurality of magnets are fixedly mounted on a base through a support member, and the vibration repulsive force uses the repulsive force between the magnet and the bulk material made of an oxide superconducting material. A bulk material made of an oxide superconducting material is fixed at a position facing the magnet of the surface plate, and a coil fixed to the lower part of the surface plate via a shaft is arranged at the center of the magnet and arranged on the surface plate. A control device for supplying a control current to the coil according to the output signal of the vibration sensor, and a cooling means for keeping the bulk material at a liquid nitrogen temperature or lower are provided.
【０００６】上記発明において、酸化物超電導物質より
なるバルク材を基台上に固設し、磁石を定盤の下部にバ
ルク材と対向して固設することもできる。これは本願第
２の発明として、基台上に支持部材を介して複数個の酸
化物超電導物質よりなるバルク材を固設し、定盤のバル
ク材と対向する位置に磁石を固設するとともに、バルク
材の中央部にシャフトを介して定盤の下部に固定された
コイルを配置し、定盤に配設された振動センサの出力信
号によりコイルに制御電流を供給する制御装置と、バル
ク材を液体窒素温度以下に保持する冷却手段を備えた振
動絶縁装置として記述される。In the above invention, a bulk material made of an oxide superconducting material may be fixed on the base, and a magnet may be fixed below the surface plate so as to face the bulk material. This is a second invention of the present application, in which a bulk material made of a plurality of oxide superconducting substances is fixed on a base through a supporting member, and a magnet is fixed at a position facing the bulk material of the surface plate. , A coil fixed to the lower part of the surface plate via a shaft at the center of the bulk material, and a control device for supplying a control current to the coil by the output signal of a vibration sensor arranged on the surface plate, and the bulk material. Is described as a vibration isolator having a cooling means for maintaining the liquid nitrogen temperature below the liquid nitrogen temperature.
【０００７】本発明における酸化物超電導物質よりなる
バルク材としては、溶融法、即ち、ＭＰＭＧ法（Ｍｅｌ
ｔ−Ｐｏｗｄｅｒ−Ｍｅｌｔ−Ｇｒｏｗｔｈ法）により
製造した所定形状の成型体が用いられる。この方法は、
例えばＹ2Ｏ3 、ＢａＣＯ3 およびＣｕＯの混合粉末を
仮焼→溶融→急冷した後、粉砕→混合→成型して（２１
１）相（Ｙ：Ｂａ：Ｃｕ＝２：１：１のモル比、以下同
じ。）＋液相の領域まで再加熱し、室温まで徐冷したも
ので、出発組成を（１２３）相から（２１１）相側へず
らすことにより過剰の（２１１）相が（１２３）相のマ
トリックス中に微細に分散した組織が得られ、（２１
１）相は常電導相であるため、ピン止め効果の大きなＹ
系（Ｙ−Ｂａ−Ｃｕ−Ｏ系）の酸化物超電導物質よりな
るバルク材を得ることができる。The bulk material made of an oxide superconducting material in the present invention is a melting method, that is, an MPMG method (Mel method).
A molded body having a predetermined shape manufactured by the t-Powder-Melt-Growth method) is used. This method
For example, a mixed powder of Y 2 O 3 , BaCO 3 and CuO is calcined → melted → quenched, and then crushed → mixed → molded (21
1) Phase (Y: Ba: Cu = 2: 1: 1 molar ratio, the same applies hereinafter) + A liquid phase was reheated and gradually cooled to room temperature, and the starting composition was changed from (123) phase to ( By shifting to the (211) phase side, a structure in which an excessive (211) phase is finely dispersed in a (123) phase matrix is obtained, and (21)
1) Phase is a normal conducting phase, so Y with a large pinning effect
A bulk material made of a system (Y—Ba—Cu—O system) oxide superconducting material can be obtained.
【０００８】上記方法によれば、常電導析出物の分散が
制御できる上、各種の形状に製作できるため、これを所
定形状に成型したバルク材を基台または定盤のいずれか
一方の対向面に複数個固設し、このバルク材と対向する
位置に、それぞれ磁石が固設される。上記発明におい
て、バルク材および磁石はそれぞれ対向して基台または
定盤に複数個固設されるが、これらのバルク材および磁
石をリング状に形成して配設することもできる。この場
合、コイルはバルク材または磁石の中央部に位置するよ
うに配置される。According to the above method, the dispersion of the normal-conducting precipitates can be controlled, and various shapes can be produced. Therefore, a bulk material formed into a predetermined shape is used as a bulk material, and the bulk material is opposed to either the base or the surface plate. A plurality of magnets are fixedly mounted on each of the magnets, and magnets are fixed at positions facing the bulk material. In the above invention, a plurality of bulk materials and magnets are fixed to the base or the surface plate so as to face each other, but these bulk materials and magnets may be formed in a ring shape and arranged. In this case, the coil is arranged so as to be located at the center of the bulk material or the magnet.
【０００９】[0009]
【作用】上記構成により本発明の振動絶縁装置において
は、酸化物超電導物質よりなるバルク材が磁化された
後、磁石との反発力により定盤が基台から浮上するた
め、定盤に横方向の力が働いても直ちに元の位置に復帰
し、従来の反発方式のように横ずれストッパーが必要で
なくなり、完全な非接触型の浮上方式を維持することが
できる。With the above structure, in the vibration isolator of the present invention, after the bulk material made of the oxide superconducting material is magnetized, the surface plate floats from the base due to the repulsive force with the magnet. Even if the force of is applied, it immediately returns to its original position, eliminating the need for a lateral shift stopper as in the conventional repulsion method, and maintaining a complete non-contact floating method.
【００１０】また、従来のアクティブ振動絶縁装置にお
いては、定盤を支持する部材と振動を抑制する部材、即
ちアクチュエータとは別々に構成されていたが、本発明
の構成により定盤を支持する部材とアクチュエータを同
一にすることができる。Further, in the conventional active vibration isolator, the member for supporting the surface plate and the member for suppressing the vibration, that is, the actuator are separately configured. However, the member for supporting the surface plate is constituted by the constitution of the present invention. And the actuator can be the same.
【００１１】[0011]
【実施例】以下本考案の一実施例について説明する。図
１は本発明の振動絶縁装置１の概略を示したもので、２
は定盤あるいは機器搭載台、３はＭＰＭＧ法により製作
したＹ系の酸化物超電導物質よりなるバルク材、４振動
センサ、５は基台、６は磁石、７はコイル，８は制御装
置である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below. FIG. 1 shows an outline of a vibration isolator 1 of the present invention.
Is a surface plate or a device mounting base, 3 is a bulk material made of a Y-based oxide superconducting material manufactured by the MPMG method, 4 vibration sensors, 5 is a base, 6 is a magnet, 7 is a coil, and 8 is a controller. .
【００１２】図において、基台５は床面９に固定され、
その上面には複数個のリング状の磁石６がハウジング１
０を介して基台５上に固設されている。機器搭載台２の
下側には複数個のリング状のバルク材３が配設されてお
り、このバルク材３は係止部材１１により機器搭載台２
の下部に固定され、バルク材３は、機器搭載台２の下部
に配設されたリング状の容器１２により包囲されるとと
もに、この容器の内部には液体窒素１３が収容されてい
る。In the figure, the base 5 is fixed to the floor surface 9,
A plurality of ring-shaped magnets 6 are provided on the upper surface of the housing 1
It is fixedly mounted on the base 5 through 0. A plurality of ring-shaped bulk materials 3 are disposed below the equipment mounting base 2, and the bulk materials 3 are attached to the equipment mounting base 2 by locking members 11.
The bulk material 3 is fixed to the lower part of the device, and is surrounded by a ring-shaped container 12 arranged at the lower part of the equipment mounting base 2, and liquid nitrogen 13 is accommodated inside the container.
【００１３】上記の磁石６とバルク材３は、基台上の所
定位置に機器搭載台２を配置した時に、それぞれが対向
するように配設され、これらの複数対の磁石とバルク材
の数および磁化の強さは機器搭載台２上に半導体のステ
ッパ装置のような機器１４を載置した場合の浮上力と浮
上重量との関係によって所定の浮上代が得られるように
決められる。The magnet 6 and the bulk material 3 are arranged so as to face each other when the device mounting base 2 is arranged at a predetermined position on the base, and the number of pairs of these magnets and the bulk material is set. The strength of the magnetization is determined so that a predetermined levitation margin can be obtained by the relationship between the levitation force and the levitation weight when a device 14 such as a semiconductor stepper device is placed on the device mounting base 2.
【００１４】また、機器搭載台２の下部には、リング状
のバルク材３の中央部に荷重支持板１５が固設されてお
り、この荷重支持板にはシャフト１６を介してコイル７
が磁石６の中央部に位置するように固設されている。一
方、機器搭載台２には振動センサ４が配設されており、
このセンサからの出力信号は制御装置８内の制御回路に
入力され、制御回路の出力信号によりドライブ回路の出
力、即ち、コイル７の制御電流を制御する。A load support plate 15 is fixed to the center of the ring-shaped bulk material 3 at the lower portion of the equipment mounting base 2, and the load support plate 15 is provided with a coil 7 via a shaft 16.
Are fixed so that they are located at the center of the magnet 6. On the other hand, a vibration sensor 4 is arranged on the equipment mounting base 2,
The output signal from this sensor is input to the control circuit in the control device 8, and the output signal of the control circuit controls the output of the drive circuit, that is, the control current of the coil 7.
【００１５】バルク材３は磁石６によって磁化される
が、これは基台と機器搭載台とを所定の間隔に維持して
対向させ、バルク材３に磁束を侵入させた後、容器１２
の内部に液体窒素１３を供給してバルク材を冷却するこ
とにより行なうことができる。上記の磁場中冷却による
方法、即ちバルク材３に磁場を印加した後、冷却する方
法により、バルク材は、その内部に侵入した磁場がピン
止めされて永久磁石の挙動を示し、機器搭載台２は基台
５上に浮上する。The bulk material 3 is magnetized by the magnet 6, and this is arranged so that the base and the equipment mounting table are opposed to each other while maintaining a predetermined space therebetween, and a magnetic flux is introduced into the bulk material 3, and then the container 12 is placed.
It can be performed by supplying liquid nitrogen 13 to the inside of the and cooling the bulk material. By the method of cooling in the magnetic field described above, that is, the method of cooling after applying a magnetic field to the bulk material 3, the bulk material exhibits the behavior of a permanent magnet by pinning the magnetic field that has penetrated into the bulk material. Floats on the base 5.
【００１６】機器搭載台２上には機器１４が載置され、
この重量により浮上代は変化するが、機器搭載台２は基
台５上で安定して浮上する。尚、上記の磁場中冷却によ
る方法に代えて零磁場冷却の後、磁場を印加する方法、
即ち予め容器１２の内部に液体窒素１３を供給してバル
ク材３を液体窒素で冷却した後、バルク材に磁束を侵入
させることもできる。A device 14 is placed on the device mounting base 2,
Although the floating allowance varies depending on this weight, the equipment mounting base 2 stably floats on the base 5. Incidentally, instead of the above method by cooling in a magnetic field, a method of applying a magnetic field after zero magnetic field cooling,
That is, it is possible to supply liquid nitrogen 13 to the inside of the container 12 in advance and cool the bulk material 3 with the liquid nitrogen, and then make the magnetic flux penetrate into the bulk material.
【００１７】さらに、磁石とバルク材の配置を逆にして
機器搭載台の下面に磁石を、基台上面にバルク材を固設
することもでき、また磁石として電磁石を用いることも
できる。電磁石を用いる場合には、予め複数個の電磁石
を一方の対向面に固設し、電磁石に所定値の電流を流し
た後、バルク材を冷却するか、あるいはバルク材を冷却
後、電磁石に所定値の電流を流すことにより、上記と同
様の浮上方法が得られる。Further, it is possible to reverse the arrangement of the magnet and the bulk material to fix the magnet on the lower surface of the equipment mounting base and to fix the bulk material on the upper surface of the base, and it is also possible to use an electromagnet as the magnet. When using an electromagnet, a plurality of electromagnets are fixedly fixed on one of the opposing surfaces in advance, and a current of a predetermined value is applied to the electromagnet, and then the bulk material is cooled, or the bulk material is cooled and then the electromagnet is predetermined. The same floating method as described above can be obtained by passing a current having a value.
【００１８】上記構成の振動絶縁装置においては、磁石
とバルク材との反発力により機器搭載台（定盤）の浮上
力が得られ、またコイルと磁石により微細振動を抑制す
るアクチュエータを形成するため、磁気浮上機構と振動
抑制用のアクチュエータを一体化することができる。In the vibration isolator having the above construction, the repulsive force between the magnet and the bulk material provides the levitation force of the equipment mounting table (surface plate), and the coil and the magnet form an actuator for suppressing fine vibration. The magnetic levitation mechanism and the vibration suppressing actuator can be integrated.
【００１９】[0019]
【発明の効果】以上述べたように本発明の振動絶縁装置
によれば、非接触で定盤を基台より浮上させることがで
き、また上部から強制的な力を加えることにより浮上位
置を変化させることができるため、浮上代を変化させる
こともできる。また、バルク材のピン止め効果によりダ
ンピングがあり、このダンピング力は浮上代が大きいと
小さく、浮上代が小さいと大きくなるため、ダンピング
の調整が容易であるとともに、従来の磁気力を利用する
方法に比較して大きな浮上力を得ることができ、さらに
磁気浮上機構と振動抑制用のアクチュエータを一体化す
ることができるため、その構造も簡単である利点を有す
る。As described above, according to the vibration isolator of the present invention, the surface plate can be levitated from the base in a non-contact manner, and the levitated position can be changed by applying a compulsory force from above. Since it is possible to change, the floating allowance can also be changed. In addition, there is damping due to the pinning effect of the bulk material. This damping force is small when the floating margin is large, and it is large when the floating margin is small, so it is easy to adjust the damping, and the conventional magnetic force is used. In comparison with the above, a large levitation force can be obtained, and since the magnetic levitation mechanism and the vibration suppressing actuator can be integrated, the structure thereof is also advantageous.
【図１】本発明の振動絶縁装置の概略断面図。FIG. 1 is a schematic sectional view of a vibration isolator of the present invention.
１…振動絶縁装置 ２…機器搭載台 ３…酸化物超電導物質よりなるバルク材 ４…振動センサ ５…基台 ６…磁石 ７…コイル ８…制御装置 １０…ハウジング １２…容器 １３…液体窒素 1 ... Vibration isolation device 2 ... Equipment mounting base 3 ... Bulk material made of oxide superconducting material 4 ... Vibration sensor 5 ... base 6 ... Magnet 7 ... coil 8 ... Control device 10 ... Housing 12 ... Container 13 ... Liquid nitrogen
───────────────────────────────────────────────────── フロントページの続き (72)発明者 塩野 武男 神奈川県川崎市川崎区小田栄２丁目１番１ 号 昭和電線電纜株式会社内 (72)発明者 内田 公夫 神奈川県川崎市川崎区小田栄２丁目１番１ 号 昭和電線電纜株式会社内 (72)発明者 長屋 重夫 神奈川県川崎市川崎区小田栄２丁目１番１ 号 昭和電線電纜株式会社内 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Takeo Shiono 2-1-1 Oda Sakae, Kawasaki-ku, Kawasaki-shi, Kanagawa No. Showa Densen Denki Co., Ltd. (72) Inventor Kimio Uchida 2-1-1 Oda Sakae, Kawasaki-ku, Kawasaki-shi, Kanagawa No. Showa Densen Denki Co., Ltd. (72) Inventor Shigeo Nagaya 2-1-1 Oda Sakae, Kawasaki-ku, Kawasaki-shi, Kanagawa No. Showa Densen Denki Co., Ltd.
Claims (2)
盤との間に振動絶縁手段を備えた振動絶縁装置におい
て、前記基台上に支持部材を介して複数個の磁石を固設
し、前記定盤の前記磁石と対向する位置に酸化物超電導
物質よりなるバルク材を固設するとともに、前記磁石の
中央部にシャフトを介して前記定盤の下部に固定された
コイルを配置し、前記定盤に配設された振動センサの出
力信号により前記コイルに制御電流を供給する制御装置
と、前記バルク材を液体窒素温度以下に保持する冷却手
段を備えたことを特徴とする振動絶縁装置。1. A vibration isolator comprising a surface plate arranged on a base and a vibration insulating means provided between the base and the surface plate, wherein a plurality of members are provided on the base via a supporting member. A magnet was fixed, a bulk material made of an oxide superconducting material was fixed at a position facing the magnet on the surface plate, and the magnet was fixed to the lower portion of the surface plate via a shaft at the center of the magnet. A coil is disposed, and a control device that supplies a control current to the coil according to an output signal of a vibration sensor disposed on the surface plate, and a cooling unit that keeps the bulk material at a liquid nitrogen temperature or less are characterized. Vibration isolation device.
盤との間に振動絶縁手段を備えた振動絶縁装置におい
て、前記基台上に支持部材を介して複数個の酸化物超電
導物質よりなるバルク材を固設し、前記定盤の前記バル
ク材と対向する位置に磁石を固設するとともに、前記バ
ルク材の中央部にシャフトを介して前記定盤の下部に固
定されたコイルを配置し、前記定盤に配設された振動セ
ンサの出力信号により前記コイルに制御電流を供給する
制御装置と、前記バルク材を液体窒素温度以下に保持す
る冷却手段を備えたことを特徴とする振動絶縁装置。2. A vibration isolator comprising a surface plate arranged on a base, and a vibration insulating means provided between the base and the surface plate. A bulk material made of an oxide superconducting material is fixed, a magnet is fixed at a position facing the bulk material of the surface plate, and is fixed to a lower portion of the surface plate via a shaft at a central portion of the bulk material. A control unit that supplies a control current to the coil according to an output signal of a vibration sensor disposed on the surface plate, and a cooling unit that keeps the bulk material at a liquid nitrogen temperature or lower. A vibration isolator characterized by.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3163037A JPH0510388A (en) | 1991-07-03 | 1991-07-03 | Vibration insulating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3163037A JPH0510388A (en) | 1991-07-03 | 1991-07-03 | Vibration insulating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0510388A true JPH0510388A (en) | 1993-01-19 |
Family
ID=15765986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3163037A Withdrawn JPH0510388A (en) | 1991-07-03 | 1991-07-03 | Vibration insulating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0510388A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07181395A (en) * | 1993-12-24 | 1995-07-21 | Ebara Corp | Microscope equipment |
| US7026901B2 (en) | 1996-06-19 | 2006-04-11 | Aisin Seiki Kabushiki Kaisha | Superconducting magnet apparatus and method for magnetizing superconductor |
| KR101518930B1 (en) * | 2013-12-31 | 2015-05-11 | 현대자동차 주식회사 | Cooling module mounting unit for vehicle |
| CN107856165A (en) * | 2017-11-24 | 2018-03-30 | 浙江琰大新材料有限公司 | A kind of energy-saving vibration forming machine for being used to produce refractory material |
| CN113049204A (en) * | 2021-03-29 | 2021-06-29 | 上海交通大学 | High-frequency non-contact double-shaft vibrating table |
-
1991
- 1991-07-03 JP JP3163037A patent/JPH0510388A/en not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07181395A (en) * | 1993-12-24 | 1995-07-21 | Ebara Corp | Microscope equipment |
| US7026901B2 (en) | 1996-06-19 | 2006-04-11 | Aisin Seiki Kabushiki Kaisha | Superconducting magnet apparatus and method for magnetizing superconductor |
| KR101518930B1 (en) * | 2013-12-31 | 2015-05-11 | 현대자동차 주식회사 | Cooling module mounting unit for vehicle |
| CN107856165A (en) * | 2017-11-24 | 2018-03-30 | 浙江琰大新材料有限公司 | A kind of energy-saving vibration forming machine for being used to produce refractory material |
| CN107856165B (en) * | 2017-11-24 | 2019-10-15 | 东海县通成石英材料科技有限公司 | It is a kind of for producing the energy-saving vibration molding machine of refractory material |
| CN113049204A (en) * | 2021-03-29 | 2021-06-29 | 上海交通大学 | High-frequency non-contact double-shaft vibrating table |
| CN113049204B (en) * | 2021-03-29 | 2022-05-17 | 上海交通大学 | High-frequency non-contact double-shaft vibrating table |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19981008 |