JPH0531760B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates primarily to an irradiation window used in an electron beam irradiation device.

(Description of Prior Art) FIG. 1 is a schematic diagram showing an accelerator section of an electron beam irradiation device. A DC power source (not shown) is connected to the cable 1, and the electron beam accelerated by the accelerating tube 2 is scanned by the scanner 3, and is irradiated to an object in the atmosphere through the irradiation window 4.

FIG. 2 is a perspective view of a water cooling grid used in the irradiation window. The water cooling grid 5 is constructed by inserting a plurality of copper (oxygen-free copper) pipes 52 to which crosspieces 53 are brazed into a frame 51 and soldering them with silver. The material of the crosspiece 53 is, for example, nickel, and the material of the frame 5 is
The material of 1 is, for example, stainless steel or nickel. A water passage is formed in the frame 51, and cooling water enters through one of the waterway holes 54, flows through the plurality of copper pipes 52 in parallel, and exits from the other waterway hole 54. This cools the window foil (not shown) that separates the vacuum side from the atmosphere side.

In this case, if the length L of the irradiation window 4 is about 30 cm or less, a water cooling grid as shown in FIG. 2 may be used as it is for the irradiation window 4. However, when the length L of the irradiation window 4 becomes longer than about 30 cm, for example, when it becomes 60 cm or 90 cm, the length
It is not easy to manufacture a long water cooling grid 5 of 60 cm or 90 cm, and special large-scale equipment is required for this purpose. Furthermore, the yield of the product is also poor due to the increase in the number of defects.

(Object of the Invention) The main object of the present invention is to provide a long irradiation window that is easy to manufacture and has a high yield.

(Structure of the Invention) The irradiation window of the present invention removably fixes a plurality of unitized water-cooling grids to a holder, and when the water-cooling grids are fixed to the holder, the pipe holes of the holder fit into the channel holes of the water-cooling grid. Insert the water pipe with the fixing plate hermetically welded into the pipe hole of the holder, vacuum-seal between the fixing plate and the holder with a gasket, and connect the water cooling grid waterway hole and the water pipe hole. It is characterized by having a water-sealed connection part with a gasket.

(Description of Embodiments) Prior to describing embodiments of the present invention, for comparison purposes, an irradiation window that is simply a unitized water cooling grid will be described with reference to FIGS. 3 to 5.

Of these, FIG. 3 is a perspective view showing a part of the holder that fixes the unitized water cooling grid, and FIG. 4 is a plan view partially showing the state in which the water cooling grid is fixed to the holder. FIG. 5 is a partial sectional view taken along the line - in FIG. 4. In this example, a water cooling grid 5 as shown in FIG. 2 with a length M of about 25 cm to 30 cm is made into a unit.
The irradiation window 4 is constructed by fixing a plurality of these to a holder. That is, the water pipe 7 is welded to the water channel hole 54 of the frame 51, a plurality of such water cooling grids 5 are sandwiched between the holder 6 which is divided into upper and lower parts, and the water pipe 7 is welded to the holder 6. , the entire circumference of the seam 61 is hermetically welded. As shown in FIG. 5, the holder 6 is provided with a window foil 9 that separates the vacuum side VS and the atmosphere side AS by a foil pressing plate 10.
is fixed. The spaces between the holder 6 and the scanner 3 and between the holder 6 and the window foil 9 (foil pressing plate 10) are vacuum-sealed by O-rings 17 and 18, respectively. Note that numerals 20 and 21 indicate welding locations.

By forming multiple water cooling grids into a unit and fixing them to a holder as described above, even when producing long irradiation windows with a length of about 30 cm or more, it can be easily produced without requiring special large equipment. can. In addition, since the water cooling grid does not have to be long, the product yield is also good.

However, in the above-mentioned irradiation window, since the holder 6 is hermetically welded all around, there remain problems such as large mold distortion and difficulty in fitting with the water pipe 7. In addition, if a leak is discovered during a tightness test after fabrication, or if any part of the water cooling grid is damaged during use, e.g. copper pipe 5.
If one of the crosspieces 53 becomes clogged or one of the crosspieces 53 becomes bent, a new set of irradiation windows must be manufactured because they are integrated with a welded structure. There is also the problem.

Therefore, an irradiation window according to the present invention that can solve these problems will be described next. FIG. 6 is a perspective view showing a part of the holder for fixing the unitized water cooling grid, FIG. 7 is a plan view partially showing the state in which the water cooling grid is fixed to the holder, and FIG. FIG. 7 is a partial cross-sectional view taken along line - in FIG. 7; Hereinafter, differences from the above-mentioned irradiation window will be mainly explained.

The holder 11 is not divided into upper and lower halves as described above, but is of an integrated type.
11', it is fixed in a hanging manner. A pipe hole 112 is formed on the side surface of the holder 11 at a position that communicates with the channel hole 54 of the water cooling grid 5 when the water cooling grid 5 is fixed.
The area around the pipe hole 112 is a sealing surface.
On the other hand, a fixing plate 12 is hermetically welded to the water pipe 13 (see welding point 19 in Figure 8), and this fixing plate 12 has a groove in which an O-ring 15 as a seal is inserted. has been done. Such a water pipe 13 is inserted into a pipe hole 112, fixed with a bolt 14, and vacuum-sealed with an O-ring 15.

On the other hand, when the water passage pipe hole 13 is inserted into the pipe hole 112, the water passage hole 54 of the frame 51 and the water passage pipe 13 are inserted into the pipe hole 112.
It is connected to allow water to pass through. Moreover, the area around the water channel hole 54 is a sealing surface, and the tip of the water pipe 13 is also grooved, into which an O-ring 16 is inserted as a seal. The communication part is water sealed. In this way, the welding is only between the water pipe 13 and the fixed plate 12, and the
The heavy seal structure allows the water system and vacuum system to be sealed at the same time.

Note that due to assembly errors in each unit of the water cooling grid, variations may occur in the waterway sealing surface, which is the contact surface of the tip of the water pipe 13. Adjustment can be made by tightening the hole and using this as a fulcrum. At this time, the position of the frame 51 is adjusted at the same time and fixed with fixing bolts 111, 111'. In this case, among the fixing bolts 111, 111',
Tighten only the 2 to 4 fixing bolts 111',
If you leave some play in the remaining bolts, you can easily adjust the sealing surface. By doing the above, even if the unit is once removed, the same position can be easily reproduced.

Additionally, although the length of insertion of the water pipe 13 may differ depending on each unit, as long as it is used at the location where it was first adjusted, it can be fixed simply with the bolt 14 from the outside, and the internal waterway seal and external Vacuum sealing can be performed at the same time, and it is also reproducible.

In such an irradiation window, a welded structure like the examples shown in FIGS. 3 to 5 is not used to prevent partial damage or failure of the unitized water cooling grid 5. This can be done by simply replacing the damaged or defective unit, and there is no need to manufacture a new irradiation window. Further, since no welding distortion occurs during the manufacture of the holder, the irradiation window can be manufactured with high precision almost equal to machining precision. This makes it possible to specify the manufacturing time and technique in advance without relying on the skills of the individual welder, making process control and quality control extremely easy.

Although the present invention has been described above using an example of an irradiation window for an electron beam irradiation device, the present invention is not limited thereto, and can be applied to an irradiation window for irradiating charged particles from a vacuum into the atmosphere. Can be widely applied.

(Effects of the Invention) As described above, according to the present invention, a long irradiation window can be easily manufactured, and the yield of the product is also good.

In addition, partial damage or defects in the unitized water cooling grid can be dealt with by simply replacing the damaged or defective unit, making it possible to manufacture the entire irradiation window anew. There's no need. Further, since no welding distortion occurs during the manufacture of the holder, the irradiation window can be manufactured with high precision almost equal to machining precision. This makes it possible to specify the manufacturing time and technique in advance without relying on the skills of the individual welder, making process control and quality control extremely easy.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing an accelerator section of an electron beam irradiation device. FIG. 2 is a perspective view of a water cooling grid used in the irradiation window. Figures 3 to 5 are diagrams partially showing an irradiation window that is simply a unitized water cooling grid.
The figure is a schematic view showing a part of the holder that fixes the water cooling grid, FIG. 4 is a plan view partially showing the state in which the water cooling grid is fixed to the holder, and FIG. FIG. 6 to 8 are views partially showing an irradiation window according to an embodiment of the present invention, in which FIG. 6 is a perspective view showing a part of a holder for fixing a water cooling grid; 7 is a plan view partially showing a state in which the water cooling grid is fixed to the holder, and FIG. 8 is a partial sectional view taken along the line - in FIG. 7. 5...Water cooling grid, 54...Water hole, 11...Holder, 112...Pipe hole, 12...Fixing plate, 13...Water pipe, 15, 16...O ring.

Claims (1)

[Claims] 1 An irradiation window used to irradiate charged particles from a vacuum into the atmosphere, in which a plurality of unitized water-cooled grids are removably fixed to a holder, and when the water-cooled grids are fixed to the holder, the holder The pipe hole of the pipe is connected to the water channel hole of the water-cooling grid, and the water pipe with the fixing plate hermetically welded is inserted into the pipe hole of the holder, and the space between the fixing plate and the holder is vacuum-sealed with a gasket, and the water-cooling grid is connected to the water-cooling grid. An irradiation window characterized in that a water channel hole and a water pipe are communicated with each other, and the communication part is sealed with water seal.