JPH0523582Y2 - - Google Patents
Info
- Publication number
- JPH0523582Y2 JPH0523582Y2 JP10347787U JP10347787U JPH0523582Y2 JP H0523582 Y2 JPH0523582 Y2 JP H0523582Y2 JP 10347787 U JP10347787 U JP 10347787U JP 10347787 U JP10347787 U JP 10347787U JP H0523582 Y2 JPH0523582 Y2 JP H0523582Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- rod
- operating rod
- resistant
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 13
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 230000007797 corrosion Effects 0.000 claims description 9
- 238000005260 corrosion Methods 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 229920002449 FKM Polymers 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
【考案の詳細な説明】
産業上の利用分野
この考案は、化合物半導体のエピタキシヤル成
長装置などの半導体製造装置に用いるボート搬送
装置に関するもので、更に述べるとボート搬送装
置のボート操作棒に関するものである。[Detailed description of the invention] Industrial application field This invention relates to a boat transport device used in semiconductor manufacturing equipment such as a compound semiconductor epitaxial growth equipment, and more specifically, to a boat operating rod of the boat transport device. be.
従来の技術
エピタキシヤル成長装置は、反応管の開口部に
蓋を設け、該蓋にシール装置を設け、該シール装
置に蓋を貫通する鉤部付ボート操作棒を摺動自在
に設け、この操作棒により反応溶液の入つた治
具、例えば、マザーボートの上に子ボートを乗せ
たカーボンボート、を反応管の中に出し入れした
り、又は子ボートを急速に摺動させ成膜の厚さを
コントロールしたりしている。BACKGROUND TECHNOLOGY An epitaxial growth apparatus has a lid provided at the opening of a reaction tube, a sealing device provided on the lid, a boat operation rod with a hook that penetrates the lid and slidably provided on the sealing device. A jig containing a reaction solution, such as a carbon boat with a child boat placed on top of a mother boat, is moved in and out of the reaction tube using a rod, or the child boat is rapidly slid to adjust the thickness of the film. I'm controlling it.
この操作棒は、高温で、しかもキヤリアガスな
どの存在する反応管内を摺動するので、耐熱性耐
腐蝕性のある石英ガスで形成されている。 This operating rod is made of heat-resistant and corrosion-resistant quartz gas because it slides inside the reaction tube at a high temperature and in the presence of carrier gas and the like.
考案が解決しようとする問題点
従来例の操作棒は、石英ガラス製であるので、
折れやすく破損しやすい。Problems that the invention aims to solve: The operating rod of the conventional example is made of quartz glass.
Easy to break and damage.
又、ガラスの製法上、操作棒の径を均一に形成
することが困難であると共に、長尺物、例えば、
2m〜2.5mの操作棒では、たわみが発生する。そ
のため、シール漏れが生ずる恐れがある。 Furthermore, due to the manufacturing method of glass, it is difficult to form the operating rod with a uniform diameter, and it is difficult to form the operating rod with a uniform diameter, and it is difficult to form the operating rod with a uniform diameter.
Deflection occurs with a 2m to 2.5m operating rod. Therefore, seal leakage may occur.
更に、フツソ系樹脂（バイトン）で形成されて
いるシール装置のＯリンングなどのシールゴム
は、熱影響で操作棒とくつつき、すべりが悪くな
る。 Furthermore, the sealing rubber such as the O-ring of the sealing device, which is made of fluorine-based resin (Viton), sticks to the operating rod due to the influence of heat, making it difficult to slip.
そのため、子ボートを急速に摺動さることが不
可能となるので、成膜の厚さのコントロールは困
難となる。 Therefore, it becomes impossible to rapidly slide the child boat, and it becomes difficult to control the thickness of the film formed.
この考案は上記事情に鑑み、操作棒の破損事故
を防止することを目的とする。 In view of the above-mentioned circumstances, the purpose of this invention is to prevent accidents involving damage to the operating rod.
他の目的は、シール漏れを防止すると共に操作
性の向上を図る事である。 Other purposes are to prevent seal leakage and to improve operability.
問題点を解決するための手段
この考案は、反応管の開口部に蓋を設け、該蓋
にシール装置を設け、該シール装置に蓋を貫通す
る鉤部付ボート操作棒を摺動自在に設けたボート
搬送装置において、前記操作棒が石英ガラス製、
又は、カーボン製の鉤部と、耐腐蝕性耐熱性金属
製の棒体部とからなることを特徴とするボート搬
送装置のボート操作棒である。Means for Solving the Problems This invention provides a lid at the opening of the reaction tube, a sealing device on the lid, and a slidable boat operating rod with a hook that penetrates the lid. In the boat transport device, the operating rod is made of quartz glass,
Alternatively, the present invention is a boat operating rod for a boat transport device characterized by comprising a hook portion made of carbon and a rod portion made of corrosion-resistant and heat-resistant metal.
作 用
ボートの取手に操作棒の鉤部を係合させ、操作
棒を摺動させるが、高温のボート側は石英ガラス
又は、カーボンで形成した鉤部であるので耐熱
性、耐腐食性があり、又、シール装置側は、耐熱
性耐腐食性金属で径を均一に加工した棒体部であ
るため、該棒体部にＯリングなどのシールゴム
が、くつつくことがなくなり滑り易くなるので、
操作性が向上する。Function: The hook of the operating rod is engaged with the handle of the boat, and the operating rod slides.The hook on the boat side, which is hot, is made of quartz glass or carbon, so it is heat resistant and corrosion resistant. Also, since the sealing device side is a rod made of heat-resistant and corrosion-resistant metal processed to a uniform diameter, the seal rubber such as an O-ring will not get stuck on the rod and will slip easily.
Improves operability.
実施例
この考案の実施例を、添付図面により説明する
が、同一図面符号は、その名称も機能も同じであ
る。Embodiment An embodiment of this invention will be described with reference to the accompanying drawings, where the same reference numerals have the same names and functions.
第１図において、１は、鉤部２と棒体部３とか
らなるボート操作棒である。 In FIG. 1, reference numeral 1 denotes a boat operating rod consisting of a hook portion 2 and a rod portion 3. As shown in FIG.
鉤部２は、石英ガラス、又は、カーボンで形成
され、又、棒体部３は、耐熱性耐腐食製剛体例え
ば、ステンレス、アルミ材等を使用した耐熱性耐
腐食製金属で形成されている。 The hook portion 2 is made of quartz glass or carbon, and the rod portion 3 is made of a heat-resistant and corrosion-resistant rigid body, such as a heat-resistant and corrosion-resistant metal such as stainless steel or aluminum. .
この鉤部２と棒体部３は、接続リング４を介し
て固着されているが、この接続手段として、第４
図に示すように、鉤部２のおねじ部４２を棒体部
３のめねじ部４３に螺着しても良く、また第５図
に示すように、鉤部２のホール穴５２付凸部５３
を棒体部３の凹部５４に挿入し、ばね５５付ボー
ル５６をボール穴５２に収容し、該ボール５６で
凸部５３を押圧し、抜け防止を図つても良い。 The hook portion 2 and the rod portion 3 are fixed to each other via a connecting ring 4, and a fourth
As shown in the figure, the male threaded part 42 of the hook part 2 may be screwed into the female threaded part 43 of the rod part 3, and as shown in FIG. Part 53
may be inserted into the concave portion 54 of the rod portion 3, a ball 56 with a spring 55 is accommodated in the ball hole 52, and the ball 56 presses the convex portion 53 to prevent it from coming off.
５は、シール装置で、第２図に示す様に、ボー
ト操作棒１に第１リング２１を嵌合し、その内側
溝にＯリング２２と押圧リング２３を挿入し、第
１リング２１のねじ部２４に袋ナツト２５を螺合
し、袋ナツト２５の下端部で押圧リング２３を押
圧してシールしている。 5 is a sealing device, and as shown in FIG. A cap nut 25 is screwed onto the portion 24, and the pressure ring 23 is pressed against the lower end of the cap nut 25 for sealing.
次に、この実施例の作動につき説明すると、第
３図に示すように、エピタキシヤル成長装置の反
応管３０の開口部３１を蓋３２で閉鎖した後、ガ
スＡ３０を流し込みながら、ヒータ３３で反応管
３０を加熱し、カーボンボート３４内のウエハ
（図示せず）を高温加熱する。 Next, to explain the operation of this embodiment, as shown in FIG. 3, after closing the opening 31 of the reaction tube 30 of the epitaxial growth apparatus with a lid 32, a reaction is carried out using a heater 33 while flowing gas A30. The tube 30 is heated, and the wafers (not shown) in the carbon boat 34 are heated to a high temperature.
このカーボンボート３４は、マザーボートと子
ボートとからなり、各ボートの取手は、ボート操
作棒１ａ，１ｂの鉤部２と係合している。 This carbon boat 34 consists of a mother boat and a child boat, and the handles of each boat are engaged with the hooks 2 of the boat operating rods 1a and 1b.
そして、ボート操作棒１ａ，１ｂを矢印Ａ１方
向に移動すると、カーボンボート３４も同方向に
摺動する。ボート３２近傍は、高温、例えば、
900℃となるが、鉤部２が石英又は、カーボンで
形成されているため、高温による悪影響は受けな
い。 When the boat operating rods 1a and 1b are moved in the direction of arrow A1, the carbon boat 34 also slides in the same direction. The vicinity of the boat 32 has a high temperature, for example,
Although the temperature is 900°C, since the hook portion 2 is made of quartz or carbon, it is not affected by the high temperature.
又、棒体部３は、耐熱性耐腐食性金属により形
成されるので、径を均一に加工できると共にシー
ル装置５のシールリングが棒体部３にくつつかな
いためすべりが良く、急速に操作棒１ｂを摺動さ
せて子ボートを移動できるので成膜の厚さを正確
にコントロールできる。 In addition, since the rod portion 3 is made of heat-resistant and corrosion-resistant metal, it can be machined to have a uniform diameter, and the seal ring of the sealing device 5 does not stick to the rod portion 3, allowing for good sliding and rapid operation. Since the child boat can be moved by sliding the rod 1b, the thickness of the film can be accurately controlled.
なお、上記実施例においては、１箇所、即ち鉤
部と棒体部を接続した操作棒について説明した
が、操作棒が長尺の場合には、複数個の棒体構成
部材を接続し、一本の棒体部を形成してもよい。
このようにすると、ボート操作棒が取り扱いやす
くなるので、ボート搬送装置にボート操作棒をセ
ツテングする作業を容易に行うことが出来る。 In the above embodiments, the operating rod was explained in which the hook portion and the rod portion were connected in one place, but if the operating rod is long, a plurality of rod component members may be connected and connected at one place. A rod portion of a book may be formed.
In this way, the boat operating rod becomes easier to handle, so that the work of setting the boat operating rod on the boat transport device can be easily performed.
考案の効果
この考案は、以上のように、石英ガラス製、又
はカーボン製の鉤部と、耐熱性耐腐食性金属製の
棒体部とからなるボート操作棒なので、操作棒の
破損事故を防止することができる。Effects of the invention As described above, this invention is a boat operating rod consisting of a hook made of quartz glass or carbon and a rod body made of heat-resistant and corrosion-resistant metal, thereby preventing accidents of breaking the operating rod. can do.
又、棒体部を精度良く加工でき且つ、たわみの
発生も少ないので、シール漏れ事故を防止でき
る。 Further, since the rod portion can be machined with high precision and there is little deflection, seal leakage accidents can be prevented.
更に、従来例のようにシール部が棒体部にくつ
つかないのですべりが良く、操作性の向上を図る
ことができる。 Furthermore, unlike the conventional example, the seal part does not stick to the rod body part, so it slides easily, and operability can be improved.
第１図は、この考案の実施例を示す一部断面正
面図、第２図は、第１図のシール装置の拡大断面
図、第３図は、使用状態を示す正面図、第４図第
５図は、各々他の実施例を示す拡大断面図であ
る。
１……ボート操作棒、２……鉤部、３……棒体
部、５……シール装置。
Fig. 1 is a partially sectional front view showing an embodiment of this invention, Fig. 2 is an enlarged sectional view of the sealing device shown in Fig. 1, Fig. 3 is a front view showing the sealing device in use, and Fig. 4 is a front view showing an embodiment of the invention. FIG. 5 is an enlarged sectional view showing other embodiments. 1... Boat operating rod, 2... Hook portion, 3... Rod body portion, 5... Seal device.
Claims (1)
置を設け、該シール装置に蓋を貫通する鉤部付
ボート操作棒を摺動自在に設けたボート搬送装
置において、前記操作棒が石英ガラス製又はカ
ーボン製の鉤部と、耐腐食性耐熱性金属製の棒
体部とからなることを特徴とするボート搬送装
置のボート操作棒。 (2) 棒体部が、ステンレスで形成されていること
を特徴とする実用新案登録請求の範囲第１項記
載のボート搬送装置のボート操作棒。 (3) 鉤部と棒体部が、螺着により一体となつてい
ることを特徴とする実用新案登録請求の範囲第
１項記載のボート搬送装置のボート操作棒。 (4) 鉤部と棒体部が、嵌着により一体となつてい
ることを特徴とする実用新案登録請求の範囲第
１項記載のボート搬送装置のボート操作棒。[Scope of Claim for Utility Model Registration] (1) A lid is provided at the opening of the reaction tube, a sealing device is provided on the lid, and a boat operating rod with a hook that penetrates the lid is slidably provided on the sealing device. 1. A boat operating rod for a boat transporting device, wherein the operating rod comprises a hook portion made of quartz glass or carbon, and a rod body portion made of a corrosion-resistant and heat-resistant metal. (2) A boat operating rod for a boat transport device according to claim 1, wherein the rod body is made of stainless steel. (3) A boat operating rod for a boat transport device according to claim 1, wherein the hook portion and the rod body portion are integrated by screwing. (4) A boat operating rod for a boat transport device according to claim 1, wherein the hook portion and the rod portion are integrated by fitting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10347787U JPH0523582Y2 (en) | 1987-07-06 | 1987-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10347787U JPH0523582Y2 (en) | 1987-07-06 | 1987-07-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6410078U JPS6410078U (en) | 1989-01-19 |
| JPH0523582Y2 true JPH0523582Y2 (en) | 1993-06-16 |
Family
ID=31334346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10347787U Expired - Lifetime JPH0523582Y2 (en) | 1987-07-06 | 1987-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523582Y2 (en) |
-
1987
- 1987-07-06 JP JP10347787U patent/JPH0523582Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6410078U (en) | 1989-01-19 |
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