JPH0511267B2 - - Google Patents
Info
- Publication number
- JPH0511267B2 JPH0511267B2 JP59242878A JP24287884A JPH0511267B2 JP H0511267 B2 JPH0511267 B2 JP H0511267B2 JP 59242878 A JP59242878 A JP 59242878A JP 24287884 A JP24287884 A JP 24287884A JP H0511267 B2 JPH0511267 B2 JP H0511267B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic sensor
- sensor element
- bias magnet
- substrate
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明はサーボモータ等の回転角速度検出用に
使用する磁気センサに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magnetic sensor used for detecting rotational angular velocity of a servo motor or the like.
従来例の構成とその問題点
従来におけるこの種の磁気センサとしては、第
１図、第２図に示すように構成されていた。すな
わち、ガラス基板またはセラミツク基板で作られ
た磁気センサ素子１には端子２が接着材３によつ
て固着され、この磁気センサ素子１を固定するた
めの取付孔５をもつたプラスチツクホルダー４に
バリウムフエライトのバイアス用磁石６を接着材
で固着し、さらにバイアス用磁石６ならびにプラ
スチツクホルダー４と磁気センサ素子１とを接着
材７で全面的に接着結合していた。Conventional configuration and problems thereof Conventional magnetic sensors of this type have been configured as shown in FIGS. 1 and 2. That is, a terminal 2 is fixed to a magnetic sensor element 1 made of a glass substrate or a ceramic substrate with an adhesive 3, and a barium is attached to a plastic holder 4 having a mounting hole 5 for fixing the magnetic sensor element 1. A ferrite bias magnet 6 was fixed with an adhesive, and the bias magnet 6, plastic holder 4, and magnetic sensor element 1 were entirely adhesively bonded with an adhesive 7.
このような従来の構造によれば、プラスチツク
ホルダー４とバイアス磁石６の熱膨脹率が大幅に
違うために−40℃と100℃の熱衝撃試験等の大き
い温度差により磁気センサ素子１の基板が割れる
ことがあり、実用上大きく問題となつていた。 According to such a conventional structure, the thermal expansion coefficients of the plastic holder 4 and the bias magnet 6 are significantly different, so that the substrate of the magnetic sensor element 1 may crack due to a large temperature difference such as in a thermal shock test of -40°C and 100°C. This has caused a serious problem in practical use.
発明の目的
本発明は以上のような従来の欠点を除去するも
のであり、温度差により磁気センサ素子の基板が
割れない磁気センサを提供することを目的とする
ものである。OBJECTS OF THE INVENTION The present invention eliminates the above-mentioned conventional drawbacks, and aims to provide a magnetic sensor in which the substrate of the magnetic sensor element does not crack due to temperature differences.
発明の構成
上記目的を達成するために本発明の磁気センサ
は、プラスチツクホルダーに埋設されたバイアス
磁石と、基板上に強磁性薄膜抵抗素子を形成して
なる磁気センサ素子とを備え、前記磁気センサ素
子の基板の一部とバイアス磁石とを接着結合した
構成とし、この構成とすることにより磁気センサ
素子はバイアス磁石のみに接着結合してあるた
め、温度差によるプラスチツクホルダーとバイア
ス磁石の熱膨脹率の違いによる応力が磁気センサ
素子に加わらず、割れといつた現象を阻止するこ
とができる。Structure of the Invention In order to achieve the above object, a magnetic sensor of the present invention includes a bias magnet embedded in a plastic holder and a magnetic sensor element formed by forming a ferromagnetic thin film resistance element on a substrate, and the magnetic sensor A part of the element's substrate and the bias magnet are adhesively bonded. With this configuration, the magnetic sensor element is adhesively bonded only to the bias magnet, so the coefficient of thermal expansion of the plastic holder and bias magnet due to temperature difference is reduced. Stress due to the difference is not applied to the magnetic sensor element, and phenomena such as cracking can be prevented.
実施例の説明
以下、本発明の一実施例を図面第３図により説
明する。第３図において８は磁気センサ素子で、
この磁気センサ素子８はガラス基板またはセラミ
ツク基板に強磁性薄膜抵抗素子を形成し、これに
複数の端子９を接着材１０で取付けて構成されて
いる。この磁気センサ素子８は、バリウムフエラ
イトなどのバイアス磁石１１を接着材により結合
したプラスチツクホルダー１２に結合される。す
なわち、磁気センサ素子８はプラスチツクホルダ
ー１２に結合されたバイアス磁石１１上に接着材
１３によつて結合され、プラスチツクホルダー１
２との間には空間１４が存在するように構成さ
れ、この空間１４は接着材１３が流出しても、磁
気センサ素子８とプラスチツクホルダー１２とは
直接結合されないような寸法をもつている。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. 3 of the drawings. In FIG. 3, 8 is a magnetic sensor element,
This magnetic sensor element 8 is constructed by forming a ferromagnetic thin film resistance element on a glass substrate or a ceramic substrate, and attaching a plurality of terminals 9 to this with an adhesive 10. This magnetic sensor element 8 is bonded to a plastic holder 12 to which a bias magnet 11 made of barium ferrite or the like is bonded using an adhesive. That is, the magnetic sensor element 8 is bonded by an adhesive 13 onto a bias magnet 11 bonded to a plastic holder 12.
2, and this space 14 has dimensions such that even if the adhesive 13 flows out, the magnetic sensor element 8 and the plastic holder 12 are not directly connected.
具体的には、厚み0.7mm、幅４mm、長さ７mmの
ガラス基板を利用した強磁性薄膜抵抗素子を磁気
センサ素子８とし、プラスチツクホルダー１２に
は、ガラス繊維30％入りのPBT樹脂で成形した
ものを用い、バイアス磁石１１としては、厚み２
mm、幅４mm、長さ４mmのバリウムフエライトを用
い、接着材１３にはエポキシ樹脂を用いて磁気セ
ンサを構成し、−40℃中に30分間放置した後、10
秒以内に100℃中に移し、その温度雰囲気中で30
分間放置し、再び10秒以内に−40℃中に移すサイ
クルを10サイクル行う熱衝撃試験を行つた。 Specifically, the magnetic sensor element 8 is a ferromagnetic thin film resistance element using a glass substrate with a thickness of 0.7 mm, a width of 4 mm, and a length of 7 mm, and the plastic holder 12 is molded with PBT resin containing 30% glass fiber. The bias magnet 11 has a thickness of 2
A magnetic sensor was constructed using barium ferrite with a width of 4 mm, a width of 4 mm, and a length of 4 mm, and an epoxy resin was used as the adhesive 13. After leaving it at -40°C for 30 minutes,
Transfer to 100℃ within seconds and 30 minutes in that temperature atmosphere.
A thermal shock test was conducted in which the sample was left for 10 minutes and then transferred to -40°C within 10 seconds for 10 cycles.
従来例で示した磁気センサは上記試験で100個
中51個の磁気センサが割れたが、本発明において
は割れたものは全く無かつた。 In the magnetic sensors shown in the conventional example, 51 out of 100 magnetic sensors were cracked in the above test, but in the present invention, there were no cracks.
発明の効果
以上のように本発明の磁気センサは、磁気セン
サ素子の基板の一部とバイアス磁石とを接着結合
したため、温度変化に対しても割れ不良を発生す
ることがなく、きわめて信頼性に富んだものとす
ることができ、工業的価値の大なるものである。Effects of the Invention As described above, since the magnetic sensor of the present invention adhesively connects a part of the substrate of the magnetic sensor element to the bias magnet, it does not suffer from cracking even under temperature changes and is extremely reliable. It can be made into a rich material and has great industrial value.
第１図は従来の磁気センサの斜視図、第２図は
同断面図、第３図は本発明の磁気センサの一実施
例を示す断面図である。
８……磁気センサ素子、９……端子、１０……
接着材、１１……バイアス磁石、１２……プラス
チツクホルダー、１３……接着剤、１４……空
間。
FIG. 1 is a perspective view of a conventional magnetic sensor, FIG. 2 is a sectional view thereof, and FIG. 3 is a sectional view showing an embodiment of the magnetic sensor of the present invention. 8...Magnetic sensor element, 9...Terminal, 10...
Adhesive, 11...Bias magnet, 12...Plastic holder, 13...Adhesive, 14...Space.
Claims (1)
磁石と、基板上に強磁性薄膜抵抗素子を形成して
なる磁気センサ素子とを備え、前記磁気センサ素
子の基板の一部とバイアス磁石とを接着結合した
磁気センサ。1. A magnetic sensor comprising a bias magnet embedded in a plastic holder and a magnetic sensor element formed by forming a ferromagnetic thin film resistance element on a substrate, and in which a part of the substrate of the magnetic sensor element and the bias magnet are adhesively bonded. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59242878A JPS61120967A (en) | 1984-11-16 | 1984-11-16 | magnetic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59242878A JPS61120967A (en) | 1984-11-16 | 1984-11-16 | magnetic sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61120967A JPS61120967A (en) | 1986-06-09 |
| JPH0511267B2 true JPH0511267B2 (en) | 1993-02-15 |
Family
ID=17095573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59242878A Granted JPS61120967A (en) | 1984-11-16 | 1984-11-16 | magnetic sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61120967A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2527856B2 (en) * | 1991-06-18 | 1996-08-28 | 三菱電機株式会社 | Magnetic sensor |
| JP2000088868A (en) * | 1998-09-09 | 2000-03-31 | Matsushita Electric Ind Co Ltd | Speed sensor |
| JP6645032B2 (en) * | 2015-05-22 | 2020-02-12 | 日本精機株式会社 | Moving object detection device |
| JP6575798B2 (en) * | 2015-05-26 | 2019-09-18 | 日本精機株式会社 | Moving object detection device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59155686U (en) * | 1983-04-05 | 1984-10-19 | サンデン株式会社 | Cup dispensing mechanism in cup beverage vending machine |
-
1984
- 1984-11-16 JP JP59242878A patent/JPS61120967A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61120967A (en) | 1986-06-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |