JPH05297239A - Method for covering optical fiber with carbon - Google Patents

Method for covering optical fiber with carbon

Info

Publication number
JPH05297239A
JPH05297239A JP4126906A JP12690692A JPH05297239A JP H05297239 A JPH05297239 A JP H05297239A JP 4126906 A JP4126906 A JP 4126906A JP 12690692 A JP12690692 A JP 12690692A JP H05297239 A JPH05297239 A JP H05297239A
Authority
JP
Japan
Prior art keywords
optical fiber
carbon
plasma
container
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4126906A
Other languages
Japanese (ja)
Inventor
Michihiko Yanagisawa
道彦 柳澤
Tsugio Sato
継男 佐藤
Kunio Ogura
邦男 小倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP4126906A priority Critical patent/JPH05297239A/en
Publication of JPH05297239A publication Critical patent/JPH05297239A/en
Pending legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
  • Mechanical Coupling Of Light Guides (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)

Abstract

(57)【要約】 【目的】 光ファイバの表面に水素含有量が極めて少な
く、耐水性、水分透過防止機能を備えたカーボンハーメ
チック被覆膜を生成できるようにする。 【構成】 光ファイバ1をセットした容器2内のガス圧
を1.5Torr以下とし、同容器2の中空電極3に高
周波電力を供給して光ファイバ1の周囲にプラズマ4を
生成させ、このプラズマ4中の炭化水素ガスとアルゴン
の混合ガス中の炭化水素ガスのモル分率を20%以下と
した。
(57) [Abstract] [Purpose] To make it possible to form a carbon hermetic coating film having a very low hydrogen content on the surface of an optical fiber and having a water resistance and a water permeation preventing function. A gas pressure in a container 2 in which the optical fiber 1 is set is set to 1.5 Torr or less, high frequency power is supplied to a hollow electrode 3 of the container 2 to generate a plasma 4 around the optical fiber 1, and the plasma is generated. The mole fraction of the hydrocarbon gas in the mixed gas of hydrocarbon gas and argon in 4 was set to 20% or less.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は光ファイバの融着接続部
や端末に局所的にカーボンハーメチック被覆膜を形成す
る方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for locally forming a carbon hermetic coating film on a fusion splicing portion or an end of an optical fiber.

【0002】[0002]

【従来の技術】光ファイバのコネクター接続部や融着接
続部はファイバー心線の外周の被覆樹脂を除去して行な
われるため、接続に使用される各種治具との接触でファ
イバー心線の表面に傷が付き易い。ファイバ心線の表面
に傷があると環境中の水分がこの傷内に侵入して傷が広
がり、ファイバ強度の著しい劣化を招く(疲労現象)。
従って、傷の付いたファイバ表面には水分を透過させな
いハーメチック被覆膜を形成することがファイバ強度の
長期信頼性を高める上で有効である。
2. Description of the Related Art Optical fiber connector splicing parts and fusion splicing parts are made by removing the coating resin on the outer circumference of the fiber core wire, so that the surface of the fiber core wire can be contacted with various jigs used for connection. Is easily scratched. If there is a flaw on the surface of the fiber core, moisture in the environment penetrates into the flaw and the flaw spreads, resulting in remarkable deterioration of the fiber strength (fatigue phenomenon).
Therefore, it is effective to form a hermetic coating film that does not allow moisture to permeate the surface of the damaged fiber in order to improve the long-term reliability of the fiber strength.

【0003】現在、ハーメチック被覆膜を形成するため
の方法としては、炭酸ガスレーザーによって光ファイバ
を加熱して熱CVD法で成膜する方法と、光ファイバの
周囲にハーメチック原料を含んだプラズマを発生させて
成膜す方法(プラズマCVD法)とが提案されている。
プラズマCVD法はファイバをセットした容器内を減圧
状態に保ち、その中に設けられた円筒形の中空電極に高
周波電力を供給して同電極内を縦向きに貫通するファイ
バの周囲にプラズマを生成させ、その光ファイバの表面
にカーボンハーメチック被覆膜を形成する方法である。
原料としては炭化水素系有機溶剤等の液体原料をアルゴ
ン等の不活性ガスでバブリングして導入する方法や、炭
化水素系ガスをアルゴンで希釈して供給する方法が一般
的に行われている。
Currently, as a method for forming a hermetic coating film, a method of heating an optical fiber by a carbon dioxide gas laser to form a film by a thermal CVD method and a plasma containing a hermetic raw material around the optical fiber are used. A method of generating and forming a film (plasma CVD method) has been proposed.
In the plasma CVD method, the inside of the container in which the fiber is set is kept in a depressurized state, and high-frequency power is supplied to a hollow cylindrical electrode provided inside the container to generate plasma around the fiber vertically passing through the electrode. Then, a carbon hermetic coating film is formed on the surface of the optical fiber.
As a raw material, a method in which a liquid raw material such as a hydrocarbon-based organic solvent is bubbled with an inert gas such as argon and introduced, or a method in which a hydrocarbon-based gas is diluted with argon and supplied is generally used.

【0004】[0004]

【発明が解決しようとする課題】プラズマCVD法では
2種以上の混合ガスのプラズマで成膜するため当然、ガ
スの混合比によって成膜状態が大きく変化する。膜の構
造ではポリエチレンに似た有機重合膜からグラファイト
状炭素膜まで、巨視的には粉体から油状膜まで極めて広
範囲に膜質が現れる。これには膜中の水素含有量が大き
く関係していると考えられる。
In the plasma CVD method, since a film is formed by plasma of a mixed gas of two or more kinds, naturally the film forming state largely changes depending on the mixing ratio of the gases. In terms of the structure of the film, film quality appears in a very wide range from organic polymer film similar to polyethylene to graphite-like carbon film, and macroscopically from powder to oil film. It is considered that this is largely related to the hydrogen content in the film.

【0005】カーボンハーメッチック被覆膜として必要
とされる耐水性、水分透過防止機能を有するためには、
同被覆膜に水素が殆ど含有されない構造が望ましいが、
そのようにするとプラズマ中の電子衝撃によって脱離し
た水素イオンが再結合してしまうため所望の構造をもっ
たカーボンハーメッチック被覆膜を形成するのが困難で
ある。これとは別に印加するパワーを上げて水素の再結
合を阻止する方法もあるが、この方法ではあまりパワー
が大きいとファイバが過剰に加熱されて溶け落ちたりす
る場合があり満足な効果は得られない。
In order to have a water resistance and a water permeation preventing function required as a carbon hermetic coating film,
It is desirable that the coating film contains almost no hydrogen,
In that case, hydrogen ions desorbed by electron impact in plasma are recombined, so that it is difficult to form a carbon hermetic coating film having a desired structure. In addition to this, there is a method to prevent recombination of hydrogen by increasing the applied power, but with this method, if the power is too high, the fiber may be overheated and melted down, resulting in a satisfactory effect. Absent.

【0006】本発明の目的は光ファイバの表面に水素含
有量が極めて少なく、耐水性、水分透過防止機能を備え
たカーボンハーメチック被覆膜を生成できるカ−ボン被
覆方法を提供することにある。
An object of the present invention is to provide a carbon coating method capable of forming a carbon hermetic coating film having a very low hydrogen content on the surface of an optical fiber and having a water resistance and a water permeation preventing function.

【0007】[0007]

【課題を解決するための手段】本発明の光ファイバのカ
−ボン被覆方法は、図1の様に光ファイバ1をセットし
た容器2内を減圧状態に保ち、同容器2内の中空電極3
に高周波電力を供給して光ファイバ1の周囲にプラズマ
4を生成させ、このプラズマ4中にハーメチック用原料
を供給することにより光ファイバ1の局所表面にカーボ
ンハーメチック被覆膜を形成する光ファイバのカ−ボン
被覆方法において、前記容器2内のガス圧を1.5To
rr以下とし、且つ生成させるプラズマ4中の炭化水素
ガスとアルゴンの混合ガス中の炭化水素ガスのモル分率
を20%以下とするものである。
The method for coating an optical fiber with carbon according to the present invention keeps the inside of the container 2 in which the optical fiber 1 is set in a depressurized state as shown in FIG.
Is supplied with high frequency power to generate plasma 4 around the optical fiber 1, and a hermetic raw material is supplied into the plasma 4 to form a carbon hermetic coating film on the local surface of the optical fiber 1. In the carbon coating method, the gas pressure in the container 2 is set to 1.5 To.
The mole fraction of the hydrocarbon gas in the mixed gas of the hydrocarbon gas and the argon in the plasma 4 to be generated is 20% or less.

【0008】[0008]

【作用】本発明では生成させるプラズマ中の炭化水素ガ
スとアルゴンの混合ガス中の炭化水素ガスのモル分率を
20%以下とする(混合ガス中の炭化水素系原料の割合
を小さくする)ので、水素含有量の極めて少ないカーボ
ン被覆を光ファイバ上に施すことができる。また、容器
2内のガス圧を1.5Torr以下とし(ガス圧を下
げ)たので、光ファイバ1の表面に密着性の良いカーボ
ンハーメチック被覆膜が生成される。
In the present invention, the mole fraction of the hydrocarbon gas in the mixed gas of hydrocarbon gas and argon in the generated plasma is set to 20% or less (the ratio of the hydrocarbon-based raw material in the mixed gas is reduced). A carbon coating with a very low hydrogen content can be applied to the optical fiber. Moreover, since the gas pressure in the container 2 is set to 1.5 Torr or less (the gas pressure is lowered), a carbon hermetic coating film having good adhesion is formed on the surface of the optical fiber 1.

【0009】[0009]

【実施例】本発明の光ファイバのカーボンハーメチック
被覆方法の一実施例として図1のハーメチック被覆装置
を用い、エチレンとアルゴンの混合ガスを用いたプラズ
マ4によりカ−ボンハ−メチック被覆膜の生成を行っ
た。図1のハーメチック被覆装置はチャンバ(容器)2
内を真空ポンプで排気して容器2内の真空度を約0.0
1〜5Torrにすることができるようにしてあり、こ
の容器2内に円筒状の中空電極3が配置され、同中空電
極3内に光ファイバ1を縦向きに貫通配置してある。
EXAMPLE As a carbon hermetic coating method for an optical fiber according to the present invention, a carbon hermetic coating film is formed by plasma 4 using a mixed gas of ethylene and argon, using the hermetic coating apparatus shown in FIG. I went. The hermetic coating apparatus shown in FIG. 1 has a chamber 2
The inside of the container 2 is evacuated by a vacuum pump to adjust the degree of vacuum in the container 2 to about 0.0.
The container 2 has a hollow cylindrical electrode 3 arranged therein, and the hollow electrode 3 has an optical fiber 1 vertically extending therethrough.

【0010】そして、図1の高周波発振器5の高周波出
力を約60W、周波数を13.56MHzとし、容器2
内を真空ポンプで排気し、混合ガスの真空密度を約0.
3Torrとした。ハーメチック用原料にはエチレンを
用いた。ハーメチック用原料は成膜速度に違いはあるも
のの炭化水素系原料ならばメタン、アセチレン等でも可
能である。また、ガス圧力(真空度)は1.5Torr
が上限であり、これを越えるとガス混合比を変えても密
着の良いカーボンハーメチック被覆膜は生成しない。
Then, the high frequency output of the high frequency oscillator 5 in FIG. 1 is set to about 60 W and the frequency is set to 13.56 MHz, and the container 2
The interior is evacuated with a vacuum pump, and the vacuum density of the mixed gas is adjusted to about 0.
It was set to 3 Torr. Ethylene was used as a hermetic raw material. The hermetic raw material may be methane, acetylene or the like as long as it is a hydrocarbon-based raw material although the film forming rate is different. The gas pressure (vacuum degree) is 1.5 Torr.
Is the upper limit, and above this range, a carbon hermetic coating film having good adhesion is not formed even if the gas mixing ratio is changed.

【0011】サンプルとして、通信用のカ−ボン被覆光
ファイバ(ファイバ径 125μm、カ−ボン膜厚い1000
Å、樹脂皮膜径250 μm)を用い、その光ファイバ1の
樹脂被覆層を除去してからその除去部分を切断し、切断
された2本のファイバの切断端面を突合わせてアーク放
電により融着接続した。融着接続部はアーク放電により
約3mmに渡ってカーボンが剥れている。このファイバ
1を内径約10mm、高さ約10mmの筒形の電極3内
中央に位置するように貫通配置(セット)し、成膜時間
を約60秒とし、高周波発振器5からマッチング回路6
を通して高周波電圧を中空電極3へ印加して光ファイバ
1の周囲にプラズマ4を生成させ、このプラズマ4中に
ハーメチック用原料を供給すること光ファイバ1の融着
接続部にカーボンハーメチック被覆膜を再被覆した。
As a sample, a carbon-coated optical fiber for communication (fiber diameter 125 μm, carbon film thickness 1000)
Å, the resin coating diameter is 250 μm), the resin coating layer of the optical fiber 1 is removed, the removed portion is cut, and the cut end faces of the two cut fibers are abutted and fused by arc discharge. Connected Carbon is peeled off from the fusion spliced part by arc discharge for about 3 mm. The fiber 1 is pierced (set) so as to be located in the center of the cylindrical electrode 3 having an inner diameter of about 10 mm and a height of about 10 mm, the film formation time is set to about 60 seconds, and the high frequency oscillator 5 to the matching circuit 6 are set.
A high frequency voltage is applied to the hollow electrode 3 through the plasma to generate plasma 4 around the optical fiber 1, and a hermetic raw material is supplied into the plasma 4. Recoated.

【0012】作成したサンプルを電子顕微鏡で観察した
ところ、融着接続部に再被覆したカーボンハーメチック
被覆膜の厚みは500〜800Åであった。また、同被
覆膜の表面は凸凹もほとんどなく平滑であった。
When the prepared sample was observed with an electron microscope, the thickness of the carbon hermetic coating film recoated on the fusion spliced portion was 500 to 800 Å. The surface of the coating film was smooth with almost no irregularities.

【0013】このようにして作成したサンプルを80℃
の温水中に100時間浸漬し、5水準の引張速度で破断
強度を調べ動疲労特性を調べたところ、疲労係数n値が
100以上と、融着接続部に再被覆したカーボンハーメ
チック被覆膜がほぼ完全に水分の透過を防いでいること
がわかった。
The sample prepared in this way is heated to 80 ° C.
It was immersed in warm water for 100 hours and the breaking strength was examined at 5 levels of tensile speed, and the dynamic fatigue characteristics were examined. As a result, the fatigue coefficient n was 100 or more, and It was found that almost completely prevented the permeation of water.

【0014】[0014]

【比較例】比較例として、炭化水素系原料のモル分率を
10%〜80%の範囲で8サンプルを作成し調べた。原
料比80%のサンプルは温水浸漬中にカーボンハーメチ
ック被覆膜が剥離したため引っ張り試験を実施しなかっ
た。この実験の結果を表1に示す。
[Comparative Example] As a comparative example, eight samples were prepared and examined in a mole fraction of the hydrocarbon raw material in the range of 10% to 80%. The tensile test was not carried out on the sample having a raw material ratio of 80% because the carbon hermetic coating film was peeled off during immersion in warm water. The results of this experiment are shown in Table 1.

【0015】モル分率40%以下のサンプルでは疲労係
数n値が約100以上と、接続部に再被覆したカーボン
ハーメチック被覆膜がほぼ完全に水分の透過を防いでい
ることが分かる。
In a sample having a mole fraction of 40% or less, the fatigue coefficient n value is about 100 or more, and it can be seen that the carbon hermetic coating film recoated on the connection portion almost completely prevents moisture permeation.

【0016】また、モル分率45%以上のサンプルは疲
労係数n値が約20〜50であり、水の透過を防止でき
ず、疲労生じていると思われる。
Further, the sample having a mole fraction of 45% or more has a fatigue coefficient n value of about 20 to 50, which cannot prevent the permeation of water and is considered to have caused fatigue.

【0017】[0017]

【表1】 [Table 1]

【0018】[0018]

【発明の効果】本発明の光ファイバのカ−ボン被覆方法
では次のような効果がある。 水素含有量の極めて少ないカーボンハーメチック被
覆膜を光ファイバ1の表面に施すことができ、カーボン
ハーメッチック被覆膜として必要とされる耐水性、水分
透過防止機能を備えたものとなる。 光ファイバ1の表面に密着性の良いカーボンハーメ
チック被覆膜を生成することができる。
The carbon fiber coating method of the present invention has the following effects. A carbon hermetic coating film having an extremely low hydrogen content can be applied to the surface of the optical fiber 1, and it has a water resistance and a water permeation preventing function required for the carbon hermetic coating film. A carbon hermetic coating film having good adhesion can be formed on the surface of the optical fiber 1.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の光ファイバのカーボン被覆方法の説明
図である。
FIG. 1 is an explanatory diagram of a carbon coating method for an optical fiber according to the present invention.

【符号の説明】[Explanation of symbols]

1 光ファイバ 2 容器 3 中空電極 4 プラズマ 1 Optical fiber 2 Container 3 Hollow electrode 4 Plasma

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 光ファイバ1をセットした容器2内を減
圧状態に保ち、同容器2内の中空電極3に高周波電力を
供給して光ファイバ1の周囲にプラズマ4を生成させ、
このプラズマ4中にハーメチック用原料を供給すること
により光ファイバ1の局所表面にカ−ボンハーメチック
被覆膜を形成する光ファイバのカ−ボン被覆方法におい
て、前記容器2内のガス圧を1.5Torr以下とし、
且つ生成させるプラズマ4中の炭化水素ガスとアルゴン
の混合ガス中の炭化水素ガスのモル分率を20%以下と
することを特徴とする光ファイバのカ−ボン被覆方法。
1. A container 2 in which an optical fiber 1 is set is kept in a depressurized state, and high frequency power is supplied to a hollow electrode 3 in the container 2 to generate plasma 4 around the optical fiber 1.
In the carbon fiber coating method for forming a carbon hermetic coating film on the local surface of the optical fiber 1 by supplying the hermetic raw material into the plasma 4, the gas pressure in the container 2 is set to 1. Less than 5 Torr,
A carbon coating method for an optical fiber, characterized in that the mole fraction of the hydrocarbon gas in the mixed gas of the hydrocarbon gas and the argon in the plasma 4 to be generated is 20% or less.
JP4126906A 1992-04-20 1992-04-20 Method for covering optical fiber with carbon Pending JPH05297239A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4126906A JPH05297239A (en) 1992-04-20 1992-04-20 Method for covering optical fiber with carbon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4126906A JPH05297239A (en) 1992-04-20 1992-04-20 Method for covering optical fiber with carbon

Publications (1)

Publication Number Publication Date
JPH05297239A true JPH05297239A (en) 1993-11-12

Family

ID=14946825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4126906A Pending JPH05297239A (en) 1992-04-20 1992-04-20 Method for covering optical fiber with carbon

Country Status (1)

Country Link
JP (1) JPH05297239A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008287225A (en) * 2007-04-17 2008-11-27 Seikoh Giken Co Ltd Optical connector kit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008287225A (en) * 2007-04-17 2008-11-27 Seikoh Giken Co Ltd Optical connector kit

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