JPH0523012B2 - - Google Patents

Info

Publication number
JPH0523012B2
JPH0523012B2 JP61086294A JP8629486A JPH0523012B2 JP H0523012 B2 JPH0523012 B2 JP H0523012B2 JP 61086294 A JP61086294 A JP 61086294A JP 8629486 A JP8629486 A JP 8629486A JP H0523012 B2 JPH0523012 B2 JP H0523012B2
Authority
JP
Japan
Prior art keywords
quadrupole
charged
axis
charged beam
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61086294A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62243230A (ja
Inventor
Yoshihiro Tamura
Takao Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP61086294A priority Critical patent/JPS62243230A/ja
Publication of JPS62243230A publication Critical patent/JPS62243230A/ja
Publication of JPH0523012B2 publication Critical patent/JPH0523012B2/ja
Granted legal-status Critical Current

Links

JP61086294A 1986-04-15 1986-04-15 Ｅ×ｂ速度選別器 Granted JPS62243230A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61086294A JPS62243230A (ja) 1986-04-15 1986-04-15 Ｅ×ｂ速度選別器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61086294A JPS62243230A (ja) 1986-04-15 1986-04-15 Ｅ×ｂ速度選別器

Publications (2)

Publication Number Publication Date
JPS62243230A JPS62243230A (ja) 1987-10-23
JPH0523012B2 true JPH0523012B2 (fr) 1993-03-31

Family

ID=13882813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61086294A Granted JPS62243230A (ja) 1986-04-15 1986-04-15 Ｅ×ｂ速度選別器

Country Status (1)

Country Link
JP (1) JPS62243230A (fr)

Also Published As

Publication number Publication date
JPS62243230A (ja) 1987-10-23

Similar Documents

Publication Publication Date Title
US4755685A (en) Ion micro beam apparatus
US4315153A (en) Focusing ExB mass separator for space-charge dominated ion beams
Seliger E× B Mass‐Separator Design
EP1082747B1 (fr) Architecture d'acceleration et d'analyse pour un implanteur ionique
US6326631B1 (en) Ion implantation device arranged to select neutral ions from the ion beam
CN102737932A (zh) 从射束中去除了中性粒子的像差校正维恩ExB滤质器
JP2001015055A (ja) 荷電粒子ビームカラム
EP0097535A2 (fr) Filtre de vitesse à champs croisés et système de traitememnt avec faisceau d'ions
CN114899080B (zh) 离子质量分析器及离子注入装置
US6974950B2 (en) Positive and negative ion beam merging system for neutral beam production
US2665384A (en) Ion accelerating and focusing system
US3723733A (en) Stigmatic, crossed-field velocity filter
JPS62243230A (ja) Ｅ×ｂ速度選別器
JPH09102291A (ja) 対物レンズ及び荷電粒子ビーム装置
JP4662610B2 (ja) 立体収束質量分離器
JP2956706B2 (ja) 質量分析装置
JPH0467549A (ja) 質量分析装置を有するイオン源
Yavor Progress in ion optics for mass-separator design
JPS6313250A (ja) イオンビ−ム装置
JPH05275057A (ja) ウィーンフィルタ
JPS593856A (ja) Ｅ×ｂ速度選別器
RU2105378C1 (ru) Ионно-оптическая система с аксиально-симметричным магнитным полем
JPS62115639A (ja) イオン注入装置
JPH0133897B2 (fr)
Schott et al. Phase free acceleration of charged particles by ac fields using deflecting coils and triangular shaped hollow electrodes