JPH0512688B2 - - Google Patents

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Publication number
JPH0512688B2
JPH0512688B2 JP56008309A JP830981A JPH0512688B2 JP H0512688 B2 JPH0512688 B2 JP H0512688B2 JP 56008309 A JP56008309 A JP 56008309A JP 830981 A JP830981 A JP 830981A JP H0512688 B2 JPH0512688 B2 JP H0512688B2
Authority
JP
Japan
Prior art keywords
electrode
liquid crystal
guest
substrate
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56008309A
Other languages
Japanese (ja)
Other versions
JPS57122477A (en
Inventor
Shunji Handa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP56008309A priority Critical patent/JPS57122477A/en
Publication of JPS57122477A publication Critical patent/JPS57122477A/en
Publication of JPH0512688B2 publication Critical patent/JPH0512688B2/ja
Granted legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Description

【発明の詳細な説明】 本発明は非線形抵抗素子である非線形素子を利
用した液晶表示装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a liquid crystal display device using a nonlinear element that is a nonlinear resistance element.

本発明の目的は非線形素子の片側電極と液晶の
片側電極とを共通化することにより製造工程を簡
略化することであり、他の目的はゲストホスト液
晶をマルチプレツクス駆動することにより、高密
度なゲストホスト型液晶表示装置を得ることであ
り、さらに他の目的は非線形素子の片側電極と液
晶片側電極とに用いるアルミ電極を反射板として
も利用することである。さらに他の目的は液晶の
配向処理を容易ならしめることである。
The purpose of the present invention is to simplify the manufacturing process by making one side electrode of the nonlinear element common to the one side electrode of the liquid crystal.Another purpose of the present invention is to simplify the manufacturing process by making one side electrode of the nonlinear element common to the one side electrode of the liquid crystal. Another object of the present invention is to obtain a guest-host type liquid crystal display device, and another object is to utilize the aluminum electrode used for one side electrode of a nonlinear element and one side electrode of a liquid crystal as a reflection plate. Yet another purpose is to facilitate alignment of liquid crystals.

液晶表示装置は、その特徴である低消費電力、
低動作電圧、高コントラストなどから広範囲に利
用されている。しかし高密度表示の要求が高まり
つつあり、当初のスタテイツク駆動によるセグメ
ント表示から、マルチプレツクス駆動によるマト
リクス表示へと移行している。主流であつたツイ
ストネマチツク型のものは電子平均化駆動法によ
り駆動デユーテイ−比1/16程度が可能であり、実
際商品として市場に出回つている。しかし視角依
存性が強いことから、視角依存性のほとんどない
ゲストホスト型の高密度表示のものが望まれてい
る。しかしこのタイプのものはもともとゲストの
二色性比が悪いために、十分なコントラストを得
るにはスタテイツク駆動あるいは1/2程度のマル
チプレツクス駆動しかできなかつた。本発明は上
記の欠点を除き高密度のゲストホスト型表示装置
を得るものである。
Liquid crystal display devices are characterized by low power consumption,
It is widely used due to its low operating voltage and high contrast. However, the demand for high-density display is increasing, and the original segment display based on static drive is now shifting to matrix display based on multiplex drive. The mainstream twisted nematic type is capable of achieving a drive duty ratio of about 1/16 using the electronic averaging drive method, and is now on the market as a commercial product. However, since viewing angle dependence is strong, a guest-host type high-density display with almost no viewing angle dependence is desired. However, since this type of device originally had a poor guest dichroic ratio, it was only possible to perform static drive or 1/2 multiplex drive to obtain sufficient contrast. The present invention eliminates the above-mentioned drawbacks and provides a high-density guest-host display device.

また従来の非線形を利用した液晶表示装置は第
1図に示すように、パターニング構成および配向
処理が面倒なものである。例えば1は片側ガラス
基板に形成したTa膜および表面を陽極酸化した
Ta2O5である。2はTa2O5の上に形成された
NiCrおよびAuの膜であり、Ta−Ta2O5−TiCr
の3層非線形構造となつている。3は液晶駆動用
の画素電極であり、2と材質は同じであるが膜厚
を極めて薄くした半透明膜である。4は対向基板
に形成した縦方向に走るデータ電極であり、横方
向に走る1の走査電極とマトリクス構造を成して
いる。液晶はこれら両基板の間に設置され、各基
板はSiOなどの斜方蒸着処理により液晶を配列す
る作用を有している。従つて液晶は両基板間で90
度ひねられるツイストネマチツクタイプである。
第2図は5および5′の部分の断面図である。2
1は走査電極、画素電極、およびTa2O523のあ
る側の基板であり、22はデータ電極のある側の
基板である。24はツイストネマチツク液晶、2
5は一対の偏光板である。この実施例から明らか
なように、その製造工程としては、パターン化さ
れた1の陽極酸化、2のdepositおよびパターン
形成、3のdepositおよびパターン形成となり工
程が多い。また液晶駆動用電極が半透明のために
ツイストネマチツクタイプの良さを失ないコント
ラストをダウンさせている。また配向処理が斜方
蒸着処理であるため、表示面積が大きくなると、
全面積にわたり一定の方向に配列する膜を形成す
ることは難かしい。
Furthermore, as shown in FIG. 1, in the conventional liquid crystal display device using nonlinearity, the patterning structure and alignment process are troublesome. For example, in 1, the Ta film formed on one side of the glass substrate and the surface were anodized.
It is Ta 2 O 5 . 2 was formed on Ta 2 O 5
NiCr and Au film, Ta−Ta 2 O 5 −TiCr
It has a three-layer nonlinear structure. 3 is a pixel electrode for driving the liquid crystal, which is a semi-transparent film made of the same material as 2 but with an extremely thin film thickness. 4 is a data electrode running in the vertical direction formed on the counter substrate, forming a matrix structure with the scanning electrode 1 running in the horizontal direction. The liquid crystal is placed between these two substrates, and each substrate has the function of arranging the liquid crystal by oblique evaporation treatment of SiO or the like. Therefore, the LCD is 90mm between both boards.
It is a twist nematic type that can be twisted many times.
FIG. 2 is a cross-sectional view of portions 5 and 5'. 2
1 is a substrate on the side where the scanning electrode, pixel electrode, and Ta 2 O 5 23 are located, and 22 is the substrate on the side where the data electrode is located. 24 is twisted nematic liquid crystal, 2
5 is a pair of polarizing plates. As is clear from this example, the manufacturing process includes many steps, including patterned anodic oxidation in step 1, deposition and pattern formation in step 3, and deposit and pattern formation in step 3. In addition, since the liquid crystal drive electrode is semi-transparent, the contrast is reduced without sacrificing the advantages of the twisted nematic type. In addition, since the orientation process is an oblique evaporation process, when the display area becomes large,
It is difficult to form a film that is aligned in a constant direction over the entire area.

本発明は電極材料および表示タイプを変えるこ
とにより、上記の欠点を除去し、しかもゲストホ
スト型で高密度の高コントラストの表示装置を提
供するものであり、以下に図面を用いて詳細に説
明する。
The present invention eliminates the above-mentioned drawbacks by changing the electrode material and display type, and provides a guest-host type display device with high density and high contrast.The present invention is described in detail below with reference to the drawings. .

第3図は本発明の実施例であり、走査電極側の
1画素部分を示している。対向電極側は第1図で
示したものと同じである。31はTaの第1電極
および走査電極であり、その表面を陽極酸化した
ものである。32はMIMの第2電極および画素
電極を一体化したAlを主成分とする電極である。
従つて従来の実施例に比べてdepositおよびパタ
ーニングがそれぞれ1回づつ減り、コストダウン
に大きく寄与できる。しかも画素電極がAlを主
成分としたものであり、そのものが反射板として
効果も有する。さらに非線形素子のスイツチング
部分のAl電極はそのTa2O5とのインタフエイス
部の仕事関数がTaのそれにほぼ等しく、非線形
素子の電圧−電流特性が両端の電極の極性に関係
なく対称となり、駆動波形を非対称にしなくても
液晶をほぼ完全に交流駆動できる。さらに非線形
素子部のTa2O5膜の厚みは数百Åであり、ラビン
グによる配向処理は不可能である。すなわちラビ
ングによりほぼすべての非線形素子は破壊する。
従つて表示面積が数cm2のものであれば、斜方蒸着
処理により表面をホモジニアスな配列効果を有す
る膜とし、ゲストホスト液晶は正のネマチツク液
晶にゲスト色素を添加したネマチツクタイプのゲ
ストホスト液晶にすればよく、表示面積が大きく
なれば、すべての方向を揃えるホモジニアス配列
処理方法は難かしい。従つて非線形素子のある基
板側は、デイツピングおよび乾燥により配列処理
が可能なホメオトロピツク処理を行ない、液晶と
してはネマチツク液晶にコレステリツク液晶およ
びゲストを添加した相転移タイプの液晶にすれば
よい。またAl電極としてはSiを含んだものを利
用するとか、あるいはAlそのものを高密度に数
μピツチのストライプあるいは格子状にエツチン
グすれば電極表面を荒らすことができる。第4図
は本発明の実施例で、いずれも下側基板は第3図
で示した非線形素子のある側の基板であり、上側
基板は第2図の22で示したものである。aはネ
マチツクタイプのゲストホスト液晶の場合、bは
下側基板を垂直処理した場合で、相転移タイプの
ゲストホスト液晶、cにaの場合においてAl電
極表面を荒らした場合のものである。なおこれ以
外の組合せも存在することは明らかである。
FIG. 3 shows an embodiment of the present invention, and shows one pixel portion on the scanning electrode side. The counter electrode side is the same as that shown in FIG. Reference numeral 31 denotes a Ta first electrode and a scanning electrode, the surfaces of which are anodized. Reference numeral 32 denotes an electrode mainly composed of Al, which integrates the second electrode of the MIM and the pixel electrode.
Therefore, compared to the conventional embodiment, the number of deposits and patterning operations are reduced by one each, which can greatly contribute to cost reduction. Moreover, since the pixel electrode is mainly composed of Al, it also has the effect of acting as a reflecting plate. Furthermore, the work function of the Al electrode in the switching part of the nonlinear element at its interface with Ta 2 O 5 is almost equal to that of Ta, and the voltage-current characteristics of the nonlinear element are symmetrical regardless of the polarity of the electrodes at both ends, making it easy to drive. The liquid crystal can be driven almost completely with alternating current without making the waveform asymmetrical. Furthermore, the thickness of the Ta 2 O 5 film in the nonlinear element portion is several hundred Å, and alignment treatment by rubbing is impossible. In other words, almost all nonlinear elements are destroyed by rubbing.
Therefore, if the display area is several cm 2 , the surface is made into a film with a homogeneous alignment effect by oblique evaporation treatment, and the guest host liquid crystal is a nematic type guest host in which a guest dye is added to a positive nematic liquid crystal. A liquid crystal display would suffice, but as the display area increases, it becomes difficult to use a homogeneous array processing method that aligns all directions. Therefore, the substrate side on which the nonlinear elements are located may be subjected to a homeotropic treatment that allows alignment by dipping and drying, and the liquid crystal may be a phase change type liquid crystal obtained by adding cholesteric liquid crystal and a guest to a nematic liquid crystal. Furthermore, the electrode surface can be roughened by using an Al electrode containing Si, or by etching the Al itself into stripes or grids with a pitch of several microns at a high density. FIG. 4 shows an embodiment of the present invention, in which the lower substrate is the substrate on the side with the nonlinear element shown in FIG. 3, and the upper substrate is shown at 22 in FIG. A is a case of a nematic type guest-host liquid crystal, b is a case where the lower substrate is vertically processed and a phase change type guest-host liquid crystal, and c is a case where the Al electrode surface is roughened in case a. It is clear that other combinations exist.

上述の如く本発明の液晶表示装置は、対向する
一対の基板間に液晶が封入されてなり、該基板の
一方の基板上には画素電極、走査電極、該画素電
極と該走査電極との間に接続された第1電極−絶
縁膜−第2電極から成る非線形素子が形成され、
かつ他方の基板上には対向電極を有してなる液晶
表示装置において、該第1電極と該走査電極は
Taで形成され、該絶縁膜はTaの酸化物であり、
該第2電極と該画素電極とはAlもしくはSiを含
むAlで形成されてなるようにしたから、以下の
ような効果を示す。
As described above, the liquid crystal display device of the present invention includes a liquid crystal sealed between a pair of opposing substrates, and a pixel electrode, a scanning electrode, and a structure between the pixel electrode and the scanning electrode on one of the substrates. A nonlinear element consisting of a first electrode, an insulating film, and a second electrode connected to is formed,
In a liquid crystal display device having a counter electrode on the other substrate, the first electrode and the scanning electrode are
formed of Ta, the insulating film is an oxide of Ta,
Since the second electrode and the pixel electrode are made of Al or Al containing Si, the following effects can be obtained.

(イ) AlとTa2O5の仕事関数とTaとTa2O5の仕事
関数がほぼ等しいので非線形素子の電圧−電流
特性が電圧ゼロに対して完全に対象となり、交
流駆動での表示のチラツキが全くなくなると共
に、駆動回路の面でもゼロ点補正が必要ないの
で簡単な回路構成で駆動できる。
(a) Since the work functions of Al and Ta 2 O 5 and those of Ta and Ta 2 O 5 are almost equal, the voltage-current characteristics of the nonlinear element are completely symmetrical with respect to zero voltage, and the display in AC drive is Flickering is completely eliminated, and zero point correction is not required in terms of the drive circuit, so it can be driven with a simple circuit configuration.

(ロ) 画素電極と非線形素子の第2金属を同一材料
であるので、従来の異なる材料を用いた場合は
3回必要であつたパターニング、堆積工程が2
回で済み、工程数が減ると共に歩留りが向上す
る。
(b) Since the second metal of the pixel electrode and the nonlinear element are made of the same material, the patterning and deposition steps, which were required three times when conventionally different materials were used, are now completed in two steps.
This reduces the number of steps and improves yield.

(ハ) 画素電極がAlであるので、反射率が優れて
おり高コントラストの反射タイプの液晶表示装
置が達成される。
(c) Since the pixel electrode is made of Al, a reflective type liquid crystal display device with excellent reflectance and high contrast can be achieved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の実施例の平面図。第2図は第1
図の5−5′部の断面図。第3図は本発明の実施
例の1画素部の平面図。第4図a,b,cは本発
明の実施例の断面図。
FIG. 1 is a plan view of a conventional embodiment. Figure 2 is the first
A cross-sectional view taken along line 5-5' in the figure. FIG. 3 is a plan view of one pixel section according to an embodiment of the present invention. Figures 4a, b, and c are cross-sectional views of embodiments of the present invention.

Claims (1)

【特許請求の範囲】[Claims] 1 対向する一対の基板間に液晶が封入されてな
り、該基板の一方の基板上には画素電極、走査電
極、該画素電極と該走査電極との間に接続された
第1電極−絶縁膜−第2電極から成る非線形素子
が形成され、かつ他方の基板上には対向電極を有
してなる液晶表示装置において、該第1電極と該
走査電極はTaで形成され、該絶縁膜はTaの酸化
物であり、該第2電極と該画素電極はAlもしく
はSiを含むAlで形成されてなることを特徴とす
る液晶表示装置。
1 A liquid crystal is sealed between a pair of opposing substrates, and on one of the substrates are a pixel electrode, a scanning electrode, and a first electrode-insulating film connected between the pixel electrode and the scanning electrode. - In a liquid crystal display device in which a nonlinear element consisting of a second electrode is formed and has a counter electrode on the other substrate, the first electrode and the scanning electrode are made of Ta, and the insulating film is made of Ta. 1. A liquid crystal display device, wherein the second electrode and the pixel electrode are formed of Al or Al containing Si.
JP56008309A 1981-01-22 1981-01-22 Liquid crystal display device Granted JPS57122477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56008309A JPS57122477A (en) 1981-01-22 1981-01-22 Liquid crystal display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56008309A JPS57122477A (en) 1981-01-22 1981-01-22 Liquid crystal display device

Publications (2)

Publication Number Publication Date
JPS57122477A JPS57122477A (en) 1982-07-30
JPH0512688B2 true JPH0512688B2 (en) 1993-02-18

Family

ID=11689543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56008309A Granted JPS57122477A (en) 1981-01-22 1981-01-22 Liquid crystal display device

Country Status (1)

Country Link
JP (1) JPS57122477A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3229584A1 (en) * 1982-08-07 1984-02-09 Vdo Adolf Schindling Ag, 6000 Frankfurt MULTIPLEXABLE LIQUID CRYSTAL CELL
JPS60164724A (en) * 1984-02-07 1985-08-27 Seiko Epson Corp electro-optical device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029237B2 (en) * 1975-07-30 1985-07-09 株式会社日立製作所 Multilayer structure thin film functional element
JPS52149090A (en) * 1976-06-04 1977-12-10 Seiko Epson Corp Liquid crystal display device

Also Published As

Publication number Publication date
JPS57122477A (en) 1982-07-30

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