JPH05323247A - Optical resonator array - Google Patents

Optical resonator array

Info

Publication number
JPH05323247A
JPH05323247A JP4125292A JP12529292A JPH05323247A JP H05323247 A JPH05323247 A JP H05323247A JP 4125292 A JP4125292 A JP 4125292A JP 12529292 A JP12529292 A JP 12529292A JP H05323247 A JPH05323247 A JP H05323247A
Authority
JP
Japan
Prior art keywords
waveguide
resonator
optical
resonators
optical resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4125292A
Other languages
Japanese (ja)
Inventor
Yoshihisa Sakai
義久 界
Osamu Mitomi
修 三冨
Hiroshi Miyazawa
弘 宮沢
Hiroki Ito
弘樹 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP4125292A priority Critical patent/JPH05323247A/en
Publication of JPH05323247A publication Critical patent/JPH05323247A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Communication System (AREA)
  • Filters And Equalizers (AREA)

Abstract

(57)【要約】 【目的】 共振器相互の誤差がなく、安定性の高い、実
用的な光学共振器アレイを実現する。 【構成】 複数の導波路型共振器が同一基板上に隣接し
て平行に設けられている光学共振器アレイにおいて、前
記複数の導波路型共振器2が電気光学効果を有する導波
路媒質からなり、所定の電圧を印加して当該導波路媒質
の屈折率を制御する手段と、温度安定化装置11とが設
けられている。前記複数の導波路型共振器2の内の1つ
に、所定の周波数で変調された基準光を入射し、該基準
光と前記導波路型共振器2の1つの共振周波数とのずれ
を、電気信号として電極を介して前記導波路媒質及び前
記温度安定化装置11に帰還し、前記導波路媒質の屈折
率を制御する手段が設けられている。また、所定の周波
数で導波路型共振器長を変調しながら、該複数の導波路
型共振器2の内の1つに基準光を入射する。
(57) [Abstract] [Purpose] To realize a practical optical resonator array with high stability and no error between resonators. In an optical resonator array in which a plurality of waveguide type resonators are provided adjacent to each other in parallel on the same substrate, the plurality of waveguide type resonators 2 are made of a waveguide medium having an electro-optical effect. Means for controlling the refractive index of the waveguide medium by applying a predetermined voltage and the temperature stabilizing device 11 are provided. A reference light modulated at a predetermined frequency is incident on one of the plurality of waveguide resonators 2, and a deviation between the reference light and one resonance frequency of the waveguide resonator 2 is given. Means are provided for returning an electric signal to the waveguide medium and the temperature stabilizing device 11 via electrodes to control the refractive index of the waveguide medium. Further, the reference light is made incident on one of the plurality of waveguide type resonators 2 while modulating the length of the waveguide type resonator at a predetermined frequency.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光学共振器アレイに関
し、特に、例えば、大容量の周波数分割多重光通信にお
ける送信源の光周波数標準及び受信部の光周波数選択フ
ィルタとして用いられる光学共振器アレイに関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical resonator array, and more particularly to an optical resonator used as an optical frequency standard of a transmission source and an optical frequency selection filter of a receiving unit in large-capacity frequency division multiplexing optical communication. It is about arrays.

【0002】[0002]

【従来の技術】図7は、従来の光学共振器アレイの概略
構成を示すブロック構成図であり、1は導波路型共振器
2が形成された光学媒質基板、2は導波路型共振器、3
は高反射膜、4は入射光、5は出射光である。図7で
は、3本の導波路型共振器2のみ示したが、実際は数十
本以上の導波路型共振器2からなっている。
2. Description of the Related Art FIG. 7 is a block diagram showing a schematic configuration of a conventional optical resonator array, 1 is an optical medium substrate on which a waveguide type resonator 2 is formed, 2 is a waveguide type resonator, Three
Is a high reflection film, 4 is incident light, and 5 is outgoing light. In FIG. 7, only three waveguide type resonators 2 are shown, but actually, several tens or more waveguide type resonators 2 are included.

【0003】このような構成の光学共振器アレイにおい
て、複数の入射光4が導波路型共振器(コア)2に入射
している。導波路型共振器2は反射膜3の間隔で決定さ
れる共振周波数間隔の図8に示す共振ピーク特性を持っ
ている。複数の入射光4を入射したとき、この共振特性
を透過した複数の出射光5が得られる。
In the optical resonator array having such a structure, a plurality of incident lights 4 are incident on the waveguide type resonator (core) 2. The waveguide resonator 2 has the resonance peak characteristic shown in FIG. 8 of the resonance frequency interval determined by the interval of the reflection film 3. When a plurality of incident lights 4 are incident, a plurality of emitted lights 5 that pass through this resonance characteristic are obtained.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、かかる
従来の光学共振器アレイでは、導波路型共振器2として
用いる光学媒質の屈折率の温度依存性、熱膨張性によっ
て、外気温度の変動によってその共振特性が変化してし
まう。また、導波路型共振器2毎の導波路長のばらつき
から、いくら均等に作ろうと努力しても、共振特性は均
一にはならない。
However, in such a conventional optical resonator array, due to the temperature dependence and thermal expansion of the refractive index of the optical medium used as the waveguide type resonator 2, its resonance is caused by the fluctuation of the outside air temperature. The characteristics will change. In addition, due to variations in the waveguide length of each waveguide resonator 2, no matter how much effort is made to make them uniform, the resonance characteristics are not uniform.

【0005】本発明は、このような問題点を解決するた
めになされたものであり、本発明の目的は、導波路型共
振器相互の誤差がなく、安定性の高い、実用的な光学共
振器アレイを提供することにある。
The present invention has been made in order to solve such a problem, and an object of the present invention is to provide a practical optical resonance having a high stability without an error between waveguide type resonators. To provide an instrument array.

【0006】本発明の前記ならびにその他の目的及び新
規な特徴は、本明細書の記述及び添付図面によって明ら
かにする。
The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

【0007】[0007]

【課題を解決するための手段】前記問題点を解決するた
めに、本発明の(1)の手段は、複数の導波路型共振器
が同一基板上に隣接して平行に設けられている光学共振
器アレイにおいて、前記複数の導波路型共振器が電気光
学効果を有する導波路媒質からなり、所定の電圧を印加
して当該導波路媒質の屈折率を制御する手段と、温度安
定化装置とが設けられていることを最も主要な特徴とす
る。
In order to solve the above-mentioned problems, the means (1) of the present invention is an optical system in which a plurality of waveguide type resonators are provided adjacent to each other in parallel on the same substrate. In the resonator array, the plurality of waveguide type resonators are made of a waveguide medium having an electro-optical effect, a means for applying a predetermined voltage to control the refractive index of the waveguide medium, and a temperature stabilizing device. Is the most important feature.

【0008】本発明の(2)の手段は、前記(1)の手
段の光学共振器アレイにおいて、前記複数の導波路型共
振器の内の1つに、所定の周波数で変調された基準光を
入射し、該基準光と前記導波路型共振器の1つの共振周
波数とのずれを、電気信号として電極を介して前記導波
路媒質及び前記温度安定化装置に帰還し、前記導波路媒
質の屈折率を制御する手段が設けられていること特徴と
する。
According to a second aspect of the present invention, in the optical resonator array according to the first aspect, one of the plurality of waveguide type resonators has a reference light modulated at a predetermined frequency. Of the reference light and one of the resonance frequencies of the waveguide type resonator is returned to the waveguide medium and the temperature stabilizing device via an electrode as an electric signal, It is characterized in that means for controlling the refractive index is provided.

【0009】本発明の(3)の手段は、前記(1)の手
段の光学共振器アレイにおいて、所定の周波数で導波路
型共振器長を変調しながら、該複数の導波路型共振器の
内の1つに基準光を入射し、該基準光と前記導波路型共
振器の1つの共振周波数とのずれを、電気信号として電
極を介して前記導波路媒質及び前記温度安定化装置に帰
還し、前記導波路媒質の屈折率を制御する手段が設けら
れていることを特徴とする。
According to a third aspect of the present invention, in the optical resonator array according to the first aspect, the plurality of waveguide type resonators are modulated while modulating the length of the waveguide type resonator at a predetermined frequency. A reference light is made incident on one of the two, and a deviation between the reference light and one resonance frequency of the waveguide type resonator is fed back to the waveguide medium and the temperature stabilizing device as an electric signal via an electrode. However, a means for controlling the refractive index of the waveguide medium is provided.

【0010】[0010]

【作用】前述の手段によれば、複数の導波路型共振器を
同一基板上に形成し、さらに、複数の導波路型共振器が
電気光学効果を有する導波路媒質からなり、また、温度
安定化装置を持つことによって安定性を向上させる。さ
らに、複数の導波路型共振器の内の1つに、基準光を入
射し、基準光と導波路型共振器の1つの共振周波数との
ずれを、電気信号として電極を介して導波路媒質及び温
度安定化装置に帰還し、導波路媒質の屈折率を制御する
ことにより、共振周波数を安定化させるので、これまで
には到達できなかった、高精度で高安定な光学共振器ア
レイを実現することができる。
According to the above-mentioned means, a plurality of waveguide type resonators are formed on the same substrate, and further, the plurality of waveguide type resonators are made of a waveguide medium having an electro-optical effect, and are temperature stable. The stability is improved by having a chemical device. Further, the reference light is made incident on one of the plurality of waveguide type resonators, and a deviation between the reference light and one resonance frequency of the waveguide type resonator is converted into an electric signal as an electric signal through the electrode to form the waveguide medium. Also, the resonance frequency is stabilized by returning to the temperature stabilization device and controlling the refractive index of the waveguide medium, thus realizing a highly accurate and highly stable optical resonator array that could not be achieved until now. can do.

【0011】[0011]

【実施例】以下、図面を参照して、本発明の実施例を詳
細に説明する。
Embodiments of the present invention will now be described in detail with reference to the drawings.

【0012】〔実施例1〕図1は、本発明の光学共振器
アレイの実施例1の外観構成を示す斜視図、図2は、図
1の概略構成を示すブロック構成図である。本実施例1
の光学共振器アレイは、図1及び図2に示すように、複
数の導波路型共振器2が形成された光学媒質基板(光学
共振器導波路基板)1、導波路からなる導波路型共振器
(光学共振器)2、高反射膜3、ペルチエ素子などから
なる温度安定化装置(温度調節装置)11、電極12、
重み付け回路13が設けられている。図2では、3本の
導波路型共振器2のみ示したが、実際は数十本以上の導
波路型共振器2からなっている。
[Embodiment 1] FIG. 1 is a perspective view showing an external configuration of an optical resonator array of Embodiment 1 of the present invention, and FIG. 2 is a block diagram showing a schematic configuration of FIG. Example 1
As shown in FIGS. 1 and 2, the optical resonator array of is an optical medium substrate (optical resonator waveguide substrate) 1 on which a plurality of waveguide type resonators 2 are formed, and a waveguide type resonance including a waveguide. Stabilizing device (temperature adjusting device) 11, which includes a resonator (optical resonator) 2, a highly reflective film 3, a Peltier element, and the like, an electrode 12,
A weighting circuit 13 is provided. In FIG. 2, only three waveguide type resonators 2 are shown, but actually, several tens or more waveguide type resonators 2 are included.

【0013】導波路型共振器2は、電極12間の電圧を
変化させることにより、電気光学効果によって、屈折率
が変わり、従って、共振周波数が変化し、それに応じた
透過特性が得られる。
In the waveguide type resonator 2, when the voltage between the electrodes 12 is changed, the refractive index is changed due to the electro-optical effect, and therefore the resonance frequency is changed, and the transmission characteristic corresponding to the change is obtained.

【0014】ところで、導波路型共振器2の両端面をい
くら平行に作ったとしても0.1度程度の誤差が生じて
しまうため、例えば、250μm毎に100個の導波路
型共振器2を形成したとすると、必要な光学媒質基板1
の長さWは25mmであり、そのとき1個目と100個目
の導波路型共振器2の長さLの誤差長△Leは、
By the way, no matter how much the two end faces of the waveguide type resonator 2 are made parallel, an error of about 0.1 degree occurs, so that, for example, 100 waveguide type resonators 2 are formed every 250 μm. If formed, the required optical medium substrate 1
Has a length W of 25 mm, and the error length ΔLe of the length L of the first and the 100th waveguide resonators 2 is

【0015】[0015]

【数1】 △Le=W×tan(0.1°) =0.044mm (1) となる。例えば、10GHz間隔の周波数分割多重(F
DM)光通信に用いようとしたとき、その導波路型共振
器長Lは、
## EQU1 ## ΔLe = W × tan (0.1 °) = 0.044 mm (1) For example, frequency division multiplexing (F
DM) When it is intended to be used for optical communication, its waveguide type resonator length L is

【0016】[0016]

【数2】 L=C/(2n1f) (2) ただし、Cは光速(2.998x108m/s)、n1
導波路の屈折率で、例えばLiNbO3では2.14、f
は周波数間隔(2.5GHz)である。したがって、導
波路型共振器長Lは28mmであるとすると、△Le/L
=0.0063より、±63MHzの誤差が生じてしま
う。
L = C / (2n 1 f) (2) where C is the speed of light (2.998 × 10 8 m / s), n 1 is the refractive index of the waveguide, and for example LiNbO 3 is 2.14, f
Is the frequency interval (2.5 GHz). Therefore, if the waveguide type resonator length L is 28 mm, then ΔLe / L
= 0.0063, an error of ± 63 MHz occurs.

【0017】そこで、その誤差分を重み付け回路13を
通して電極12に予め、その誤差分を補うように、電圧
が発生するようにしておく。
Therefore, the voltage is generated in advance in the electrode 12 through the weighting circuit 13 so as to compensate for the error.

【0018】導波路型共振器長Lの変動による導波路型
共振器2の特性への影響を考察するために、導波路型共
振器2の共振ピーク周波数の安定性を検討した。例え
ば、LiNbO3の屈折率の温度係数は△nT/n1=3.
8×10-5deg-1、熱膨張係数は△LT/L=1×1
-6deg-1程度であり、屈折率の温度係数の方が極め
て大きく、熱膨張係数は無視できる。温度1度(de
g.)あたりのfの温度変化を△fTとすると(2)式
より、
The stability of the resonance peak frequency of the waveguide resonator 2 was examined in order to consider the influence of the fluctuation of the waveguide resonator length L on the characteristics of the waveguide resonator 2. For example, the temperature coefficient of the refractive index of LiNbO 3 is Δn T / n 1 = 3.
8 × 10 −5 deg −1 , thermal expansion coefficient ΔL T / L = 1 × 1
It is about 0 -6 deg -1 , and the temperature coefficient of the refractive index is extremely large, and the thermal expansion coefficient can be ignored. Temperature 1 degree (de
g. When the temperature change of f per) is Δf T , from equation (2),

【0019】[0019]

【数3】 [Equation 3]

【0020】となる。[0020]

【0021】ところで、ある共振ピーク周波数をF
0(193420GHz、波長λ=1.55μm)、モー
ド数をmとすると、
By the way, a certain resonance peak frequency is F
0 (193420 GHz, wavelength λ = 1.55 μm), and the number of modes is m,

【0022】[0022]

【数4】 F0=mc/(n1L) =mf (4) であり、1degあたりのf0の温度変化△f0は、Equation 4] F 0 = mc / (n 1 L) = a mf (4), the temperature change △ f 0 of f 0 per 1deg is

【0023】[0023]

【数5】 △F0=m△fT =−7.4 GHz/deg (5) である。ΔF 0 = mΔf T = −7.4 GHz / deg (5)

【0024】そこで、温度安定化装置11を用いて周囲
温度を±0.01℃以下に温度制御したところ、約±7
0MHzの安定性が得られた。
Therefore, when the ambient temperature is controlled to ± 0.01 ° C. or lower by using the temperature stabilizer 11, about ± 7
A 0 MHz stability was obtained.

【0025】[実施例2]図3は、本発明の実施例2の
安定化光学共振器アレイの概略構成を示すブロック構成
図である。本実施例2は、図3に示すように、複数の導
波路型共振器(光学共振器)2が形成された光学媒質基
板(光学共振器導波路基板)1、導波路からなる導波路
型共振器(光学共振器)2、高反射膜3、ペルチエ素子
などからなる温度安定化装置(温度調節装置)11、電
極12、電気フィルタなどの重み付け回路13、所定の
光周波数で発振する基準半導体レーザ21、光電変換用
受光器22、高周波電気信号発振器23、位相検波器又
はロックインアンプ24が設けられている。図3では、
図2と同様に、3本の導波路型共振器2のみ示したが、
実際は数十本以上の導波路型共振器2からなっている。
[Second Embodiment] FIG. 3 is a block diagram showing a schematic structure of a stabilized optical resonator array according to a second embodiment of the present invention. In the second embodiment, as shown in FIG. 3, an optical medium substrate (optical resonator waveguide substrate) 1 on which a plurality of waveguide type resonators (optical resonators) 2 are formed, and a waveguide type including a waveguide A resonator (optical resonator) 2, a highly reflective film 3, a temperature stabilizing device (temperature adjusting device) 11 including a Peltier element, an electrode 12, a weighting circuit 13 such as an electric filter, a reference semiconductor that oscillates at a predetermined optical frequency. A laser 21, a photoelectric conversion light receiver 22, a high frequency electric signal oscillator 23, a phase detector or a lock-in amplifier 24 are provided. In Figure 3,
Similar to FIG. 2, only three waveguide resonators 2 are shown,
Actually, it is composed of several tens of waveguide type resonators 2.

【0026】導波路型共振器(光学共振器)2は、電極
12間の電圧を変化させることにより、電気光学効果に
よって、屈折率が変わり、従って、共振周波数が変化
し、それに応じた透過特性が得られる。
In the waveguide type resonator (optical resonator) 2, by changing the voltage between the electrodes 12, the refractive index is changed by the electro-optical effect, and therefore the resonance frequency is changed, and the transmission characteristics are changed accordingly. Is obtained.

【0027】次に、本実施例2の安定化光学共振器アレ
イの動作を図3に従って説明する。
Next, the operation of the stabilized optical resonator array of the second embodiment will be described with reference to FIG.

【0028】基準半導体レーザ21からの出射光は、導
波路型共振器2の内の1つを透過し、光電変換用受光器
22で光電変換される。そのとき、基準半導体レーザ2
1は、高周波電気信号発振器23による変調信号を参照
して所定の周波数変調がかけられ、周波数変調光を出力
している。導波路型共振器2においては、その透過率の
周波数依存性によって光の周波数変化が、光の強度変化
に変換される。即ち、周波数変調光の中心周波数と導波
路型共振器2の1つの共振ピーク周波数との周波数差が
検出される。
The emitted light from the reference semiconductor laser 21 passes through one of the waveguide resonators 2 and is photoelectrically converted by the photoelectric conversion light receiver 22. At that time, the reference semiconductor laser 2
Reference numeral 1 refers to the modulation signal from the high-frequency electrical signal oscillator 23 and is subjected to predetermined frequency modulation, and outputs frequency-modulated light. In the waveguide resonator 2, a frequency change of light is converted into a light intensity change due to the frequency dependence of the transmittance. That is, the frequency difference between the center frequency of the frequency-modulated light and one resonance peak frequency of the waveguide resonator 2 is detected.

【0029】この導波路型共振器2の透過光は、光電変
換用受光器22にて受光され光信号から電気信号に変換
されて、位相検波器24に送られる。位相検波器24で
高周波電気信号発振器23の参照信号と位相比較するこ
とにより、前記周波数差に応じた誤差信号を発生し、こ
の誤差信号を電気フィルタ,重み付け回路13,温度安
定化装置(温度調節装置)11及び電極12を通して光
学媒質に電界が加えられ、その屈折率を変化させること
により、導波路型共振器長Lを安定化するものである。
The transmitted light of the waveguide resonator 2 is received by the photoelectric conversion photodetector 22, converted from an optical signal to an electric signal, and sent to the phase detector 24. The phase detector 24 compares the phase with the reference signal of the high frequency electric signal oscillator 23 to generate an error signal according to the frequency difference, and the error signal is generated by the electric filter, the weighting circuit 13, the temperature stabilizing device (temperature adjusting device). An electric field is applied to the optical medium through the (device) 11 and the electrode 12, and the refractive index of the optical medium is changed to stabilize the waveguide resonator length L.

【0030】例えば、図3の装置構成において、基準半
導体レーザ21として波長1.55μm帯で発振するIn
GaAsP系の分布帰還型半導体レーザ(DFB型L
D)を同位体置換アセチレンガス(1322)を周波数
基準として安定化したものを用いた。高周波電気信号発
振器23の周波数を100MHzとした。この周波数安
定化光を導波路型共振器(光学共振器)2に入射した。
光学媒質基板(光学共振器導波路基板)1として、Li
NbO3を用いた。共振周波数間隔は2.5GHzであ
る。導波路の損失は0.2dB/cm、反射率は80%
である。0.25mm毎に100本の導波路型共振器2を
形成した。
For example, in the device configuration shown in FIG. 3, In oscillating in the wavelength of 1.55 μm as the reference semiconductor laser 21
GaAsP distributed feedback semiconductor laser (DFB type L
D) which was stabilized using an isotope-substituted acetylene gas ( 13 C 2 H 2 ) as a frequency reference was used. The frequency of the high frequency electric signal oscillator 23 was 100 MHz. This frequency-stabilized light was made incident on the waveguide resonator (optical resonator) 2.
As the optical medium substrate (optical resonator waveguide substrate) 1, Li
NbO 3 was used. The resonance frequency interval is 2.5 GHz. Waveguide loss is 0.2 dB / cm, reflectance is 80%
Is. 100 waveguide type resonators 2 were formed every 0.25 mm.

【0031】ここで、ポッケルス効果によって、光路長
を安定化する。最大可能印加電界10V/μmとして、
△n=1.6×10-3の変化が得られる。これは、共振
周波数変化にして約300GHzに相当し、可変可能範
囲としては、十分である。可変幅を±10GHzとし
て、±300mVの印加電圧によって制御可能である。
Here, the optical path length is stabilized by the Pockels effect. With the maximum possible applied electric field of 10 V / μm,
A change of Δn = 1.6 × 10 −3 is obtained. This corresponds to a resonance frequency change of about 300 GHz, which is sufficient as a variable range. The variable width is ± 10 GHz and can be controlled by an applied voltage of ± 300 mV.

【0032】基準半導体レーザ21の100MHzの変
調光の成分を位相検波器24で位相検出し、導波路型共
振器2の共振器長を±2MHz(印加電圧60μV)以
下に安定化した。安定化帯域は100nsである。この安
定度は温度変動に直すと3/±10000℃に相当す
る。
The phase detector 24 detects the phase of the 100 MHz modulated light component of the reference semiconductor laser 21, and the resonator length of the waveguide resonator 2 is stabilized to ± 2 MHz (applied voltage 60 μV) or less. The stabilization band is 100 ns. This stability corresponds to 3 / ± 10000 ° C. when converted into temperature fluctuation.

【0033】ところで、1度当りの周波数シフト量7.
4GHzは、式(3)と式(5)からもわかるように、
導波路型共振器2の共振器長に関係なく、一定値である
ので、近接する導波路型共振器2でも同様の安定化で同
様の効果が得られる。図4に共振ピークが相互に安定化
された光学導波路アレイの透過特性図を示す。隣合った
導波路共振器2の共振ピークが重なり合っていることが
わかる。
By the way, the frequency shift amount per degree is 7.
At 4 GHz, as can be seen from equations (3) and (5),
Since it is a constant value regardless of the resonator length of the waveguide resonator 2, the similar effect can be obtained by the similar stabilization even in the adjacent waveguide resonator 2. FIG. 4 shows a transmission characteristic diagram of the optical waveguide array in which the resonance peaks are mutually stabilized. It can be seen that the resonance peaks of the adjacent waveguide resonators 2 overlap.

【0034】〔実施例3〕図5は、本発明の光学共振器
アレイの実施例3の概略構成を示すブロック構成図であ
り、前記実施例2の基準半導体レーザ21を変調する代
わりに導波路型共振器2の導波路長を変調して誤差信号
を得ている場合の例である。この場合は、レーザを変調
する手段が不要なので極めてコンパクトに系が実現可能
である。
[Embodiment 3] FIG. 5 is a block diagram showing a schematic construction of Embodiment 3 of the optical resonator array of the present invention. Instead of modulating the reference semiconductor laser 21 of Embodiment 2, a waveguide is used. This is an example of a case where the waveguide length of the mold resonator 2 is modulated to obtain an error signal. In this case, since a means for modulating the laser is unnecessary, a very compact system can be realized.

【0035】以上のように、共振周波数を安定化した光
学共振器アレイは、大容量の周波数分割多重光通信にお
ける送信源の光周波数標準及び受信源の光周波数選択フ
ィルタとして用いることができる。光周波数標準として
用いれば、安定化した共振ピーク毎に、例えば、10G
Hz毎に安定化された複数のレーザ光源を実現できる。
As described above, the optical resonator array in which the resonance frequency is stabilized can be used as the optical frequency standard of the transmission source and the optical frequency selection filter of the reception source in large capacity frequency division multiplexing optical communication. If used as an optical frequency standard, for example, 10G
A plurality of laser light sources stabilized for each Hz can be realized.

【0036】図6は、本実施例3の安定化光学共振器を
用いて複数のレーザを同時に安定化した例の概略構成を
示すブロック構成図であり、51,51’は周波数多重
用の複数レーザ(被安定化レーザ)で、52,52’は
受光器、53,53’は位相検波器である。高周波電気
信号発振器(変調器)23の変調信号を導波路型共振器
2の電極12に印加し、導波路型共振器2の共振ピーク
とレーザの発振周波数との誤差信号を得て、レーザに負
帰還することによって安定化しているものである。
FIG. 6 is a block diagram showing a schematic configuration of an example in which a plurality of lasers are simultaneously stabilized by using the stabilizing optical resonator of the third embodiment, and 51 and 51 'are a plurality of frequency multiplexing units. Lasers (stabilized lasers) 52 and 52 'are photodetectors and 53 and 53' are phase detectors. The modulation signal of the high frequency electric signal oscillator (modulator) 23 is applied to the electrode 12 of the waveguide resonator 2 to obtain an error signal between the resonance peak of the waveguide resonator 2 and the oscillation frequency of the laser, and the laser is fed to the laser. It is stabilized by negative feedback.

【0037】光学媒質として、LiNbO3,LiTa
3,LiIO3,BaTiO3,GaAs,ZnO,P
bMoO4,ADP(NH42PO4),KDP(KH2
PO4),RDA(RbH2AsO4),CDA(C22
AsO4)又はBa2NaNb516を用いることもでき
る。
As the optical medium, LiNbO 3 and LiTa are used.
O 3 , LiIO 3 , BaTiO 3 , GaAs, ZnO, P
bMoO 4 , ADP (NH 4 H 2 PO 4 ), KDP (KH 2
PO 4 ), RDA (RbH 2 AsO 4 ), CDA (C 2 H 2
AsO 4 ) or Ba 2 NaNb 5 O 16 can also be used.

【0038】前記図3では、基準半導体レーザ21の変
調に直接変調を用いたが、音響光学変調器、電気光学変
調器などの、他の構成の変調器を用いて変調しても同様
の効果を得ることができる。
Although the direct modulation is used for the modulation of the reference semiconductor laser 21 in FIG. 3, the same effect can be obtained by using a modulator having another structure such as an acousto-optic modulator or an electro-optic modulator. Can be obtained.

【0039】以上、本発明を実施例に基づき具体的に説
明したが、本発明は、前記実施例に限定されるものでは
なく、その要旨を逸脱しない範囲において種々変更可能
であることは言うまでもない。
Although the present invention has been specifically described based on the embodiments, it is needless to say that the present invention is not limited to the embodiments and various modifications can be made without departing from the scope of the invention. ..

【0040】[0040]

【発明の効果】以上、説明したように、本発明によれ
ば、複数の導波路型共振器を同一基板上に形成し、さら
に、複数の導波路型共振器が電気光学効果を有する導波
路媒質からなり、かつ温度安定化装置を設けることによ
って安定性を向上することができる。また、複数の導波
路型共振器の内の1つに、基準光を入射し、基準光と共
振器の1つの共振周波数とのずれを、電気信号として導
波路媒質及び温度安定化装置に帰還し、導波路媒質の屈
折率を制御することにより、共振周波数を安定化するこ
とによって、これまでには到達できなかった、高精度で
高安定な光学共振器アレイを実現することができる。
As described above, according to the present invention, a plurality of waveguide type resonators are formed on the same substrate, and the plurality of waveguide type resonators have an electro-optical effect. Stability can be improved by including a medium and providing a temperature stabilizing device. Further, the reference light is made incident on one of the plurality of waveguide resonators, and the deviation between the reference light and one resonance frequency of the resonator is fed back to the waveguide medium and the temperature stabilizing device as an electric signal. However, by controlling the refractive index of the waveguide medium and stabilizing the resonance frequency, it is possible to realize a highly accurate and highly stable optical resonator array that has not been achieved so far.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の光学共振器アレイの実施例1の外観
構成を示す斜視図、
FIG. 1 is a perspective view showing an external configuration of a first embodiment of an optical resonator array of the present invention,

【図2】 本発明の光学共振器アレイの実施例1の概略
構成を示すブロック構成図、
FIG. 2 is a block configuration diagram showing a schematic configuration of Example 1 of the optical resonator array of the present invention,

【図3】 本発明の実施例2の安定化光学共振器アレイ
の概略構成を示すブロック構成図、
FIG. 3 is a block configuration diagram showing a schematic configuration of a stabilized optical resonator array according to a second embodiment of the present invention,

【図4】 本実施例2の安定化したときの共振ピークの
例を説明するための図、
FIG. 4 is a diagram for explaining an example of a resonance peak when stabilized in the second embodiment;

【図5】 本発明の光学共振器アレイの実施例3の概略
構成を示すブロック構成図、
FIG. 5 is a block configuration diagram showing a schematic configuration of Example 3 of the optical resonator array of the present invention,

【図6】 本発明の実施例3の安定化光学共振器アレイ
を複数の半導体レーザの安定化に応用した例の概略構成
を示すブロック構成図、
FIG. 6 is a block configuration diagram showing a schematic configuration of an example in which the stabilized optical resonator array of Example 3 of the present invention is applied to stabilization of a plurality of semiconductor lasers,

【図7】 従来の光学共振器アレイの概略構成を示すブ
ロック構成図、
FIG. 7 is a block configuration diagram showing a schematic configuration of a conventional optical resonator array,

【図8】 複数の光学共振器の共振ピークを説明するた
めの図。
FIG. 8 is a diagram for explaining resonance peaks of a plurality of optical resonators.

【符号の説明】[Explanation of symbols]

1…光学媒質基板(光学共振器導波路基板)、2…導波
路型共振器(光学共振器)、3…高反射膜、4…入射
光、5…出射光、11…温度安定化装置、12…電極、
13…重み付け回路、21…基準半導体レーザ、22…
光電変換用受光器、52,52’…受光器、23…高周
波電気信号発振器、24,53,53’…位相検波器、
51,51’…被安定化レーザ。
DESCRIPTION OF SYMBOLS 1 ... Optical medium substrate (optical resonator waveguide substrate), 2 ... Waveguide type resonator (optical resonator), 3 ... High reflection film, 4 ... Incident light, 5 ... Emission light, 11 ... Temperature stabilizing device, 12 ... electrodes,
13 ... Weighting circuit, 21 ... Reference semiconductor laser, 22 ...
Photoelectric conversion photodetector, 52, 52 '... Photodetector, 23 ... High-frequency electrical signal oscillator, 24, 53, 53' ... Phase detector,
51,51 '... Stabilized laser.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 伊藤 弘樹 東京都千代田区内幸町一丁目1番6号 日 本電信電話株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroki Ito 1-1-6 Uchisaiwaicho, Chiyoda-ku, Tokyo Nihon Telegraph and Telephone Corporation

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数の導波路型共振器が同一基板上に隣
接して平行に設けられている光学共振器アレイにおい
て、前記複数の導波路型共振器が電気光学効果を有する
導波路媒質からなり、所定の電圧を印加して当該導波路
媒質の屈折率を制御する手段と、温度安定化装置とが設
けられていることを特徴とする光学共振器アレイ。
1. An optical resonator array in which a plurality of waveguide type resonators are provided adjacent to each other in parallel on the same substrate, wherein the plurality of waveguide type resonators are made of a waveguide medium having an electro-optical effect. An optical resonator array comprising: a means for controlling a refractive index of the waveguide medium by applying a predetermined voltage; and a temperature stabilizing device.
【請求項2】 請求項1に記載の光学共振器アレイにお
いて、前記複数の導波路型共振器の内の1つに、所定の
周波数で変調された基準光を入射し、該基準光と前記導
波路型共振器の1つの共振周波数とのずれを、電気信号
として電極を介して前記導波路媒質及び前記温度安定化
装置に帰還し、前記導波路媒質の屈折率を制御する手段
が設けられていること特徴とする光学共振器アレイ。
2. The optical resonator array according to claim 1, wherein a reference light modulated at a predetermined frequency is incident on one of the plurality of waveguide resonators, and the reference light and the reference light are combined. A means for controlling a refractive index of the waveguide medium by returning a deviation from one resonance frequency of the waveguide resonator to the waveguide medium and the temperature stabilizing device via an electrode as an electric signal is provided. An optical resonator array characterized in that
【請求項3】 請求項1に記載の光学共振器アレイにお
いて、所定の周波数で導波路型共振器長を変調しなが
ら、該複数の導波路型共振器の内の1つに基準光を入射
し、該基準光と前記導波路型共振器の1つの共振周波数
とのずれを、電気信号として電極を介して前記導波路媒
質及び前記温度安定化装置に帰還し、前記導波路媒質の
屈折率を制御する手段が設けられていることを特徴とす
る光学共振器アレイ。
3. The optical resonator array according to claim 1, wherein the reference light is incident on one of the plurality of waveguide resonators while modulating the waveguide resonator length at a predetermined frequency. Then, the deviation between the reference light and one resonance frequency of the waveguide resonator is returned to the waveguide medium and the temperature stabilizing device as an electric signal through the electrode, and the refractive index of the waveguide medium is returned. An optical resonator array, characterized in that means for controlling the optical resonator are provided.
JP4125292A 1992-05-19 1992-05-19 Optical resonator array Pending JPH05323247A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4125292A JPH05323247A (en) 1992-05-19 1992-05-19 Optical resonator array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4125292A JPH05323247A (en) 1992-05-19 1992-05-19 Optical resonator array

Publications (1)

Publication Number Publication Date
JPH05323247A true JPH05323247A (en) 1993-12-07

Family

ID=14906474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4125292A Pending JPH05323247A (en) 1992-05-19 1992-05-19 Optical resonator array

Country Status (1)

Country Link
JP (1) JPH05323247A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002277841A (en) * 2001-03-21 2002-09-25 Japan Science & Technology Corp Optical resonator
JP2002538494A (en) * 1999-02-23 2002-11-12 マルコニ キャスウェル リミテッド Light modulator
JP2004282793A (en) * 2004-06-23 2004-10-07 Fujitsu Ltd Optical transmission system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002538494A (en) * 1999-02-23 2002-11-12 マルコニ キャスウェル リミテッド Light modulator
JP2002277841A (en) * 2001-03-21 2002-09-25 Japan Science & Technology Corp Optical resonator
JP2004282793A (en) * 2004-06-23 2004-10-07 Fujitsu Ltd Optical transmission system

Similar Documents

Publication Publication Date Title
US6873631B2 (en) Integrated opto-electronic oscillators having optical resonators
US7061335B2 (en) Processing of signals with regenerative opto-electronic circuits
US7184451B2 (en) Continuously tunable coupled opto-electronic oscillators having balanced opto-electronic filters
CA2547966C (en) Continuously tunable coupled opto-electronic oscillators having balanced opto-electronic filters
CA2478347C (en) Atomic clock based on an opto-electronic oscillator
US3988704A (en) Broadband electrooptical modulator
KR100417170B1 (en) Method and apparatus for signal transmission in optical fiber
US20050018276A1 (en) Optical frequency comb generator
JPH01114093A (en) Semiconductor laser
US4977565A (en) Method and apparatus for stabilizing oscillation frequency separation among plural laser devices
US11581879B2 (en) Arbitrary microwave waveform generator using lasers in close thermal and mechanical proximity
JPH05323247A (en) Optical resonator array
JP3537058B2 (en) Multiplexed optical frequency comb generator
US5121399A (en) Device for continuously tuning a coherent and rectilinearly polarized light source
JP2501484B2 (en) Wavelength stabilization laser device
JP3351212B2 (en) Pulse light source
US6792011B2 (en) Frequency modulated laser with high modulation bandwidth
JPH05307158A (en) Stabilized optical resonator
JP3090229B2 (en) Optical path length stabilizer
JPH10321938A (en) Frequency stabilized light source
JP2980136B2 (en) Multi-wavelength stabilized laser device
JP3104715B2 (en) Variable wavelength filter device
JPH0722702A (en) Semiconductor laser device, driving method thereof, and optical communication system using the same
JPH07112088B2 (en) Frequency stabilized light source
Yao et al. Opto-electronic oscillators having optical resonators