JPH0523583Y2 - - Google Patents

Info

Publication number
JPH0523583Y2
JPH0523583Y2 JP1987127024U JP12702487U JPH0523583Y2 JP H0523583 Y2 JPH0523583 Y2 JP H0523583Y2 JP 1987127024 U JP1987127024 U JP 1987127024U JP 12702487 U JP12702487 U JP 12702487U JP H0523583 Y2 JPH0523583 Y2 JP H0523583Y2
Authority
JP
Japan
Prior art keywords
cap
melt tank
melt
quartz tube
charging hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987127024U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6433575U (th
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987127024U priority Critical patent/JPH0523583Y2/ja
Publication of JPS6433575U publication Critical patent/JPS6433575U/ja
Application granted granted Critical
Publication of JPH0523583Y2 publication Critical patent/JPH0523583Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1987127024U 1987-08-21 1987-08-21 Expired - Lifetime JPH0523583Y2 (th)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987127024U JPH0523583Y2 (th) 1987-08-21 1987-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987127024U JPH0523583Y2 (th) 1987-08-21 1987-08-21

Publications (2)

Publication Number Publication Date
JPS6433575U JPS6433575U (th) 1989-03-01
JPH0523583Y2 true JPH0523583Y2 (th) 1993-06-16

Family

ID=31379072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987127024U Expired - Lifetime JPH0523583Y2 (th) 1987-08-21 1987-08-21

Country Status (1)

Country Link
JP (1) JPH0523583Y2 (th)

Also Published As

Publication number Publication date
JPS6433575U (th) 1989-03-01

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