JPH05311357A - Shadow-mask material - Google Patents
Shadow-mask materialInfo
- Publication number
- JPH05311357A JPH05311357A JP35669991A JP35669991A JPH05311357A JP H05311357 A JPH05311357 A JP H05311357A JP 35669991 A JP35669991 A JP 35669991A JP 35669991 A JP35669991 A JP 35669991A JP H05311357 A JPH05311357 A JP H05311357A
- Authority
- JP
- Japan
- Prior art keywords
- rolling
- shadow
- mask material
- etching
- controlled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000463 material Substances 0.000 title claims abstract description 21
- 238000004220 aggregation Methods 0.000 claims abstract description 14
- 230000002776 aggregation Effects 0.000 claims abstract description 14
- 238000005096 rolling process Methods 0.000 claims abstract description 14
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims abstract description 13
- 239000013078 crystal Substances 0.000 abstract description 22
- 238000005530 etching Methods 0.000 abstract description 21
- 238000000137 annealing Methods 0.000 abstract description 14
- 238000001953 recrystallisation Methods 0.000 description 7
- 239000000956 alloy Substances 0.000 description 3
- 238000005097 cold rolling Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- 229910000655 Killed steel Inorganic materials 0.000 description 2
- RQMIWLMVTCKXAQ-UHFFFAOYSA-N [AlH3].[C] Chemical compound [AlH3].[C] RQMIWLMVTCKXAQ-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Electrodes For Cathode-Ray Tubes (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、カラーテレビジョン用
受像管に用いられるシャドウマスク材に関するものであ
り、特には結晶粒度及び集合組織を特定範囲に指定した
Fe−Ni系高精細度カラーテレビジョン用受像管用シ
ャドウスク材に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shadow mask material used in a picture tube for a color television, and more particularly to an Fe-Ni-based high definition color television in which crystal grain size and texture are specified in specific ranges. The present invention relates to a shadow mask material for a picture tube for John.
【0002】[0002]
【従来技術】カラーテレビジョン受像管には色選別用電
極としてシャドウマスクが使用されている。2. Description of the Related Art A shadow mask is used as a color selection electrode in a color television picture tube.
【0003】シャドウマスク用の材料としては、低炭素
アルミキルド鋼がこれまで使用されてきたが、最近では
低熱膨張特性を有するアンバー合金材(Fe−36%N
i)が使用されることが多くなっている。As a material for a shadow mask, low carbon aluminum killed steel has been used so far, but recently, an amber alloy material (Fe-36% N) having a low thermal expansion characteristic has been used.
i) is more often used.
【0004】それは次の理由によるものである。すなわ
ち、カラー受像管を動作させた際、シャドウマスクに差
し向けられた電子ビームは、シャドウマスクの開孔を通
過するほか、シャドウマスク非開口部表面に直接射突す
るために、シャドウマスクは時として80℃にも達する
程に加熱される。この際、熱膨張が大きい材料であると
シャドウマスクの熱膨張によって色純度の低下が生じる
わけであるが、熱膨張率の低いFe−Ni系アンバーの
使用によりこの熱膨張による色純度の低下を防止しよう
というものである。This is due to the following reasons. That is, when the color cathode ray tube is operated, the electron beam directed to the shadow mask passes through the aperture of the shadow mask and directly strikes the surface of the shadow mask non-opening portion, so that the shadow mask is occasionally damaged. Is heated up to 80 ° C. At this time, if the material has a large thermal expansion, the thermal expansion of the shadow mask causes a decrease in the color purity, but the use of Fe-Ni-based amber, which has a low thermal expansion coefficient, reduces the color purity due to the thermal expansion. It is to prevent it.
【0005】こうしたシャドウマスクは、幾つかの製造
方式があるが、代表的には、Fe−Ni系アンバー材料
をインゴットから、鍛造を経て、圧延及び焼鈍を繰り返
し、最終冷間圧延により適当な厚さのシャドウマスク材
とした後、必要に応じ最終再結晶焼鈍を行ない、そこに
多数の穿孔を例えば塩化第2鉄を使用しての周知のエッ
チングにより形成することが必須である。この後、成形
及び黒化処理等の周知の工程が実施されてシャドウマス
クが製造される。There are several manufacturing methods for such a shadow mask, but typically, an Fe-Ni amber material is ingot, forged, repeatedly rolled and annealed, and finally cold-rolled to an appropriate thickness. It is indispensable to carry out final recrystallization annealing if necessary after forming the shadow mask material and to form a large number of perforations therein by well-known etching using ferric chloride, for example. After that, well-known processes such as molding and blackening are performed to manufacture the shadow mask.
【0006】しかし、このFe−Ni系アンバー合金は
従来の低炭素アルミキルド鋼に比べてエッチング穿孔性
が劣ることが問題となっている。この問題は各結晶粒の
結晶方位によってエッチングスピードが異なるため、多
結晶体であるFe−Ni系シャドウマスク材をエッチン
グすると、結晶粒に沿って凹凸ができ、適正な穿孔が形
成されず、シャドウマスクの品質を低下させるというも
のである。However, this Fe-Ni-based amber alloy has a problem that it is inferior in etching piercing property to the conventional low carbon aluminum killed steel. This problem is because the etching speed varies depending on the crystal orientation of each crystal grain, so when etching the Fe-Ni-based shadow mask material, which is a polycrystalline body, irregularities are formed along the crystal grains, and proper perforations are not formed, resulting in shadows. The quality of the mask is reduced.
【0007】これに関して、結晶粒が小さいほどエッチ
ング後の孔形状及びエッチング壁面が平滑になり、マス
クの品質が向上することは従来より知られており、特開
昭61−39343号においては開孔壁にかかる結晶粒
の個数が規定されている。更には、例えば特開昭59−
149638号に記載されるように、従来結晶粒を微細
化することとともに、圧延面への{100}面の集合度
を高めることでエッチングの均一化をはかることが行わ
れていた。In this regard, it has been conventionally known that the smaller the crystal grains, the smoother the hole shape and the etched wall surface after etching and the better the quality of the mask. The number of crystal grains on the wall is specified. Furthermore, for example, JP-A-59-
As described in Japanese Patent No. 149638, it has been conventionally attempted to uniformize etching by making crystal grains fine and increasing the degree of aggregation of {100} planes with respect to the rolling plane.
【0008】[0008]
【発明が解決しようとする課題】しかし、これでも最近
需要の増加している高精細度マスクに対応する材料とし
ては不充分であった。本発明の課題は、従来より均一な
エッチング穿孔性を有するFe−Ni系高精細度カラー
テレビジョン用受像管用シャドウスク材を開発すること
である。However, this is still insufficient as a material for a high definition mask, which has recently been in increasing demand. An object of the present invention is to develop a shadow mask material for a picture tube for an Fe-Ni-based high-definition color television having a more uniform etching perforation property than ever before.
【0009】[0009]
【課題を解決するための手段】本発明者らはかかる点に
鑑み種々の研究を行なった結果、従来シャドウマスク圧
延面への{100}面の集合度を高めていたことがむし
ろ問題で、高精細度マスク用としては逆に{100}面
の集合度をできるだけ低くすることが望ましいことを見
い出した。この従来とは逆の知見に基づいて、本発明
は、結晶粒度が粒度番号で9.0以上で、かつ圧延面へ
の{100}面の集合度が35%未満であることを特徴
とするFe−Ni系シャドウスク材を提供するものであ
る。SUMMARY OF THE INVENTION As a result of various studies conducted by the present inventors in view of such a point, it was rather a problem that the degree of aggregation of {100} planes on the conventional shadow mask rolling surface was increased. On the contrary, it was found that it is desirable to make the degree of aggregation of {100} faces as low as possible for a high definition mask. Based on this knowledge opposite to the conventional one, the present invention is characterized in that the grain size is 9.0 or more in grain size number, and the degree of aggregation of {100} faces to the rolled face is less than 35%. An Fe-Ni-based shadow mask material is provided.
【0010】[0010]
【作用】結晶粒が小さいほどエッチング後の孔形状及び
エッチング壁面が平滑になり、マスクの品質が向上す
る。結晶粒度が粒度番号で9.0以上とすることによ
り、平滑なエッチング後の孔形状及びエッチング壁面が
保証される。結晶方位として圧延面への{100}面の
集合度を35%未満とすることにより、結晶方位はラン
ダムとなり、エッチング均一性を向上する。The smaller the crystal grains, the smoother the hole shape and the etched wall surface after etching, and the quality of the mask is improved. When the grain size is 9.0 or more in terms of grain size, a smooth post-etching hole shape and etching wall surface are guaranteed. When the degree of aggregation of {100} planes with respect to the rolled surface is less than 35% as the crystal orientation, the crystal orientation becomes random and the etching uniformity is improved.
【0011】[0011]
【実施例】Fe−Ni系シャドウスク材とは、アンバー
合金材(Fe−36%Ni)に代表される、Fe−34
〜38重量%Ni範囲のものを包括し、添加元素とし
て、Si、Mn、Cr、Co、Ti、Zr、Mo、N
b、B、V、Be、Al、Ta及びWの1種以上を添加
することも出来る。[Examples] The Fe-Ni-based shadow disk material is Fe-34 typified by an amber alloy material (Fe-36% Ni).
Up to 38 wt% Ni, including Si, Mn, Cr, Co, Ti, Zr, Mo, N as additional elements
It is also possible to add one or more of b, B, V, Be, Al, Ta and W.
【0012】Fe−Ni系シャドウマスク材は、適宜組
成の溶製インゴットから、鍛造後、圧延及び焼鈍を繰り
返し、最終冷間圧延により適当な厚さのシャドウマスク
材とした後、必要に応じて最終再結晶焼鈍或いは歪取焼
鈍を行ない、そこに多数の穿孔をフォトレジストを塗布
し、パターンを焼き付けて現像した後、例えば塩化第2
鉄のようなエッチング液でエッチング加工し、その後レ
ジストを除去する周知のフォトエッチング技術により形
成することによって作製される。The Fe-Ni-based shadow mask material is prepared by melting an ingot having an appropriate composition, repeating forging, rolling and annealing, and finally cold rolling to obtain a shadow mask material having an appropriate thickness. After performing final recrystallization annealing or strain relief annealing, a large number of perforations are coated with a photoresist, and a pattern is baked and developed.
It is manufactured by etching using an etching solution such as iron, and then forming by a well-known photoetching technique of removing the resist.
【0013】エッチングに際しては、結晶組織が重要で
ある。本発明においては、結晶粒度が粒度番号で9.0
以上、好ましくは9.5〜12とされる。そして圧延面
への{100}面の集合度が35%未満である必要があ
る。好ましい集合度は30%未満である。Crystal structure is important for etching. In the present invention, the grain size is 9.0 in terms of grain size number.
As described above, it is preferably 9.5 to 12. Then, the degree of aggregation of {100} planes on the rolled surface needs to be less than 35%. The preferred degree of aggregation is less than 30%.
【0014】その限定理由を述べる。結晶粒が小さいほ
どエッチング後の孔形状及びエッチング壁面が平滑にな
り、マスクの品質が向上することは従来より知られてお
り、先に挙げた特開昭61−39343号においては開
孔壁にかかる結晶粒の個数が規定されている。本発明に
おいてもこの点は同様で、結晶粒度が粒度番号で9.0
以上であることが必要である。好ましくは9.5〜12
の範囲とされる。結晶粒度が粒度番号はJISの規定に
基づく。また、特開昭59−149638号により知ら
れるように、{100}面の集合度を高くすることが従
来行われてきたが、一つの方位を集合させると、たとえ
一つ一つの結晶粒は小さくても隣りあった結晶粒の方位
がほとんど同じになるために、実際上エッチングにおい
ては結晶粒が大きい場合と同じ結果になってしまい好ま
しくない。そこで、結晶方位としてはできるだけランダ
ムのほうがよく、圧延面への{100}面の集合度は3
5%未満である必要がある。好ましい集合度は30%未
満である。The reason for the limitation will be described. It has been conventionally known that the smaller the crystal grains, the smoother the hole shape and the etched wall surface after etching and the better the quality of the mask. In the above-mentioned JP-A-61-39343, the opening wall is The number of such crystal grains is specified. In the present invention, this point is the same, and the crystal grain size is 9.0 in the grain size number.
It is necessary to be above. Preferably 9.5-12
The range is. The crystal grain size is based on the JIS standard. Further, as known from JP-A-59-149638, it has been conventionally performed to increase the degree of aggregation of {100} planes. However, when one orientation is aggregated, each crystal grain becomes Even if it is small, the crystal grains adjacent to each other have almost the same orientation, so that the actual result is the same as in the case where the crystal grain is large, which is not preferable. Therefore, the crystallographic orientation should be as random as possible, and the degree of aggregation of {100} planes on the rolling plane should be 3
It should be less than 5%. The preferred degree of aggregation is less than 30%.
【0015】本発明において好ましい製造条件は次の通
りである:熱間圧延後、80%を超えない圧延度で圧
延、再結晶焼鈍を行った後、再び80%を超えない圧延
度で圧延する。次に、650〜1150℃で5秒〜60
分焼鈍し、結晶粒を微細化する。最終圧延度は10〜5
0%とし、最終再結晶焼鈍が必要な場合は650〜11
50℃で5秒〜60分行う。In the present invention, preferable manufacturing conditions are as follows: hot rolling, rolling at a rolling degree not exceeding 80%, recrystallization annealing, and rolling again at a rolling degree not exceeding 80%. .. Then, at 650 to 1150 ° C. for 5 seconds to 60
Minute annealing is performed to refine the crystal grains. Final rolling degree is 10-5
0% and 650-11 if final recrystallization annealing is required
It is carried out at 50 ° C. for 5 seconds to 60 minutes.
【0016】(実施例及び比較例)供試材の化学成分と
してはFe−36%Ni合金を用いた。同一インゴット
から、最終再結晶焼鈍前の冷延加工度と、最終再結晶焼
鈍条件を変化させて第1表に示す結晶粒度と{100}
面の集合度を持つ供試材を作製した。なお、すべての供
試材は、最終再結晶焼鈍後に加工度15%の最終冷間圧
延を行い板厚0.15mmの冷延板とした。Examples and Comparative Examples Fe-36% Ni alloy was used as the chemical composition of the sample material. From the same ingot, the degree of cold rolling before the final recrystallization annealing and the final recrystallization annealing conditions were changed to obtain the grain sizes and {100} shown in Table 1.
A test material having a degree of surface aggregation was prepared. In addition, all the test materials were subjected to final cold rolling with a workability of 15% after final recrystallization annealing to obtain cold-rolled sheets with a plate thickness of 0.15 mm.
【0017】この冷延板に塩化第2鉄を主成分とするエ
ッチング液により多数の開孔を形成し、この際のエッチ
ング穿孔性を評価した。その結果も第1表に合わせて示
す。なお、マスクパターンはエッチングの難しい高精細
なものを用いた。A large number of holes were formed in the cold rolled sheet by an etching solution containing ferric chloride as a main component, and the etching piercing property at this time was evaluated. The results are also shown in Table 1. The mask pattern used had a high definition and was difficult to etch.
【0018】[0018]
【表1】 [Table 1]
【0019】表1からわかるように、本発明例は比較例
に比べて良好なエッチング穿孔性を示し、均一な穿孔を
有する良好な品質のマスクを生成することができた。As can be seen from Table 1, the inventive examples showed better etching piercing properties than the comparative examples and were able to produce good quality masks with uniform piercing.
【0020】[0020]
【発明の効果】従来より均一なエッチング穿孔性を有す
るFe−Ni系シャドウマスク材を開発することに成功
し、最近需要の増加している高精細度カラーテレビジョ
ン用受像管用シャドウマスクに対処することが出来る。Industrial Applicability The Fe-Ni-based shadow mask material having more uniform etching perforation than the conventional one has been successfully developed, and the shadow mask for a picture tube for a high-definition color television, which has recently been increasing in demand, has been dealt with. You can
Claims (1)
つ圧延面への{100}面の集合度が35%未満である
ことを特徴とするFe−Ni系シャドウスク材。1. An Fe-Ni-based shadow mask material having a grain size of 9.0 or more in terms of grain size and a degree of aggregation of {100} planes with respect to a rolling plane of less than 35%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35669991A JPH05311357A (en) | 1991-12-26 | 1991-12-26 | Shadow-mask material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35669991A JPH05311357A (en) | 1991-12-26 | 1991-12-26 | Shadow-mask material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05311357A true JPH05311357A (en) | 1993-11-22 |
Family
ID=18450340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35669991A Withdrawn JPH05311357A (en) | 1991-12-26 | 1991-12-26 | Shadow-mask material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05311357A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100225448B1 (en) * | 1996-03-07 | 1999-10-15 | 사카모토 타카시 | Manufacturing method of Fe-Ni-based alloy plate for shadow mask |
| GB2336713A (en) * | 1998-04-21 | 1999-10-27 | Lg Electronics Inc | Shadow mask for colour crt and method of fabricating the same |
| WO2003069007A1 (en) * | 2002-02-15 | 2003-08-21 | Jfe Steel Corporation | Low thermal expansion alloy thin sheet and its production method |
| KR100418813B1 (en) * | 1996-11-08 | 2004-04-29 | 엘지마이크론 주식회사 | Method for fabricating material of shadow mask |
-
1991
- 1991-12-26 JP JP35669991A patent/JPH05311357A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100225448B1 (en) * | 1996-03-07 | 1999-10-15 | 사카모토 타카시 | Manufacturing method of Fe-Ni-based alloy plate for shadow mask |
| KR100418813B1 (en) * | 1996-11-08 | 2004-04-29 | 엘지마이크론 주식회사 | Method for fabricating material of shadow mask |
| GB2336713A (en) * | 1998-04-21 | 1999-10-27 | Lg Electronics Inc | Shadow mask for colour crt and method of fabricating the same |
| GB2336713B (en) * | 1998-04-21 | 2003-03-05 | Lg Electronics Inc | Shadow mask for color crt and method of fabricating the same |
| WO2003069007A1 (en) * | 2002-02-15 | 2003-08-21 | Jfe Steel Corporation | Low thermal expansion alloy thin sheet and its production method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990311 |