JPH0514867U - Optical wavelength meter - Google Patents

Optical wavelength meter

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Publication number
JPH0514867U
JPH0514867U JP1104191U JP1104191U JPH0514867U JP H0514867 U JPH0514867 U JP H0514867U JP 1104191 U JP1104191 U JP 1104191U JP 1104191 U JP1104191 U JP 1104191U JP H0514867 U JPH0514867 U JP H0514867U
Authority
JP
Japan
Prior art keywords
light
measured
frequency
wavelength
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1104191U
Other languages
Japanese (ja)
Inventor
克己 磯崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1104191U priority Critical patent/JPH0514867U/en
Publication of JPH0514867U publication Critical patent/JPH0514867U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 (修正有) 【目的】 小型,安価,長寿命で、高精度な波長測定が
可能な装置を実現する。 【構成】 ガスの吸収線を周波数基準として使用しレ−
ザダイオ−ドの発振周波数を注入電流若しくは温度によ
って常に一定となるように制御して基準となる光を出射
する周波数安定化レ−ザ光源3、被測定光を入射させる
測定光入射用光学系4、移動鏡14をその光学系に有す
るマイケルソン干渉計1、前記基準光と被測定光との干
渉信号を検出する光検出器2を備え、前記周波数安定化
レ−ザ光源3からの基準光と前記測定光入射用光学系4
からの被測定光を同時に前記マイケルソン干渉計1に入
射させ、前記移動鏡14を変位する事により生じる干渉
の強度変化を前記光検出器2で測定することにより、前
記被測定光の波長を求めるようにしたことを特徴とす
る。
(57) [Summary] (Correction) [Purpose] To realize a compact, inexpensive, long-life device capable of highly accurate wavelength measurement. [Composition] The absorption line of gas is used as a frequency reference
A frequency-stabilized laser light source 3 that emits a reference light by controlling the oscillation frequency of the diode so that it is always constant by an injection current or a temperature, and an optical system 4 for introducing a measurement light. A Michelson interferometer 1 having a movable mirror 14 in its optical system, a photodetector 2 for detecting an interference signal between the reference light and the light to be measured, and a reference light from the frequency stabilizing laser light source 3. And the measuring light incident optical system 4
The wavelength of the light to be measured is measured by simultaneously injecting the light to be measured from the above into the Michelson interferometer 1 and measuring the intensity change of the interference caused by displacing the movable mirror 14 with the photodetector 2. The feature is that they are asked.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial applications]

本考案は、光の波長を測定する光波長計に関し、特に小型、安価、長寿命であ ると共に、測定精度をより高精度にした光波長計に関するものである。 The present invention relates to an optical wavelength meter for measuring the wavelength of light, and more particularly to an optical wavelength meter that is compact, inexpensive, has a long life, and has higher measurement accuracy.

【0002】[0002]

【従来の技術】[Prior Art]

光波長計は、光通信、光応用機器、各種光学測定等に使用する光源の波長を測 定する装置である。現在、光の波長を測定するものとしては、光スペクトラムア ナライザにより、各波長に対応した光パワ−を分光により測定し、そのスペクト ルからピ−ク波長または中心波長を求める分光器によるものや、干渉膜フィルタ の反射と透過の比が波長に応じて変化することを利用した干渉膜フィルタタイプ や水晶等の偏波面が波長に応じて回転することを利用した旋光子タイプなどの光 波長板によるものや、マイケルソン干渉計で移動鏡を変位することにより生ずる 干渉の強度変化を測定して、波長を求めるマイケルソン干渉計によるものなどが ある。この内、10-6オ−ダ以上の高精度測定が可能で、取り扱いが容易などの 点を考慮すると、マイケルソン干渉計によるものが優れている。An optical wavelength meter is a device that measures the wavelength of a light source used for optical communication, optical application equipment, and various optical measurements. Currently, as a method for measuring the wavelength of light, an optical spectrum analyzer is used to measure the optical power corresponding to each wavelength by spectroscopy, and a spectroscope that determines the peak wavelength or center wavelength from the spectrum is used. , An optical wave plate such as an interference film filter type that uses the ratio of reflection and transmission of an interference film filter to change according to wavelength, and an optical rotator type that uses the polarization plane of a crystal to rotate according to wavelength. And the Michelson interferometer that determines the wavelength by measuring the intensity change of the interference caused by displacing the moving mirror with the Michelson interferometer. Among these, the Michelson interferometer is superior in view of the fact that it is possible to perform high-precision measurement of 10 −6 orders or more and is easy to handle.

【0003】 このマイケルソン干渉計による光波長計は、図2に示すように、基準光と被測 定光をハ−フミラ−11,ミラ−12,13,移動鏡14で構成されるマイケル ソン干渉計1に同時に入射させ、移動鏡14を変位させたときの干渉信号を光検 出器2で光電変換して、図示しない演算部で被測定光の波長を求めるようにした ものである。As shown in FIG. 2, the optical wavelength meter based on the Michelson interferometer uses the Michelson interference composed of the reference light and the light to be measured, which is composed of Hahmira-11, Mira-12 and 13, and the movable mirror 14. The interference signal generated when the movable mirror 14 is displaced at the same time is incident on the meter 1 is photoelectrically converted by the photodetector 2, and the wavelength of the light to be measured is obtained by a calculation unit (not shown).

【0004】[0004]

【考案が解決しようとする課題】[Problems to be solved by the device]

しかしながら、上記従来技術に示すマイケルソン干渉計による光波長計におい て、その測定分解能(精度)は、例えば光源に使用されているHe−Neレ−ザ の安定度(波長の絶対精度)でほぼ決定されており、〜1×10-6程度であった 。また、He−Neレ−ザはガスレ−ザであるため、小型化が難しく、寿命も短 かった。However, in the optical wavelength meter by the Michelson interferometer shown in the above-mentioned prior art, its measurement resolution (accuracy) is almost the same as the stability (absolute accuracy of wavelength) of the He-Ne laser used for the light source. It has been determined and was about 1 × 10 −6 . Further, since the He-Ne laser is a gas laser, it is difficult to miniaturize it and its life is short.

【0005】 本考案は上記従来技術の課題を踏まえて成されたものであり、小型、安価、長 寿命にできると共に、より高精度な波長測定が可能な光波長計を提供することを 目的としたものである。The present invention has been made in view of the above problems of the prior art, and an object of the present invention is to provide an optical wavelength meter that can be miniaturized, inexpensive, and have a long life, and that can perform more accurate wavelength measurement. It was done.

【0006】[0006]

【課題を解決するための手段】[Means for Solving the Problems]

上記課題を解決するための本考案の構成は、ガスの吸収線を周波数基準として 使用しレ−ザダイオ−ドの発振周波数を注入電流若しくは温度によって常に一定 となるように制御して基準となる光を出射する周波数安定化レ−ザ光源と、被測 定光を入射させる測定光入射用光学系と、移動鏡をその光学系に有するマイケル ソン干渉計と、前記基準光と被測定光との干渉信号を検出する光検出器とを備え 、前記周波数安定化レ−ザ光源からの基準光と前記測定光入射用光学系からの被 測定光を同時に前記マイケルソン干渉計に入射させ、前記移動鏡を変位すること により生じる干渉の強度変化を前記光検出器で測定することにより、前記被測定 光の波長を求めるようにしたことを特徴とするものである。 The configuration of the present invention for solving the above-mentioned problem is to use a gas absorption line as a frequency reference and control the oscillation frequency of a laser diode so that it is always constant by the injection current or the temperature. Stabilized laser light source that emits light, a measurement light incidence optical system that inputs the measured light, a Michelson interferometer that has a moving mirror in the optical system, and the interference between the reference light and the measured light. A photodetector for detecting a signal, wherein the reference light from the frequency-stabilized laser light source and the light to be measured from the measurement light incidence optical system are simultaneously incident on the Michelson interferometer, and the movable mirror The wavelength of the light to be measured is obtained by measuring the intensity change of the interference caused by displacing the light with the photodetector.

【0007】[0007]

【作用】[Action]

本考案によれば、光波長計の光源としてガスの吸収セルに発振周波数を固定し た周波数安定化レ−ザ光源を使用している。したがって、光源にHe−Neレ− ザを用いたものに比べ、波長精度を2〜3桁向上できると共に、小型、安価、長 寿命な装置にできる。 According to the present invention, a frequency-stabilized laser light source whose oscillation frequency is fixed to a gas absorption cell is used as a light source of an optical wavelength meter. Therefore, as compared with a light source using a He-Ne laser, the wavelength accuracy can be improved by two to three digits, and a small-sized, inexpensive, long-life device can be obtained.

【0008】[0008]

【実施例】【Example】

以下、本考案を図面に基づいて説明する。 図1は本考案の光波長計の一実施例を示す構成図であり、マイケルソン干渉計 を用いたものである。なお、図1において図2と同一要素には同一符号を付して 重複する説明は省略する。図1において、3は基準光を出射するための周波数安 定化レ−ザ光源であり、この周波数安定化レ−ザ光源3は、レ−ザダイオ−ド3 1、出力を取り出すためのハ−フミラ−32、パワ−モニタ用のハ−フミラ−3 3、Rbガスの吸収セル34、光検出器35,36、レ−ザダイオ−ド31の注 入電流を制御する制御回路37で構成される。レ−ザダイオ−ド31を出射した 光は、ハ−フミラ−33で分岐され、一方はRbガスの吸収セル34に入射され て、その透過強度が光検出器35で検出される。他方はパワ−モニタ用として光 検出器36で検出され、両者の信号が制御回路37に出力され、レ−ザダイオ− ド31の発振波長が常に一定となるように制御される。4は被測定光を入射させ る測定光入射用光学系、5は被測定光をマイケルソン干渉計1に導くためのミラ −である。 Hereinafter, the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing an embodiment of the optical wavelength meter of the present invention, which uses a Michelson interferometer. In FIG. 1, the same elements as those in FIG. 2 are designated by the same reference numerals, and overlapping description will be omitted. In FIG. 1, reference numeral 3 is a frequency stabilizing laser light source for emitting a reference light. The frequency stabilizing laser light source 3 is a laser diode 31 and a harness for taking out an output. It is composed of a humilla-32, a harhumilla-33 for power monitoring, an absorption cell 34 for Rb gas, photodetectors 35 and 36, and a control circuit 37 for controlling the injection current of the laser diode 31. .. The light emitted from the laser diode 31 is branched by the half mirror 33, one of which is incident on the Rb gas absorption cell 34, and the transmission intensity thereof is detected by the photodetector 35. The other one is detected by the photodetector 36 for power monitoring, both signals are output to the control circuit 37, and the oscillation wavelength of the laser diode 31 is controlled to be always constant. Reference numeral 4 is a measuring light incidence optical system for making the measured light incident, and 5 is a mirror for guiding the measured light to the Michelson interferometer 1.

【0009】 このような構成において、周波数安定化レ−ザ光源3から発振波長を常に一定 となるように制御され、ハ−フミラ−32を介して出射された基準光と、測定光 入射用光学系4から出射され、ミラ−5により導かれた被測定光は、同時にハ− フミラ−11、ミラ−12,13、移動鏡14からなるマイケルソン干渉計1に 入射され、移動鏡14を変位した時の干渉信号は、光検出器2で光電変換され、 図示しない演算部で被測定光の波長が求められる。In such a configuration, the reference light emitted from the frequency stabilizing laser light source 3 is controlled so that the oscillation wavelength is always constant, and the reference light emitted through the half mirror 32 and the measuring light incident optical system. The light to be measured emitted from the system 4 and guided by the mirror 5 is simultaneously incident on the Michelson interferometer 1 including the half mirrors 11, mirrors 12, 13 and the movable mirror 14 to displace the movable mirror 14. The interference signal at that time is photoelectrically converted by the photodetector 2, and the wavelength of the light to be measured is obtained by a calculation unit (not shown).

【0010】 ここで、周波数安定化レ−ザ光源3から出射される基準光の波長をλr 、測定 光入射用光学系4から出射される被測定光の波長をλm 、空気屈折率をna 、移 動鏡14の変位をLとすると、基準光による干渉信号θr と被測定光による干渉 信号θm は、それぞれ次式で表される。 θr =(2π/λr )・4na L … θm =(2π/λm )・4na L … 上記構成において、基準光と被測定光は同一光路を逆方向に通しており、基準 光と被測定光の空気屈折率na と移動鏡14の変位Lは同一であるため、前記 式と式の比をとれば、 λm =λr ・θr /θm … となり、この式から被測定光の波長を求めることができる。Here, the wavelength of the reference light emitted from the frequency stabilizing laser light source 3 is λ r, the wavelength of the light to be measured emitted from the measurement light incident optical system 4 is λ m, and the air refractive index is na. When the displacement of the moving mirror 14 is L, the interference signal θr due to the reference light and the interference signal θm due to the measured light are respectively expressed by the following equations. θr = (2π / λr) · 4na L ... θm = (2π / λm) · 4na L ... In the above configuration, the reference light and the measured light pass through the same optical path in opposite directions, and the reference light and the measured light Since the air refractive index na and the displacement L of the movable mirror 14 are the same, if the ratio of the above equations is taken, λm = λr · θr / θm ... And the wavelength of the measured light can be obtained from this equation. ..

【0011】 この結果、従来の光波長計の測定精度は、光源に使用されているHe−Neレ −ザの波長精度(〜1×10-6)に決められていたが、本考案のように光源に波 長精度が1×10-8〜10-9の周波数安定化レ−ザ光源を用いることにより、光 波長計の測長精度は2〜3桁の精度の向上が可能となる。また、LD光源はHe −Neレ−ザと比較して、小型、安価、長寿命であり、本考案の光波長計の特徴 となる。As a result, the measurement accuracy of the conventional optical wavelength meter is determined by the wavelength accuracy (~ 1 × 10 -6 ) of the He-Ne laser used for the light source, but it is the present invention. In addition, by using a frequency-stabilized laser light source with a wavelength accuracy of 1 × 10 -8 to 10 -9 , it is possible to improve the measurement accuracy of the optical wavelength meter by a few digits. The LD light source is smaller, cheaper, and has a longer life than He-Ne lasers, which is a feature of the optical wavelength meter of the present invention.

【0012】 なお、上記実施例において、周波数安定化レ−ザ光源3で用いたガスの吸収セ ル34は、Rb に限るものではなく、Cs (セシウム)やNH4 (アセチレン) などでも良い。また、干渉計はマイケルソン形に限るものではなく、フィゾ−形 やマッハツェンダ形でも良い。In the above embodiment, the gas absorption cell 34 used in the frequency stabilizing laser light source 3 is not limited to Rb, but may be Cs (cesium) or NH4 (acetylene). The interferometer is not limited to the Michelson type, but may be a Fizeau type or a Mach-Zehnder type.

【0013】[0013]

【考案の効果】[Effect of the device]

以上、実施例と共に具体的に説明したように、本考案によれば、小型、安価、 長寿命にできると共に、より高精度な波長測定が可能な光波長計を実現できる。 As described above in detail with reference to the embodiments, according to the present invention, it is possible to realize an optical wavelength meter that can be made small in size, inexpensive, and have a long life, and that can measure wavelengths with higher accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図1】本考案の光波長計の一実施例を示す構成図であ
る。
FIG. 1 is a block diagram showing an embodiment of an optical wavelength meter of the present invention.

【図2】マイケルソン干渉計による光波長計の原理を示
す構成図である。
FIG. 2 is a configuration diagram showing the principle of an optical wavelength meter using a Michelson interferometer.

【符号の説明】[Explanation of symbols]

1 マイケルソン干渉計 2,35,36 光検出器 3 周波数安定化レ−ザ光源 4 測定光入射用光学系 5,12,13 ミラ− 11,32,33 ハ−フミラ− 14 移動鏡 31 レ−ザダイオ−ド 34 Rbガスの吸収セル 37 制御回路 1 Michelson Interferometer 2, 35, 36 Photodetector 3 Frequency Stabilized Laser Light Source 4 Optical System for Incident of Measurement Light 5, 12, 13 Mirror 11, 32, 33 Haar Mirror 14 Moving Mirror 31 Ray The diode 34 Rb gas absorption cell 37 Control circuit

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 ガスの吸収線を周波数基準として使用し
レ−ザダイオ−ドの発振周波数を注入電流若しくは温度
によって常に一定となるように制御して基準となる光を
出射する周波数安定化レ−ザ光源と、被測定光を入射さ
せる測定光入射用光学系と、移動鏡をその光学系に有す
るマイケルソン干渉計と、前記基準光と被測定光との干
渉信号を検出する光検出器とを備え、前記周波数安定化
レ−ザ光源からの基準光と前記測定光入射用光学系から
の被測定光を同時に前記マイケルソン干渉計に入射さ
せ、前記移動鏡を変位することにより生じる干渉の強度
変化を前記光検出器で測定することにより、前記被測定
光の波長を求めるようにしたことを特徴とする光波長
計。
1. A frequency stabilization laser which emits a reference light by controlling an oscillation frequency of a laser diode so that it is always constant by an injection current or a temperature by using a gas absorption line as a frequency reference. A light source, a measurement light incident optical system for injecting the measured light, a Michelson interferometer having a movable mirror in the optical system, and a photodetector for detecting an interference signal between the reference light and the measured light. The reference light from the frequency-stabilized laser light source and the measured light from the measurement light incidence optical system are simultaneously incident on the Michelson interferometer, and the interference caused by displacing the movable mirror. An optical wavelength meter, wherein the wavelength of the light to be measured is obtained by measuring the intensity change with the photodetector.
JP1104191U 1991-03-04 1991-03-04 Optical wavelength meter Pending JPH0514867U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1104191U JPH0514867U (en) 1991-03-04 1991-03-04 Optical wavelength meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1104191U JPH0514867U (en) 1991-03-04 1991-03-04 Optical wavelength meter

Publications (1)

Publication Number Publication Date
JPH0514867U true JPH0514867U (en) 1993-02-26

Family

ID=11766971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1104191U Pending JPH0514867U (en) 1991-03-04 1991-03-04 Optical wavelength meter

Country Status (1)

Country Link
JP (1) JPH0514867U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014092475A (en) * 2012-11-05 2014-05-19 Yokogawa Electric Corp Light wavelength meter
WO2025088872A1 (en) 2023-10-26 2025-05-01 パナソニックIpマネジメント株式会社 Ranging device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62198724A (en) * 1986-02-26 1987-09-02 Yokogawa Electric Corp Variable wavelength light source
JPH01272175A (en) * 1987-12-15 1989-10-31 Lumonics Inc Excimer laser

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62198724A (en) * 1986-02-26 1987-09-02 Yokogawa Electric Corp Variable wavelength light source
JPH01272175A (en) * 1987-12-15 1989-10-31 Lumonics Inc Excimer laser

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014092475A (en) * 2012-11-05 2014-05-19 Yokogawa Electric Corp Light wavelength meter
US9146161B2 (en) 2012-11-05 2015-09-29 Yokogawa Electric Corporation Optical wavelength meter
WO2025088872A1 (en) 2023-10-26 2025-05-01 パナソニックIpマネジメント株式会社 Ranging device

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