JPH05290431A - Magneto-optical recording medium and its production - Google Patents

Abstract

(57) [Summary] [Purpose] A magneto-optical recording medium in which information is recorded in a multilayer magnetic film composed of a rare earth metal and a transition metal, and the sub-lattice magnetization does not reverse under a wider range of recording and reproducing conditions than before. A magneto-optical recording medium having at least one magnetic layer is obtained. [Configuration] A magneto-optical recording medium in which information on the multilayered magnetic film comprising a rare earth metal and the transition metal is recorded, comprising at least one magnetic layer at the time of recording and reproduction sublattice magnetization does not cause an inversion, the layer magneto-optical recording medium is a magnetic layer that is set Naruhen adjusted in the vertical direction of the magnetic film surface. Preparation of a magneto-optical recording medium, characterized by modulation composition in a vertical direction of the magneto-optical recording magnetic film surface a rare earth metal and a transition metal is provided a process for the preparation of the medium.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium capable of optical modulation direct overwriting by using an exchange-coupling multilayer magnetic film and a method for producing the same.

[0002]

2. Description of the Related Art FIG. 7 shows, for example, the Journal of Applied Physic.
s) Vol. 67, No. 9, Part II A May 1, 1990 4415-44
FIG. 12 is an explanatory diagram showing a configuration of a conventional magneto-optical recording medium described on page 16 and a light beam at the time of recording / reproducing. In the figure, 1 is a light beam emitted from a semiconductor laser or the like and condensed by a lens, 2 is an external magnetic field generator for generating a magnetic field Hb, 3 is a transparent substrate made of glass or plastic, 4,
Reference numerals 5, 6, 11, and 8 are five magnetic layers exchange-coupled to each other, that is, the first magnetic layer 4, the second magnetic layer 5, the third magnetic layer 6, the fourth magnetic layer 11, and the fifth magnetic layer 8. , 9 and 10 are dielectric layers. Further, the magnetic layers in contact with each other are coupled to each other by the exchange coupling force. Here, the exchange coupling force is a force at which the magnetizations (sublattice magnetizations) of the rare earth metal or the transition metal in the magnetic layer tend to be parallel to each other.

Next, the light modulation direct overwrite operation will be described. FIG. 8 is an explanatory diagram showing the light intensity of the light beam used for recording and reproduction. The light intensity of the light beam is 3
In FIG. 8, P _READ is the light intensity level during reproduction, P _LOW is the low light intensity level during recording and P _{HIGH in FIG.}
Indicates a high light intensity level during recording. Since P _READ has a small intensity, the magnetization state of the magneto-optical recording medium (hereinafter, also referred to as a medium) does not change, but P _LOW and P _HIGH have a higher intensity than P _READ , so that the medium temperature rises and the reached temperature thereof is reached. Respectively become T _LOW and T _HIGH , and "0" or "1" is recorded depending on the change in the magnetization state during the subsequent cooling.
Here, the process of recording "0" is called "low power process", and the process of recording "1" is called "high power process".

Hereinafter, these two steps will be described with reference to FIG.

FIG. 9 is an explanatory view showing the direction of the transition metal sublattice magnetization of each magnetic layer at each temperature shown in the figure, where Troom is room temperature, Tc ₁ is the Curie temperature of the first magnetic layer 4, and Tc ₂ Is the second
The Curie temperature of the magnetic layer 5, Tc ₃ represents the Curie temperature of the third magnetic layer 6, and Tc ₄ represents the Curie temperature of the fourth magnetic layer 11. Further, each magnetic layer in the figure is a first magnetic layer 4, a second magnetic layer 5, a third magnetic layer 6 and a fourth magnetic layer 11 in order from the top.

First, when a light beam is irradiated in the "low power process", the medium temperature reaches T _LOW , that is, Tc ₁
It rises to the neighborhood. At this time, the second magnetic layer 5 and the fourth magnetic layer
11 is upward without any change in the transition metal sublattice magnetization,
At the time of subsequent cooling, the exchange magnetic coupling force from the second magnetic layer 5 causes the transition metal sublattice magnetization to be aligned in the same direction in the first magnetic layer 4 and "0" is recorded.

Further, when the light beam is irradiated in the "high power process", the medium temperature reaches T _HIGH , that is, Tc ₂
It rises to the neighborhood. At this time, only the fourth magnetic layer 11 has an upward direction of the transition metal sublattice magnetization, and then the magnetic field Hb generated by the external magnetic field generator 2 during cooling causes the direction of the transition metal sublattice magnetization of the second magnetic layer 5. Becomes downward, and then the transition metal sublattice magnetization of the first magnetic layer 4 becomes downward due to the exchange coupling force from the second magnetic layer 5 as in the case of the “low power process”. Then, in the vicinity of room temperature, the second
A so-called initialization process occurs in which the transition metal sublattice magnetization of the magnetic layer 5 is turned upward by the exchange coupling force from the third magnetic layer 6, but the transition metal sublattice magnetization of the first magnetic layer 4 is exchange coupled at this point. There is no reversal due to force, keeping downwards and "1" is recorded.

[0008]

In order to realize the initialization process in the above-mentioned optical modulation direct overwrite operation, the sub-lattice magnetization of the magneto-optical recording medium, such as that of the fourth magnetic layer 11, during recording / reproducing. At least 1 not to flip
It is necessary to have one magnetic layer (hereinafter, also referred to as an initialization layer), and the reversal magnetic field of the sublattice magnetization of the initialization layer must be sufficiently large over the entire temperature range during recording and reproduction.

However, in the initialization layer obtained by the conventional manufacturing method of the magneto-optical recording medium, the reversal magnetic field of the sublattice magnetization is not sufficiently large, so that the recording / reproducing conditions may be limited to a narrow range. There is.

Therefore, in order to ensure a stable light modulation direct overwrite operation under a wider range of recording / reproducing conditions, the allowable range of the light intensity and the external magnetic field intensity at which the sublattice magnetization of the initializing layer is not reversed is further widened. It is necessary to secure it.

The present invention has been made to solve the above problems, and has a magneto-optical recording having at least one magnetic layer in which the sublattice magnetization does not reverse under a wider range of recording / reproducing conditions than in the past. An object of the present invention is to provide a medium and a method for manufacturing the magneto-optical recording medium.

[0012]

According to the present invention, a magnetic film consisting essentially of a rare earth metal having perpendicular magnetic anisotropy and Fe and / or Co transition metal is laminated on a substrate, and the layers in contact with each other are A magneto-optical recording medium in which information is recorded on a multi-layer magnetic film coupled by exchange coupling force, comprising at least one magnetic layer which does not cause reversal of sublattice magnetization during recording and reproduction, and the layer is basically A rare earth metal and Fe and / or Co transition metal are periodically laminated in a direction perpendicular to the magnetic film surface to form a magnetic layer having a modulated composition, and the layer allows optical modulation direct overwrite (overwriting). A magneto-optical recording medium characterized by the above and a rare earth metal and Fe having perpendicular magnetic anisotropy on a substrate.
A method for manufacturing a magneto-optical recording medium in which magnetic films made of and / or Co transition metal are stacked, and the layers in contact with each other are used to record information in a multilayer magnetic film that is coupled by exchange coupling force. When forming at least one magnetic layer in which the sub-lattice magnetization does not invert, the composition is basically modulated by stacking rare earth metal and Fe and / or Co transition metal periodically in the direction perpendicular to the magnetic film surface. The present invention relates to a method for manufacturing a magneto-optical recording medium.

[0013]

In the magneto-optical recording medium of the present invention, since the magnetic film whose composition is modulated in the direction perpendicular to the magnetic film surface is used as the initialization layer, the light intensity and the sub-lattice magnetization of the initialization layer are not reversed. The allowable range of external magnetic field strength can be widened,
A more stable light modulation direct overwrite operation becomes possible. Further, this allows the characteristic allowable range of the magnetic film constituting the magneto-optical recording medium to be widened, and the degree of freedom in medium design can be increased.

[0014]

EXAMPLE A magneto-optical recording medium of the present invention is formed by laminating a magnetic layer having a perpendicular magnetic anisotropy, which is basically a rare earth metal and Fe and / or Co transition metal, on a substrate. A magneto-optical recording medium in which information is recorded on a multi-layer magnetic film coupled by exchange coupling force, and at least one magnetic layer that does not cause reversal of sublattice magnetization during recording and reproduction is provided, and the layer is basically a rare earth element. It is a feature that the metal and Fe and / or Co transition metal are a magnetic layer whose composition is modulated in the direction perpendicular to the magnetic film surface.

In the magneto-optical recording medium of the present invention, the initialization layer is different from the conventional one, but other substrates, magnetic layers and the like are the same as those in the conventional one. That is, on a substrate that has been conventionally used, for example, a dielectric layer is provided, on which a magnetic thin film made of a rare earth element-transition metal alloy that has been conventionally used is laminated in a normal thickness, respectively, A protective film is provided as the uppermost layer.

The magnetic layers in contact with each other are coupled by the exchange coupling force as in the conventional case.

An embodiment of the magneto-optical recording medium of the present invention is shown in FIG. In the figure, 1 is a light beam emitted from a semiconductor laser or the like and condensed by a lens, and 2 is a magnetic field H.
An external magnetic field generator for generating b, 3 is a transparent substrate made of glass or plastic, and 4 to 8 are exchange-coupled with each other.
4 is a first magnetic layer, 5 is a second magnetic layer,
6 is a third magnetic layer, 7 is a magnetic layer whose composition is modulated in the direction perpendicular to the magnetic film surface (composition-modulated magnetic layer), 8 is a fifth magnetic layer,
Reference numerals 9 and 10 are dielectric layers.

Specific examples of each layer of the magneto-optical recording medium shown in FIG. 1 are as follows. Here, for example, 25,65 and 10 in the Tb ₂₅ Fe ₆₅ Co ₁₀
Indicates atomic% (at%).

Substrate: Glass or plastic transparent substrate Dielectric layer: SiNx 600 Å First magnetic layer: TbFeCo ternary amorphous magnetic alloy layer Tb ₂₅ Fe ₆₅ Co ₁₀ 700 Å Fifth magnetic layer: GdFeCo ternary amorphous Magnetic alloy layer Gd ₃₃ Fe ₆₀ Co ₇ 100 Å Second magnetic layer: GdDyFeCo quaternary amorphous magnetic alloy layer Gd ₁₀ Dy ₁₉ Fe ₄₇ Co ₂₄ 800 Å Third magnetic layer: TbFeCo ternary amorphous magnetic alloy layer Tb ₁₇ Fe ₇₉ Co ₄ 200 Å Composition modulation magnetic layer: TbFeCo-based amorphous magnetic layer Tb _X (Fe having a composition-modulated structure in which Tb layers and FeCo layers are periodically laminated in a direction perpendicular to the magnetic film surface. _100-Y Co _Y ) _100-X 400 Å Protective layer: SiNx 600 Å The optical modulation direct overwrite operation on the magneto-optical recording medium of the present invention is the same as the conventional one.

In the present invention, the initialization layer is different from the conventional one, and the composition of the initialization layer is modulated in the direction perpendicular to the magnetic film surface. The composition is modulated in the direction perpendicular to the magnetic film surface means that, for example, a rare earth metal layer and a transition metal layer are laminated in the direction perpendicular to the magnetic film surface, and the atomic ratio of rare earth metal (or transition metal) is in the magnetic film surface. The composition is modulated in the vertical direction, and the composition modulation structure (modulation period λ) is confirmed by, for example, high resolution Auger electron spectroscopy.

A specific example of the initialization layer of the present invention is a TbCo amorphous magnetic layer having a composition-modulated structure in which a Tb layer and a Co layer are periodically laminated in the direction perpendicular to the magnetic film surface. However, its composition is Tb _X Co
_100-X (21 ≦ X ≦ 30 (at%)) is preferable. This composition is the composition of the entire layer. Further, the modulation period λ is 3 Å ≤ λ ≤ from the point that a wider allowable range of the light intensity and the external magnetic field intensity in which the sub-lattice magnetization is not reversed is secured as compared with the conventional alloy layer having a uniform composition (λ = 0 Å). 20Å is preferred.

As a specific example of the initialization layer of the present invention,
For example, Tb having a structure in which the Tb layer and the FeCo layer are periodically laminated in the direction perpendicular to the magnetic film surface and whose composition is modulated.
The FeCo amorphous magnetic layer can be cited as its composition.
_X (Fe _100-Y Co _Y ) _100-X (21 ≦ X ≦ 30 (at%), 50 ≦ Y
≦ 100 (at%)) is preferable. This composition is the composition of the entire layer. In addition, the modulation period λ is 3 Å ≤ λ in comparison with the conventional alloy layer having a uniform composition (λ = 0 Å), because a wider allowable range of the light intensity and the external magnetic field intensity in which the sublattice magnetization is not reversed is secured. It is preferable that ≦ 20Å.

Since the magneto-optical recording medium of the present invention has the above-mentioned initialization layer, it is possible to widen the allowable range of the light intensity and the external magnetic field intensity at which the sub-lattice magnetization of the initialization layer is not reversed, and A stable light modulation direct overwrite operation is possible under a wide range of recording and reproducing conditions. Further, this can increase the degree of freedom in medium design without limiting the characteristics of other magnetic films constituting the magneto-optical recording medium.

Next, a method of manufacturing the magneto-optical recording medium of the present invention will be described with reference to FIG.

In the present invention, in order to form the initializing layer, the rare earth metal and the transition metal are simultaneously sputtered while rotating the substrate by using, for example, a sputtering apparatus.

First, similar to the conventional method, for example, the first magnetic layer 4, the fifth magnetic layer 8 and the second magnetic layer are formed on the transparent substrate 3 mounted on the substrate holder that rotates so that the substrate passes over the target. The layer 5 and the third magnetic layer 6 and the respective alloy targets are sequentially sputtered to form a film.

After that, the Tb target and the Co target are simultaneously sputtered to form the fourth magnetic layer 7 as the initialization layer while rotating the substrate, for example.

When the substrate is rotated and the film forming rates of the rare earth metal and the transition metal are aÅ / min and bÅ / min, respectively, the substrate rotation speed is Rr.pm and the modulation period λ is λ = (a
A composition modulation film of + b) / R is obtained. For example, Tb
When the Tb and Co film formation rates are both 100 Å / min using a target and a Co target, the substrate rotation speed is 20.
A TbCo composition modulation film with λ = 10Å is obtained as rpm. Further, the modulation cycle λ of the composition modulation film can be arbitrarily changed by changing the rotation speed of the substrate.

FIG. 2 shows Tb ₂₅ Co having different composition modulation periods λ.
The perpendicular magnetic anisotropy Ku _⊥ and the coercive force Hc of the ₇₅ film at room temperature are shown. As is clear from the figure, it is possible to obtain a magnetic film having a large Ku _⊥ and Hc by modulating the composition.

Further, FIG. 3 shows that Hc has a maximum value of λ = 10Å
Is the measurement result of the temperature dependence of Hc of the Tb ₂₅ Co ₇₅ film of λ = 0 Å with no compositional modulation and λ over the measurement temperature range.
It can be seen that the Tb ₂₅ Co ₇₅ film of = 10Å has a larger Hc. Hc ₁ (λ = 0) represents the coercive force at room temperature.

Therefore, the composition-modulated magnetic film obtained by the method for manufacturing the magneto-optical recording medium of the present invention has a larger perpendicular magnetic anisotropy than the conventional magnetic film having a uniform composition, and has a coercive force over a wide temperature range. large. When this composition-modulated magnetic film is used as the initialization layer, the reversal magnetic field is large over a wide temperature range, and a stable optical modulation direct overwrite operation is possible under a wider range of recording and reproducing conditions.

Further, such an effect may be obtained by a manufacturing method in which a composition-modulated magnetic film is obtained by opening and closing a shutter using, for example, a vapor deposition apparatus, and is not limited to the above-described manufacturing method using a sputtering apparatus. Needless to say.

[Example 1] FIG.
The dielectric layer 9, the first magnetic layer 4, the fifth magnetic layer 8, the second magnetic layer 5, and the third magnetic layer 5 are formed on the glass substrate so as to have the structure shown in FIG.
The magnetic layer 6, the composition-modulating magnetic layer 7, and the like were sequentially formed by a sputtering method to manufacture a magneto-optical recording medium having the following structure.

Dielectric layer: SiNx 600 Å First magnetic layer: TbFeCo ternary amorphous magnetic alloy layer Tb ₂₅ Fe ₆₅ Co ₁₀ 700 Å Fifth magnetic layer: GdFeCo ternary amorphous magnetic alloy layer Gd ₃₃ Fe ₆₀ Co ₇ 100 Å Second magnetic layer: GdDyFeCo quaternary amorphous magnetic alloy layer Gd ₁₀ Dy ₁₉ Fe ₄₇ Co ₂₄ 800 Å Third magnetic layer: TbFeCo ternary amorphous magnetic alloy layer 200 Å Tb ₁₇ Fe ₇₉ Co ₄ Composition modulation magnetic layer: TbCo binary amorphous magnetic layer 400 Å Tb ₂₅ Co ₇₅ (modulation cycle 10 Å) Protective layer: SiNx 600 Å Composition modulation magnetic layer 7 has a modulation cycle formed by using a Tb target and a Co target. It is a 10Å Tb ₂₅ Co ₇₅ film. The film forming conditions at this time are Ar pressure of 2.3 mTorr during film forming,
Input power 30 for both Tb and Co targets
At 0 W, the substrate rotation speed is 200 rpm.

Using the magneto-optical recording medium manufactured as described above, a signal with a bit length of 2.9 μm and a signal with a bit length of 3.8 μm, a linear velocity of 7.5 m / sec, an applied magnetic field of 300 Oe and a P _{LOW of} 3.0 mW were used. Then, the value of P _HIGH was changed and the light modulation was directly overwritten and reproduced. At this time, P _READ is 1.0m
W.

The measurement results are shown in FIG. Defining the value of the drawing in as shown CNR lower the 2dB drops than (carrier-to-noise ratio) is the maximum value to determine the tolerance of P _HIGH (PHmin.) And upper (PHmax.), Allowed the P _HIGH Range ((PHmax.-PHmin.) / {(PHmax. + PHmin.) /
2}) was able to secure 70% in this case.

[Comparative Example 1] The first magnetic layer 4, the fifth magnetic layer 8, the second magnetic layer 5, the third magnetic layer 6 were formed on the glass substrate in the same manner as in Example 1 except for the initialization layer. The fourth magnetic layer 11 was sequentially formed by the sputtering method to manufacture the magneto-optical recording medium having the above-mentioned structure. The fourth magnetic layer 11 is formed of a TbCo alloy target by a normal method and is formed of Tb having a modulation period λ = 0Å.
₂₅ Co ₇₅ film.

Using the magneto-optical recording medium manufactured as described above, a signal with a bit length of 2.9 μm is applied onto a signal with a bit length of 3.8 μm, a linear velocity of 7.5 m / sec, and an applied magnetic field of 300 O as in the first embodiment.
Under the conditions of e and P _LOW 3.0 mW, the value of P _HIGH was changed and light modulation direct overwriting was performed and reproduction was performed. At this time, P _READ was set to 1.0 mW.

In this case, the allowable range for P _HIGH was 50%.

[Examples 2 to 6] The first magnetic layer 4, the fifth magnetic layer 8, the second magnetic layer 5 and the third magnetic layer were formed on the glass substrate in the same manner as in Example 1 except for the initialization layer. 6. The composition-modulating magnetic layer 7 was sequentially formed by the sputtering method to manufacture the magneto-optical recording medium having the above-mentioned structure. The composition-modulated magnetic layer 7 is formed by using a Tb target and a Co target. Λ = 3Å, λ =
It is a Tb ₂₅ Co ₇₅ film of 5Å, λ = 15Å, λ = 20Å, λ = 30Å (each of Examples 2 to 6).

Using the magneto-optical recording medium manufactured as described above, a signal with a bit length of 2.9 μm is applied on a signal with a bit length of 3.8 μm and a linear velocity of 7.5 m / sec.
Under the conditions of e and P _LOW 3.0 mW, the value of P _HIGH was changed and light modulation direct overwriting was performed and reproduction was performed. At this time, P _READ was set to 1.0 mW.

FIG. 5 is a plot of each measurement result of the obtained P _HIGH allowable range, including the results of Example 1 and Comparative Example 1, with respect to the modulation period λ. It is clear from the figure that the allowable range of P _HIGH is large in the range of 3Å ≦ λ ≦ 20Å as compared with the magneto-optical recording medium manufactured by the sputtering method using the conventional alloy target.

[Examples 7 to 10 and Comparative Example 2] A first layer was formed on a glass substrate in the same manner as in Example 1 except for the initialization layer.
The magnetic layer 4, the fifth magnetic layer 8, the second magnetic layer 5, the third magnetic layer 6, and the initialization layer were sequentially formed by the sputtering method to manufacture the magneto-optical recording medium having the above-mentioned structure. The initialization layer was formed using a Tb target and a Co target λ = 3Å, λ
= 10Å, λ = 20Å, λ = 30Å (Examples 7 to 10 respectively)
Tb ₃₀ Co ₇₀ film (composition-modulated magnetic film 7) and TbCo
Λ = 0 Å formed by a normal method using an alloy target
This is a Tb ₃₀ Co ₇₀ film (fourth magnetic layer 11) of (Comparative Example 2).

Using the magneto-optical recording medium manufactured as described above, a signal with a bit length of 2.9 μm is applied on a signal with a bit length of 3.8 μm in the same manner as in Example 1 with a linear velocity of 7.5 m / sec and an applied magnetic field of 300 O.
Under the conditions of e and P _LOW 3.0 mW, the value of P _HIGH was changed and light modulation direct overwriting was performed and reproduction was performed. At this time, P _READ was set to 1.0 mW.

FIG. 5 is a plot of each measurement result of the obtained P _HIGH allowable range with respect to the modulation period λ. The allowable range of P _HIGH is 3Å ≦ λ ≦ as compared with a magneto-optical recording medium manufactured by a sputtering method using a conventional alloy target.
It is clear from the figure that a large value can be obtained in the range of 20Å.

[Examples 11 to 14 and Comparative Example 3] The first magnetic layer 4, the fifth magnetic layer 8, the second magnetic layer 5 were formed on the glass substrate in the same manner as in Example 1 except for the initialization layer. The third magnetic layer 6 and the initialization layer were sequentially formed by the sputtering method to manufacture the magneto-optical recording medium having the above-mentioned structure. The initialization layer 7 was formed using a Tb target and a FeCo target λ = 3
Å, λ = 10Å, λ = 20Å, λ = 30Å (Embodiment 11
.About.14) Tb ₂₅ (Fe ₃₀ Co ₇₀ ) ₇₅ film (composition-modulating magnetic layer 7) and a TbFeCo alloy target were used to form Tb ₂₅ (Fe ₃₀ (Comparative Example 3)).
Co ₇₀ ) ₇₅ film (fourth magnetic film 11).

Using the magneto-optical recording medium manufactured as described above, a signal with a bit length of 2.9 μm is applied onto a signal with a bit length of 3.8 μm and a linear velocity of 7.5 m / sec.
e, P _HIGH was changed under the condition of P _LOW 3.0 mW, and light modulation direct overwrite was performed for reproduction. At this time, P _READ was set to 1.0 mW.

FIG. 6 is a plot of each measurement result of the obtained P _HIGH allowable range with respect to the modulation period λ. The allowable range of P _HIGH is 3Å ≦ λ ≦ as compared with a magneto-optical recording medium manufactured by a sputtering method using a conventional alloy target.
It is clear from the figure that a large value can be obtained in the range of 20Å.

[Examples 15 to 18 and Comparative Example 4] The first magnetic layer 4, the fifth magnetic layer 8 and the second magnetic layer 5 were formed on the glass substrate in the same manner as in Example 1 except for the initialization layer. The third magnetic layer 6 and the initialization layer were sequentially formed by the sputtering method to manufacture the magneto-optical recording medium having the above-mentioned structure. The initialization layer was formed using Tb target and FeCo target λ = 3
Å, λ = 10Å, λ = 20Å, λ = 30Å (Embodiment 15
_{Tb 30 (Fe 30 Co 70)} 70 film (compositionally modulated magnetic layer 7) and TbFeCo Tb ₃₀ of the alloy using a target λ was deposited in the usual way = 0 Å (Comparative Example 4) of ~ 18) (Fe ₃₀
Co ₇₀ ) ₇₀ film (fourth magnetic layer 11).

Using the magneto-optical recording medium manufactured as described above, a signal with a bit length of 2.9 μm is applied onto a signal with a bit length of 3.8 μm and a linear velocity of 7.5 m / sec.
e, P _HIGH was changed under the condition of P _LOW 3.0 mW, and light modulation direct overwrite was performed for reproduction. At this time, P _READ was set to 1.0 mW.

FIG. 6 is a plot of each measurement result of the obtained P _HIGH allowable range with respect to the modulation period λ. The allowable range of P _HIGH is 3Å ≦ λ ≦ as compared with a magneto-optical recording medium manufactured by a sputtering method using a conventional alloy target.
It is clear from the figure that a large value can be obtained in the range of 20Å.

[0052]

By using the magneto-optical recording medium of the present invention, it is possible to widen the permissible range of the light intensity and the external magnetic field intensity at which the sub-lattice magnetization of the initialization layer is not reversed, and under a wider range of recording / reproducing conditions. In this way, stable light modulation direct overwrite operation is possible. Further, in the magneto-optical recording medium of the present invention, the characteristic allowable range of the magnetic film forming the magneto-optical recording medium is widened, and the degree of freedom in medium design can be increased.

Further, according to the manufacturing method of the present invention, in a magnetic film basically composed of a rare earth metal and Fe and / or Co transition metal having perpendicular magnetic anisotropy, the rare earth metal and the transition metal are formed on the surface of the magnetic layer film. It is possible to obtain a magnetic film having a structure in which the composition is vertically modulated and having a large perpendicular magnetic anisotropy and a large coercive force over a wide temperature range as compared with a magnetic film having a uniform composition produced by a conventional method.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing a configuration of a magneto-optical recording medium of the present invention and a light beam at the time of recording / reproducing.

FIG. 2 is a graph showing the composition modulation period dependence of the perpendicular magnetic anisotropy and the coercive force of the initialization layer formed by the manufacturing method of the present invention.

FIG. 3 is a graph showing the temperature dependence of the coercive force of the initialization layer formed by the manufacturing method of the present invention.

FIG. 4 is a graph showing the relationship between CNR and (P _HIGH / P _Hmin. ) Of the magneto-optical recording medium obtained in Example 1.

FIG. 5 is a graph showing the composition modulation period dependency of the allowable range of P _HIGH of the magneto-optical recording media obtained in Examples 1 to 10 and Comparative Examples 1 and 2.

FIG. 6 is a graph showing the composition modulation period dependence of the allowable range of P _HIGH of the magneto-optical recording media obtained in Examples 11-18 and Comparative Examples 3-4.

FIG. 7 is an explanatory diagram showing a configuration of a conventional magneto-optical recording medium and a light beam at the time of recording / reproducing.

FIG. 8 is an explanatory diagram showing the light intensity of a three-value modulated light beam.

FIG. 9 is an explanatory diagram showing a magnetization state of a conventional magneto-optical recording medium at each temperature.

[Explanation of symbols]

3 substrate 4 1st magnetic layer 5 2nd magnetic layer 6 3rd magnetic layer 7 composition modulation magnetic layer (layer whose composition is modulated in the direction perpendicular to the magnetic film surface) 8 5th magnetic layer

[Procedure amendment]

[Submission date] September 24, 1992

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be amended] Claims

[Correction method] Change

[Correction content]

[Claims]

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0007

[Correction method] Change

[Correction content]

When the light beam is irradiated in the "high power process", the medium temperature is up to T _HIGH , that is, Tc.
_It rises to around ₂ . At this time, only the fourth magnetic layer 11 has an upward direction of the transition metal sublattice magnetization, and during the subsequent cooling, the magnetic field Hb generated by the external magnetic field generator 2 causes
The direction of the transition metal sublattice magnetization of the magnetic layer 5 becomes downward,
Next, the transition metal sublattice magnetization of the first magnetic layer 4 becomes downward due to the exchange coupling force from the second magnetic layer 5 as in the “low power process”. Then, in the vicinity of room temperature, a transition metal sublattice of the first magnetic layer 4 undergoes a so-called initialization process in which the transition metal sublattice magnetization of the second magnetic layer 5 is turned upward by the exchange coupling force from the third magnetic layer 6. At this point, the magnetization does not reverse due to the exchange coupling force, and remains downward and is "1".
Is recorded.

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0012

[Correction method] Change

[Correction content]

[0012]

According to the present invention, a magnetic film consisting essentially of a rare earth metal having perpendicular magnetic anisotropy and Fe and / or Co transition metal is laminated on a substrate, and the layers in contact with each other are A magneto-optical recording medium in which information is recorded on a multi-layer magnetic film coupled by exchange coupling force, comprising at least one magnetic layer which does not cause reversal of sublattice magnetization during recording and reproduction, and the layer is basically Composition of rare earth metal and Fe and / or Co transition metal in the direction perpendicular to the magnetic film surface
A is modulated magnetic layer, essentially rare earth metal having perpendicular magnetic anisotropy in magneto-optical recording medium and the substrate, characterized in that the layer by the light modulation direct overwriting (overwriting) is possible And Fe and / or C
A method of manufacturing a magneto-optical recording medium in which magnetic films made of a transition metal are laminated, and the layers in contact with each other have information recorded on a multilayer magnetic film that is coupled by exchange coupling force. when forming the at least one magnetic layer does not cause a reversal, essentially rare earth metal and Fe and (or) a magneto-optical recording medium Co transition metal, characterized in that modulation composition vertical magnetic film surface Regarding the manufacturing method.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0013

[Correction method] Change

[Correction content]

[0013]

Magneto-optical recording medium of the effects of the present invention, since the direction perpendicular to the pair Naruhen adjusted by magnetic film of the magnetic film surface is used as the initial layer, the light intensity of the sublattice magnetization of the initializing layer is not reversed Further, the allowable range of the external magnetic field strength can be widened, and more stable light modulation direct overwrite operation can be performed. Furthermore, this allows a wider range of allowable characteristics of the magnetic film that constitutes the magneto-optical recording medium, thus increasing the degree of freedom in medium design.

[Procedure Amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction content]

[0014]

EXAMPLE A magneto-optical recording medium of the present invention is formed by laminating a magnetic layer having a perpendicular magnetic anisotropy, which is basically a rare earth metal and Fe and / or Co transition metal, on a substrate. A magneto-optical recording medium in which information is recorded on a multi-layer magnetic film coupled by exchange coupling force, and at least one magnetic layer that does not cause reversal of sublattice magnetization during recording and reproduction is provided, and the layer is basically a rare earth element. it is characterized metals and Fe and (or) Co transition metal is a magnetic layer that is set Naruhen adjusted in the vertical direction of the magnetic film surface.

[Procedure Amendment 6]

[Document name to be amended] Statement

[Correction target item name] 0018

[Correction method] Change

[Correction content]

Specific examples of each layer of the magneto-optical recording medium shown in FIG. 1 are as follows. Here, for example, 25,65 and 10 in the Tb ₂₅ Fe ₆₅ Co ₁₀
Indicates the atomic ratio (at%).

[Procedure Amendment 7]

[Document name to be amended] Statement

[Correction target item name] 0020

[Correction method] Change

[Correction content]

In the present invention, the initial layer is different from the conventional, and is set Naruhen adjusted in the vertical direction of the magnetic film surface. The is set Naruhen adjusted in the vertical direction of the magnetic layer surface, for example a rare earth metal layer and the transition metal layer are stacked in the vertical direction of the magnetic film surface, atomic ratio magnetic film surface of a rare earth metal (or transition metal) in the vertical direction in the modulated structure, the composition modulation structure is confirmed by, for example, high-resolution Auger electron spectroscopy.

[Procedure Amendment 8]

[Document name to be amended] Statement

[Correction target item name] 0021

[Correction method] Change

[Correction content]

[0021] Specific examples of the initializing layer of the present invention, for example, Tb layer and TbCo amorphous magnetic layer Co layer has a periodically stacked sets Naruhen adjusted structure in a direction perpendicular to the magnetic film surface The composition is Tb _X Co _100-X (21
≦ X ≦ 30 (at%)) is preferable. This composition is the composition of the entire layer. Further, the modulation period λ is 3 Å ≤ λ ≤ from the point that a wider allowable range of the light intensity and the external magnetic field intensity in which the sub-lattice magnetization is not reversed is secured as compared with the conventional alloy layer having a uniform composition (λ = 0 Å). 20Å is preferred.

[Procedure Amendment 9]

[Document name to be amended] Statement

[Name of item to be corrected] 0022

[Correction method] Change

[Correction content]

As a specific example of the initialization layer of the present invention,
For example Tb layer and TbF the FeCo layer has a periodically stacked sets Naruhen adjusted structure in a direction perpendicular to the magnetic film surface
The eCo amorphous magnetic layer is exemplified by the composition of Tb _X.
(Fe _100-Y Co _Y ) _100-X (21 ≦ X ≦ 30 (at%), 50 ≦
Y ≦ 100 (at%)) is preferable. This composition is the composition of the entire layer. In addition, the modulation period λ is 3 Å ≤ λ in comparison with the conventional alloy layer having a uniform composition (λ = 0 Å), because a wider allowable range of the light intensity and the external magnetic field intensity in which the sublattice magnetization is not reversed is secured. It is preferable that ≦ 20Å.

[Procedure Amendment 10]

[Document name to be amended] Statement

[Name of item to be corrected] 0023

[Correction method] Change

[Correction content]

Since the magneto-optical recording medium of the present invention has the above-mentioned initialization layer, it is possible to widen the allowable range of the light intensity and the external magnetic field intensity at which the sub-lattice magnetization of the initialization layer is not reversed, and A stable light modulation direct overwrite operation is possible under a wide range of recording and reproducing conditions. further
As a result, the allowable range of the characteristics of the other magnetic films forming the magneto-optical recording medium is widened, and the degree of freedom in medium design can be increased.

[Procedure Amendment 11]

[Document name to be amended] Statement

[Correction target item name] 0028

[Correction method] Change

[Correction content]

When the substrate is rotated, when the film forming rates of the rare earth metal and the transition metal are aÅ / min and bÅ / min, respectively, the substrate rotation speed is Rr. p. m. And the modulation period λ is λ
A composition-modulated magnetic film of = (a + b) / R is obtained. For example, when the Tb and Co targets are both Tb and Co film formation rates of 100 Å / min, the substrate rotation speed is 20 r. p. m. As a result, a TbCo composition-modulated magnetic film with λ = 10Å is obtained. Further, the modulation period λ of the composition-modulating magnetic film can be arbitrarily changed by changing the rotation speed of the substrate.

[Procedure Amendment 12]

[Document name to be amended] Statement

[Name of item to be corrected] 0029

[Correction method] Change

[Correction content]

[0029] Figure 2 is a vertical at different Tb ₂₅ Co ₇₅ film at room temperature the modulation period λ anisotropy Ku _⊥ and coercive force Hc
Indicates. As apparent from the figure, Ku by a set Naruhen tone
It is possible to obtain a magnetic film having a large _⊥ and Hc.

[Procedure Amendment 13]

[Document name to be amended] Statement

[Name of item to be corrected] 0030

[Correction method] Change

[Correction content]

Further, FIG. 3 shows that Hc has a maximum value of λ = 10Å
A set Naruhen regulating the temperature dependence of the measurement result of the absence lambda = 0 Å of Tb ₂₅ Co ₇₅ film Hc, over a measurement temperature range lambda =
It can be seen that the 10b Tb ₂₅ Co ₇₅ film has a larger Hc. Hc ₁ (λ = 0) represents the coercive force at room temperature.

[Procedure Amendment 14]

[Document name to be amended] Statement

[Correction target item name] 0034

[Correction method] Change

[Correction content]

Dielectric layer: SiNx 600 Å First magnetic layer: TbFeCo ternary amorphous magnetic alloy layer Tb ₂₅ Fe ₆₅ Co ₁₀ 700 Å Fifth magnetic layer: GdFeCo ternary amorphous magnetic alloy layer Gd ₃₃ Fe ₆₀ Co ₇ 100 Å Second magnetic layer: GdDyFeCo quaternary amorphous magnetic alloy layer Gd ₁₀ Dy ₁₉ Fe ₄₇ Co ₂₄ 800 Å Third magnetic layer: TbFeCo ternary amorphous magnetic alloy layer 200 Å Tb ₁₇ Fe ₇₉ Co ₄ Composition modulation magnetic layer: TbCo binary amorphous magnetic layer 400 Å Tb ₂₅ Co ₇₅ (modulation period λ = 10 Å) Protective layer: SiNx 600 Å Composition modulation magnetic layer 7 is a modulation film formed by using a Tb target and a Co target. It is a Tb ₂₅ Co ₇₅ film with a period λ = 10Å. The film forming conditions at this time are Ar pressure of 2.3 mTorr during film forming,
Input power 30 for both Tb and Co targets
At 0 W, the substrate rotation speed is 20 rpm.

[Procedure Amendment 15]

[Document name to be amended] Statement

[Correction target item name] 0052

[Correction method] Change

[Correction content]

[0052]

By using the magneto-optical recording medium of the present invention, it is possible to widen the permissible range of the light intensity and the external magnetic field intensity at which the sub-lattice magnetization of the initialization layer is not reversed, and under a wider range of recording / reproducing conditions. In this way, stable light modulation direct overwrite operation is possible. Further, in the magneto-optical recording medium of the present invention, the allowable range of the characteristics of the magnetic film constituting the magneto-optical recording medium is widened, and the degree of freedom in medium design can be increased.

[Procedure 16]

[Document name to be amended] Statement

[Correction target item name] 0053

[Correction method] Change

[Correction content]

Furthermore, according to the production method of the present invention, basically a rare earth metal and Fe and (or) a rare earth metal in the magnetic film made of Co transition metal and a transition metal having perpendicular magnetic anisotropy of the magnetic film surface has a vertically set Naruhen tone structure, large perpendicular magnetic anisotropy as compared to a uniform magnetic film of the composition according to the conventional manufacturing method, it is possible to obtain a large magnetic film coercivity over a wide temperature range.

[Procedure Amendment 17]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 1

[Correction method] Change

[Correction content]

[Figure 1]

[Procedure 18]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 6

[Correction method] Change

[Correction content]

[Figure 6]

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Takashi Tokunaga Takashi Tokunaga 8-1-1 Tsukaguchihonmachi, Amagasaki City Mitsubishi Electric Corporation Industrial Systems Research Institute (72) Yoshiyuki Nakagi 8-1-1 Tsukaguchihonmachi, Amagasaki Mitsubishi Electric Corporation Industrial Systems Laboratory

Claims (3)

[Claims] 1. A magnetic film basically composed of a rare earth metal having perpendicular magnetic anisotropy and Fe and / or Co transition metal is laminated on a substrate, and the layers in contact with each other are coupled by an exchange coupling force. A magneto-optical recording medium in which information is recorded on a multilayer magnetic film, which comprises at least one magnetic layer in which sublattice magnetization does not invert during recording and reproduction, and the layer is basically a rare earth metal and Fe and / or Magneto-optical recording, characterized in that it is a magnetic layer whose composition is modulated by periodically stacking Co transition metal in the direction perpendicular to the magnetic film surface and by which optical modulation direct overwrite is possible. Medium. 2. The at least one magnetic layer in which the sublattice magnetization does not invert during recording / reproducing is a Tb layer and FeCo.
A general formula Tb _X (Fe _100-Y Co _Y ) in which the layers are periodically laminated in the direction perpendicular to the magnetic film surface and have a composition-modulated structure
A TbFeCo amorphous magnetic layer represented by _100-X (21 ≦ X ≦ 30 (at%), 50 ≦ Y ≦ 100 (at%)), and its modulation period λ
2. The magneto-optical recording medium according to claim 1, wherein 3Å ≦ λ ≦ 20Å. 3. A magnetic film basically composed of a rare earth metal having perpendicular magnetic anisotropy and Fe and / or Co transition metal is laminated on a substrate, and the layers in contact with each other are coupled by an exchange coupling force. A method of manufacturing a magneto-optical recording medium in which information is recorded on a multilayer magnetic film, wherein when forming at least one magnetic layer in which sub-lattice magnetization does not invert during recording and reproduction,
Basically, a method of manufacturing a magneto-optical recording medium, characterized in that a rare earth metal and Fe and / or Co transition metal are periodically laminated in a direction perpendicular to a magnetic film surface to modulate the composition.