JPH05127094A - Optical microscope - Google Patents

Abstract

PURPOSE:To provide the microscope capable of observing an object with more rugged surface than the focusing range due to the rotation of a rotary driving rod. CONSTITUTION:An illumination head with a light source, a light conductive member 6 carrying the light from the light source, and an optical system 3 collecting the light is mounted on the microscope. An illumination head 7 is fixed at the end of the illumination head to move freely in the optical axis direction. By shifting the optical system in the optical axis direction while bringing the illumination head 7 into contact to the subject 13, the focusing with the subject 13 is enabled.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical microscope equipped with an illumination head that comes into contact with an object to be inspected such as metal or fiber for surface inspection and observation.

[0002]

2. Description of the Related Art Conventionally, as an example of this type of optical microscope, the one shown in the sectional view of FIG.
308527). A ring 18 is formed on the outer peripheral surface of the inner cylinder 1 having a window at the center of the cylindrical shape, and at both ends in the axial direction.
Outer cylinder 2 having a window in the center of the cylinder through a and 18b
Are arranged. A cylindrical optical member 6 for guiding light from a light source (not shown) to the inside of the inner cylinder 1 is arranged between the rings 18a and 18b and the inner cylinder. Inner cylinder 2
The objective lenses 4a, 4
The optical system in which b is disposed is slidably disposed in the optical axis direction (arrow direction).

A rotating rod 17 having a cylindrical shape and a spiral sliding groove on the inner peripheral surface thereof is disposed on the outer peripheral surface of the outer cylinder 2, and a cover 5 is disposed on the outer peripheral surface of the rotating rod 17. The cover 5 and the turning rod 17 are fixed by the fixing screw 15. Frame 3
The tip of the rotation stop pin 14 is screwed onto a part of the outer peripheral surface of
This rear end is fitted in the sliding groove of the rotating rod 17. A turning rod fixing ring 11 is fixed between the cover 5 and the outer cylinder 2 at the end of the turning rod 17.

A contact type lighting head 7 is brought into contact with the ends of the inner cylinder 1 and the outer cylinder 2 (the left end in the figure), and the holding ring 8 is attached to the contact type lighting head 7.
It is fixed by. A packing 25 is arranged between the lighting head 7 and the outer cylinder 2. In the figure, 12 is a light receiving element, and 13 is an inspection object.

In such a structure, in order to focus the objective lenses 4a and 4b, the cover rod 5 is rotated to rotate the rotating rod 5 so that the sliding groove 17a formed in the rotating rod 5 is brought into contact therewith. Since the detent pin 14 slides along and rotates, the objective lenses 4a and 4b
Since the frame 3 having the arrow moves in the optical axis direction, the inspection object 13
It is possible to focus on.

[0006]

In the conventional optical microscope described above, even if the object 13 to be inspected has irregularities, it is possible to perform observation without any problem. That is, as shown in the upper hole of FIG. 6A, the unevenness of the inspection object 13 is
When it is within the adjustment range a3 of the focus by the turning rod 5, it is possible to focus by rotating the turning rod 5.

However, when the inspection object 13 has a large unevenness such as the lower hole of FIG. 6A, or
In the case of the inspection object 13 covered with the transparent shield as shown in (b), it is difficult to observe. Again,
Similarly to the above, the rotating rod 5 is rotated, and the objective lenses 4a and 4b supported by the frame 3 are moved back and forth to focus. Since the unevenness depth a2 ′ of the object 13 to be inspected is larger than the focus adjustment range a3 by the rotating rod 5, the rotating rod 5 alone cannot focus. There is no problem because the uneven depth a1 of the inspection object 13 is smaller than the adjustment range a3.

For this reason, the contact-type lighting head 7 must be replaced with a shorter one than the one currently mounted, or a non-contact-type lighting head (not shown) must be used.

However, it is difficult to replace the contact-type lighting head 7 when observing the unevenness of the same inspection object 13, and when using the non-contact-type lighting head, the fulcrum is not fixed if it is used by hand. , It becomes difficult to observe due to camera shake.

Therefore, it is an object of the present invention to provide an optical microscope capable of observing an object to be inspected having an unevenness larger than the focusing range due to the rotation of the rotating rod, which has been a problem in the prior art. ..

[0011]

In order to achieve the above object, the present invention provides a microscope main body with a light source, a light guide member for guiding light from the light source, and an optical system for condensing the light. By attaching the head main body, movably attaching the illumination head to the tip of the illumination head main body in the optical axis direction, and moving the optical system in the optical axis direction with the illumination head in contact with the object to be inspected. An optical microscope capable of focusing on the object to be inspected.

[0012]

According to the present invention, since the contact type lighting head is attached to the lighting head main body so as to be movable in the optical axis direction,
It is possible to observe even an object to be inspected that has large unevenness.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. Here, the same parts as those of the conventional example of FIG. A description will be mainly given of a configuration in which 7 is movable in the optical axis direction. A cylindrical ring 21 is provided slidably in the axial direction on one end of the cylindrical inner cylinder 1, that is, on the outer peripheral surface of the left end in the drawing, and a light guide member having flexibility on the outer peripheral surface of the ring 21. A cylindrical ring 10 is fixed via 6 so that 21, 6, 10 are integrated.

The ring 10 has a step on the outer peripheral surface at one end, a male screw 10a is formed on the step, and a collar 10b is formed on a part of the other end. On the other hand, a collar 2a is formed on a part of one end of the outer cylinder 2, and the collar 2a is formed.
Is in contact with the collar 10b of the ring 10.

The end faces of the rings 10 and 21 and the light guide member 6 are in contact with the flange portion 7a of the illumination head 7 having a substantially conical shape, and these are fixed by the holding ring 8.
The holding ring 8 has a hole 8a formed in the bottom surface of a bottomed cylinder so that the cylindrical portion of the lighting head 7 can be inserted therein, and a female screw that can be screwed into the male screw 10a of the ring 10 on the inner peripheral surface of the cylindrical portion. 8b is formed. Therefore, the illumination head 7 is integrally fixed to the ring 10 by screwing the female screw 8b of the holding ring 8 into the male screw 10a of the ring 10. On the outer peripheral surface of the cylindrical portion of the retaining ring 8 and the outer peripheral surface of the left end portion of the outer cylinder 2, a coiled spring 9 is compressed, that is, the illumination head 7 is always away from the objective lenses 4a and 4b of the optical system. It is arranged so that the elastic force acts in the direction.

With the optical microscope configured as described above,
When observing the uneven inspection object 13, the contact illumination head 7 may be brought into contact with the inspection object 13 to such an extent that the spring 9 does not bend, and the rotating rod 5 may be rotated to perform focusing.

Further, when observing the bottom surface side of the recess of the inspection object 13 (back side of the recess), the focus cannot be adjusted even by rotating the rotating rod 5 and adjusting the movement of the objective lenses 4a and 4b. In this case, the microscope main body is pressed against the object to be inspected 13 and the spring 9 is bent, so that the apparent focus position moves to the inner side of the recess of the object to be inspected 13. Therefore, only the range in which the lighting head 7 can move,
As compared with the conventional microscope, the in-focus range of the inspection object 13 in the depth direction increases, and the applicable range increases.

Specifically, in FIG. 6A, b1 indicates the total focus adjustment range of the illumination head 7 and the rotating rod 17 of this embodiment, and this focus adjustment range b1 is the object 13 to be inspected. It can be seen that the depth is larger than the depth a2 of the maximum uneven portion. Although the light guide member 6 also bends as the illumination head 13 moves, this light guide optical member 6
There is no problem in durability as long as it is within the allowable flexible range.

FIG. 2 is a sectional view showing a second embodiment of the present invention. In the embodiment shown in FIG. 1, the lighting head 7 has a spring 9
If it is always necessary to move and fix to the right in Fig. 1 by means of Fig. 1, female threads are bored in the ring 8 as shown in Fig. 2 and slits are formed in the outer cylinder 2 and the rotating rod fixing ring 11, respectively. However, the fixing screw 23 is provided at this portion.

With such a structure, if the fixing screw 23 is tightened at a desired position within the movable range of the illumination head 7, the illumination head 7 can always be moved rightward in FIG. 2 and fixed. it can.

FIG. 3 is a sectional view showing a third embodiment of the present invention. The difference from the first embodiment described above is that the coil-shaped spring 9 of FIG. In order to get the function, it is done as follows. That is, the flange at the end of the contact-type lighting head 7, the outer tube 2, and the retaining ring 8
An elastic member 16 such as a wave washer is always provided between and in the state of being compressed.

According to the third embodiment of the present invention, the same operational effects as those of the first embodiment described above can be obtained. That is, with the illumination head in contact with the inspection object 13, the rotating rod 1
Adjust 7 to focus. In this case, when the adjustment by the turning rod 17 is disengaged and the concave side of the inspection object 13 is further focused, the microscope main body is pressed against the inspection object 13 to bend the elastic member 16. In this embodiment, there is always a gap between the end surface of the optical member 6 and the illumination head 13, which is the movable range b1 of the illumination head 7, and a loss of the light amount occurs. However, the presence of this gap is sufficient. There is no problem if the light source is adjusted so that the amount of light can be obtained.

FIG. 4 is a sectional view showing a fourth embodiment of the present invention, which is different from the third embodiment in the following points. That is, the illumination head 7 is fixed to the holding ring 8, a female screw 8b is formed on the inner peripheral surface of the holding ring 8, and a male screw 2b is formed on the outer peripheral surface of the outer cylinder 2 so that they can be screwed together. Is.

In the embodiment shown in FIG. 4, since the illumination head 7 moves in the optical axis direction by rotating the holding ring 8, it is possible to focus at a desired position within the movable range b1 of the illumination head 7. Becomes

[0025]

According to the present invention described above, since the contact type lighting head is constructed so as to be movable in the optical axis direction with respect to the main body, the focusing range by the rotation of the rotating rod, which has been a problem in the prior art, is encountered. It is possible to provide an optical microscope capable of observing even an inspection object having the above unevenness.

[Brief description of drawings]

FIG. 1 is a sectional view showing an illumination optical system of a first embodiment of an optical microscope according to the present invention.

FIG. 2 is a sectional view showing an illumination optical system of a second embodiment of the optical microscope according to the present invention.

FIG. 3 is a sectional view showing an illumination optical system of a third embodiment of the optical microscope according to the present invention.

FIG. 4 is a sectional view showing an illumination optical system of a fourth embodiment of the optical microscope according to the present invention.

FIG. 5 is a sectional view showing an illumination optical system of an example of a conventional optical microscope.

6A and 6B are views for explaining the problems of the conventional microscope and the effects of the embodiment of the present invention.

[Explanation of symbols]

1 ... Inner cylinder, 2 ... Outer cylinder, 3 ... Frame, 4a, 4b ... Lens, 5
... Cover, 6 ... Light guide member, 7 ... Contact lighting head, 8 ...
Holding ring, 9 ... Spring, 10 ... Ring, 11 ... Rotating rod fixing ring, 12 ... Light receiving element, 13 ... Inspected object, 1
4 ... Detent pin, 15 ... Fixing screw, 16 ... Elastic member,
17 ... rotating rod, 18a, 18b ... ring, 2a ... brim,
2b ... Male screw, 8a ... Hole, 8b ... Female screw.

Claims (1)

[Claims] 1. A light source, a light guide member for guiding light from the light source, and an illumination head body having an optical system for condensing the light are attached to a microscope body, and an illumination head is provided at a tip of the illumination head body. Is movably mounted in the optical axis direction, and an optical microscope capable of focusing with the object to be inspected by moving the optical system in the optical axis direction while the illumination head is in contact with the object to be inspected. ..