JPH0527500Y2 - - Google Patents

Info

Publication number
JPH0527500Y2
JPH0527500Y2 JP1988074722U JP7472288U JPH0527500Y2 JP H0527500 Y2 JPH0527500 Y2 JP H0527500Y2 JP 1988074722 U JP1988074722 U JP 1988074722U JP 7472288 U JP7472288 U JP 7472288U JP H0527500 Y2 JPH0527500 Y2 JP H0527500Y2
Authority
JP
Japan
Prior art keywords
substrate
growth
substrate holder
dummy
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988074722U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01177276U (da
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988074722U priority Critical patent/JPH0527500Y2/ja
Publication of JPH01177276U publication Critical patent/JPH01177276U/ja
Application granted granted Critical
Publication of JPH0527500Y2 publication Critical patent/JPH0527500Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1988074722U 1988-06-07 1988-06-07 Expired - Lifetime JPH0527500Y2 (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988074722U JPH0527500Y2 (da) 1988-06-07 1988-06-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988074722U JPH0527500Y2 (da) 1988-06-07 1988-06-07

Publications (2)

Publication Number Publication Date
JPH01177276U JPH01177276U (da) 1989-12-18
JPH0527500Y2 true JPH0527500Y2 (da) 1993-07-13

Family

ID=31299822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988074722U Expired - Lifetime JPH0527500Y2 (da) 1988-06-07 1988-06-07

Country Status (1)

Country Link
JP (1) JPH0527500Y2 (da)

Also Published As

Publication number Publication date
JPH01177276U (da) 1989-12-18

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