JPH0513685B2 - - Google Patents

Info

Publication number
JPH0513685B2
JPH0513685B2 JP18368085A JP18368085A JPH0513685B2 JP H0513685 B2 JPH0513685 B2 JP H0513685B2 JP 18368085 A JP18368085 A JP 18368085A JP 18368085 A JP18368085 A JP 18368085A JP H0513685 B2 JPH0513685 B2 JP H0513685B2
Authority
JP
Japan
Prior art keywords
laser
sif
infrared
compound
working material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP18368085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6245327A (ja
Inventor
Shigeyoshi Arai
Masatsugu Kamioka
Yoichi Ishikawa
Shohei Isomura
Kyoko Sugita
Tatsuhiko Motomya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
RIKEN
Original Assignee
Shin-Etsu Chemical Co Ltd
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd, RIKEN filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP18368085A priority Critical patent/JPS6245327A/ja
Priority to US06/824,222 priority patent/US4824537A/en
Priority to EP86101539A priority patent/EP0190758B1/de
Priority to CA000501270A priority patent/CA1285371C/en
Priority to DE8686101539T priority patent/DE3664569D1/de
Publication of JPS6245327A publication Critical patent/JPS6245327A/ja
Publication of JPH0513685B2 publication Critical patent/JPH0513685B2/ja
Granted legal-status Critical Current

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Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Silicon Compounds (AREA)
JP18368085A 1985-02-06 1985-08-21 レ−ザ−同位体分離用作業物質およびレ−ザ−同位体分離法 Granted JPS6245327A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP18368085A JPS6245327A (ja) 1985-08-21 1985-08-21 レ−ザ−同位体分離用作業物質およびレ−ザ−同位体分離法
US06/824,222 US4824537A (en) 1985-02-06 1986-01-30 Working substances used in laser isotope separation and method of laser isotope separation
EP86101539A EP0190758B1 (de) 1985-02-06 1986-02-06 Verfahren zur Laserisotopentrennung von Silizium
CA000501270A CA1285371C (en) 1985-02-06 1986-02-06 Working substances used in laser isotope separation and method of laserisotope separation
DE8686101539T DE3664569D1 (en) 1985-02-06 1986-02-06 Process for a laser isotope separation of silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18368085A JPS6245327A (ja) 1985-08-21 1985-08-21 レ−ザ−同位体分離用作業物質およびレ−ザ−同位体分離法

Publications (2)

Publication Number Publication Date
JPS6245327A JPS6245327A (ja) 1987-02-27
JPH0513685B2 true JPH0513685B2 (de) 1993-02-23

Family

ID=16140043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18368085A Granted JPS6245327A (ja) 1985-02-06 1985-08-21 レ−ザ−同位体分離用作業物質およびレ−ザ−同位体分離法

Country Status (1)

Country Link
JP (1) JPS6245327A (de)

Also Published As

Publication number Publication date
JPS6245327A (ja) 1987-02-27

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