JPH05196675A - Electric characteristic evaluation device - Google Patents

Abstract

(57) [Summary] [Object] To provide an electrical property evaluation device capable of rapidly evaluating the in-plane distribution of the electrical property of a measured object of a single body or a plurality of series bodies stacked in series. [Structure] A power source connected to a plurality of sets of metal terminal electrodes sandwiching the DUT and a pair of metal terminal electrodes sandwiching the DUT, and a terminal switcher for switching to each of the plurality of sets of metal terminal electrodes A measurement device that measures the electrical characteristics between the metal terminal and the metal terminal, their control, a processing device that captures the output of the measurement device, and a combination that has a small deviation from the reference value and small in-plane nonuniformity can be selected. An electrical characteristic evaluation device equipped with a sorter.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric characteristic evaluation device. More specifically, the present invention relates to an electrical characteristic evaluation device for evaluating the in-plane uniformity of an object to be measured among the electrical characteristics of the object to be measured and selecting an object to be measured that satisfies the criteria.

[0002]

2. Description of the Related Art Conventionally, in a disk-shaped product such as a zinc oxide type arrester element, variations in electrical characteristics at a central portion and a peripheral portion occur due to variations in particles in a manufacturing process, and thus, between plate thicknesses. Sometimes it may be necessary to investigate electrical properties.

In such a case, a schematic explanatory view of an electric characteristic evaluation apparatus conventionally used is shown in FIG. In the figure, reference numeral 50 is an object to be measured, 21 is an upper metal terminal electrode, and 22 is a lower metal terminal electrode.

With this apparatus, the lower metal terminal electrode 22 is pressed against and brought into contact with the lower surface of the object 50 to be measured, and the upper metal terminal electrode 21 is brought into contact with the position facing the lower metal terminal electrode 22. These electrodes are shown in FIG.
Connect to the constant current device 60 as shown in Fig.
Connect a voltmeter 70 in parallel with. For example, 1 mA is applied as a constant current flowing between the metal terminal electrodes 21 and 22, and the voltage between the metal terminal electrodes at this time is measured. Once the data at a certain point on the DUT 50 is obtained, next, in order to obtain the data at another point, the metal terminal electrodes 21 and 22 are removed from the DUT 50, and the DUT 50 is moved to another data. The metal terminal electrodes 21 and 22 are brought into contact with the measurement point position, and 1 mA is again supplied to measure the voltage between the metal terminal electrodes. Thus, as shown in FIG. 6, the voltage between the metal terminal electrodes at each measurement point (1, 2, 3, ...) Is obtained.

From the thus obtained position and voltage data, the voltage distribution is obtained based on a graph showing the voltage change with respect to the position as shown in FIG. 3, for example.

[0006]

In the conventional electrical characteristic evaluation apparatus as described above, since there is only one pair of metal terminal electrodes, if the number of measurement points is increased in order to accurately obtain the in-plane distribution,
Since the object to be measured or the pair of electrodes must be moved each time the measurement is performed, there is a problem that the measurement requires a lot of time and labor.

[0007] In addition to these objects to be measured which are used alone as a material satisfying the characteristic distribution, they may be used in a state where they are stacked in series (hereinafter referred to as "series body"). It is necessary to optimally select the combination so as to offset the manufacturing variations one by one, eliminate the non-uniformity of the in-plane distribution in the entire series body, and enter the predetermined variation range. Therefore, there is a problem that it takes a lot of time and labor to select an optimum sample from conventional individual data.

The present invention has been made in order to solve the above-mentioned problems, and it is possible to accurately and quickly measure the electrical characteristics of the object to be measured at a plurality of points and to optimize the selection of N in-series bodies. The purpose is to obtain an electric characteristic evaluation device that can be used.

[0009]

The electrical characteristic evaluation apparatus of the present invention comprises a plurality of sets of metal terminal electrodes facing each other with the object to be measured interposed therebetween, and a power supply connected to a pair of metal terminal electrodes sandwiching the object to be measured. And a pair of terminal switching devices that are connected between the power supply and each of the plurality of sets of metal terminal electrodes to switch between and connect the plurality of sets of metal terminal electrodes, and measurement of electrical characteristics generated between the pair of metal terminal electrodes. And a processing device that controls the terminal switching device and the power supply and captures the output of the measuring device.

[0010]

In the electrical characteristic evaluation apparatus of the present invention, a plurality of sets of metal terminal electrodes facing each other can be sequentially switched by the terminal switcher to measure the electrical characteristics at each place, and the measurement can be performed quickly.

Further, by providing a sorter, it is possible to make the electrical characteristics of the series body in which a plurality of objects to be measured are piled up uniform and to combine the objects to be measured satisfying the specifications in a short time.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a block diagram of an electric characteristic evaluation apparatus according to an embodiment of the present invention. In the figure, 11
(11a, 11b, 11c, 11d) are the metal terminal electrodes on the upper side of the object to be measured 50, and 12 (12a, 12b, 12c, 12d) are the metal terminal electrodes on the upper side of the object to be measured 50. The lower metal terminal electrodes are arranged with sandwiching 50, and are held by holding plates 41 and 42, respectively. 31 and 32 are a plurality of metal terminal electrodes 11a, 11b, 11c, 11d,
Any of 12a, 12b, 12c, 12d and constant current device 60
It is a terminal switching device for switching the connection with. 70 is a voltmeter, 80 is a processor using a computer, 81 is an instruction from the processor 80, a controller for turning on and off the constant current device 60, 82 is an instruction from the processor 80, a metal terminal electrode A controller that drives the terminal switching devices 31 and 32 of 11 and 12, and 83 is an output device.

In order to check the electric characteristics of the object to be measured with this electric characteristic evaluation apparatus, first, the object to be measured 50 is arranged between the metal terminal electrodes 11 and 12. In this way, DUT 50
A plurality of sets of metal terminal electrodes 11 arranged at positions to be measured,
12 is in contact with the DUT 50.

Next, a processor 80 using a computer
From the controller 82, a signal is sent to the terminal switching devices 31, 32 to connect to the metal terminal electrodes 11a, 12a. Next, the processor 80 sends a power-on signal to the controller 81. The controller 81 applies a constant current of 1 mA from the constant current device 60 between the metal terminal electrodes 11a and 12a, and the voltmeter 70
Measure the voltage (V _1mA ) generated between the terminals.
The measured value is input to the processing device 80. Next, the processing device 80
At the same time as sending a power-off signal from the controller 81 to the controller 81, a signal is sent via the controller 82 to the terminal switching devices 31, 32 to connect to the metal terminal electrodes 11b, 12b. Next, the processor 80 sends a power-on signal to the controller 81.
The controller 81 applies a constant current of 1 mA from the constant current device 60 between the metal terminal electrodes 11b and 12b, and the voltmeter 70 measures the voltage (V _1mA ) generated between the terminals. The measured value is input to the processor 80 using a computer.

The above processing is repeated in the same manner, and the processing device 80
The voltage distribution (V _1mA ) of the DUT 50 as shown in FIG.

The horizontal axis of the graph of FIG. 3 represents the distance from the center of the object to be measured in the radial direction, r (distance from center) /
R (radius of the object to be measured) is shown, and the vertical axis is based on the minimum value (Vmin) of the measured voltage (V _1mA ).

[0017]

[Equation 1] It is shown by the value obtained by.

Although a constant current of 1 mA is selected in this evaluation example, it may be higher or lower than 1 mA as long as the electric characteristics of the object 50 to be measured do not change and the reproducibility of the measured voltage is good.

Thus, as shown in FIG. 6, in order to know the in-plane distribution of the object to be measured, the data from the measuring points 1 to 32 (the number of measuring points is changed as necessary) is processed by the processing unit 80.
To record. In this way, the data of many objects to be measured are recorded.

The characteristics of the object to be measured generally vary during manufacture. Therefore, when the DUT is used alone, the sample No. Is output from the output device 83 and used. On the other hand, when objects to be measured having variations are stacked in series and used in a series body, it is necessary to use this data to reduce the non-uniformity of the in-plane distribution of the entire series body. In order to compare and select with such a reference value, as shown in FIG.
It sorts by the sorter 84 connected to 80. This selection method will be described in detail.

Sample No. Is indicated by i, the measurement position is indicated by j, and the measurement data of the position j of the sample i is indicated by Vi, j. Now N
Suppose that you choose a series body that is made by stacking individual simple substances in series. The measurement data at this time is obtained by the equation (1).

[0022]

[Equation 2] Here, V (j) in the equation (1) is the measurement data at the measurement position j of the serial body, and there are the number j of measurement points.

The maximum value of V (j) is V (j) max and the minimum value of V (j) is V (j) min. The parameter U for evaluating the nonuniformity is defined by the following equation (2).

[0024]

[Equation 3] It can be said that the smaller this U, the smaller the nonuniformity.

Now, it is assumed that M (M> N) data of the object to be measured is input to the processor 80 using a computer. The required specifications for the series body consisting of N individual units are determined to be the reference voltage of the series body: ± V0 Allowable value of V0: ΔV0 Allowable nonuniformity: F, and satisfy the discriminants of the following equations (3) to (5). The combination is selected by the selecting means of the processing device 80 or the selecting device 84, and the optimum series body is selected.

V0−ΔV0 ≦ V (j) min (3) V (j) max ≦ V0 + ΔV0 (4) U ≦ F (5) Using the classifier 84, N pieces are combined from M pieces to be measured. The selection means for selecting the series body to reduce the nonuniformity of the in-plane electrical characteristics will be described below. The number of measurement points, L, is determined and set according to the size of the object to be measured. The number of measurement points is determined by the processing accuracy of the object to be measured.For example, in the case of a metal oxide object, it is 10
Measure at mm intervals. Measure the voltage of a single unit and input the data from the processor. Compare with the reference value of the judgment formula for a single unit and collect M items that passed. The number of combinations ( _M C _N ) selected from N among _M ,
Compute V (j) Compare the reference values of discriminants (3) to (5) for the series body and select a combination that satisfies the discriminant. Output to.

When selecting a single substance using the sorter 84, the measurement data of the single substance described above is compared with a reference value, and from the smallest U, the sample No. Is output by the output device 83.

In the above-mentioned embodiment, the controller 81, 82 is described as an example in which it is configured separately from the processing device 80, but the function may be provided in the processing device 80 using a computer. Also, the selector of the embodiment shown in FIG. 2 can be provided with the function in the processor 80 using a computer.

Further, in the above-mentioned embodiment, attention has been paid to the voltage characteristic of the object to be measured, and it has been described that the standard and the variation thereof are managed. However, other characteristics such as connecting a constant voltage device to measure the current characteristic have been described. The present invention can be applied when a sorting operation for reducing the standard or variation is required even for the characteristics. Therefore, a power supply device other than the constant current device can be connected according to the purpose, and a measuring device according to the purpose other than the voltmeter can be connected.

[0030]

As described above, according to the present invention, since the terminal switching device capable of switching a plurality of sets of metal terminal electrodes is provided, there is an effect that the measurement can be performed quickly.

Further, since the selector for selecting the combination of the objects to be measured which satisfies the specification of the electrical characteristics is provided, there is an effect that the work of selecting a plurality of series bodies stacked from the objects to be measured can be performed in a short time.

[Brief description of drawings]

FIG. 1 is a block diagram of an electric characteristic evaluation apparatus according to an embodiment of the present invention.

FIG. 2 is a block diagram of an embodiment of an electrical characteristic evaluation device incorporating the selector of the present invention.

FIG. 3 is a diagram showing a voltage (V _1mA ) distribution of an object to be measured.

FIG. 4 is a schematic explanatory view of an electrode portion of a conventional electrical characteristic evaluation device.

FIG. 5 is a schematic explanatory diagram of a conventional electrical characteristic evaluation apparatus.

FIG. 6 is a diagram showing an example of measurement positions of an object to be measured.

[Explanation of symbols]

 11, 12 Metal terminal electrode 31, 32 Terminal switching device 50 DUT 60 Constant current device 70 Voltmeter 80 Processing device 84 Sorter

Claims (2)

[Claims] 1. A plurality of sets of metal terminal electrodes facing each other with the object to be measured interposed therebetween, a power source connected to the pair of metal terminal electrodes sandwiching the object to be measured, and a power source and each of the plurality of sets of metal terminal electrodes. There, a pair of terminal switching devices that are switched and connected to a plurality of sets of metal terminal electrodes, a measuring device that measures electrical characteristics generated between a pair of metal terminal electrodes, and a terminal switching device and a power supply are controlled and measured. An electrical characteristic evaluation device, comprising: a processing device that captures the output of a container. 2. From the electrical characteristic data of M measured objects,
N (M> N) to meet the reference value of the series body in which the DUTs are stacked in series and to minimize the non-uniformity of electrical characteristics
The electrical characteristic evaluation apparatus according to claim 1, further comprising a selector for selecting an individual.