JPH0525228Y2 - - Google Patents

Info

Publication number
JPH0525228Y2
JPH0525228Y2 JP1986098625U JP9862586U JPH0525228Y2 JP H0525228 Y2 JPH0525228 Y2 JP H0525228Y2 JP 1986098625 U JP1986098625 U JP 1986098625U JP 9862586 U JP9862586 U JP 9862586U JP H0525228 Y2 JPH0525228 Y2 JP H0525228Y2
Authority
JP
Japan
Prior art keywords
heat insulating
heat
wafer
free
support columns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986098625U
Other languages
English (en)
Japanese (ja)
Other versions
JPS635624U (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986098625U priority Critical patent/JPH0525228Y2/ja
Publication of JPS635624U publication Critical patent/JPS635624U/ja
Application granted granted Critical
Publication of JPH0525228Y2 publication Critical patent/JPH0525228Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986098625U 1986-06-27 1986-06-27 Expired - Lifetime JPH0525228Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986098625U JPH0525228Y2 (2) 1986-06-27 1986-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986098625U JPH0525228Y2 (2) 1986-06-27 1986-06-27

Publications (2)

Publication Number Publication Date
JPS635624U JPS635624U (2) 1988-01-14
JPH0525228Y2 true JPH0525228Y2 (2) 1993-06-25

Family

ID=30966735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986098625U Expired - Lifetime JPH0525228Y2 (2) 1986-06-27 1986-06-27

Country Status (1)

Country Link
JP (1) JPH0525228Y2 (2)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49107676A (2) * 1973-02-16 1974-10-12

Also Published As

Publication number Publication date
JPS635624U (2) 1988-01-14

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