JPH0515075B2 - - Google Patents
Info
- Publication number
- JPH0515075B2 JPH0515075B2 JP61012997A JP1299786A JPH0515075B2 JP H0515075 B2 JPH0515075 B2 JP H0515075B2 JP 61012997 A JP61012997 A JP 61012997A JP 1299786 A JP1299786 A JP 1299786A JP H0515075 B2 JPH0515075 B2 JP H0515075B2
- Authority
- JP
- Japan
- Prior art keywords
- superconducting
- insulating
- layer
- insulating layer
- resistive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61012997A JPS62172771A (ja) | 1986-01-25 | 1986-01-25 | 超伝導回路装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61012997A JPS62172771A (ja) | 1986-01-25 | 1986-01-25 | 超伝導回路装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62172771A JPS62172771A (ja) | 1987-07-29 |
| JPH0515075B2 true JPH0515075B2 (de) | 1993-02-26 |
Family
ID=11820843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61012997A Granted JPS62172771A (ja) | 1986-01-25 | 1986-01-25 | 超伝導回路装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172771A (de) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60177689A (ja) * | 1984-02-23 | 1985-09-11 | Nec Corp | 超伝導回路装置 |
-
1986
- 1986-01-25 JP JP61012997A patent/JPS62172771A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62172771A (ja) | 1987-07-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4430662A (en) | Superconductive tunnel junction integrated circuit | |
| JP4711249B2 (ja) | 超伝導集積回路及びその作製方法 | |
| CA2025800C (en) | Silver metal electrode on oxide superconductor | |
| JPH05102547A (ja) | ジヨセフソン集積回路装置の製造方法 | |
| JPH0515075B2 (de) | ||
| JPH0766462A (ja) | 超伝導回路 | |
| JPS6146081A (ja) | ジヨセフソン接合素子の製造方法 | |
| KR950006343B1 (ko) | 반도체 장치의 제조방법 | |
| JP2896978B2 (ja) | 半導体素子の多層配線形成方法 | |
| JP2727773B2 (ja) | ジョセフソン集積回路の製造方法 | |
| JPS60208873A (ja) | ジヨセフソン接合素子の製造方法 | |
| JPH0695581B2 (ja) | 超伝導回路装置 | |
| JPH053754B2 (de) | ||
| JPS5870594A (ja) | パタ−ン形成法 | |
| JPH0334675B2 (de) | ||
| JPH0234195B2 (de) | ||
| JPS61244078A (ja) | 超伝導線路の作製方法 | |
| JPS62224937A (ja) | 凹部埋め込み方法 | |
| JPH055192B2 (de) | ||
| JP2827256B2 (ja) | エッチバック平坦化方法 | |
| JPS61115360A (ja) | ジヨセフソン集積回路の作製方法 | |
| JPS63299160A (ja) | 半導体装置およびその製造方法 | |
| JPH0374514B2 (de) | ||
| JPS58125880A (ja) | ジヨセフソン接合素子 | |
| JPS58145177A (ja) | ジヨセフソン接合素子の製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |