JPH05262429A - Stopping positioning device for conveying device and method thereof - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention relates to a stop positioning device and method of a transfer device, and an object thereof is to stop the transfer carriage with high positioning accuracy in a short time. [Structure] A carrier truck 2 which is slidably mounted on a track 1 in a non-contact manner and is slidably driven, and front and rear magnets 3a and 3b made of permanent magnets 3 are fixed to front and rear wall surfaces, respectively. ,
Front-end means 4a facing the front-end magnet 3a and the rear-end magnet 3b, respectively.
And the repulsive force generating means 4 including the rearward means 4b. Then, when the carrier 2 approaches the stop position S, the front means 4a of the repulsive force generating means 4 appears, and the repulsive force acts on the front magnet 3a, and then the carrier 2 moves the front means 4a. When approaching the 4a, the rearward means 4b is made to appear, a repulsive force is applied to the rearward magnet 3b, and then between the frontward means 4a and the front magnet 3a, and between the rearward means 4b and the rear magnet 3b. At least one of the acting repulsive forces is controlled to stop the transport carriage 2 at a predetermined stop position S.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stop / positioning device for a transfer device and a method therefor. The present invention relates to a stop positioning device for a transport device and a method thereof.

In recent years, along with the progress of electronic devices centering on semiconductor devices, rationalization in their manufacturing process has been vigorously promoted. In particular, in the manufacturing process of semiconductor devices, the carrying process is becoming more important in order to streamline the manufacturing and eliminate dust.

In the process of manufacturing a semiconductor device, for example, a wafer in a wafer process, a chip after element formation on the wafer and scribing, and an assembly process for assembling and inspecting the chip. The semi-finished products in the inspection process and the like are transported everywhere between various devices.

Therefore, in the process of manufacturing a series of semiconductor devices, how to efficiently and reliably carry the transfer process across various manufacturing devices is an important issue that greatly affects productivity. There is.

[0005]

2. Description of the Related Art As semiconductor devices become larger and larger in capacity, their design rules are becoming finer and finer.
In order to realize the rule, it is necessary to extremely avoid the generation of dust in the atmosphere of the manufacturing process, so-called dust generation.

Therefore, in order to reduce the number of workers who work in the atmosphere as much as possible, in order to reduce the number of workers who work in the atmosphere, it is necessary to automate various processes together with the improvement of productivity. Has been.

On the other hand, for dust generated in the manufacturing equipment,
Various measures have been taken for each device, and it is required that a transport device that travels between various devices is also high-speed, highly reliable, and clean. Therefore, a magnetic levitation type carrier is provided in which dust is not generated due to sliding on a carrier line such as a track.

A magnetic levitation type carrier (hereinafter abbreviated as a carrier) is supported in a non-contact state on a track by utilizing the attractive force and repulsive force of a magnet, and is moved forward and backward by a linear motor as a drive source. It is supposed to do.

In order to accurately stop the moving carriage at a predetermined position in the vicinity of various manufacturing apparatuses, a linear motor as a drive source is braked in a direction opposite to the traveling direction of the carriage to bring the carriage to a predetermined position. Therefore, the speed of the carrier vehicle may be set to "0".

However, since the carrier truck slides without contacting the track, there is no friction. Therefore, if a slight disturbance element such as the inclination of the track or the difference in the weight of the load is applied, it becomes difficult to stop the predetermined position. Therefore, a device has been developed for stopping the carrier by magnetic force at a predetermined position.

FIG. 5 is a schematic explanatory view of an example of a conventional stop device for a carrier vehicle. FIG. 5 (A) is a top view, FIG. 5 (B) is an explanatory view of how to apply a restraining force R, and FIG. (C) is an explanatory view of a bogie stop position. In the figure, 1 is a track, 2 is a carriage, 5 is a magnetic member, and 6 is an electromagnet.

In FIG. 5 (A), the carriage 2 has a track 1
It sits on top of and can be moved without contact.
A magnetic member 5 such as an iron plate is attached to the side wall surface thereof, and when the carriage 2 stops at a predetermined stop position S, an electromagnet 6 is provided outside the track 1 facing the magnetic member 5.
Are arranged.

The electromagnet 6 does not operate when the moving carriage 2 passes, but when stopping the carriage 2, a current is passed through the electromagnet 6 to stand by. When the carriage 2 approaches while decelerating, a magnetic attraction force acts on the magnetic member 5 to generate a restraining force R, and the magnetic member 5 stops at a position facing the electromagnet 6.

[0014]

By the way, the restraining force R exerted on the magnetic member 5 by the electromagnet 6 and the stop position S of the magnetic member 5 will be described.
As shown in FIG. 5 (B), the binding force R is large at both ends where the magnetic member 5 starts to face the electromagnet 6, and the binding force R is just when they face each other. Does not work. That is, the range of the binding force R is related to the size of the magnetic member 5.

However, it is not a good idea to make the magnetic member 5 too large because the weight of the carriage 2 is increased, the inertia is increased, and the time required for stopping is increased. Also,
Since there is no friction during the movement of the carrier 2 and the restraining force R disappears at a predetermined stop position S, as shown in FIG. 5 (C), it gradually swings while swinging similar to the damping vibration of the spring. Stop. As a result, the downtime also tends to increase.

Therefore, the carrier truck 2 moving at high speed
However, there is a problem that it is difficult to stop at a predetermined stop position S with high positioning accuracy in a short time. SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a stop positioning method for a transport device that applies a magnetic repulsive force from the front and rear of the traveling direction of the transport vehicle to sandwich it and stop the transport vehicle with high positioning accuracy in a short time.

[0017]

The above-mentioned problem is solved by a stop positioning method of a transfer device for stopping a transfer carriage slidably driven on a track in a non-contact manner at a predetermined stop position S. A permanent magnet and a repulsive force generating means, wherein the permanent magnet is composed of a front magnet and a rear magnet fixed to the front and rear wall surfaces of the carrier,
The repulsive force generating means includes front-end means facing the front magnet and rear-end means facing the rear magnet, and generates a magnetic repulsive force to each other. In the stop positioning device of the carrying device, the stop positioning device of the carrying device configured so as to appear and retract at the front and the rear of the stop position S, respectively. When the transport carriage approaches the stop position S, the front means of the repulsive force generating means is caused to appear, and the repulsive force is applied to the front magnet. Then, when the transport carriage approaches the front means, A rear means is made to appear, a repulsive force is applied to the rear magnet, and then at least one of the repulsive force acting between the front means and the front magnet and between the rear means and the rear magnet is applied. Control the carriage to a predetermined stop position. And how to stop the positioning constructed transport device to stop the S, it is solved by.

[0018]

In the conventional transporting apparatus, a restraining force is applied to the side wall surface of the transporting vehicle to stop the transporting vehicle at a predetermined stop position S. The repulsive force is applied to stop at the stop position S.

That is, the front magnet and the rear magnet of the permanent magnet are fixed to the front and rear wall surfaces of the carrier, and the repulsive force generating means consisting of the front means and the rear means appears so as to face each of the magnets. I try to evacuate. Then, when the transport vehicle approaches the stop position S, first, the repositioning means appears, and a repulsive force acts between the repositioning magnet and the facing front magnet. When the carrier vehicle is about to be pushed back, the rearward means appears, and the repulsive force acts on the rearward magnet.

In this way, the carriage to be stopped is sandwiched by the repulsive force generating means and is pressed from the front and back, so that the swing that occurs before the stop is suppressed, and the carriage can be accurately positioned within a short time. It can be stopped at a predetermined stop position S.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a perspective view of an essential part of a first embodiment of the present invention, FIG. 2 is an explanatory view of a stop positioning step of the present invention, and FIG. 3 is an explanatory view of various combinations of the present invention. 4 is a perspective view of the second embodiment of the present invention. In the figure, 1 is an orbit,
1a is a missing portion, 2 is a carriage, 3 is a permanent magnet, 3a is a front magnet, 3b is a rear magnet, 4 is a repulsive force generating means, 4a is a front means,
4b is a rear-end means.

Embodiment 1 In FIGS. 1 and 2, a carriage 2 is mounted on a track 1 and magnetically supported in a non-contact state, and is driven by a linear motor. .. And orbit 1
In the front of the stop position S and in the rear not shown in the drawing, there is a cutout portion 1a obtained by cutting off the track 1. The distance between the missing portion 1a and the missing portion 1a is, for example, 100 or more than the length of the transport carriage 2.
It is about mm longer. And these two missing parts 1a
Repulsive force generating means 4 is disposed in each of the.

The permanent magnet 3 fixed to the carrier 2 has front magnets 3a on the front wall surface and rear magnets 3b on the rear wall surface. It may be a pole. Here, it is said that both are north poles.

The repulsive force generating means 4 is a front magnet 3a or a rear magnet.
As a means for generating a magnetic repulsive force with respect to 3b, the front-end means 4a and the rear-end means 4b made of, for example, an electromagnet are vertically moved by the cylinder 4c. The relationship between the front-end means 4a and the rear-end means 4b is relatively determined by the direction in which the carrier 2 moves and the direction in which the carrier 2 moves. When the cylinder 4c moves up, the front-end means 4a faces the front-end magnet 3a, and the rear-end means 4b faces the rear-end magnet 3b.

In this case, since the front magnet 3a and the rear magnet 3b are N poles, both the front means 4a and the rear means 4b are N poles.
When they face each other, the repulsive force works to repel each other.

In FIG. 2A, when the carriage 2 approaches the stop position S while decelerating, as shown in FIG. 2B, the pre-positioning means 4a of the repulsive force generating means 4 appears.
Then, the repulsive force acts between the front-end means 4a and the front-end magnet 3a to apply braking, and when they are too close, they are pushed back. Aiming at that time, as shown in FIG. 2 (C), the rear-end means 4b appears and a repulsive force acts between the rear-end magnet 3b and the rear-end magnet 3b to repel each other. That is, the rear-end means 4b tries to push back the transport carriage 2 which is about to be pushed back in the opposite direction by the front-end means 4a.

In this way, the transport carriage 2 is constrained by the two repulsive force generating means 4 so as to be sandwiched from the front and the rear so as to be pressed, so that the swinging that occurs before the stop as in the conventional case is rapidly weakened, and the carriage 2 shown in FIG. As shown in (D), it can be stopped at a predetermined stop position S within a short time.

By the way, in FIG. 3, repulsive force generating means 4
In addition to an electromagnet, a permanent magnet can also be used for this.
That is, FIG. 3A shows a case where electromagnets are used for both the front-end means 4a and the rear-end means 4b. In this case, if the direction of the current flowing through the electromagnet is selected and the carrier 2 is sandwiched between the front magnet 3a and the rear magnet 3b so that the repulsive force acts, and the current value flowing through the electromagnet is adjusted. The magnitude of the repulsive force generated can also be controlled. In this way, the transport carriage 2 is quickly moved to the predetermined stop position S while preventing the swing of the transport carriage 2.
Can be stopped.

FIG. 3B shows a case where a permanent magnet is used for the front-end means 4a and an electromagnet is used for the rear-end means 4b. In this case, first, the carrier truck 2 moving by the permanent magnet of the front-end means 4a is repulsed and stopped. Then, the carrier vehicle 2 to be returned is stopped by adjusting the repulsive force with the electromagnet of the rear-end means 4b. In this way, it is possible to prevent the carriage 2 from swinging and stop the carriage 2 at the predetermined stop position S in a short time.

FIG. 3C shows a case where an electromagnet is used for the front-end means 4a and a permanent magnet is used for the rear-end means 4b.
In this case, the transport carriage 2 moving by the electromagnet of the front-end means 4a is first repulsed and stopped, and the repulsive force of the transport carriage 2 to be returned is adjusted by the permanent magnet of the rear-end means 4b. In this way, it is possible to prevent the carriage 2 from swinging and stop the carriage 2 at the predetermined stop position S in a short time.

Embodiment 2 In FIG. 4, the repulsive force generating means 4 is adapted to move forward and backward from the lateral direction of the track 1 to appear and retract. That is, the cylinder 4c is adapted to horizontally project or sink. When the cylinder 4c projects, the front-end means 4a and the rear-end means 4b face the front-end magnets 3a and the rear-end magnets 3b fixed to the front and rear of the carrier vehicle 2 and repulsive force acts magnetically to repel them. It is supposed to do.

With such a structure, it is not necessary to provide a place for disposing the repulsive force generating means 4 by cutting off the track 1 as in the first embodiment. Although the cylinder is used for the appearance and retreat of the repulsive force generating means here, an arm, a link or the like may be used, and various modifications are possible. Further, the front-rear relationship of the carrier vehicle and the polarities of the permanent magnets and electromagnets may be such that the facing surfaces have the same polarity and the repulsive force acts.

[0033]

According to the stop positioning device and the method thereof according to the present invention, the front and rear of the carrier are sandwiched by the magnetic repulsive force and pushed back from both sides, so that the carrier can be accurately positioned at a predetermined stop position in a short time. Can be stopped.

As a result, particularly in the manufacturing process of the semiconductor device, it becomes possible to improve the efficiency of the transfer work for connecting various processes indispensable for automation and connecting various devices. The present invention largely contributes to the improvement of the efficiency of the transfer work, and thus to the efficiency of the entire manufacturing process.

[Brief description of drawings]

FIG. 1 is a perspective view of a main part of a first embodiment of the present invention.

FIG. 2 is an explanatory diagram of a stop positioning process of the present invention.

FIG. 3 is an explanatory diagram of various combinations of the present invention.

FIG. 4 is a perspective view of a second embodiment of the present invention.

5A and 5B are schematic explanatory views of an example of a conventional stop device for a carrier truck. FIG. 5A is a top view, FIG. 5B is an explanatory diagram of how to apply a restraining force R, and FIG. FIG.

[Explanation of symbols]

1 Trajectory 1a Missing part 2 Transport cart 3 Permanent magnet 3a Front magnet 3b
Rear magnet 4 Repulsive force generating means 4a Front means 4b
Post-position means

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location H01L 21/68 A 8418-4M // B65G 43/00 G

Claims (5)

[Claims] 1. A stop positioning device for a transfer device, which stops a transfer carriage (2) slidably driven on a track (1) in a non-contact manner at a predetermined stop position S, wherein magnet
(3) and a repulsive force generating means (4), the permanent magnet (3) includes a front magnet (3a) and a rear magnet (3a) fixed to the front and rear wall surfaces of the transport carriage (2). 3b), the repulsive force generating means (4) is a front-end means (4a) facing the front magnet (3a), and a rear-end means facing the rear magnet (3b).
(4b), which mutually generate magnetic repulsive force, and are arranged so as to appear and retreat in front of and behind the stop position S on the track (1). A stop positioning device for a transport device, characterized in that 2. The repulsive force generating means (4) comprises front means (4a).
2. The stop positioning device for a transfer device according to claim 1, wherein at least one of the rear end means (4b) and the rear means (4b) comprises an electromagnet and the other comprises a permanent magnet. 3. The track (1) has a cutout portion (1a) before and after the stop position S, and the repulsive force generating means (4) is arranged in the cutout portion (1a).
The stop positioning device for a transport device according to claim 1, wherein the stop positioning device moves up and down to emerge and retreat. 4. The repulsive force generating means (4) is arranged on the side of the track (1) before and after the stop position S, and moves forward / backward to appear / retract. A stop positioning device for the transport device described. 5. The stop positioning device for a transfer device according to claim 1, wherein when the transfer carriage (2) approaches a stop position S, a front-end means (4a) of the repulsive force generation means (4) appears. Then, a repulsive force is applied to the front magnet (3a), and then, when the carrier vehicle (2) approaches the front means (4a), the rear means (4b) is caused to appear, and the rear means (4b) appears. Stationary magnet (3
At least one of the repulsive force acting between the front means (4a) and the front magnet (3a) and between the rear means (4b) and the rear magnet (3b). Is controlled to stop the transport carriage (2) at a predetermined stop position S.