JPH0514152Y2 - - Google Patents

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Publication number
JPH0514152Y2
JPH0514152Y2 JP1987113880U JP11388087U JPH0514152Y2 JP H0514152 Y2 JPH0514152 Y2 JP H0514152Y2 JP 1987113880 U JP1987113880 U JP 1987113880U JP 11388087 U JP11388087 U JP 11388087U JP H0514152 Y2 JPH0514152 Y2 JP H0514152Y2
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JP
Japan
Prior art keywords
rectification column
pressure rectification
liquefied
gas
nitrogen
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Expired - Lifetime
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JP1987113880U
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Japanese (ja)
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JPS6419892U (en
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Description

【考案の詳細な説明】 産業上の利用分野 本考案は空気を原料として、圧縮、冷却、液
化、精留して酸素ガスと窒素ガスを製造する自己
冷熱を利用した空気分離装置に関する。
[Detailed Description of the Invention] Industrial Application Field The present invention relates to an air separation device that uses air as a raw material and uses self-cooling heat to produce oxygen gas and nitrogen gas by compressing, cooling, liquefying, and rectifying the air.

従来の技術 空気分離装置において、コールド・ボツクス
(非真空型パーライト断熱型保冷槽)内で原料空
気を分離し、酸素ガス及び窒素ガス等を製造する
場合、次の熱エネルギーに相当する寒冷量が必要
となる。
Conventional technology In an air separation device, when raw air is separated in a cold box (non-vacuum type perlite insulated cold storage tank) to produce oxygen gas, nitrogen gas, etc., the amount of refrigeration equivalent to the following thermal energy is It becomes necessary.

外気からのコールド・ボツクスへの侵入熱エ
ネルギー 熱交換器高温端温度差による熱エネルギー差 一般の空気分離装置では、上記,で述べた
必要寒冷エネルギーを、膨脹機による断熱膨脹に
より発生させている場合と、コールド・ボツクス
の外部に設置された液化窒素貯槽からコールド・
ボツクス内の高圧精留塔に液化窒素を供給してい
る場合がある。
Thermal energy entering the cold box from outside air Thermal energy difference due to the temperature difference at the high temperature end of the heat exchanger In general air separation equipment, the necessary cold energy mentioned above is generated by adiabatic expansion using an expander. and cold water from a liquefied nitrogen storage tank installed outside the cold box.
In some cases, liquefied nitrogen is supplied to the high-pressure rectification column inside the box.

考案が解決しようとする問題点 従来方式で膨脹機を使用する場合は設備費の増
加、運転の困難さ、メンテナンスの複雑さ等の障
害があり、またコールド・ボツクスの外部に設置
された液化窒素貯槽からコールド・ボツクス内の
高圧精留塔に液化窒素を供給する場合は液化窒素
貯槽内の液化窒素を高圧精留塔の内部圧力に打ち
勝つて導入しなければならない。このため、液化
窒素貯槽内の液化窒素を加熱して加圧する必要が
あつた。従来このため液化窒素が持つている寒冷
の一部を無駄にしている現状である。
Problems that the invention aims to solve When using an expander in the conventional method, there are obstacles such as increased equipment costs, difficulty in operation, and complexity of maintenance. When supplying liquefied nitrogen from the storage tank to the high-pressure rectification column in the cold box, the liquefied nitrogen in the liquefied nitrogen storage tank must be introduced while overcoming the internal pressure of the high-pressure rectification column. Therefore, it was necessary to heat and pressurize the liquefied nitrogen in the liquefied nitrogen storage tank. Conventionally, this means that a portion of the cooling power contained in liquefied nitrogen is wasted.

問題点を解決するための手段 そのため本考案の装置は、圧縮された空気を原
料として高圧精留塔と低圧精留塔とを備えた複式
精留塔により酸素ガスと窒素ガスを製造する、コ
ールドボツクスに封入された空気分離装置におい
て、高圧精留塔の頂部から取出された窒素ガスの
一部を液化して高圧精留塔の頂部付近に戻す液化
ユニツト及び導管、並びに高圧精留塔に戻された
液化窒素を、該精留塔への戻し導管と同一レベル
から取出してコールドボツクス外に設置した断熱
型液化窒素貯槽に送給する導管を有し、さらに前
記断熱型液化窒素貯槽を、断熱パイプを介して低
圧精留塔の頂部に連通し、該断熱パイプはコール
ドボツクス内に膨張弁を有することを特徴として
いる。
Means for Solving the Problems Therefore, the device of the present invention is a cold-cold device that uses compressed air as a raw material to produce oxygen gas and nitrogen gas using a double rectification column equipped with a high-pressure rectification column and a low-pressure rectification column. In an air separation device enclosed in a box, a liquefaction unit and conduit that liquefies a portion of the nitrogen gas taken out from the top of the high-pressure rectification column and returns it to the vicinity of the top of the high-pressure rectification column, as well as a conduit for returning it to the high-pressure rectification column. It has a conduit for taking out the liquefied nitrogen from the same level as the return conduit to the rectification column and feeding it to an adiabatic liquefied nitrogen storage tank installed outside the cold box, It communicates with the top of the low-pressure rectification column via a pipe, and the insulated pipe is characterized by having an expansion valve in the cold box.

以下、本考案による空気分離装置の一実施例を
示す添付のフローシートを参照しながら、本考案
をさらに詳細に説明する。
Hereinafter, the present invention will be described in more detail with reference to the attached flow sheet showing an embodiment of the air separation device according to the present invention.

実施例 図示の如く、原料空気は原料空気圧縮機1にて
分離に必要な圧力迄圧縮された後、水洗浄塔2で
冷却、洗浄される。
Embodiment As shown in the figure, raw air is compressed in a raw air compressor 1 to the pressure required for separation, and then cooled and washed in a water washing tower 2.

常温迄冷却洗浄された原料空気は、低温分離設
備に導入され、切替式空気熱交換器(3,4……
高温熱交換器3及び低温熱交換器4から成る)で
向流する廃ガス及び製品ガスにより冷却され、水
及び炭酸ガスは、これら熱交換器に凝縮、固化す
る。
The raw air that has been cooled and cleaned to room temperature is introduced into the low-temperature separation equipment, where it is passed through a switching air heat exchanger (3, 4...
The water and carbon dioxide gas are cooled by counter-current waste gas and product gas in a high temperature heat exchanger 3 and a low temperature heat exchanger 4), and water and carbon dioxide are condensed and solidified in these heat exchangers.

空気と廃ガスとは、切替バルブ24a,24
b,24c,24d(24aと24bが閉のとき
24cと24dは開)とクラペツトボツクス25
a,25bによつて、周期的に切替えされ、凝
縮・固化した空気中の不純物は、廃ガスにより昇
華除去される。一方、製品酸素ガス及び製品窒素
ガスは、切替式空気熱交換器の一定流路を流れ
る。
Air and waste gas are connected to switching valves 24a and 24.
b, 24c, 24d (when 24a and 24b are closed, 24c and 24d are open) and Clapette box 25
a and 25b are periodically switched, and the condensed and solidified impurities in the air are sublimed and removed by the waste gas. On the other hand, the product oxygen gas and the product nitrogen gas flow through a constant flow path of the switched air heat exchanger.

精製された原料空気は、切替式空気熱交換器
3,4で製品ガス及び廃ガスにより、向流熱交換
し、液化温度近く迄冷却された後、高圧精留塔5
底部へ送られる。原料空気は高圧精留塔に於い
て、塔頂の純窒素ガスと塔底の酸素分に富む液体
空気とに分離される。
The purified feed air undergoes countercurrent heat exchange with the product gas and waste gas in the switching air heat exchangers 3 and 4, and is cooled to near the liquefaction temperature.
Sent to the bottom. The feed air is separated into pure nitrogen gas at the top of the column and oxygen-rich liquid air at the bottom of the column in a high-pressure rectification column.

高圧精留塔5塔頂の窒素ガスは高圧精留塔5頂
部付近に設置された主蒸化器6で、蒸発する液化
酸素と熱交換し、液化し、再び高圧精留塔5に供
給される。
The nitrogen gas at the top of the high-pressure rectification column 5 exchanges heat with the evaporated liquefied oxygen in the main evaporator 6 installed near the top of the high-pressure rectification column 5, liquefies it, and is supplied to the high-pressure rectification column 5 again. Ru.

この塔頂部の液化窒素は高圧精留塔5の還流液
として使用される。塔中部の液化窒素の一部は高
圧精留塔5の還流液として使用され、残部は窒素
過冷却器9に送られ、そこで廃ガスにより過冷却
され、膨脹弁15aにより膨脹して液化窒素貯槽
12からの本装置の冷熱源である液化窒素と合流
後、低圧精留塔10に導入され、低圧精留塔10
頂部の還流液として使用される。
The liquefied nitrogen at the top of the column is used as a reflux liquid in the high-pressure rectification column 5. A part of the liquefied nitrogen in the middle of the column is used as a reflux liquid in the high-pressure rectification column 5, and the remainder is sent to the nitrogen supercooler 9, where it is supercooled by waste gas, expanded by the expansion valve 15a, and sent to the liquefied nitrogen storage tank. After merging with liquefied nitrogen which is a cold source of this apparatus from 12, it is introduced into the low pressure rectification column 10.
Used as top reflux liquid.

高圧精留塔5底部の液化空気は2塔切替式の吸
着塔7を通り、炭化水素分を吸着除去された後、
液化空気過冷却器8で過冷却された後、膨脹弁1
6により膨脹して低圧精留塔10上部に導入さ
れ、低圧精留塔10上部の還流液として使用され
る。
The liquefied air at the bottom of the high-pressure rectification column 5 passes through a two-column switching type adsorption column 7, after which hydrocarbons are adsorbed and removed.
After being supercooled by the liquefied air supercooler 8, the expansion valve 1
6 and introduced into the upper part of the low-pressure rectification column 10, where it is used as a reflux liquid in the upper part of the low-pressure rectification column 10.

空気の最終分離は低圧精留塔10で行われ、塔
頂に廃ガス、塔中部にアルゴンリツチガス、塔底
に液化酸素が製出される。
The final separation of air is carried out in a low-pressure rectification column 10, producing waste gas at the top of the column, argon-rich gas at the middle of the column, and liquefied oxygen at the bottom of the column.

液化酸素は低圧精留塔10塔底より取り出さ
れ、液化酸素ポンプ13により昇圧され、2塔切
替式の吸着塔14を通り、炭化水素分を吸着除去
された後、主蒸化器6で前述の窒素ガスと熱交換
し、酸素ガスとなり再び低圧精留塔10底部に供
給される。
Liquefied oxygen is taken out from the bottom of the low-pressure rectification column 10, pressurized by the liquefied oxygen pump 13, passed through the two-column switching type adsorption column 14, and after adsorption and removal of hydrocarbons, it is transferred to the main evaporator 6 as described above. The oxygen gas exchanges heat with nitrogen gas, becomes oxygen gas, and is again supplied to the bottom of the low-pressure rectification column 10.

低圧精留塔10底部の一部の酸素ガスは、切替
式空気熱交換器で加温された後、製品酸素ガスと
なる(図中酸素ガスライン)。
A portion of the oxygen gas at the bottom of the low-pressure rectification column 10 is heated in a switching air heat exchanger and then becomes product oxygen gas (oxygen gas line in the figure).

本考案装置に必要な冷熱源はコールド・ボツク
ス(C・B)の外方に配設した二重殻真空断熱液
化窒素貯槽12から二重殻真空断熱導管18によ
り、コールド・ボツクス(C・B)内にある膨脹
弁18a、導管18bを通り、導管19と合流後
低圧精留塔10頂部に供給されるが、前記液化窒
素貯槽12への液化窒素は、高圧精留塔5の頂部
から導管38で取出された窒素ガスを導管49で
分岐し、液化ユニツト50(公知機構のもの)で
液化したものであつて、本考案装置によつて製造
されたものである。図では、この液化ユニツト5
0で液化された液化窒素は、導管51で高圧精留
塔5の頂部近くに戻され、同一の精留板から導管
48によつて、貯槽12に送られている。液化窒
素を一旦、高圧精留塔5へ戻すことにより、その
際のフラツシユ・ガスは高圧精留塔5内に回収さ
れ、効率的な精留に寄与する。液化ユニツト50
から直接、貯槽12に送ることもできるが、その
場合には貯槽12内でのフラツシユ・ガスを高圧
精留塔5へ戻す導管が必要である。
The cold heat source required for the device of the present invention is connected to the cold box (C/B) by a double shell vacuum insulated conduit 18 from a double shell vacuum insulated liquefied nitrogen storage tank 12 arranged outside the cold box (C/B). ), the liquid nitrogen passes through an expansion valve 18a located in The nitrogen gas taken out at 38 is branched through a conduit 49 and liquefied in a liquefaction unit 50 (of a known mechanism), which is produced by the apparatus of the present invention. In the figure, this liquefaction unit 5
The liquefied nitrogen liquefied at 0 is returned to near the top of the high-pressure rectification column 5 in a conduit 51 and is sent to the storage tank 12 by a conduit 48 from the same rectification plate. By once returning the liquefied nitrogen to the high-pressure rectification column 5, the flash gas at that time is recovered within the high-pressure rectification column 5, contributing to efficient rectification. Liquefaction unit 50
It is also possible to send the flash gas directly from the storage tank 12 to the storage tank 12, but in that case a conduit for returning the flash gas in the storage tank 12 to the high pressure rectification column 5 is required.

このように、本考案装置では、液運転時に導管
38から取出される製品窒素の一部を液化ユニツ
ト50で液化して貯槽12に貯留し、ガス運転時
にこの貯槽12の液化窒素すなわち自己冷熱を導
管18で取出して、本考案装置に必要な冷熱源と
して低圧精留塔10の頂部から供給するのであ
る。
As described above, in the device of the present invention, a part of the product nitrogen taken out from the conduit 38 during liquid operation is liquefied in the liquefaction unit 50 and stored in the storage tank 12, and during gas operation, the liquefied nitrogen in the storage tank 12, that is, the self-cooling heat is used. It is taken out through a conduit 18 and supplied from the top of the low-pressure rectification column 10 as a source of cold heat necessary for the apparatus of the present invention.

低圧精留塔中部に形成されるアルゴン・リツチ
ガスはアルゴン精留塔11底部に吹き込まれて精
留される。アルゴン精留塔11頂部に於いては、
凝縮器20が設置され、粗アルゴンガスは、導管
21さらに、膨脹弁17を通つて膨脹した液化空
気と熱交換し液化される。液化された粗アルゴン
はアルゴン精留塔の還流液として使用される。
The argon-rich gas formed in the middle of the low-pressure rectification column is blown into the bottom of the argon rectification column 11 and rectified. At the top of the argon rectification column 11,
A condenser 20 is installed, and the crude argon gas is liquefied by exchanging heat with the expanded liquefied air through the conduit 21 and the expansion valve 17. The liquefied crude argon is used as the reflux liquid of the argon rectification column.

アルゴン精留塔11頂部の一部の粗アルゴンガ
スは熱交換器(添付図面には図示せず)を通つて
加温され、粗アルゴンガスとなる(図中粗アルゴ
ンライン)。
A portion of the crude argon gas at the top of the argon rectification column 11 is heated through a heat exchanger (not shown in the attached drawing) and becomes crude argon gas (crude argon line in the drawing).

アルゴン精留塔11底部のアルゴンリツチの液
体は再び低圧精留塔10中部へ導入され、低圧精
留塔10底部の還流液として使用される。
The argon-rich liquid at the bottom of the argon rectification column 11 is again introduced into the middle of the low-pressure rectification column 10 and used as the reflux liquid at the bottom of the low-pressure rectification column 10.

低圧精留塔10頂部の廃ガスは液化窒素過冷却
器9液化空気過冷却器8を通つた後、切替式空気
熱交換器4,3にて常温迄加温され大気に放出さ
れる(図中廃ガスライン)。
The waste gas at the top of the low-pressure rectification column 10 passes through a liquefied nitrogen supercooler 9 and a liquefied air supercooler 8, and then is heated to room temperature in the switching air heat exchangers 4 and 3 and released into the atmosphere (Fig. middle waste gas line).

高圧精留塔5頂部の窒素ガスの一部は、切替式
空気熱交換器4,3で加温され製品窒素ガスとな
る(図中窒素ガスライン)。
A portion of the nitrogen gas at the top of the high-pressure rectification column 5 is heated by the switching air heat exchangers 4 and 3 and becomes a product nitrogen gas (nitrogen gas line in the figure).

前記切替式熱交換器3,4は原料空気中の不純
物を物理的(固化←→昇華)に除去するシステムで
あり、不純物の除去にはこれら熱交換器内の温度
差を調整(即ち、昇華させるのに必要な温度ΔT
を保持する)する必要があり、この調整を前記熱
交換器3,4の中間部より分岐した配管22の調
整弁23の開閉により、流量調整のために一部の
窒素ガスを抜き出し、この抜き出された窒素ガス
は廃ガスラインの液化窒素過冷却器9手前で合流
され廃ガスとなる。
The switching heat exchangers 3 and 4 are systems that physically remove impurities in the raw air (solidification←→sublimation), and to remove impurities, the temperature difference within these heat exchangers is adjusted (i.e., sublimation). Temperature ΔT required to
This adjustment is carried out by opening and closing the regulating valve 23 of the pipe 22 branched from the middle part of the heat exchangers 3 and 4 to extract a part of the nitrogen gas to adjust the flow rate. The discharged nitrogen gas is combined in the waste gas line before the liquefied nitrogen supercooler 9 and becomes waste gas.

前述の如く、本考案では多量の液化酸素又は窒
素を製造できる空気分離装置において、需給に差
がある時又は液化ユニツトの停止等の時にガス運
転(ガス製品を製造する)が可能な空気分離装置
を提供するものである。
As mentioned above, the present invention is an air separation device that can produce a large amount of liquefied oxygen or nitrogen, and can operate on gas (manufacture gas products) when there is a difference in supply and demand or when the liquefaction unit is stopped. It provides:

考案の効果 上記のように空気分離装置のコールド・ボツク
ス外部に設置した断熱貯槽に、本装置によつて製
造された液化窒素を貯蔵し、更に断熱パイプによ
り空気分離装置の低圧精留塔上部にその液化窒素
自己冷熱を供給し、この装置に必要な寒冷と還流
液を同時に満足させることができる。
Effects of the device As mentioned above, the liquefied nitrogen produced by this device is stored in an insulated storage tank installed outside the cold box of the air separation device, and is further transported to the upper part of the low-pressure rectification column of the air separation device using an insulated pipe. By supplying the liquefied nitrogen's self-cooling heat, it is possible to simultaneously satisfy the cooling and reflux liquid requirements for this device.

そのため膨脹機が不要になり、この機器の設置
に伴う設備費の増加、運転の困難さ、メンテナン
スの複雑さから解放される。
This eliminates the need for an expander, and eliminates the increased equipment costs, operational difficulties, and complexity of maintenance associated with installing this equipment.

また本考案装置では前にも述べたように、高圧
精留塔5の頂部から取出された窒素ガスは、液化
ユニツト50で液化されて高圧精留塔5の頂部近
くに戻され、その同一精留塔から貯槽12へ液化
窒素が流し込まれる。液化窒素を一旦、高圧精留
塔5へ戻してから貯槽12へ流し込むことによ
り、高圧精留塔への戻し時のフラツシユ・ガスを
高圧精留塔内に回収して、精留に寄与させること
ができる。さらに貯槽12から低圧精留塔10へ
の液化窒素の供給も圧力差のみを利用している。
もし高圧精留塔5へ貯槽12から供給するのであ
れば、送液ポンプが必要となるし、それでなけれ
ば高圧精留塔5への供給時には貯槽12内の圧力
を上げ、液化窒素の貯留時には圧力を下げるとい
う操作を繰返さなければならない。このような昇
圧−減圧を操返すことはその際の気化ガスが放出
されるので寒冷ロスが増加する。
In addition, in the device of the present invention, as mentioned earlier, the nitrogen gas taken out from the top of the high-pressure rectification column 5 is liquefied in the liquefaction unit 50 and returned to the vicinity of the top of the high-pressure rectification column 5. Liquefied nitrogen is poured into the storage tank 12 from the distillation column. By once returning the liquefied nitrogen to the high-pressure rectification column 5 and then flowing it into the storage tank 12, the flash gas at the time of return to the high-pressure rectification column is recovered into the high-pressure rectification column and made to contribute to rectification. I can do it. Furthermore, the supply of liquefied nitrogen from the storage tank 12 to the low-pressure rectification column 10 also utilizes only the pressure difference.
If the high pressure rectification column 5 is to be supplied from the storage tank 12, a liquid pump is required. Otherwise, the pressure in the storage tank 12 is increased when supplying to the high pressure rectification column 5, and when storing liquefied nitrogen, the pressure inside the storage tank 12 is increased. The operation of lowering the pressure must be repeated. Repetition of such pressurization and depressurization causes vaporized gas to be released, resulting in increased cooling loss.

本考案装置では、上記のように送液ポンプが不
要であし、寒冷ロスもないので、液化窒素の寒冷
自己冷熱を有効に活用でき、装置の運転モードの
変更がスムーズに行える利点がある。
The device of the present invention does not require a liquid pump as described above, and there is no cooling loss, so the cold self-cooling heat of liquefied nitrogen can be effectively utilized, and the device has the advantage of being able to smoothly change its operating mode.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案装置の一具体例を示すフローシ
ートであり、 図中:1……原料空気圧縮機、2……水洗浄
塔、3,4……切替式空気熱交換器(3は高温熱
交換器、4は低温熱交換器)、5……高圧精留塔、
6……主蒸化器、7……吸着器(2塔切替式……
液化空気過器)、8……液化空気過冷却器、9
……液化窒素過冷却器、10……低圧精留塔、1
1……アルゴン精留塔、12……二重殻真空断熱
液化窒素貯槽、13……液化酸素ポンプ、14…
…吸着器(2塔切替式……液化酸素過器)、1
8……二重殻真空断熱導管、20……凝縮器、2
4a,24b,24c,24d……切替バルブ、
25a,25b……フラペツト ボツクス、50
……液化ユニツト、C・B……コールドボツク
ス、26〜49,51……導管。
Fig. 1 is a flow sheet showing a specific example of the device of the present invention. high-temperature heat exchanger, 4 is a low-temperature heat exchanger), 5... high-pressure rectification column,
6...Main evaporator, 7...Adsorber (two-column switching type...
liquefied air supercooler), 8... liquefied air supercooler, 9
...Liquid nitrogen supercooler, 10...Low pressure rectification column, 1
1...Argon rectification column, 12...Double shell vacuum insulated liquefied nitrogen storage tank, 13...Liquid oxygen pump, 14...
...Adsorber (two-column switching type...liquefied oxygen absorber), 1
8...Double shell vacuum insulated conduit, 20...Condenser, 2
4a, 24b, 24c, 24d... switching valve,
25a, 25b...Frappet Box, 50
...Liquification unit, C/B... Cold box, 26-49, 51... Conduit.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 圧縮された空気を原料として高圧精留塔5と低
圧精留塔10とを備えた複式精留塔により酸素ガ
スと窒素ガスを製造する、コールドボツクスC.B.
に封入された空気分離装置において、高圧精留塔
5の頂部から取出された窒素ガスの一部を液化し
て高圧精留塔5の頂部付近に戻す液化ユニツト5
0及び導管49,51、並びに高圧精留塔5に戻
された液化窒素を、該精留塔への戻し導管51と
同一レベルから取出してコールドボツクスC.B.外
に設置した断熱型液化窒素貯槽12に送給する導
管48を有し、さらに前記断熱型液化窒素貯槽1
2を、断熱パイプ18を介して低圧精留塔10の
頂部に連通し、該断熱パイプ18はコールドボツ
クスC.B.内に膨張弁18aを備えていることから
なる、自己冷熱を利用する空気分離装置。
A cold box CB that uses compressed air as a raw material to produce oxygen gas and nitrogen gas using a double rectifier that includes a high-pressure rectifier 5 and a low-pressure rectifier 10.
In the air separation device sealed in the high pressure rectification column 5, a liquefaction unit 5 liquefies a part of the nitrogen gas taken out from the top of the high pressure rectification column 5 and returns it to the vicinity of the top of the high pressure rectification column 5.
0, conduits 49, 51, and the high-pressure rectification column 5 are taken out from the same level as the return conduit 51 to the rectification column and transferred to an adiabatic liquefied nitrogen storage tank 12 installed outside the cold box CB. The adiabatic liquefied nitrogen storage tank 1 has a conduit 48 for feeding
2 is connected to the top of a low-pressure rectification column 10 via an insulated pipe 18, and the insulated pipe 18 is equipped with an expansion valve 18a in a cold box CB.
JP1987113880U 1987-07-27 1987-07-27 Expired - Lifetime JPH0514152Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987113880U JPH0514152Y2 (en) 1987-07-27 1987-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987113880U JPH0514152Y2 (en) 1987-07-27 1987-07-27

Publications (2)

Publication Number Publication Date
JPS6419892U JPS6419892U (en) 1989-01-31
JPH0514152Y2 true JPH0514152Y2 (en) 1993-04-15

Family

ID=31354118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987113880U Expired - Lifetime JPH0514152Y2 (en) 1987-07-27 1987-07-27

Country Status (1)

Country Link
JP (1) JPH0514152Y2 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59231381A (en) * 1983-06-15 1984-12-26 株式会社日立製作所 Argon collection method using air separation equipment

Also Published As

Publication number Publication date
JPS6419892U (en) 1989-01-31

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