JPH05248383A - 多段式真空ポンプシステム - Google Patents

多段式真空ポンプシステム

Info

Publication number
JPH05248383A
JPH05248383A JP4300999A JP30099992A JPH05248383A JP H05248383 A JPH05248383 A JP H05248383A JP 4300999 A JP4300999 A JP 4300999A JP 30099992 A JP30099992 A JP 30099992A JP H05248383 A JPH05248383 A JP H05248383A
Authority
JP
Japan
Prior art keywords
pump
stage
pump system
high vacuum
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4300999A
Other languages
English (en)
Japanese (ja)
Inventor
Gion Caduff
ギオン・ガドゥフ
Roland Fischer
ロランド・フィシャー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH filed Critical Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Publication of JPH05248383A publication Critical patent/JPH05248383A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP4300999A 1991-11-11 1992-11-11 多段式真空ポンプシステム Pending JPH05248383A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4136950:5 1991-11-11
DE4136950A DE4136950A1 (de) 1991-11-11 1991-11-11 Mehrstufiges vakuumpumpsystem

Publications (1)

Publication Number Publication Date
JPH05248383A true JPH05248383A (ja) 1993-09-24

Family

ID=6444465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4300999A Pending JPH05248383A (ja) 1991-11-11 1992-11-11 多段式真空ポンプシステム

Country Status (3)

Country Link
EP (1) EP0541989B1 (fr)
JP (1) JPH05248383A (fr)
DE (2) DE4136950A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE19500823A1 (de) * 1995-01-13 1996-07-18 Sgi Prozess Technik Gmbh Vakuum-Pumpstand
DE69623516T2 (de) 1995-02-28 2003-05-15 Anest Iwata Corp., Tokio/Tokyo Kontrollsystem für zweistufige Vakuumpumpe
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
DE19630264A1 (de) * 1996-07-26 1998-01-29 Klein Schanzlin & Becker Ag Verfahren zur Schaltung von Einrichtungen oder Maschinen in einem Strömungssystem
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE202013000913U1 (de) * 2013-01-30 2014-05-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe insbesondere Wälzkolbenpumpe
GB2579360A (en) 2018-11-28 2020-06-24 Edwards Ltd Multiple chamber vacuum exhaust system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH470589A (de) * 1968-10-11 1969-03-31 Balzers Patent Beteilig Ag Anordnung zur Evakuierung von Rezipienten
US4505647A (en) * 1978-01-26 1985-03-19 Grumman Allied Industries, Inc. Vacuum pumping system
US4361418A (en) * 1980-05-06 1982-11-30 Risdon Corporation High vacuum processing system having improved recycle draw-down capability under high humidity ambient atmospheric conditions
JP2607572B2 (ja) * 1987-12-23 1997-05-07 株式会社日立製作所 荷電粒子を用いる分析装置および方法
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump

Also Published As

Publication number Publication date
EP0541989B1 (fr) 1995-06-28
DE4136950A1 (de) 1993-05-13
DE59202713D1 (de) 1995-08-03
EP0541989A1 (fr) 1993-05-19

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