JPH0517144Y2 - - Google Patents

Info

Publication number
JPH0517144Y2
JPH0517144Y2 JP14070985U JP14070985U JPH0517144Y2 JP H0517144 Y2 JPH0517144 Y2 JP H0517144Y2 JP 14070985 U JP14070985 U JP 14070985U JP 14070985 U JP14070985 U JP 14070985U JP H0517144 Y2 JPH0517144 Y2 JP H0517144Y2
Authority
JP
Japan
Prior art keywords
gas
vacuum
atmosphere
container
pores
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14070985U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6250725U (mo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14070985U priority Critical patent/JPH0517144Y2/ja
Publication of JPS6250725U publication Critical patent/JPS6250725U/ja
Application granted granted Critical
Publication of JPH0517144Y2 publication Critical patent/JPH0517144Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
JP14070985U 1985-09-17 1985-09-17 Expired - Lifetime JPH0517144Y2 (mo)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14070985U JPH0517144Y2 (mo) 1985-09-17 1985-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14070985U JPH0517144Y2 (mo) 1985-09-17 1985-09-17

Publications (2)

Publication Number Publication Date
JPS6250725U JPS6250725U (mo) 1987-03-30
JPH0517144Y2 true JPH0517144Y2 (mo) 1993-05-10

Family

ID=31047813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14070985U Expired - Lifetime JPH0517144Y2 (mo) 1985-09-17 1985-09-17

Country Status (1)

Country Link
JP (1) JPH0517144Y2 (mo)

Also Published As

Publication number Publication date
JPS6250725U (mo) 1987-03-30

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