JPH05257945A - Method for managing manufacturing of semiconductor device - Google Patents
Method for managing manufacturing of semiconductor deviceInfo
- Publication number
- JPH05257945A JPH05257945A JP5210592A JP5210592A JPH05257945A JP H05257945 A JPH05257945 A JP H05257945A JP 5210592 A JP5210592 A JP 5210592A JP 5210592 A JP5210592 A JP 5210592A JP H05257945 A JPH05257945 A JP H05257945A
- Authority
- JP
- Japan
- Prior art keywords
- work
- host computer
- name
- information
- managing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 98
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000004065 semiconductor Substances 0.000 title claims abstract description 15
- 238000010276 construction Methods 0.000 claims description 11
- 238000007726 management method Methods 0.000 claims description 2
- 238000004364 calculation method Methods 0.000 abstract description 10
- 241000282414 Homo sapiens Species 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 10
- 210000003811 finger Anatomy 0.000 description 8
- 238000009825 accumulation Methods 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 210000003813 thumb Anatomy 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
Landscapes
- General Factory Administration (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体装置の製造管理
方法に係わり、特に、仕掛状況、工期の把握、投入入庫
計画の立案支援を管理する方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device manufacturing control method, and more particularly, to a method for managing the status of work in progress, the construction period, and the support for drafting a loading / unloading plan.
【０００２】[0002]
【従来の技術】通常、半導体装置は、一つの半導体装置
においてもその品種は多岐にわたる。またその一品種の
半導体装置をとっても、その製造工程は、５０工程ない
し５００工程に及ぶ。さらに、その製造工程の一つに
も、種々の条件も異なり、使用する設備が異なってい
る。そしてその使用する設備に関しても、全く単機能で
はなく、種々の製造工程を任うものである。例えば、通
常の設備でも２工程ないし１０工程の製造工程を任って
いる。また半導体装置製造は、同一設備で工程が異なる
（条件が異なる）もとで、数回の作業がされることにな
る。2. Description of the Related Art Generally, there are various kinds of semiconductor devices, even one semiconductor device. Further, even if the semiconductor device of one kind is manufactured, the manufacturing process thereof extends from 50 to 500 processes. Furthermore, various conditions are different in one of the manufacturing processes, and different equipment is used. The equipment used is not a single function at all, and various manufacturing processes are entrusted to it. For example, even a normal facility entrusts two to ten manufacturing processes. Further, in manufacturing a semiconductor device, work is performed several times under different processes (conditions are different) in the same equipment.
【０００３】従って、このような多品種の半導体装置の
製造に際しては、仕掛状況の客観的把握、または、仕掛
っているものの工期（進捗状況）及び入庫予測が重要と
なる。Therefore, in manufacturing such various types of semiconductor devices, it is important to objectively grasp the status of work in progress, or to predict the work period (progress status) and warehousing of work in progress.
【０００４】従来、仕掛状況の把握を支援する支援装置
では、仕掛状況をグラフ表示したり、一覧表として出力
するのみであった。そしてそのグラフや一覧表をもと
に、人間が経験により、工期、入庫予測を行っていた。Conventionally, in a support device that assists in grasping the in-process status, the in-process status is only displayed as a graph or output as a list. Then, based on the graphs and the list, human beings used the experience to predict the construction period and warehousing.
【０００５】[0005]
【発明が解決しようとする課題】この従来方法では、人
が仕掛状況のグラフ、一覧表から工期・入庫予測を行っ
ていた為、推測値と実際の値との差が人によって非常に
大きく、また同時に複数の人が予測した場合には、それ
ぞれの予測結果が異なるケースがあるという問題点があ
った。In this conventional method, a person predicts the construction period and warehousing from a graph and a list of work in progress, so the difference between the estimated value and the actual value is very large depending on the person. Further, when a plurality of people make predictions at the same time, there is a problem that the prediction results may be different.
【０００６】[0006]
【課題を解決するための手段】本発明に於ける半導体装
置の製造管理方法は、各設備に情報をホストコンピュー
タに転送する端末機を備え、前記各設備の作業開始また
は、終了時に、作業日時、作業情報を前記端末機と前記
ホストコンピュータとで交換するステップと、前記ホス
トコンピュータが、前記情報をデータベースに随時にデ
ータの追加・更新を行うステップと、前記ホストコンピ
ュータが、工程手順データと投入・入庫・設備稼働計画
のデータと前記作業履歴のデータによって、仕掛の状
況、工期、入庫量を予測支援するステップと、端末機に
よって処理結果及びデータベース内の各種データを表示
出力するステップとを備えている。A semiconductor device manufacturing management method according to the present invention includes a terminal for transferring information to a host computer in each facility, and the work date and time at the start or end of the work of each facility. , Exchanging work information between the terminal and the host computer, the host computer adding / updating the information to / from the database at any time, and the host computer inputting process procedure data -Providing a step of predicting and supporting the status of work in progress, construction period, and the amount of goods received based on the data of the receipt / equipment operation plan and the data of the work history, and the step of displaying and outputting the processing results and various data in the database by the terminal. ing.
【０００７】[0007]
【実施例】次に本発明について図面を参照して説明す
る。図１は、本発明の一実施例を半導体装置製造ライン
に適用した時の概略のブロック図である。The present invention will be described below with reference to the drawings. FIG. 1 is a schematic block diagram when an embodiment of the present invention is applied to a semiconductor device manufacturing line.
【０００８】装置概要として、各種データを統合管理及
び制御しているホストコンピュータ１、設備からの情報
をホストに報告する為の端末機２及びホストコンピュー
タ１内の情報を表示出力する表示端末機３から構成され
る。As an outline of the apparatus, a host computer 1 that integrally manages and controls various data, a terminal 2 for reporting information from equipment to a host, and a display terminal 3 for displaying and outputting information in the host computer 1 Composed of.
【０００９】ホストコンピュータ１の概要として、工程
手順情報を管理している手順データベース部（以下ＤＢ
と略す）４、作業履歴情報を管理している履歴ＤＢ５、
投入、入庫、稼働日の計画を管理している計画ＤＢ６、
端末機２からのデータを統制し、制御している報告部
７、及び手順ＤＢ４、履歴ＤＢ５、計画ＤＢ６のデータ
より仕掛指数を算出したり、流れているロットの工期を
推定したり、入庫予測等を行って各種支援の為の計算を
行う支援部８より構成される。As an outline of the host computer 1, a procedure database section (hereinafter referred to as DB) that manages process procedure information.
4, a history DB 5 that manages work history information,
A plan DB6 that manages plans for loading, warehousing, and working days,
Controlling and controlling the data from the terminal 2, calculating the work-in-process index from the data in the reporting unit 7 and the procedure DB 4, the history DB 5, and the plan DB 6, estimating the construction period of the flowing lot, and predicting receipt of goods. And the like, and is composed of a support unit 8 for performing calculations for various kinds of support.
【００１０】次にホストコンピュータ１の内部機能を説
明する。図２は手順ＤＢ４のツリー構造を示す構造図で
ある。工程手順の手順名９を親とし、その下位レベルに
工程名１０が作業工程フローに従って並んで入ってい
る。また、その下位に工程毎に条件１１として、作業設
備名及び条件データが入っている。そして、手順名９の
レコード内には、手順名と複数の品名が入っている。Next, the internal function of the host computer 1 will be described. FIG. 2 is a structural diagram showing a tree structure of the procedure DB 4. The process name 9 of the process procedure is used as a parent, and the process name 10 is arranged in the lower level side by side according to the work process flow. Further, the work equipment name and the condition data are entered as the condition 11 for each process in the lower order. The record of the procedure name 9 contains the procedure name and a plurality of product names.
【００１１】図３は、履歴ＤＢ５のツリー構造を示す構
造図である。製品のロットＮｏ．１２を親とし、その下
位レベルに、そのロットの手順名または、品名がロット
情報１３として、そのロットの作業工程名、作業日時が
履歴１４として入っている。FIG. 3 is a structural diagram showing a tree structure of the history DB 5. Product lot number. 12 is a parent, and the procedure name or product name of the lot is stored as lot information 13 in the lower level, and the work process name and work date and time of the lot are stored as history 14.
【００１２】図４乃至図６は、計画ＤＢ６の内部構成
で、それぞれリレーショナルタイプのＤＢ構造である。
図４は、投入計画に関するＤＢである。各品種１５毎に
各月１６毎の投入量を管理している。図５は、入庫計画
に関するＤＢである。品名種１７毎に各月１８毎の入庫
量を管理している。図６は、ライン稼働日に関するＤＢ
である。各月毎に稼働日１９が入力されている。FIGS. 4 to 6 show the internal structure of the plan DB 6, which is a relational type DB structure.
FIG. 4 is a DB relating to the input plan. The input amount for each month 16 is managed for each product type 15. FIG. 5 is a DB relating to a storage plan. The amount of goods stored in each month 18 is managed for each product name type 17. Figure 6 is a DB for line working days
Is. The working day 19 is entered for each month.
【００１３】図７は、報告部７の機能を示すフローチャ
ートである。設備でのロットの処理が作業終了２０する
と、ステップ２１で作業者もしくは、オンライン設備に
よる自動転送によって、端末機２よりホストコンピュー
タ１の報告部７に、作業された設備名とロットＮｏ．が
転送される。ステップ２２でこの転送されたデータの中
から、設備名とロットＮｏ．を取得する。ステップ２３
では、ステップ２２で得られたロットＮｏ．より履歴Ｄ
Ｂ４のロットＮｏ．１２と同じものを探し、その下位に
あるロット情報１３のところから手順名、品名を得る。
ステップ２４でもステップ２３と同様にして、最新履歴
の工程名を得る。ステップ２３，ステップ２４で得られ
た手順名と工程名より、手順ＤＢ４の手順名９と工程名
１０を検索し、その次の工程の工程名（仕掛工程名）を
得る（工程名１０は、製造フローに従って順序よく並ん
でいるので検索が容易である）。この工程名（仕掛工程
名）の下位の条件１０より作業設備名をステップ２６で
得る。ステップ２７では、ステップ２２で得られた設備
名とステップ２６で得られた設備名を比較する。ステッ
プ２７の結果が等しいならステップ２８では、履歴ＤＢ
５の履歴１４のところに最新履歴として、その時の時刻
を作業時間、ステップ２５で得られた工程名（仕掛工程
名）のレコードを追加更新する。ステップ２８が終了し
たら、端末機２に対して、“次工程に送って下さい”と
メッセージを転送する。ステップ２８の結果が等しくな
かったら、ステップ３０では端末機２に対して“報告設
備が異なります”とエラーメッセージを転送する。FIG. 7 is a flowchart showing the function of the reporting unit 7. When the processing of the lot in the equipment is completed 20, in step 21, the operator or the automatic transfer by the online equipment causes the terminal 2 to inform the reporting section 7 of the host computer 1 of the equipment name and lot number of the work. Is transferred. From the transferred data in step 22, the equipment name and lot number. To get. Step 23
Then, the lot number obtained in step 22. More history D
Lot No. of B4. The same name as 12 is searched for, and the procedure name and the product name are obtained from the lot information 13 under it.
In step 24, the process name of the latest history is obtained as in step 23. From the procedure name and the process name obtained in steps 23 and 24, the procedure name 9 and the process name 10 in the procedure DB 4 are searched to obtain the process name (work-in-process name) of the next process (the process name 10 is It is easy to search because they are arranged in order according to the manufacturing flow). The work equipment name is obtained in step 26 from the condition 10 under the process name (work-in-process name). In step 27, the equipment name obtained in step 22 and the equipment name obtained in step 26 are compared. If the results of step 27 are the same, in step 28, the history DB
The record of the process history (work-in-process name) obtained in step 25 is additionally updated with the latest history in the history record 14 of No. 5 as the latest history. When step 28 is completed, the message “Please send to the next process” is transferred to the terminal 2. If the results of step 28 are not equal, in step 30 an error message is sent to the terminal 2 saying "reporting equipment is different".
【００１４】次に支援部８の機能を説明する。この支援
部は、手順ＤＢ４、履歴ＤＢ５、計画ＤＢ６のデータを
もとに４つの数式で数値演算を行う。Next, the function of the support unit 8 will be described. This support unit performs numerical calculation with four mathematical expressions based on the data of the procedure DB 4, the history DB 5, and the plan DB 6.
【００１５】この４つの式は、仕掛指数算出式である
（１）式、平均進捗工期算出式である（２）式、推定作
業件数算出式である（３）式、仕掛状態の関係式である
（４）式である。These four formulas are the formula (1) which is a work-in-process index calculation formula, the formula (2) which is an average progress construction period calculation formula, the formula (3) which is an estimated work number calculation formula, and a relational formula of work-in-progress state. It is a certain formula (4).
【００１６】仕掛指数算出式の（１）式は、Equation (1) of the in-process index calculation equation is
【００１７】 [0017]
【００１８】で示され、この式は、任意の品種Ａに対し
て、品種Ａの仕掛ロット数をＬ、品種Ａの工程手順の数
（工程数）をＭとし、また、工程手順に投入から入庫ま
でを１から順に連番を付ける。この時あるロットＮの最
新履歴の工程ｉの連番をＮｉとする。品種Ａに仕掛って
いるすべてのロットのＮｉの累積を求めて（１）式で定
義される数値Ｓを仕掛指数とよぶ。この仕掛指数Ｓは、
０≦Ｓ≦１の間にあり、品種Ａが平均的に投入近くに仕
掛っているか（０近く）、入庫近くに仕掛っているか
（１近く）を示す指標となっている。This formula is given as follows: For an arbitrary product A, the number of in-process lots of product A is L, the number of process procedures (process number) of product A is M, and Sequential numbering from 1 up to warehousing. At this time, the serial number of the process i of the latest history of a certain lot N is Ni. The numerical value S defined by the equation (1), which is obtained by calculating the accumulation of Ni in all lots of the type A, is called an in-process index. This in-process index S is
It is in the range of 0 ≦ S ≦ 1, and is an index indicating whether the product A is on average near the input (near 0) or near the storage (near 1).
【００１９】平均進捗工期算出式の（２）式は、The formula (2) of the average progress construction period calculation formula is
【００２０】 [0020]
【００２１】で示され、この式は、任意の品種Ａに対し
て、品種Ａの仕掛ロット数をＬ、品種Ａの工程手順の数
（工程数）をＭとし、また、あるロットＧか、その日に
作業された（通過した）工程数ｊをＧｊとする。品種Ａ
に仕掛っているすべてのロットのＧｉの累積を求めて
（２）式で定義される数値Ｔを平均進捗工期とよぶ。こ
の平均進捗工期は、その時にライン内に仕掛っているロ
ットの進捗の度合を平均的に工期換算したものである。This formula is given as follows: For an arbitrary product type A, the number of in-process lots of the product type A is L, the number of process steps (process number) of the product type A is M, and a certain lot G Let Gj be the number of steps j that have been performed (passed) on that day. Variety A
The value T defined by the equation (2) by obtaining the accumulation of Gi of all lots in process is called the average progress period. The average progress period is an average of the progress of the lots in the line at that time.
【００２２】推定作業件数算出式の（３）式は、The formula (3) of the estimated work number calculation formula is
【００２３】 [0023]
【００２４】で示され、この式は、任意の品種Ａに対し
て、品種Ａの工程手順の数（工程数）をＭ、任意の期間
Ｂ（例えば１ケ月間）の間の平均進捗工期をＴ、期間Ｂ
のライン稼働日数をＫ、品種Ａのロットが、期間Ｂの間
に平均的に仕掛っているロット数をｌとし次の（３−
１）式で定義する。## EQU3 ## This equation is given to M for the number of process steps (number of processes) of the type A for an arbitrary type A, and the average progress period for an arbitrary period B (for example, one month). T, period B
Of the line operation days of K, and the number of lots of the type A lot in process during the period B is set to 1 on the following (3-
It is defined by the equation 1).
【００２５】 [0025]
【００２６】（３）式で定義される数値Ｈを推定作業件
数とよぶ。この推定作業件数Ｈは、期間Ｂの間に、その
品種によって作業される総作業工程数を示すものであ
る。The numerical value H defined by the equation (3) is called the estimated work number. The estimated number of work cases H indicates the total number of work steps carried out by the type during the period B.
【００２７】仕掛状態の関係式の（４）式は、The relational expression (4) of the work-in-progress condition is
【００２８】 [0028]
【００２９】で示され、この式は、任意の品種Ａ、任意
の期間Ｂ（例えば１ケ月）に対して、品種Ａの期間Ｂの
末時点での仕掛ロット数をＬ、品種Ａの期間Ｂの初めの
時点での仕掛ロット数をＬ1 、品種Ａの期間Ｂの末時点
での仕掛指数をＳ、品種Ａの期間Ｂの初めの時点での仕
掛指数をＳ1 、品種Ａの期間Ｂの（末時点での）工程手
順の数（工程数）をＭ、品種Ａの期間Ｂの間の推定作業
件数をＨ、品種Ａの期間Ｂの間に入庫したロット数をＯ
として示される。（４）式のＨに（３）式を代入すれ
ば、期間Ｂに於ける投入、入庫、仕掛状態（仕掛指
数）、平均進捗工期、推定作業件数が、関係づけられ
る。This formula is given as follows: For an arbitrary type A and an arbitrary period B (for example, one month), the number of in-process lots at the end of the period B of the type A is L, and the period B of the type A is B. L 1 is the number of in-process lots at the beginning of the period, S is the in-process index at the end of the period B of the product type A, S 1 is the in-process index at the beginning of the period B of the product type A, and the period B of the product type A. The number of process procedures (at the end) is M, the estimated number of operations during the period B of the product A is H, and the number of lots stored during the period B of the product A is O.
Indicated as. By substituting the equation (3) into the H of the equation (4), the input, the receipt, the work-in-progress state (work-in-process index), the average progress period, and the estimated number of work in the period B are associated with each other.
【００３０】図８は、支援部８か、それぞれの数式を利
用して、表示端末機３に出力した時の実施例の一例であ
る。本例では、１１月，１２月の品種毎の投入、入庫、
仕掛指数をパラメータとして、月末の仕掛ロット数、平
均進捗工期、推定作業件数を算出している。ここで何を
パラメータとし、何を算出結果とするかは、その時のシ
ミュレーションしたい状況に合せて、（１）式〜（４）
式を組み合せ変形させて使用する。FIG. 8 is an example of an embodiment in which the support unit 8 or the respective mathematical expressions are used to output to the display terminal 3. In this example, input and storage for each product type in November and December,
With the in-process index as a parameter, the number of in-process lots at the end of the month, the average progress period, and the estimated number of operations are calculated. Here, what is used as a parameter and what is used as a calculation result is determined by equations (1) to (4) according to the situation to be simulated at that time.
Combine and transform the formulas to use.
【００３１】またこの表の実現は、支援部８か直接行っ
てもよいし、必要なデータを表示端末３に転送し、そこ
で市販の表計算Ｓ／Ｗでそれを読み込んで図８のように
展開してもよい。The table may be realized directly by the support unit 8, or necessary data may be transferred to the display terminal 3 and read by a commercially available spreadsheet S / W there, as shown in FIG. You may deploy.
【００３２】ここでは、前者の例で説明する。また本例
では、月単位で行っているか、それを日、四半期単位等
任意の期間で実施も可能である。そして任意の期間のく
り返し日数も任意である（本例では、１１，１２月の２
回である）。Here, the former example will be described. Further, in this example, it may be carried out on a monthly basis or may be carried out on an arbitrary period such as a day or quarterly basis. The number of repeating days in any period is also arbitrary (in this example, 2 in November and December).
Times).
【００３３】図８の表は、品名Ａ３１、品名Ｂ３２、品
名Ｃ３３と合計３９の行と、１０月、１１月、１２月の
名月のデータの列によって構成される。ここでは、３ケ
月分しかないが、それ以上の時でも同様である。１０月
の月の区分には、仕掛指数の項目仕指４０の１０月末で
の列とその時の仕掛ロット数項目仕口４１の列がある。
以下“項目”を略し、例えば、項目仕口４１→仕口４１
という。品名Ａ３１のところの工程数３５の下の１００
は、品名Ａの工程数を示している。この工程数３５は、
手順ＤＢの手順名９のところの品名を検索し、その時の
手順名９の下位の工程の数を調べて得る。工程数を手順
名９と同レベルの品名といっしょにあるレコード内に前
もって設定しておいて、それを参照してもよい。同様に
して、工程数３６，工程数３７が得られる。品名Ａ３１
の仕指４０の欄の“０．５”は、履歴ＤＢ５より品名Ａ
の１０月末（１０月３１日２３時：５９分）時点でのロ
ットがどの工程に仕掛っていたかを調べ、それをもとに
（１）式で算出したものである。品名Ｂ３２、品名Ｃ３
３の仕指４０の“０．７”，“０．３”も同様である。The table of FIG. 8 is composed of a product name A31, a product name B32, a product name C33 and a total of 39 rows, and columns of data of the famous months of October, November and December. Here, there are only three months worth, but the same applies when there are more months. In the month segment of October, there is a column at the end of October of the item finger 40 of the in-process index and a column of the item-in-process lot number item 41 at that time.
Hereinafter, “item” is abbreviated, and for example, item joint 41 → joint 41
Say. 100 under the number of processes 35 at the product name A31
Indicates the number of steps of product name A. The number of steps 35 is
It is obtained by searching the product name of the procedure name 9 in the procedure DB and checking the number of steps under the procedure name 9 at that time. The number of steps may be set in advance in a record along with the product name of the same level as the procedure name 9 and referred to. Similarly, 36 steps and 37 steps are obtained. Product name A31
"0.5" in the column of the index 40 of the item is the product name A from the history DB 5.
It was calculated by the formula (1) based on which process the lot was processed at the end of October (23:59 on October 31st). Product name B32, Product name C3
The same applies to "0.7" and "0.3" of the third finger 40.
【００３４】この１０月末の仕掛指数は、後から履歴を
もとに算出するのではなく、１０月３１日２３時：５９
分この仕掛指数を調べておいてどこか別のところに記憶
させておいて、必要に応じて取り出して使用する方法も
ある。The work-in-process index at the end of October is not calculated later based on the history, but at 23:00 on October 31:59.
There is also a method of checking this work-in-progress index and storing it somewhere else, and retrieving it when necessary.
【００３５】品名Ａ３１の仕口４１の欄の“３０”も、
履歴ＤＢ５より品名Ａの１０月末の仕掛ロット数を数え
たものである。ここで、仕掛ロット数は、投入の履歴が
あって、入庫の履歴がないロットを数えると算出でき
る。品名Ｂ３２、品名Ｃ３３の仕口４１の“４０”，
“５０”も同様である。合計３４の仕口４１の“１２
０”は、それぞれの品名のロット数の合計である。この
欄は、仕掛ロット数が変わるたびに再計算されて表示さ
れる。"30" in the column of the joint 41 of the product name A31
The number of work-in-process lots of the product name A at the end of October is counted from the history DB 5. Here, the number of in-process lots can be calculated by counting lots that have a history of loading and no history of warehousing. Product name B32, product name C33, "40" in joint 41,
The same applies to "50". Total of 34 connections 41, "12"
"0" is the total number of lots of each product name. This column is recalculated and displayed each time the number of in-process lots changes.
【００３６】稼働日３８の“３０”は、１１月のライン
稼働日数を示し、これは計画ＤＢ６の中の、稼働日に関
するＤＢを参照して転記する。稼働日３９の“２５”も
同様である。１１月の投入４２、入庫４３、１２月の投
入４８、入庫４９も、計画ＤＢ６の中の投入、入庫に関
するＤＢから転記したものである。１１月の仕指４４、
１２月の仕指５０は、このスプレットシートが始めて展
開された時は、１０月の仕指４０と同じ値が初期値とし
て入っている。平均進捗工期や、推定作業件数を参照し
ながら本スプレットシート使用者が、この仕掛指数を変
更する。これが変更されたら、その都度関係ある値はす
べて再計算される。図８では、品名Ａ３１は、０．５で
変更していないが、品名Ｂ３２は、０．７から０．６，
０．６と変更している。品名Ｃ３３も、０．３から０．
４，０．５と変更している。"30" of the operating day 38 indicates the number of line operating days in November, which is posted by referring to the DB regarding the operating days in the plan DB 6. The same applies to "25" on the working day 39. The input 42 in November, the storage 43, the input 48 in December, and the storage 49 in December are also transferred from the DB regarding the input and storage in the plan DB 6. November's thumb 44,
When the spread sheet is unfolded for the first time, the December finger 50 has the same value as the October finger 40 as an initial value. The user of this spread sheet changes this work-in-process index while referring to the average progress period and the estimated number of operations. Whenever this changes, all relevant values are recalculated. In FIG. 8, the product name A31 is not changed to 0.5, but the product name B32 is 0.7 to 0.6,
It has been changed to 0.6. The product name C33 is also 0.3 to 0.
It has been changed to 4, 0.5.
【００３７】１１月の仕掛ロット数仕口４５は品名毎に
次の式で算出する。The number of work-in-process lots 45 for November is calculated by the following formula for each product name.
【００３８】仕口４５＝仕口４１＋投入４２−入庫４３ １２月末の仕掛ロット数仕口５１も、品名毎に次の式で
算出する。Port 45 = Port 41 + Injection 42-Receiving 43 The in-process lot number port 51 at the end of December is also calculated by the following formula for each product name.
【００３９】仕口５１＝仕口４５＋投入４８−入庫４９ １１月の推定作業件数作件４７は、（４）式より、次の
（４−１）式に変形して算出する。The joint 51 = the joint 45 + the input 48-the stock 49 The estimated number of works 47 in November is calculated by transforming the equation (4) into the following equation (4-1).
【００４０】 [0040]
【００４１】作件４７＝仕口４５×仕指４４×工程数３
５＋入庫４３×工程数３５−仕口４１×仕指４０×工程
数３５ （この式は、品名Ａのときで、品名Ｂのときは工程数３
６を工程数３５のかわりに使用し、、品名Ｃのときは、
工程数３７を工程数３５のかわりに使用する） 同様に１２月の推定作業件数作件５３は、次式で示され
る。品名Ａのときは、 作件５３＝仕口５１×仕指５０×工程数３５＋入庫４９
×工程数３５−仕口４５×仕指４４×工程数３５ １１月の平均進捗工期の工期４６は、品名毎に（３）式
を次の（３−２）式に変形して、Work 47 = Joint 45 × Finger 44 × Number of processes 3
5 + warehousing 43 x number of steps 35-port 41 x finger 40 x number of steps 35 (This formula is for product name A, and for product name B, the number of processes is 3
6 is used instead of the number of steps 35, and when the product name is C,
The number of processes 37 is used in place of the number of processes 35) Similarly, the estimated work number work 53 for December is represented by the following equation. In the case of product name A, product 53 = joint 51 × finger 50 × number of processes 35 + storage 49
× number of steps 35-portion 45 × fingers 44 × number of steps 35 The average progress period 46 in November is to transform the formula (3) into the following formula (3-2) for each product name,
【００４２】 [0042]
【００４３】品名Ａのときは、工期４６＝工程数３５×
稼働日３８÷作件４７×｛仕口４１＋（投入４２−入庫
４３）÷２｝で算出される。品名が変れば工程数３５の
ところをそれぞれ変えて算出する。When the product name is A, the construction period 46 = the number of processes 35 ×
It is calculated by the following formula: working day 38 / work 47 × {port 41+ (input 42-stock 43) / 2}. If the product name changes, the number of steps 35 is changed and calculated.
【００４４】同様にして１２月の平均進捗工期の工期５
２は、工期５２＝工程数３５×稼働日３９÷作件５３×
｛仕口４５＋（投入４８−入庫４９）÷２｝（品名Ａの
とき）で算出される。Similarly, the average progress period in December, which is 5
2 is construction period 52 = number of processes 35 × working days 39 ÷ work 53 ×
It is calculated by {portion 45+ (input 48-stock 49) / 2} (when the product name is A).
【００４５】合計３４の行の仕口４１，投入４２，入庫
４３，仕口４５，作件４７，投入４８，入庫４９，仕口
５１，作件５３は、それぞれの列の累積値である。A total of 34 rows of the connection 41, the input 42, the storage 43, the connection 45, the work 47, the input 48, the storage 49, the connection 51, and the work 53 are cumulative values of the respective columns.
【００４６】このスプレットシート内のパラメータが変
更されたら、それに関係するすべての値が再計算され
る。例えば、品名Ａの１１月の投入ロット数が変われ
ば、１１月、１２月の仕掛ロット数，平均進捗工期，推
定作業件数と、それに関する累積が再計算されて更新さ
れる。When a parameter in this spreadsheet is changed, all values associated with it are recalculated. For example, if the number of input lots in November of the product name A changes, the number of work-in-process lots in November and December, the average progress period, the estimated number of works, and the accumulation thereof are recalculated and updated.
【００４７】[0047]
【発明の効果】以上説明したように本発明は、人の勘や
経験による半導体装置の仕掛、入庫、工期予測をシステ
ム化することにより、均質で妥当な予測結果が得られ、
生産性が向上するという効果を有する。As described above, according to the present invention, a uniform and appropriate prediction result can be obtained by systematizing the in-process of the semiconductor device, warehousing, and construction period prediction by human intuition or experience.
It has the effect of improving productivity.
【図１】本発明の一実施例の半導体装置ラインのブロッ
ク図。FIG. 1 is a block diagram of a semiconductor device line according to an embodiment of the present invention.
【図２】工程手順データのデータベースの構造図。FIG. 2 is a structural diagram of a database of process procedure data.
【図３】履歴データのデータベースの構造図。FIG. 3 is a structural diagram of a history data database.
【図４】投入データのデータベースの構造図。FIG. 4 is a structural diagram of a database of input data.
【図５】入庫データのデータベースの構造図。FIG. 5 is a structural diagram of a receipt data database.
【図６】稼働日データのデータベースの構造図。FIG. 6 is a structural diagram of a database of working day data.
【図７】図１の報告部７の動作を説明するフロー図。7 is a flowchart explaining the operation of the reporting unit 7 in FIG.
【図８】図１の表示端末機３に出力される表の概要図。8 is a schematic diagram of a table output to the display terminal 3 of FIG.
１ ホストコンピュータ ２ 端末機 ３ 表示端末機 ４〜６ データベース部 ７ 報告部 ８ 支援部 ９〜１９ データベース項目名 ２０〜３０ 処理ステップ ３１〜５３ 項目名 1 Host computer 2 Terminal 3 Display terminal 4-6 Database part 7 Report part 8 Support part 9-19 Database item name 20-30 Processing step 31-53 Item name
Claims (1)
設備に情報をホストコンピュータに転送する端末機を備
え、前記各設備の作業開始または終了時に、作業日時、
作業情報を前記端末機と前記ホストコンピュータとで交
換するステップと、 前記ホストコンピュータが、前記情報をデータベースに
随時にデータの追加・更新を行うステップと、 前記ホストコンピュータが、工程手順データと投入・入
庫設備稼働計画のデータと前記作業履歴のデータとによ
って、仕掛の状況、工期、入庫量を予測支援するステッ
プと、 処理結果及びデータベース内の各種データを端末機で表
示出力するステップとを有することを特徴とする半導体
装置の製造管理方法。1. A semiconductor device manufacturing management method, wherein each equipment is provided with a terminal for transferring information to a host computer, and when the work of each equipment is started or ended, work date and time,
A step of exchanging work information between the terminal and the host computer; a step of the host computer adding / updating the information to / from the database at any time; It has a step of predicting and supporting the status of work in progress, the construction period, and the amount of warehousing based on the data of the warehousing facility operation plan and the data of the work history, and the step of displaying and outputting the processing result and various data in the database on a terminal. A method for manufacturing and controlling a semiconductor device, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5210592A JP2781694B2 (en) | 1992-03-11 | 1992-03-11 | Semiconductor device manufacturing management method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5210592A JP2781694B2 (en) | 1992-03-11 | 1992-03-11 | Semiconductor device manufacturing management method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05257945A true JPH05257945A (en) | 1993-10-08 |
| JP2781694B2 JP2781694B2 (en) | 1998-07-30 |
Family
ID=12905578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5210592A Expired - Fee Related JP2781694B2 (en) | 1992-03-11 | 1992-03-11 | Semiconductor device manufacturing management method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2781694B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000066705A (en) * | 1998-08-20 | 2000-03-03 | Matsushita Electric Works Ltd | Manufacturing information management method |
| US6343238B1 (en) | 1998-04-09 | 2002-01-29 | Oki Electric Industry Co., Ltd. | System for providing information regarding production progress |
| KR100393936B1 (en) * | 1999-12-28 | 2003-08-09 | 료덴 세미컨덕터 시스템 엔지니어링 (주) | Process control device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7503973B2 (en) * | 2020-09-03 | 2024-06-21 | 川崎重工業株式会社 | Production management system and production management method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0326449A (en) * | 1989-06-23 | 1991-02-05 | Hitachi Ltd | production management system |
| JPH0363736A (en) * | 1989-07-31 | 1991-03-19 | Matsushita Electric Ind Co Ltd | Semiconductor process data accumulation system |
| JPH0373257A (en) * | 1989-08-11 | 1991-03-28 | Nec Corp | Production scheduling device |
| JPH0430954A (en) * | 1990-05-25 | 1992-02-03 | Mitsubishi Electric Corp | Method and device for planning input program of part to be processed |
-
1992
- 1992-03-11 JP JP5210592A patent/JP2781694B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0326449A (en) * | 1989-06-23 | 1991-02-05 | Hitachi Ltd | production management system |
| JPH0363736A (en) * | 1989-07-31 | 1991-03-19 | Matsushita Electric Ind Co Ltd | Semiconductor process data accumulation system |
| JPH0373257A (en) * | 1989-08-11 | 1991-03-28 | Nec Corp | Production scheduling device |
| JPH0430954A (en) * | 1990-05-25 | 1992-02-03 | Mitsubishi Electric Corp | Method and device for planning input program of part to be processed |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6343238B1 (en) | 1998-04-09 | 2002-01-29 | Oki Electric Industry Co., Ltd. | System for providing information regarding production progress |
| JP2000066705A (en) * | 1998-08-20 | 2000-03-03 | Matsushita Electric Works Ltd | Manufacturing information management method |
| KR100393936B1 (en) * | 1999-12-28 | 2003-08-09 | 료덴 세미컨덕터 시스템 엔지니어링 (주) | Process control device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2781694B2 (en) | 1998-07-30 |
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