JPH05281186A - Flue gas measuring device - Google Patents

Flue gas measuring device

Info

Publication number
JPH05281186A
JPH05281186A JP4106164A JP10616492A JPH05281186A JP H05281186 A JPH05281186 A JP H05281186A JP 4106164 A JP4106164 A JP 4106164A JP 10616492 A JP10616492 A JP 10616492A JP H05281186 A JPH05281186 A JP H05281186A
Authority
JP
Japan
Prior art keywords
exhaust gas
combustion exhaust
oxygen concentration
dust
measuring part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4106164A
Other languages
Japanese (ja)
Other versions
JP2541419B2 (en
Inventor
Hideyuki Miki
英之 三木
Shingo Sumi
心吾 角
Hiroaki Matsuhisa
浩明 松久
Masaru Kozakura
優 小桜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4106164A priority Critical patent/JP2541419B2/en
Publication of JPH05281186A publication Critical patent/JPH05281186A/en
Application granted granted Critical
Publication of JP2541419B2 publication Critical patent/JP2541419B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To achieve miniaturization and light weight by providing a means for eliminating dust within a combustion exhaust gas. a means for eliminating water content and corrosion substance, and a threshold current type zirconia type oxygen concentration meter. CONSTITUTION:Water content and dust of a combustion exhaust gas are eliminated by dehumidification/dust-elimination part 13 and the combustion exhaust gas is lead to a nitrogen oxide concentration measuring part 16 and an oxygen concentration measuring part 17. In this case, it is directly supplied to the measuring part 16, while it is supplied to the measuring part 17 through an SO2 elimination part 15. The elimination part 15 uses an absorbent which mainly consists of for example magnesium oxide and hydrogen chloride is eliminated along with sulphuric disulfide which is included within the combustion exhaust gas, thus preventing a crystalline object (such as sulphur) which influences the measuring part 17 from being generated. In this manner, the combustion exhaust gas whose water content, dust, and corrosive product substance are eliminated are led to the measuring part 17, where the oxygen concentration is measured.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、焼却炉等から排出され
る燃焼排ガス中の窒素酸化物(NO及びNO2。一般に
NOxと表わされる。)の濃度を測定する装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for measuring the concentration of nitrogen oxides (NO and NO 2 ; generally represented as NOx) in combustion exhaust gas discharged from an incinerator or the like.

【0002】[0002]

【従来の技術】燃焼排ガス中の窒素酸化物濃度を測定す
る場合には、酸素濃度により換算した換算窒素酸化物濃
度という値が使用される。この値を算出するためには、
窒素酸化物そのものの濃度の他に、燃焼排ガス中に含ま
れる酸素の濃度も測定する必要がある。このため、採取
した燃焼排ガス中の窒素酸化物濃度と酸素濃度とを同時
に測定する機能を備えた燃焼排ガス測定装置が作製され
ている。
2. Description of the Related Art When measuring the nitrogen oxide concentration in a combustion exhaust gas, a value called a converted nitrogen oxide concentration converted by oxygen concentration is used. To calculate this value,
In addition to the concentration of nitrogen oxide itself, it is necessary to measure the concentration of oxygen contained in the combustion exhaust gas. Therefore, a combustion exhaust gas measuring device having a function of simultaneously measuring the nitrogen oxide concentration and the oxygen concentration in the collected combustion exhaust gas has been produced.

【0003】[0003]

【発明が解決しようとする課題】このような機能を有す
る燃焼排ガス測定装置の酸素濃度測定部には、従来、磁
気式(磁気風式、磁気力式)や起電力型ジルコニア式の
酸素濃度計が使用されており、限界電流型ジルコニア式
酸素濃度計(特公昭59−26895号参照)は使用さ
れていなかった。これは、限界電流型ジルコニア式酸素
濃度計には測定ガスを導入するための小さい孔が存在す
るため、この孔に燃焼排ガス中のダスト等が詰まって測
定不能になることや、燃焼排ガス中の水分や(硫黄酸化
物等から生成する)酸が電極を腐食させること等の不都
合があるためである。しかし、磁気式の酸素濃度計は磁
石を使用することから大きくて重量がかさみ、構造も複
雑で取り扱いが不便である。また、起電力型ジルコニア
式酸素濃度計も大きなスペースを必要とする。さらに、
一部の酸素濃度計では酸素濃度が既知の基準ガスを必要
とする。これらのことから、換算窒素酸化物濃度を測定
することのできる燃焼排ガス測定装置を小型・軽量化し
ようとする場合、酸素濃度測定部が障害となっていた。
The oxygen concentration measuring unit of the combustion exhaust gas measuring apparatus having such a function is conventionally a magnetic type (magnetic wind type, magnetic force type) or electromotive force type zirconia type oxygen concentration meter. Was used, and the limiting current type zirconia type oxygen concentration meter (see Japanese Patent Publication No. 59-26895) was not used. This is because the limiting current type zirconia oximeter has a small hole for introducing the measurement gas, and therefore dust or the like in the combustion exhaust gas is clogged into this hole and measurement becomes impossible, or This is because water or an acid (generated from sulfur oxide or the like) corrodes the electrode. However, since the magnetic oximeter uses a magnet, it is large and heavy, and its structure is complicated, which makes it inconvenient to handle. The electromotive force type zirconia oximeter also requires a large space. further,
Some oximeters require a reference gas with a known oxygen concentration. For these reasons, the oxygen concentration measuring unit has been an obstacle when attempting to reduce the size and weight of the combustion exhaust gas measuring device capable of measuring the converted nitrogen oxide concentration.

【0004】本発明はこのような課題を解決するために
成されたものであり、その目的とするところは、小型化
及び軽量化の可能な燃焼排ガス測定装置を提供すること
にある。
The present invention has been made to solve such a problem, and an object of the present invention is to provide a combustion exhaust gas measuring apparatus which can be reduced in size and weight.

【0005】[0005]

【課題を解決するための手段】上記課題を解決するため
に成された本発明では、燃焼排ガス中の窒素酸化物濃度
と酸素濃度とを測定する燃焼排ガス測定装置において、 a)燃焼排ガス中のダストを除去する手段と、 b)燃焼排ガス中の水分及び腐食性物質を除去する手段
と、 c)限界電流型ジルコニア式酸素濃度計とを備えること
を特徴としている。
In order to solve the above problems, the present invention provides a flue gas measuring apparatus for measuring nitrogen oxide concentration and oxygen concentration in flue gas, comprising: a) It is characterized by comprising means for removing dust, b) means for removing water and corrosive substances in combustion exhaust gas, and c) a limiting current type zirconia oximeter.

【0006】[0006]

【作用】まずダスト除去手段aにより、サンプリングさ
れた燃焼排ガス中の、限界電流型ジルコニア式酸素濃度
計の小孔を塞ぐ可能性のあるダスト(固形浮遊物)を除
去する。ここにおけるダストには、固体微粒子の他、液
体微粒子も含まれる。このようなダスト除去は、現在市
販されている各種の除塵フィルタにより行なうことがで
きる。次に、水分・腐食性物質除去手段bにより、水分
や限界電流型ジルコニア式酸素濃度計の電極を腐食させ
る恐れのある物質を除去する。水分の除去は電子クーラ
や除湿剤を用いることにより行なうことができる。腐食
性物質としてはSO2、SO3等が挙げられるが、これら
は例えば酸化マグネシウムを主成分とする吸収剤を充填
した容器中を通過させることにより除去することができ
る。なお、ダスト除去手段aと水分・腐食性物質除去手
段bの順序は逆でもよいし、同時に使用してもよい。こ
れら両手段を通した後の燃焼排ガスを限界電流型ジルコ
ニア式酸素濃度計に導き、酸素濃度を検出する。なお、
窒素酸化物濃度は従来通りの装置で測定を行ない、酸素
濃度測定値によって換算して換算窒素酸化物濃度を算出
する。
First, the dust removing means a removes dust (solid suspended matter) in the sampled combustion exhaust gas that may block the small holes of the limiting current type zirconia oxygen analyzer. The dust here includes liquid fine particles as well as solid fine particles. Such dust removal can be performed by various types of dust filters currently on the market. Next, the water / corrosive substance removing means b removes water and substances that may corrode the electrodes of the limiting current type zirconia oximeter. Water can be removed by using an electronic cooler or a dehumidifying agent. Examples of corrosive substances include SO 2 and SO 3 , which can be removed by passing them through a container filled with an absorbent containing magnesium oxide as a main component. The order of the dust removing means a and the water / corrosive substance removing means b may be reversed or they may be used simultaneously. The flue gas after passing through these means is led to a limiting current type zirconia type oxygen concentration meter to detect the oxygen concentration. In addition,
The nitrogen oxide concentration is measured by a conventional device, and the converted nitrogen oxide concentration is calculated by converting the measured oxygen concentration value.

【0007】[0007]

【実施例】本発明を実施した燃焼排ガスの窒素酸化物濃
度測定装置の構成の一例を図1に示す。本測定装置10
の試料ガス導入口12に所定の燃焼排ガスサンプリング
導管を接続し、ポンプ14により燃焼排ガスを装置10
内に吸引する。吸引した燃焼排ガスは、窒素酸化物(N
Ox)濃度及び酸素濃度を測定する前に、前処理部11
にて不純物等除去の前処理を行なう。まず、除湿・除塵
部13で水分及びダストを除去する。水分の除去には、
電子クーラを用いることができる。ダストの除去にはメ
ンブレンフィルタ等を用いることができる。ダストは、
少なくとも、後述の限界電流型ジルコニア式酸素濃度計
の小孔26よりも大きいものは除去しておく必要がある
が、1μm程度の目を有するフィルタを使用すれば十分
である。
EXAMPLE FIG. 1 shows an example of the configuration of a nitrogen oxide concentration measuring apparatus for combustion exhaust gas according to the present invention. Main measuring device 10
A predetermined flue gas sampling conduit is connected to the sample gas inlet 12 of the flue gas, and the flue gas is pumped by the pump 14
Aspirate into. The combustion exhaust gas sucked in is nitrogen oxide (N
Before measuring the Ox) concentration and the oxygen concentration, the pretreatment unit 11
Performs pretreatment to remove impurities. First, the dehumidifying / dust removing unit 13 removes water and dust. To remove water,
An electronic cooler can be used. A membrane filter or the like can be used to remove dust. Dust is
At least those larger than the small holes 26 of the limiting current type zirconia type oxygen concentration meter described later need to be removed, but it is sufficient to use a filter having an eye of about 1 μm.

【0008】除湿及び除塵を行なった燃焼排ガスは、一
方は窒素酸化物(NOx)濃度測定部16へ、他方は酸
素濃度測定部17へ送出するが、窒素酸化物濃度測定部
16へは直接供給するのに対し、酸素濃度測定部17へ
はSO2除去部15を介して供給する。本実施例ではS
2除去部15は酸化マグネシウムを主成分とする吸収
剤を使用しており、燃焼排ガス中の二硫化硫黄(S
2)の他、塩化水素(HCl)も除去することができ
る。これによって、酸素濃度測定部17に影響を与える
結晶物(例えば硫安等)の生成を防止することができ
る。なお、SO2除去部15にはこの他に、後述のジル
コニア法を使用する際の干渉成分となるCOやHC等を
除去する吸収剤を加えてもよい。
The combustion exhaust gas that has been dehumidified and dedusted is sent to the nitrogen oxide (NOx) concentration measuring unit 16 on the one hand and to the oxygen concentration measuring unit 17 on the other hand, but directly supplied to the nitrogen oxide concentration measuring unit 16. On the other hand, the oxygen concentration measuring unit 17 is supplied via the SO 2 removing unit 15. In this embodiment, S
The O 2 removing section 15 uses an absorbent containing magnesium oxide as a main component, and the sulfur disulfide (S
Besides O 2 ), hydrogen chloride (HCl) can also be removed. As a result, it is possible to prevent the formation of a crystal substance (for example, ammonium sulfate) that affects the oxygen concentration measuring unit 17. In addition to the above, the SO 2 removing section 15 may be added with an absorbent for removing CO, HC and the like which are interference components when the zirconia method described later is used.

【0009】このようにして水分、ダスト及び腐食性物
質が除去された燃焼排ガスは酸素濃度測定部17に導か
れ、そこで酸素濃度が測定される。本実施例の燃焼排ガ
ス測定装置10では、酸素濃度測定部17に限界電流型
ジルコニア式酸素濃度計を使用している。
The combustion exhaust gas from which moisture, dust and corrosive substances have been removed in this way is guided to the oxygen concentration measuring section 17, where the oxygen concentration is measured. In the combustion exhaust gas measuring apparatus 10 of this embodiment, a limiting current type zirconia type oxygen concentration meter is used in the oxygen concentration measuring unit 17.

【0010】限界電流型ジルコニア式酸素濃度計は、図
2に示すように、安定化ジルコニア(ZrO2)ディス
ク22の両面に白金電極23、24を形成し、その片側
を、小孔26を設けたキャップ25で覆ったものであ
る。両電極23、24間に電圧を印加すると、ジルコニ
ア22のポンピング作用により、キャップ25により囲
まれた空間内の酸素分子がジルコニアディスク22を通
して外部へ排出される。この負圧のため、キャップ25
の頂部に設けた小孔26から被測定ガスが流入するが、
小孔26が非常に小さいため、この小孔26を通したガ
スの流入速度がジルコニアディスク22を介したポンピ
ングを律速する。このため、両電極23、24間の電圧
−電流特性は、被測定ガスの酸素濃度に応じた値(限界
電流値)で電流が飽和するような形となる。従って、両
電極23、24間に適当な電圧を印加して限界電流値を
測定することにより、被測定ガス(燃焼排ガス)の酸素
濃度を測定することができる。
As shown in FIG. 2, the limiting current type zirconia oximeter has platinum electrodes 23 and 24 formed on both sides of a stabilized zirconia (ZrO 2 ) disk 22, and a small hole 26 is provided on one side thereof. It is covered with a cap 25. When a voltage is applied between the electrodes 23 and 24, oxygen molecules in the space surrounded by the cap 25 are discharged to the outside through the zirconia disk 22 by the pumping action of the zirconia 22. Due to this negative pressure, the cap 25
The gas to be measured flows in through the small hole 26 provided at the top of the
Since the small holes 26 are very small, the gas inflow rate through the small holes 26 limits the pumping through the zirconia disk 22. Therefore, the voltage-current characteristic between the electrodes 23 and 24 is such that the current is saturated at a value (limit current value) according to the oxygen concentration of the gas to be measured. Therefore, the oxygen concentration of the gas to be measured (combustion exhaust gas) can be measured by applying an appropriate voltage between the electrodes 23 and 24 and measuring the limiting current value.

【0011】ここで、燃焼排ガス中にダストが含まれて
いると、このキャップの小孔26が詰まって酸素濃度の
測定が不能となってしまう。燃焼排ガス中ではダストと
なっていなくても、例えばSO2とアンモニア(NH3
による硫安の生成のように、化学反応により固形物が生
成されると、小孔26を閉塞してしまう。また、燃焼排
ガス中に水分、SO2、塩酸、硫酸等の金属を腐食させ
るような物質が含まれていると、電極23、24が劣化
し、測定値が不正確となる。それに対し、本実施例の燃
焼排ガス測定装置では燃焼排ガス中のこれらの物質を既
に前処理部11で除去しているため、このような問題が
生ぜず、長期間にわたって安定して酸素濃度を測定する
ことができる。
If the combustion exhaust gas contains dust, the small hole 26 of the cap is clogged, and the oxygen concentration cannot be measured. Even if it does not become dust in the combustion exhaust gas, for example SO 2 and ammonia (NH 3 )
When a solid substance is produced by a chemical reaction, such as the production of ammonium sulfate by, the small holes 26 are closed. Also, if the combustion exhaust gas contains a substance that corrodes metals such as water, SO 2 , hydrochloric acid, and sulfuric acid, the electrodes 23 and 24 will deteriorate and the measured values will be inaccurate. On the other hand, in the combustion exhaust gas measuring apparatus of the present embodiment, since these substances in the combustion exhaust gas have already been removed by the pretreatment unit 11, such a problem does not occur and the oxygen concentration can be measured stably over a long period of time. can do.

【0012】窒素酸化物濃度測定部16では、化学発光
式や非分散型赤外線式等、各種方式の窒素酸化物濃度測
定器により燃焼排ガス中の窒素酸化物(NO、NO2
の濃度を測定する。これら両濃度測定部16、17によ
り測定された窒素酸化物濃度及び酸素濃度の信号は演算
部18に送られ、そこで所定の換算式により換算窒素酸
化物濃度が算出される。算出された換算窒素酸化物濃度
の値は、ディスプレイ19により数値表示される。な
お、窒素酸化物濃度測定値或いは酸素濃度測定値をその
ままディスプレイ19に表示することもできる。
The nitrogen oxide concentration measuring unit 16 uses various types of nitrogen oxide concentration measuring devices such as a chemiluminescence type and a non-dispersive infrared type to measure nitrogen oxides (NO, NO 2 ) in combustion exhaust gas.
To measure the concentration of. The signals of the nitrogen oxide concentration and the oxygen concentration measured by both the concentration measuring units 16 and 17 are sent to the calculating unit 18, where the converted nitrogen oxide concentration is calculated by a predetermined conversion formula. The calculated converted nitrogen oxide concentration value is displayed numerically on the display 19. The nitrogen oxide concentration measured value or the oxygen concentration measured value may be displayed on the display 19 as it is.

【0013】ここでは燃焼排ガス中の窒素酸化物濃度を
測定する装置について説明を行なったが、硫黄酸化物濃
度測定装置についても、その酸素濃度測定部及び前処理
部は同様に構成することができる。
Although the apparatus for measuring the nitrogen oxide concentration in the combustion exhaust gas has been described here, the oxygen concentration measuring section and the pretreatment section of the sulfur oxide concentration measuring apparatus can be similarly constructed. ..

【0014】[0014]

【発明の効果】本発明に係る燃焼排ガス測定装置では酸
素濃度測定部に、小型・軽量で構造が簡単であり、か
つ、基準ガスを必要としない限界電流型ジルコニア式酸
素濃度計を使用するため、燃焼排ガス測定装置全体を小
型・軽量化することができる。
The flue gas measuring apparatus according to the present invention uses the limiting current type zirconia type oxygen concentration meter for the oxygen concentration measuring section, which is small and lightweight and has a simple structure, and does not require a reference gas. It is possible to reduce the size and weight of the entire combustion exhaust gas measuring device.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例である燃焼排ガス測定装置
の構成を示すブロック図。
FIG. 1 is a block diagram showing the configuration of a combustion exhaust gas measuring apparatus that is an embodiment of the present invention.

【図2】 実施例の燃焼排ガス測定装置で使用する限界
電流型ジルコニア式酸素濃度計の断面及び検出用回路を
示す説明図。
FIG. 2 is an explanatory view showing a cross section and a detection circuit of a limiting current type zirconia oximeter used in the combustion exhaust gas measuring apparatus of the embodiment.

【符号の説明】[Explanation of symbols]

10…燃焼排ガス測定装置 11…前処理部 12…試料ガス導入口 13…除湿・除
塵部 14…ポンプ 15…SO2
去部 16…窒素酸化物濃度測定部 17…酸素濃度
測定部 18…演算部 19…ディスプ
レイ 22…ジルコニアディスク 23、24…白
金電極 25…キャップ 26…小孔
10 ... flue gas measuring device 11 ... preprocessing section 12 ... sample gas inlet 13 ... dehumidifying, dedusting unit 14 ... pump 15 ... SO 2 removal unit 16 ... NOx concentration measuring unit 17 ... oxygen concentration measuring unit 18 ... computing unit 19 ... Display 22 ... Zirconia disk 23, 24 ... Platinum electrode 25 ... Cap 26 ... Small hole

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 G01N 27/28 M 7235−2J 27/27 (72)発明者 小桜 優 京都市中京区西ノ京桑原町1番地 株式会 社島津製作所三条工場内─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification number Reference number within the agency FI Technical display location G01N 27/28 M 7235-2J 27/27 (72) Inventor Yu Kozakura 1 Nishinokyo Kuwabara-cho, Nakagyo-ku, Kyoto House number Shimadzu Corporation Sanjo factory

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 燃焼排ガス中の窒素酸化物濃度と酸素濃
度とを測定する燃焼排ガス測定装置において、 a)燃焼排ガス中のダストを除去する手段と、 b)燃焼排ガス中の水分及び腐食性物質を除去する手段
と、 c)限界電流型ジルコニア式酸素濃度計とを備えること
を特徴とする燃焼排ガス測定装置。
1. A flue gas measuring device for measuring nitrogen oxide concentration and oxygen concentration in flue gas, comprising: a) means for removing dust in flue gas; and b) water and corrosive substances in flue gas. And a c) limiting current type zirconia oximeter.
JP4106164A 1992-03-30 1992-03-30 Flue gas measuring device Expired - Fee Related JP2541419B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4106164A JP2541419B2 (en) 1992-03-30 1992-03-30 Flue gas measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4106164A JP2541419B2 (en) 1992-03-30 1992-03-30 Flue gas measuring device

Publications (2)

Publication Number Publication Date
JPH05281186A true JPH05281186A (en) 1993-10-29
JP2541419B2 JP2541419B2 (en) 1996-10-09

Family

ID=14426645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4106164A Expired - Fee Related JP2541419B2 (en) 1992-03-30 1992-03-30 Flue gas measuring device

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Cited By (6)

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US5872305A (en) * 1996-08-01 1999-02-16 Testo Gmbh & Co. Method for preparing a test gas stream
JP2003065958A (en) * 2001-08-30 2003-03-05 Dia Instr:Kk Sulfur analysis method and analyzer
JP2005138875A (en) * 2003-11-07 2005-06-02 Toyo Seikan Kaisha Ltd Device and method for monitoring oxygen concentration state
JP2015518155A (en) * 2012-05-30 2015-06-25 ベコー テヒノロギース ゲーエムベーハー Measuring apparatus and method for detecting hydrocarbon fractions in gas while taking into account cross-sensitivity
JP2019197076A (en) * 2019-08-22 2019-11-14 株式会社島津製作所 Oxygen concentration measuring device
CN112014520A (en) * 2019-05-30 2020-12-01 株式会社岛津制作所 Exhaust gas measuring device

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JPH0269948A (en) * 1988-09-05 1990-03-08 Matsushita Electric Ind Co Ltd Apparatus for mounting of electronic component
JPH03267752A (en) * 1990-03-17 1991-11-28 Toyota Central Res & Dev Lab Inc Limiting current type oxygen concentration detection device

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JPS4881893U (en) * 1971-12-29 1973-10-05
JPS5669553A (en) * 1979-11-13 1981-06-10 Ngk Insulators Ltd Oxygen concentration detecting device
JPS56164994A (en) * 1980-05-24 1981-12-18 Tokyo Shibaura Electric Co Gas concentration measuring device
JPS60104756U (en) * 1983-12-21 1985-07-17 三菱重工業株式会社 Conversion circuit device
JPS6152255A (en) * 1984-08-20 1986-03-14 Sarada Meron:Kk Production of noodle food to provide change of indeterminate form, noodle food using it, and unusual chinese noodle using well-known production method
JPS61265554A (en) * 1985-05-20 1986-11-25 Horiba Ltd Gas analyser
JPS63261149A (en) * 1987-04-17 1988-10-27 Tech Res Assoc Conduct Inorg Compo Sensor for controlling combustion
JPH0269948A (en) * 1988-09-05 1990-03-08 Matsushita Electric Ind Co Ltd Apparatus for mounting of electronic component
JPH03267752A (en) * 1990-03-17 1991-11-28 Toyota Central Res & Dev Lab Inc Limiting current type oxygen concentration detection device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5872305A (en) * 1996-08-01 1999-02-16 Testo Gmbh & Co. Method for preparing a test gas stream
JP2003065958A (en) * 2001-08-30 2003-03-05 Dia Instr:Kk Sulfur analysis method and analyzer
JP2005138875A (en) * 2003-11-07 2005-06-02 Toyo Seikan Kaisha Ltd Device and method for monitoring oxygen concentration state
JP2015518155A (en) * 2012-05-30 2015-06-25 ベコー テヒノロギース ゲーエムベーハー Measuring apparatus and method for detecting hydrocarbon fractions in gas while taking into account cross-sensitivity
CN112014520A (en) * 2019-05-30 2020-12-01 株式会社岛津制作所 Exhaust gas measuring device
CN112014520B (en) * 2019-05-30 2023-09-22 株式会社岛津制作所 Exhaust gas measuring device
JP2019197076A (en) * 2019-08-22 2019-11-14 株式会社島津製作所 Oxygen concentration measuring device

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