JPH05200735A - Cutter - Google Patents

Abstract

PURPOSE:To provide a cutter capable of certainly controlling the operation of a cutting driving mechanism on the basis of a predetermined control parameter value with respect to the cutting quantity of a cutting blade to a work. CONSTITUTION:The cutting blade relatively movable with respect to a work and cutting the work accompanied by movement, a cutting drive mechanism 36 relatively moving the cutting blade and the work and a cutting quantity detecting means 42 for detecting the cutting quantity of the cutting blade are provide. Further, memory means 56, 58 storing the values of the predetermined control parameters of the cutting drive mechanism 36 and a control means 60 continuously detecting the cutting quantity through the cutting quantity detecting means 42 to read the value of the control parameter of the cutting drive mechanism 36 corresponding to the detected cutting quantity from the memories 56, 58 to control the cutting drive means 36 on the basis of the value of the control parameter are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting device, and more particularly to a cutting device in which a cutting blade is movable relative to a work to be cut and the work is cut along with the movement.

[0002]

2. Description of the Related Art A cutting device for moving a cutting blade relative to a work to be cut and cutting the work along with the movement is disclosed, for example, in Japanese Patent Laid-Open No. 61-79561. There is. This type of cutting device has a reciprocating mechanism for reciprocating the cutting blade in a direction perpendicular to the cutting advancing direction of the workpiece, a speed adjusting mechanism for adjusting the speed of the reciprocating movement, and a cutting blade for moving the workpiece. The cutting device includes a contacting / separating mechanism for contacting / separating and a weighting mechanism for applying a weight for pressing a cutting blade against the work when cutting the work.

In the conventional cutting apparatus, it is necessary to control the stroke length and speed of the reciprocating motion of the cutting blade and the weight for pressing the cutting blade against the work depending on the progress of cutting the work. For example, when attempting to cut a cylindrical work piece in a direction perpendicular to the axis, the stroke length must be increased because the cutting distance increases as it approaches the center. On the other hand, as the cutting distance increases, the cutting blade reciprocates. The speed of movement needs to be slow. Also, the weight needs to be increased as the cutting distance increases. In order to change and adjust the stroke length, speed, and weight (control parameters of the cutting drive mechanism), conventionally, according to the shape of the cutting cross section of the workpiece, first of all, the control parameters suitable for the cutting amount of the cutting blade are set. Predetermine the value. On the other hand, since the time to reach a certain depth of cut from the start of cutting the work is empirically known, it is possible to specify the number of times to reach the specific depth of cut specified by multiple timers. When it is possible to determine that the cut amount has been reached, the operation of each mechanism is controlled by the value of the control parameter that is predetermined corresponding to the specific cut amount. This enables a cutting operation suitable for the cutting amount.

[0004]

However, the above-mentioned conventional cutting device has the following problems. For a work with a circular cross section, the time to reach a certain depth of cut is easy to predict, but the time expected depending on the wear of the cutting blade, wear of abrasive grains used for cutting, work material, etc. May take a different time than. Also, when the shape of the cut cross section of the work becomes complicated, it is difficult to predict the time to reach a certain cutting depth, and especially for the first work, it cannot be predicted at all. I have no choice but to rely on my intuition. If there is a difference between the expected cutting time and the actual cutting time, for example, there is a risk that the cutting blade speed will become high at the cutting amount position where the cutting blade speed (control parameter) should be low. .. As a result, there is a problem in that the cutting blade is significantly consumed, and if it is significant, the cutting blade and the work are damaged. Further, there is a problem that the cutting blade or the fragments of the work are scattered due to the damage, which is dangerous. Further, since the value of the control parameter is changed by the timer, the number of times the value of the control parameter is changed is limited to the number of timers, and thus there is a problem that multi-step highly accurate control cannot be performed. Therefore, an object of the present invention is to provide a cutting device capable of reliably controlling the operation of the cutting drive mechanism with a predetermined control parameter value with respect to the cutting amount of the cutting blade with respect to the work.

[0005]

In order to solve the above problems, the present invention has the following constitution. That is, the work to be cut is relatively movable for cutting, and the cutting blade that cuts the work along with the movement, and the cutting blade and the work relatively move to cut the work. A cutting drive mechanism for causing the cutting blade to detect a cutting amount of the cutting blade with respect to the work, and a value of a predetermined control parameter of the cutting driving mechanism for the cutting amount. And a storage means for storing, while the cutting blade cuts the work, the cutting amount is continuously detected via the cutting amount detecting means and corresponds to the detected cutting amount. A control means for reading the value of the control parameter of the cutting drive mechanism from the storage means and controlling the cutting drive mechanism with the value of the control parameter is provided.

[0006]

[Operation] The operation will be described. The control means continuously detects the cutting amount through the cutting amount detecting means while the cutting blade cuts the work, and stores the value of the control parameter of the cutting drive mechanism corresponding to the detected cutting amount. The cutting drive mechanism is controlled by the value of the control parameter. Therefore, it is possible to reliably control the operation of the cutting drive mechanism with the value of the predetermined control parameter with respect to the cutting amount of the cutting blade with respect to the work.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings. In the present embodiment, a multi-blade cutting device that manufactures an electronic material such as a ceramic wafer will be described as an example of the cutting device. First, the configuration of the multi-blade cutting apparatus 10 of the present embodiment will be described with reference to FIG. 1 (a block diagram of a control system) and FIG. 2 (an explanatory view showing the outline of the cutting apparatus of the embodiment). A bed 12 is provided inside the apparatus 10. A slide frame 14 is provided on the bed 12 so as to reciprocate (slide) in the arrow direction. Reference numeral 16 denotes a blade (cutting blade), which is formed by tensioning a large number of grinding bands in parallel inside the slide frame 14. When the slide frame 14 reciprocates, the blade 16 is also movable with respect to the workpiece 18 to be cut, and the workpiece 18 can be ground and cut into a large number of wafers simultaneously with the movement.

Reference numeral 20 denotes a connecting member, the left end of which is fixed to the slide frame 14. On the other hand, a guide slot 22 is formed at the right end of the connecting member 20. A flywheel 24 is rotationally driven by a motor 28 via a belt 26. Crank pin 3 on the flywheel 24
0 is provided, and the crank pin 30 is connected to the connecting member 20.
It is fitted in the guide slot 22 of. With this configuration, when the motor 28 is driven and the flywheel 24 rotates, the connecting member 20 and the slide frame 14 integrally reciprocate in the arrow direction, and the blade 16 also reciprocates in the same manner. Therefore, the slide frame 14, the connecting member 20,
The flywheel 24, the belt 26 and the motor 28 constitute a reciprocating mechanism 32. Further, the reciprocating speed of the blade 16 can be adjusted by adjusting the rotation speed of the motor 28, which also serves as a speed adjusting mechanism.

The position of the crankpin 30 on the flywheel 24 is a known mechanism (for example, Japanese Patent Laid-Open No. 60-263664).
It can be moved in the radial direction. By changing the position of the crank pin 30, the stroke length of the reciprocating motion of the blade 16 can be changed. Therefore, the mechanism for changing the position of the crank pin 30 serves as the stroke adjusting mechanism 34. The reciprocating mechanism 3
2 and the stroke adjusting mechanism 34 together with the cutting drive mechanism 36
Make up. Reference numeral 38 denotes a work supporting mechanism, which is the table 4
The work 18 can be placed on the 0. The work supporting mechanism 38 has a cylinder structure, and the table 40 is vertically movable. By moving the table 40 upward, the blade 16 can be moved toward and away from the work 18 in the cutting direction (upward in this embodiment), so that the work support mechanism 38 constitutes a contact and separation mechanism.

Reference numeral 42 is a cut amount detecting sensor which is an example of a cut amount detecting means. Although not shown in FIG. 2, the sensor 42 detects the amount of cutting of the blade 16 with respect to the work 18 by detecting the vertical movement distance of the table 40. As the sensor 42, for example, one end is fixed to the table 40 and the other end is fixed to a rotatable spool, and a wire wound around the spool and an encoder for detecting the rotation amount of the spool are used. Become. Table 4 equivalent to the progress of cutting of the work 18 by the blade 16
With the upward movement of 0, the spool rotates. The encoder detects the rotation amount, and the length of the wire pulled out, that is, the cutting amount of the blade 16 can be detected from the rotation amount.

Reference numeral 44 denotes a weighting mechanism, which is a hydraulic cylinder 46.
And a pressure applying device 48. The hydraulic pressure of the hydraulic cylinder 46 is transmitted to the work supporting mechanism 38 via the oil passage 50. Due to the transmitted hydraulic pressure, the work support mechanism 3
Workpiece 1 is made possible while allowing the upper movement of the table 40 of No. 8
When cutting 8, the blade 16 is weighted to press it against the work 18. The pressure applying device 48 comprises a lever arm 52 and a weight 54 which is self-propelled on the arm 52 by a known mechanism (see, for example, Japanese Patent Laid-Open No. 61-79561). By changing the position, the weight (hydraulic pressure) for pressing the blade 16 against the work 18 can be changed.

Reference numeral 56 denotes a ROM, which serves as a storage means for the depth of cut, the stroke length and speed of the reciprocating movement of the blade 16 which is determined in advance, and the weight (oil pressure) for pressing the blade 16 against the work 18. ) Etc. (values of control parameters) are stored (hereinafter, this data will be referred to as table data). Further, the ROM 56 stores in advance an operating system of control means, a control program of the cutting device 10, control data and the like, which will be described later. In addition to the ROM 56, an external storage means such as an IC card or a floppy disk may be used as the storage means. If an external memory is used as the storage means, the value of the table data can be easily changed. An example of table data is shown in FIG.
Is shown in the graph.

Reference numeral 58 denotes a RAM, which is a current cutting amount detected through the sensor 42, a current control parameter value corresponding to the current cutting amount, an input command, data,
The information processed by the control means described later is temporarily stored. In the present embodiment, the table data stored in the ROM 56 is once transferred to the RAM 58, and the control means controls based on the table data on the RAM 58. By temporarily transferring to the RAM 58, the table data can be changed. The table data is
Instead of storing it in the ROM 56, the operator may input it to the RAM 58 as a storage unit prior to the work. In that case, the data can be saved by using an external memory together.

Reference numeral 60 denotes a microprocessor (MPU), and as a control means, while the blade 16 cuts the work 18, the work 18 of the blade 16 is passed through a sensor 42.
Is continuously detected, the value of the table data corresponding to the detected depth of cut is read from the RAM 58 (or ROM 56), and the cutting drive mechanism 36 and the weighting mechanism 44 are controlled by the value of the control parameter. . That is,
The stroke length of the reciprocating motion of the blade 16 is the position of the crank pin 30 on the flywheel 24, the reciprocating speed of the blade 16 is the rotation speed of the motor 28, and the weight for pressing the blade 16 against the work 18 is the weight 54. The position is controlled by the MPU 60 changing the position on the arm 52. In addition, the MPU 60 includes a control program, control data,
The entire cutting device 10 is also controlled by the input command or the like.

A keyboard 62 is used to input commands, control data, etc. to the MPU 60. The table data stored in the RAM 58 can also be changed from the keyboard 62. The input means is not limited to the keyboard 62, and various means such as a switch and a touch panel can be adopted. Reference numeral 64 denotes a display, which is a command, data, RAM input via the keyboard 62.
The current table data stored in 58, MPU6
The information processed by 0 is output and displayed. Display 6
As the four types, for example, a liquid crystal display can be used. Further, as the output means, in addition to the display 64, it is possible to employ various means such as printing display by a printer or displaying by turning on an LED.

Next, the operation of the cutting device 10 of this embodiment will be described. When the cutting device 10 is started, the MPU 60
Clears the RAM 58, reads the control program from the ROM 56, and transfers the table data to the RAM 58. In the case where the shape of the cut cross section of the work 18 is the example shown in FIG. 3, the table data is data corresponding to each graph of FIG. If necessary, the operator outputs an image of the table data to the display 64, and changes and inputs from the keyboard 62. When creating the initial table data in the RAM 58 or the like, the operator may input the values of the table data indicated by the black circles in FIG. The table data between the black circles is designed such that the MPU 60 automatically obtains a proportional value by calculation for each minimum value of the cutting amount (for example, 0.1 mm) and writes it. When the cutting start support of the work 18 is input, the MPU 60 indicates the current cutting amount by the sensor 4
2 is detected and stored in the RAM 58. MPU60
Searches the table data for a control parameter value for the current cut amount, and stores the control parameter value in the RAM 58 as the current control parameter value. And M
The PU 60 sets the motor 2 to the current control parameter value.
8. Control the stroke adjusting mechanism 34 and the weighting mechanism 44.

Detection of the present cutting amount, retrieval of table data, motor 28, stroke adjusting mechanism 34,
A series of operations of controlling the weighting mechanism 44 is continuously repeated to cut the work 18 and the base material 66.
According to this cutting operation, the work 18 can be cut with a suitable stroke length, speed, and weight of the blade 16 according to the cutting amount. Therefore, for example, immediately before the completion of the cutting of the work 18, the cutting speed is made extremely low and the work 18
Can be prevented from breaking. Further, when cutting together with the abrasive grains, the cutting surface may be inclined because the diameter of the abrasive grains becomes small, but by making the cutting speed low and reducing the weight, It is possible to

In the cutting device 10 of this embodiment, the MP
U60 continuously detects the cutting amount via the sensor 42 while the blade 16 cuts the work 18, and displays the values of the control parameters of the cutting drive mechanism 36 and the weighting mechanism 44 corresponding to the detected cutting amount. The cutting drive mechanism 36 and the weighting mechanism 4 are read from the RAM 58, and the values of the control parameters are used.
Control 4 Therefore, it is possible to reliably control the operation of the cutting drive mechanism 36 and the weighting mechanism 44 with the value of the predetermined control parameter with respect to the cutting amount of the blade 16 with respect to the work 18. Further, the control parameter value for the cutting amount is stored in the ROM 56 or RA as table data.
Since it is stored in M58 in advance, the number of change points of the control parameter value is not limited to the number of timers as in the conventional case. Therefore, since the number of change points of the control parameter value is only restricted to the minimum value of the cutting amount, it is possible to set a large number of change points of the control parameter value, so that the control resolution becomes high and highly accurate control becomes possible. Further, the operation status of the cutting device 10 may be monitored using a monitor device capable of remotely monitoring the control status of the MPU 60. Although various embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and the spirit of the invention is not limited to, for example, the cutting device is not limited to the multi-blade cutting device. Of course, many modifications can be made without departing from the scope.

[0019]

When the cutting device according to the present invention is used, the control means continuously detects the cutting amount through the cutting amount detecting means while the cutting blade cuts the workpiece, and detects the detected cutting amount. The value of the control parameter of the cutting drive mechanism corresponding to the amount is read from the storage means, and the cutting drive mechanism is controlled by the value of the control parameter. Therefore, it is possible to reliably control the operation of the cutting drive mechanism with the value of the predetermined control parameter with respect to the cutting amount of the cutting blade with respect to the work. Therefore, it is possible to prevent the consumption of the cutting blade, the damage of the cutting blade and the work, and to improve the safety. In addition, the change of the control parameter value is given as data, and the timer is not used as in the past, so the number of times the control parameter value is changed is not limited to the number of timers, and multi-step high-precision control is possible. It has a remarkable effect.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of a cutting device according to the present invention.

FIG. 2 is an explanatory view showing an outline of the cutting device of FIG.

FIG. 3 is an explanatory view showing an example of a cut cross section of a work.

FIG. 4 is a graph showing table data when the work of FIG. 3 is cut.

[Explanation of symbols]

 10 Multi-blade cutting device 16 Blade 18 Work 32 Reciprocating mechanism 34 Stroke adjusting mechanism 36 Cutting drive mechanism 38 Work support mechanism 42 Cutting amount detection sensor 44 Weighting mechanism 56 ROM 58 RAM 60 MPU

Claims (5)

[Claims] 1. A cutting blade that is relatively movable for cutting with respect to a workpiece to be cut, and that cuts the workpiece in association with the movement, and the cutting blade and the workpiece relative to each other for cutting the workpiece. Cutting drive mechanism for moving the cutting blade, a cutting amount detection means for detecting a cutting amount of the cutting blade with respect to the work, and a control of the cutting driving mechanism that is predetermined with respect to the cutting amount. Storage means for storing the value of the parameter, while the cutting blade cuts the workpiece, continuously detects the cutting amount via the cutting amount detecting means, the detected cutting amount And a control means for reading the control parameter value of the cutting drive mechanism corresponding to the above from the storage means and controlling the cutting drive mechanism with the value of the control parameter. 2. The cutting drive mechanism includes a reciprocating mechanism for reciprocating the cutting blade in a direction perpendicular to a cutting advancing direction of the workpiece, and a speed adjusting mechanism for adjusting the reciprocating speed. 2. The cutting device according to claim 1, further comprising a contacting / separating mechanism for relatively moving the cutting blade in the cutting proceeding direction of the workpiece. 3. The cutting mechanism according to claim 1, further comprising a weighting mechanism for applying a weight for pressing the cutting blade against the work when the work is cut. apparatus. 4. The cutting device according to claim 2, wherein the control parameters are a stroke length of the reciprocating motion of the cutting blade and a speed of the reciprocating motion. 5. The cutting device according to claim 3, wherein the control parameter is the weight, and the control unit controls the weight mechanism with the weight value.