JPH05130511A - Driving method for solid-state image pickup device - Google Patents

Driving method for solid-state image pickup device

Info

Publication number
JPH05130511A
JPH05130511A JP3289864A JP28986491A JPH05130511A JP H05130511 A JPH05130511 A JP H05130511A JP 3289864 A JP3289864 A JP 3289864A JP 28986491 A JP28986491 A JP 28986491A JP H05130511 A JPH05130511 A JP H05130511A
Authority
JP
Japan
Prior art keywords
substrate
transfer
pulse
photoelectric conversion
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3289864A
Other languages
Japanese (ja)
Inventor
Noboru Kokusenya
昇 国仙谷
Hiroaki Asada
浩明 浅田
Keijiro Itakura
啓二郎 板倉
Shiyunei Nobusada
俊英 信定
Yasuyuki Toyoda
泰之 豊田
Shinichiro Hayashi
慎一郎 林
Yukio Saito
幸男 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP3289864A priority Critical patent/JPH05130511A/en
Publication of JPH05130511A publication Critical patent/JPH05130511A/en
Pending legal-status Critical Current

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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

PURPOSE:To perform FIT transfer capable of performing smear suppression and to suppress blooming in a FIT transfer period even when an object with remarkably high luminance is image-picked up by increasing a substrate voltage in the FIT transfer period. CONSTITUTION:The voltage of a substrate 14 is set at a low level that is a constant driving voltage during a period 4 before a readout pulse 2 is applied. The chevron of potential of a P well 13 is set at a high state, and the saturation capacity of a photoelectric conversion part 6 goes to the maximum level. When the discharge pulse 1 of pseudo signal charge is applied, the pseudo signal charge that exists in a vertical transfer part 7 is transferred to a signal discharge part 11. Thence, when the pulse 2 is applied, the signal charge of the photoelectric conversion part 6 is read out to the vertical transfer part 7. Simultaneously with the application of a FIT transfer pulse 3, the voltage of the substrate 14 is increased higher than the driving voltage in a period other than that of the FIT transfer. The chevron of potential of the P well 13 goes to a low state, and the signal charge generated at the photoelectric conversion part 6 in the FIT transfer period is extracted to a substrate 14 side without generating overflow, therefore. no blooming occurs.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、固体撮像装置の駆動方
法に関し、特に、基板に印加する電圧の制御対策に係る
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for driving a solid-state image pickup device, and more particularly to a measure for controlling a voltage applied to a substrate.

【0002】[0002]

【従来の技術】最近、固体撮像装置においては、高画質
を実現する1つの方法として、光電変換部と、垂直転送
部と、水平転送部と、信号検出部と、信号排出部とを設
ける以外に、蓄積部を設けた構造が用いられている。そ
こで、以下、図面を参照しながら上述した固体撮像装置
について説明する。
2. Description of the Related Art Recently, in a solid-state image pickup device, one method for realizing high image quality is to provide a photoelectric conversion part, a vertical transfer part, a horizontal transfer part, a signal detection part, and a signal discharge part. The structure in which the storage part is provided is used. Therefore, the above-described solid-state imaging device will be described below with reference to the drawings.

【0003】まず、固体撮像装置の基本的な構造は、図
2に示すように、N形基板14上に設けられたPウエル
13に、光電変換部6と、垂直転送部7と、蓄積部8
と、水平転送部9と、信号検出部10と、信号排出部1
1とが形成されてなる。そして、図2における矢印は信
号電荷の転送方向を示している。
First, as shown in FIG. 2, the basic structure of a solid-state image pickup device is such that a photoelectric conversion section 6, a vertical transfer section 7, and a storage section are provided in a P well 13 provided on an N-type substrate 14. 8
, Horizontal transfer unit 9, signal detection unit 10, and signal output unit 1
1 are formed. The arrow in FIG. 2 indicates the transfer direction of signal charges.

【0004】一方、図4は、従来の駆動パルスの一部と
基板14の電圧とを示している。この図4において、
(a)は、複合帰線消去信号、(b)は、垂直転送部7
の偽信号電荷を信号排出部11に転送するパルス1(以
下、掃き出しパルス1と称する。)と、光電変換部6で
蓄積された信号電荷を垂直転送部7へ読み出すパルス2
(以下、読み出しパルス2と称する。)と、光電変換6
から垂直転送部7へ読み出した信号電荷を蓄積部8へ転
送するパルス3(以下、この転送をFIT転送と称し、
パルス3をFIT転送パルス3と称する。)とから成る
転送パルス、(c)は、基板14の電圧を示している。
On the other hand, FIG. 4 shows a part of the conventional drive pulse and the voltage of the substrate 14. In this FIG.
(A) is a composite blanking signal, (b) is the vertical transfer unit 7
Pulse 1 (hereinafter referred to as sweep pulse 1) for transferring the false signal charge of the above to the signal discharge part 11, and pulse 2 for reading out the signal charge accumulated in the photoelectric conversion part 6 to the vertical transfer part 7.
(Hereinafter, referred to as read pulse 2) and photoelectric conversion 6
The pulse 3 for transferring the signal charge read from the vertical transfer unit 7 to the vertical transfer unit 7 (hereinafter, this transfer is referred to as FIT transfer,
Pulse 3 is called FIT transfer pulse 3. (C) shows the voltage of the substrate 14.

【0005】そこで、この固体撮像装置の駆動方法につ
いて説明する。
Therefore, a method of driving this solid-state image pickup device will be described.

【0006】まず、垂直帰線期間中に掃き出しパルス1
を出力し、該掃き出しパルス1によってFIT転送期間
及び垂直走査期間に垂直転送部7に蓄積された偽信号電
荷を信号排出部11に転送して排出する。次に、読み出
しパルス2により光電変換部6から垂直転送部7に信号
電荷を読み出す。そして、FIT転送パルス3により垂
直転送部7から蓄積部8まで信号電荷を高速転送する。
この蓄積部8に蓄えられた信号電荷は、垂直走査期間に
1段ずつ全段に亘って水平転送部9に順次転送され、信
号検出部10から出力される。
First, the sweep pulse 1 is output during the vertical blanking period.
By the sweep pulse 1, the pseudo signal charges accumulated in the vertical transfer unit 7 during the FIT transfer period and the vertical scanning period are transferred to the signal discharging unit 11 and discharged. Next, the signal pulse is read from the photoelectric conversion unit 6 to the vertical transfer unit 7 by the read pulse 2. Then, the signal charges are transferred at high speed from the vertical transfer section 7 to the storage section 8 by the FIT transfer pulse 3.
The signal charges stored in the storage section 8 are sequentially transferred to the horizontal transfer section 9 one by one in the vertical scanning period, and are output from the signal detection section 10.

【0007】この駆動方法により、前記垂直転送部7か
ら蓄積部8までの転送を短時間に行うことができ、垂直
転送部7に直接入射してくる光によって発生する電荷、
すなわちスミアが大きく抑制される。
By this driving method, the transfer from the vertical transfer unit 7 to the storage unit 8 can be performed in a short time, and the charges generated by the light directly incident on the vertical transfer unit 7
That is, smear is greatly suppressed.

【0008】また、前記基板14の電圧は、図3の実線
のように、光電変換部6と垂直転送部7の間の転送ゲー
ト12のポテンシャルよりも、光電変換部6と基板14
の間のPウエル13のポテンシャルの山が若干低くなる
ようなある一定値に設定してある。このように基板14
の電圧を一定値に設定することにより、信号飽和電荷量
を損なうことなく過飽和電荷は基板14側へ引き抜か
れ、いわゆる縦型オーバーフロードレインを構成してい
る。
The voltage of the substrate 14 is higher than the potential of the transfer gate 12 between the photoelectric conversion unit 6 and the vertical transfer unit 7 as shown by the solid line in FIG.
It is set to a certain constant value such that the peak of the potential of the P well 13 between them becomes slightly lower. Thus, the substrate 14
By setting the voltage of 1 to a constant value, the supersaturated charges are extracted to the substrate 14 side without impairing the amount of signal saturated charges, forming a so-called vertical overflow drain.

【0009】[0009]

【発明が解決しようとする課題】しかしながら、上述し
た固体撮像装置の駆動方法では、基板14の電圧を常時
一定値に設定しているため、極めて高輝度な被写体を撮
像した場合には、FIT転送期間中に光電変換部6の飽
和容量を越える信号電荷が発生し、図3の転送ゲート1
2のポテンシャルを越えて垂直転送部7へ電荷が溢れ出
す現象(以下、この現象をブルーミングと称する。)が
起きるという問題があった。
However, in the above-described method for driving the solid-state image pickup device, the voltage of the substrate 14 is always set to a constant value. Therefore, when an extremely high-luminance subject is imaged, the FIT transfer is performed. During the period, signal charges exceeding the saturation capacity of the photoelectric conversion unit 6 are generated, and the transfer gate 1 of FIG.
There has been a problem that a phenomenon in which charges overflow from the potential of 2 to the vertical transfer unit 7 (hereinafter, this phenomenon is referred to as blooming) occurs.

【0010】本発明は、斯かる点に鑑みて成されたもの
で、FIT転送期間中に生ずるブルーミングを防ぐこと
ができる固体撮像装置の駆動方法を提供することを目的
とするものである。
The present invention has been made in view of the above points, and an object of the present invention is to provide a driving method of a solid-state image pickup device capable of preventing blooming occurring during the FIT transfer period.

【0011】[0011]

【課題を解決するための手段】上記の目的を達成するた
めに、本発明が講じた手段は、FIT転送期間中にFI
T転送期間以外の期間よりも高いパルス電圧を基板に印
加するようにしたものである。
[Means for Solving the Problems] In order to achieve the above-mentioned object, the measures taken by the present invention are:
A pulse voltage higher than the period other than the T transfer period is applied to the substrate.

【0012】具体的に、一導電型の半導体基板上に設け
られた反対導電型の半導体層内に、光電変換部と、垂直
転送部と、蓄積部と、水平転送部と、信号検出部と、信
号排出部とが形成された固体撮像装置を前提としてい
る。
Specifically, in a semiconductor layer of opposite conductivity type provided on a semiconductor substrate of one conductivity type, a photoelectric conversion section, a vertical transfer section, a storage section, a horizontal transfer section, and a signal detection section. , A solid-state imaging device in which a signal discharging unit is formed.

【0013】そして、前記基板に一定の駆動電圧を印加
する一方、前記光電変換部から垂直転送部へ読み出した
信号電荷を蓄積部へ転送するFIT転送期間に、前記一
定の駆動電圧よりも高いパルス電圧を前記基板に印加す
る構成としている。
A pulse higher than the constant drive voltage is applied during a FIT transfer period in which a constant drive voltage is applied to the substrate while the signal charges read from the photoelectric conversion unit to the vertical transfer unit are transferred to the storage unit. A voltage is applied to the substrate.

【0014】[0014]

【作用】上記の構成により、本発明では、半導体層のポ
テンシャルがFIT転送期間中には低くなり、光電変換
部の飽和容量を越える信号電荷は全て基板側へ掃き出さ
れることなる。この結果、極めて高輝度な被写体を撮像
する場合においてもブルーミングが抑制されることにな
る。
With the above structure, in the present invention, the potential of the semiconductor layer is lowered during the FIT transfer period, and all signal charges exceeding the saturation capacity of the photoelectric conversion portion are swept out to the substrate side. As a result, blooming is suppressed even when capturing an extremely high-luminance subject.

【0015】[0015]

【実施例】以下、本発明の一実施例について図面を参照
しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

【0016】図2に示すように、固体撮像装置は、一導
電型のN形基板14上に設けられた反対導電型の半導体
層であるPウエル13に、光電変換部6と、垂直転送部
7と、蓄積部8と、水平転送部9と、信号検出部10
と、信号排出部11とが形成されてなり、矢印は信号電
荷の転送方向を示している。
As shown in FIG. 2, in the solid-state image pickup device, a photoelectric conversion section 6 and a vertical transfer section are provided in a P well 13 which is a semiconductor layer of opposite conductivity type provided on an N type substrate 14 of one conductivity type. 7, a storage unit 8, a horizontal transfer unit 9, and a signal detection unit 10
And a signal discharge part 11 are formed, and the arrow indicates the transfer direction of the signal charge.

【0017】一方、図1は、本発明の実施例における固
体撮像装置の駆動パルスの一部と基板14の電圧とを示
しており、(a)は、複合帰線消去信号、(b)は、垂
直転送部7の偽信号電荷を信号排出部11に転送する掃
き出しパルス1と、光電変換部6で蓄積された信号電荷
を垂直転送部7へ読み出す読み出しパルス2と、光電変
換6から垂直転送部7へ読み出した信号電荷を蓄積部8
へ転送するFIT転送パルス3とから成る転送パルス、
(c)は、基板14の電圧を示している。
On the other hand, FIG. 1 shows a part of the driving pulse of the solid-state image pickup device and the voltage of the substrate 14 in the embodiment of the present invention, (a) is a composite blanking signal, and (b) is. , Sweep pulse 1 for transferring the false signal charge of the vertical transfer unit 7 to the signal discharge unit 11, read pulse 2 for reading the signal charge accumulated in the photoelectric conversion unit 6 to the vertical transfer unit 7, and vertical transfer from the photoelectric conversion 6 The signal charge read to the unit 7 is stored in the storage unit 8.
Transfer pulse consisting of FIT transfer pulse 3 for transfer to
(C) shows the voltage of the substrate 14.

【0018】次に、以上のように構成された固体撮像装
置の駆動方法について、以下、その動作と共に説明す
る。
Next, a method of driving the solid-state image pickup device configured as described above will be described below together with its operation.

【0019】まず、読み出しパルス2が印加されるまで
の期間4の間は、基板14の電圧は一定の駆動電圧であ
るローレベルに設定されている。そして、この状態にお
いては、図3に示すように、Pウエル13のポテンシャ
ルの山は、実線で示すような高い状態にあり、光電変換
部6の飽和容量は最大になっている。
First, during the period 4 until the read pulse 2 is applied, the voltage of the substrate 14 is set to a low level which is a constant drive voltage. In this state, as shown in FIG. 3, the peak of the potential of the P well 13 is in a high state as shown by the solid line, and the saturation capacity of the photoelectric conversion unit 6 is maximized.

【0020】一方、偽信号電荷の掃き出しパルス1が印
加されると、垂直転送部7に存在する偽信号電荷が信号
排出部11へ転送される。次に、読み出しパルス2が印
加されると、光電変換部6の信号電荷が垂直転送部7に
読み出される。
On the other hand, when the sweep-out pulse 1 of the false signal charge is applied, the false signal charge existing in the vertical transfer section 7 is transferred to the signal discharging section 11. Next, when the read pulse 2 is applied, the signal charge of the photoelectric conversion unit 6 is read to the vertical transfer unit 7.

【0021】続いて、FIT転送パルス3が印加された
と同時に、基板14の電圧をFIT転送期間以外の期間
における基板14の駆動電圧よりも高くする(図1にお
ける(c)参照)。そして、この状態においては、図3
に示すように、Pウエル13のポテンシャルの山は、破
線で示すような低い状態になり、FIT転送期間中に光
電変換部6で発生する信号電荷は垂直転送部7に溢れる
ことなく基板14側へ引き抜かれるためブルーミングが
生じることがない。
Then, at the same time that the FIT transfer pulse 3 is applied, the voltage of the substrate 14 is made higher than the drive voltage of the substrate 14 in the period other than the FIT transfer period (see (c) in FIG. 1). Then, in this state, as shown in FIG.
As shown in FIG. 5, the potential peak of the P well 13 is in a low state as shown by the broken line, and the signal charges generated in the photoelectric conversion unit 6 during the FIT transfer period do not overflow into the vertical transfer unit 7 and the substrate 14 side. Blooming does not occur because it is pulled out to.

【0022】その後、前記蓄積部8に蓄えられた信号電
荷は、垂直走査期間に1段ずつ全段に亘って水平転送部
9に順次転送され、信号検出部10から出力される。
Thereafter, the signal charges stored in the storage section 8 are sequentially transferred to the horizontal transfer section 9 one by one in the vertical scanning period, and output from the signal detection section 10.

【0023】尚、映像に使用する信号電荷を蓄積する期
間5には、基板14の電圧はローレベルに設定してあ
り、Pウエル13のポテンシャルの山は、図3に示す実
線のようになるために、ダイナミックレンジを損なうこ
とはない。
During the period 5 for accumulating the signal charge used for the image, the voltage of the substrate 14 is set to the low level, and the peak of the potential of the P well 13 is as shown by the solid line in FIG. Therefore, the dynamic range is not impaired.

【0024】[0024]

【発明の効果】以上のように、本発明によれば、FIT
転送期間中の基板電圧を高くするようにしたために、ス
ミア抑制のできるFIT転送を行うことができると同時
に、極めて高輝度な被写体を撮像した場合においても、
FIT転送期間中のブルーミングの発生を抑制すること
ができることから、その実用的な効果は大なるものがあ
る。
As described above, according to the present invention, the FIT
Since the substrate voltage is increased during the transfer period, FIT transfer capable of suppressing smear can be performed, and at the same time, even when an extremely high-luminance object is imaged,
Since the occurrence of blooming during the FIT transfer period can be suppressed, its practical effect is great.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の固体撮像装置の駆動パルス及び基板電
圧を示す波形図である。
FIG. 1 is a waveform diagram showing a drive pulse and a substrate voltage of a solid-state imaging device of the present invention.

【図2】固体撮像装置の構成図である。FIG. 2 is a configuration diagram of a solid-state imaging device.

【図3】光電変換部、垂直転送部及びPウエル付近のポ
テンシャルの特性図である。
FIG. 3 is a characteristic diagram of a potential near a photoelectric conversion unit, a vertical transfer unit, and a P well.

【図4】従来の固体撮像装置の駆動パルス及び基板電圧
を示す波形図である。
FIG. 4 is a waveform diagram showing drive pulses and substrate voltage of a conventional solid-state imaging device.

【符号の説明】[Explanation of symbols]

1 掃き出しパルス 2 読み出しパルス 3 FIT転送パルス 6 光電変換部 7 垂直転送部 8 蓄積部 9 水平転送部 10 信号検出部 11 信号排出部 12 転送ゲート 13 Pウエル 14 基板 1 Sweeping pulse 2 Readout pulse 3 FIT transfer pulse 6 Photoelectric conversion unit 7 Vertical transfer unit 8 Storage unit 9 Horizontal transfer unit 10 Signal detection unit 11 Signal discharge unit 12 Transfer gate 13 P well 14 Substrate

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 H01L 29/796 (72)発明者 信定 俊英 大阪府門真市大字門真1006番地 松下電子 工業株式会社内 (72)発明者 豊田 泰之 大阪府門真市大字門真1006番地 松下電子 工業株式会社内 (72)発明者 林 慎一郎 大阪府門真市大字門真1006番地 松下電子 工業株式会社内 (72)発明者 斉藤 幸男 大阪府門真市大字門真1006番地 松下電子 工業株式会社内─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 5 Identification number Internal reference number FI Technical indication location H01L 29/796 (72) Inventor Toshihide Nobusada 1006 Kadoma, Kadoma-shi, Osaka Matsushita Electronics Industrial Co., Ltd. (72) Inventor Yasuyuki Toyota, 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electronics Industrial Co., Ltd. 1006 Kadoma, Kadoma-shi, Osaka Prefecture Matsushita Electronics Industrial Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 一導電型の半導体基板上に設けられた反
対導電型の半導体層内に、光電変換部と、垂直転送部
と、蓄積部と、水平転送部と、信号検出部と、信号排出
部とが形成された固体撮像装置において、 前記基板に一定の駆動電圧を印加する一方、前記光電変
換部から垂直転送部へ読み出した信号電荷を蓄積部へ転
送するFIT転送期間に、前記一定の駆動電圧よりも高
いパルス電圧を前記基板に印加することを特徴とする固
体撮像装置の駆動方法。
1. A photoelectric conversion part, a vertical transfer part, a storage part, a horizontal transfer part, a signal detection part, and a signal in a semiconductor layer of the opposite conductivity type provided on a semiconductor substrate of one conductivity type. In the solid-state imaging device in which the discharge unit is formed, a constant drive voltage is applied to the substrate, and the constant charge is transferred during the FIT transfer period in which the signal charge read from the photoelectric conversion unit to the vertical transfer unit is transferred to the storage unit. A driving method for a solid-state imaging device, which comprises applying a pulse voltage higher than the driving voltage to the substrate.
JP3289864A 1991-11-06 1991-11-06 Driving method for solid-state image pickup device Pending JPH05130511A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3289864A JPH05130511A (en) 1991-11-06 1991-11-06 Driving method for solid-state image pickup device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3289864A JPH05130511A (en) 1991-11-06 1991-11-06 Driving method for solid-state image pickup device

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JPH05130511A true JPH05130511A (en) 1993-05-25

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5729287A (en) * 1995-08-22 1998-03-17 Nec Corporation Driving method for driving a solid state image pick-up device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5729287A (en) * 1995-08-22 1998-03-17 Nec Corporation Driving method for driving a solid state image pick-up device

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