JPH0532809B2 - - Google Patents

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Publication number
JPH0532809B2
JPH0532809B2 JP6463085A JP6463085A JPH0532809B2 JP H0532809 B2 JPH0532809 B2 JP H0532809B2 JP 6463085 A JP6463085 A JP 6463085A JP 6463085 A JP6463085 A JP 6463085A JP H0532809 B2 JPH0532809 B2 JP H0532809B2
Authority
JP
Japan
Prior art keywords
layer
magnetization
crystal layer
small
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6463085A
Other languages
Japanese (ja)
Other versions
JPS61222023A (en
Inventor
Yasuo Ishizaka
Noboru Watanabe
Kazuo Kimura
Eiichiro Imaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP6463085A priority Critical patent/JPS61222023A/en
Priority to US06/843,757 priority patent/US4798765A/en
Priority to DE19863610432 priority patent/DE3610432A1/en
Priority to GB8607871A priority patent/GB2175014B/en
Publication of JPS61222023A publication Critical patent/JPS61222023A/en
Publication of JPH0532809B2 publication Critical patent/JPH0532809B2/ja
Granted legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Magnetic Record Carriers (AREA)
  • Recording Or Reproducing By Magnetic Means (AREA)
  • Thin Magnetic Films (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は垂直磁気記録媒体に係り、特に記録再
生出力を増大し得る垂直磁気記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a perpendicular magnetic recording medium, and more particularly to a perpendicular magnetic recording medium capable of increasing recording and reproducing output.

従来の技術 一般に、磁気ヘツドにより磁気記録媒体に記
録、再生を行なうには、磁気ヘツドにより磁気記
録媒体の磁性層にその媒体長手方向(面内方向)
の磁化を行なわせて記録し、これを再生するもの
が汎用されている。しかるに、これによれば記録
が高密度になるに従つて減磁界が大きくなり減磁
作用が高密度記録に悪影響を及ぼすことが知られ
ている。そこで近年上記悪影響を解消するものと
して、磁気記録媒体の磁性層に垂直方向に磁化を
行なう垂直磁気記録方式が提案されている。これ
によれば記録密度を向上させるに従い減磁界が小
さくなり理論的には残留磁化の減少がない良好な
高密度記録を行なうことができる。
BACKGROUND TECHNOLOGY In general, in order to record on and read from a magnetic recording medium using a magnetic head, the magnetic head is used to write information on the magnetic layer of the magnetic recording medium in the longitudinal direction (in-plane direction) of the medium.
A commonly used device is one that performs magnetization to record and reproduce this information. However, according to this method, it is known that as the recording density increases, the demagnetizing field increases and the demagnetizing effect has an adverse effect on high-density recording. Therefore, in recent years, a perpendicular magnetic recording method has been proposed in which the magnetic layer of a magnetic recording medium is magnetized in the perpendicular direction to eliminate the above-mentioned adverse effects. According to this, as the recording density is improved, the demagnetizing field becomes smaller, and theoretically, it is possible to perform good high-density recording without reducing residual magnetization.

従来この垂直磁気記録方式に用いる垂直磁気記
録媒体としては、ベースフイルム上にCo−Cr膜
をスパツタリングにより被膜形成したものがあつ
た。周知の如く、Co−Cr膜は比較的高い飽和磁
化(Ms)を有し、かつ膜面に対し垂直な磁化容
易軸を持つ(すなわち膜面に対し垂直方向の抗磁
力Hc⊥が大である)ため垂直磁気記録媒体とし
ては極めて有望な材質であることが知られてい
る。しかるにCo−Cr膜はその磁化容易軸がCrの
添加によりCoの磁化容易軸(最密六方晶のC軸)
が垂直に近い配向を有しているものの十分には垂
直方向に配向しておらず強い垂直磁気異方性を得
ることができなかつた。このため従来、Co−Cr
にニオブ(Nb)及びタンタル(Ta)等の第三元
素を添加することによりCoの磁化容易軸を垂直
方向に強く配向させた構成の垂直磁気記録媒体が
あつた。またCo−Cr膜とベースフイルムとの間
に、いわゆる裏打ち層である高透磁率層(すなわ
ち抗磁力Hcが小なる層。例えばNi−Fe)を別個
形成して二層構造とし高透磁率層内で広がつてい
る磁束を所定磁気記録位置にて磁気ヘツドの磁極
に向け集中させて吸い込ませることにより分布が
鋭くかつ強い垂直磁化を行ない得る構成の垂直磁
気記録媒体があつた。
Conventionally, perpendicular magnetic recording media used in this perpendicular magnetic recording system include those in which a Co--Cr film is formed on a base film by sputtering. As is well known, the Co-Cr film has a relatively high saturation magnetization (Ms) and an axis of easy magnetization perpendicular to the film surface (that is, the coercive force Hc⊥ in the direction perpendicular to the film surface is large). ), it is known to be an extremely promising material for perpendicular magnetic recording media. However, in the Co-Cr film, the easy axis of magnetization changes due to the addition of Cr (the C axis of a close-packed hexagonal system).
Although it has a nearly perpendicular orientation, it is not sufficiently oriented in the perpendicular direction and strong perpendicular magnetic anisotropy could not be obtained. For this reason, conventionally Co-Cr
There was a perpendicular magnetic recording medium in which the axis of easy magnetization of Co was strongly oriented in the perpendicular direction by adding a third element such as niobium (Nb) and tantalum (Ta) to Co. In addition, a high magnetic permeability layer (i.e., a layer with low coercive force Hc, e.g. Ni-Fe), which is a so-called backing layer, is formed separately between the Co-Cr film and the base film to create a two-layer structure. There is a perpendicular magnetic recording medium which is capable of producing strong perpendicular magnetization with a sharp distribution by concentrating the magnetic flux spreading within the magnetic head towards the magnetic pole of the magnetic head at a predetermined magnetic recording position and attracting it.

発明が解決しようとする問題点 上記従来の垂直磁気記録媒体では、Coの磁化
容易軸を強く垂直方向へ配向させるために、Co
にCr及びNb、Ta等を添加していた。しかるに
Cr及びNb、Taの添加によりCoの磁化容易軸は
強く垂直方向へ配向するものの、強磁性体である
Coに非磁性体であるCr及びNb、Taを添加する
ことにより垂直磁気記録媒体としての飽和磁化
Msが低下してしまい高い再生出力を得ることが
できないという問題点があつた。またCo−Cr膜
に加え高透磁率層を裏打ち層として形成された二
層構造の垂直磁気記録媒体の場合、Co−Cr膜の
抗磁力Hc(700Oe以上)に対して高透磁率層の抗
磁力Hcは極めて小(10Oe以下)となつていたた
め、衝撃性のバルクハウゼンノイズが発生すると
いう問題点があつた。これに加えて、このバルク
ハウゼンノイズを防止するには少なくとも10Oe
以上の抗磁力を有することが必要となるが、この
条件を満たしかつ裏打ち層としての機能を有する
適当な素材が無いという問題点もあつた。
Problems to be Solved by the Invention In the conventional perpendicular magnetic recording medium described above, in order to strongly orient the axis of easy magnetization of Co in the perpendicular direction,
Cr, Nb, Ta, etc. were added to it. However,
Although the axis of easy magnetization of Co is strongly oriented in the perpendicular direction due to the addition of Cr, Nb, and Ta, it remains a ferromagnetic material.
Saturation magnetization as a perpendicular magnetic recording medium by adding non-magnetic materials Cr, Nb, and Ta to Co
There was a problem in that Ms decreased and high playback output could not be obtained. In addition, in the case of a two-layer perpendicular magnetic recording medium in which a high magnetic permeability layer is formed as a backing layer in addition to a Co-Cr film, the high magnetic permeability layer resists the coercive force Hc (700 Oe or more) of the Co-Cr film. Since the magnetic force Hc was extremely small (10 Oe or less), there was a problem in that it generated impulsive Barkhausen noise. In addition to this, at least 10Oe to prevent this Barkhausen noise
Although it is necessary to have the above coercive force, there is also the problem that there is no suitable material that satisfies this condition and functions as a backing layer.

そこで本発明では、コバルト、クロムにニオブ
及びタンタルのうち少なくとも一方を加えてなる
磁性材をコーテイングした際、磁性層が抗磁力の
異なる二層に分かれて形成されることに注目し、
この二層の内抗磁力の小なる小粒径結晶層を垂直
磁気記録に積極的に利用することにより上記問題
点を解決した垂直磁気記録媒体を提供することを
目的とする。
Therefore, in the present invention, we focused on the fact that when coating a magnetic material made of cobalt and chromium with at least one of niobium and tantalum added, the magnetic layer is formed into two layers with different coercive forces,
It is an object of the present invention to provide a perpendicular magnetic recording medium that solves the above-mentioned problems by actively utilizing the small-grain crystal layer having a small internal coercive force in the two layers for perpendicular magnetic recording.

問題点を解決するための手段及び作用 上記問題点を解決するために本発明では、コバ
ルト及びクロムに、ニオブ及びタンタルのうち少
なくとも一方を添加してなる磁性材によりベース
上に低抗磁力の、原点近傍で急激に立ち上がる曲
線で表わされる面内M−Hヒステリシス特性であ
る磁化ジヤンプを有する層を形成すると共に、該
層上に、該層のニオブ又はタンタルの添加量より
小なる量で、該磁化ジヤンプを生じない量のニオ
ブ及びタンタルのうち少なくとも一方をコバルト
及びクロムに添加した磁性材よりなる垂直磁化層
を形成した。
Means and Effects for Solving the Problems In order to solve the above problems, the present invention provides a magnetic material having a low coercive force on a base using a magnetic material made of cobalt and chromium and adding at least one of niobium and tantalum. A layer having a magnetization jump, which is an in-plane M-H hysteresis characteristic represented by a curve that rises sharply near the origin, is formed, and on the layer, niobium or tantalum is added in an amount smaller than the amount of niobium or tantalum added to the layer. A perpendicular magnetization layer was formed of a magnetic material in which at least one of niobium and tantalum was added to cobalt and chromium in an amount that would not cause a magnetization jump.

上記各手段を講ずることにより、垂直磁化され
磁化ジヤンプを生じない垂直磁化層は高い飽和磁
化Msを維持し得、かつ低い抗磁力で磁化ジヤン
プを有する層はいわゆる裏打ち層としての機能を
奏する。
By taking each of the above measures, the perpendicularly magnetized layer that is perpendicularly magnetized and does not cause a magnetization jump can maintain a high saturation magnetization Ms, and the layer that has a low coercive force and a magnetization jump functions as a so-called underlayer.

実施例 本発明になる垂直磁気記録媒体(以下単に記録
媒体という)は、まずベースとなるポリイミド基
板上にコバルト(Co)、クロム(Cr)にニオブ
(Nb)及びタンタル(Ta)のうち少なくとも一
方を加えた磁性材をターゲツトとしてスパツタリ
ングし、続いてその上にCo及びCrに、ニオブ
(Nb)及びタンタル(Ta)のうち少なくとも一
方を上記添加量より小量加えた磁性材をターゲツ
トとしてスパツタリングすることにより得られ
る。
Embodiment A perpendicular magnetic recording medium according to the present invention (hereinafter simply referred to as a recording medium) is first made of cobalt (Co), chromium (Cr), niobium (Nb), and tantalum (Ta) on a base polyimide substrate. Sputtering is performed using a magnetic material as a target to which Co and Cr are added, and then sputtering is performed using a magnetic material as a target on which Co and Cr are added and at least one of niobium (Nb) and tantalum (Ta) is added in a smaller amount than the above amount. It can be obtained by

従来より金属等(例えばCo−Cr合金)をベー
ス上にスパツタリングした際、被膜形成された薄
膜はその膜面に垂直方向に対して同一結晶構造を
形成するのではなく、ベース近傍の極めて薄い部
分にまず小粒径の第一の結晶層を形成し、その上
部に続いて大粒径の第二の結晶層が形成されるこ
とが各種の実験(例えば走査型電子顕微鏡による
写真撮影)により明らかになつてきている
(Edward R.Wuori and Professor J.H.Judy:
“INITIAL LAYER EFFECT IN CO−CR
FILMS”、IEEE Trans.、VOL.MAG−20、No.
5、SEPTEMBER 1984、P774〜P775または
William G.Haines:“VSM PROFILING OF
CoCr FILMS:A NEW ANALYTICAL
TECHNIQUE”IEEE Trans.、VOL、MAG−
20、No.5、SEPTEMBER 1984、P812〜P814)。
Conventionally, when sputtering metal, etc. (e.g. Co-Cr alloy) onto a base, the thin film formed does not form the same crystal structure in the direction perpendicular to the film surface, but instead forms an extremely thin part near the base. Various experiments (e.g., scanning electron microscopy photography) have shown that a first crystal layer with small grain size is formed first, followed by a second crystal layer with large grain size. (Edward R.Wuori and Professor JHJudy:
“INITIAL LAYER EFFECT IN CO−CR
FILMS”, IEEE Trans., VOL.MAG−20, No.
5, SEPTEMBER 1984, P774-P775 or
William G. Haines: “VSM PROFILING OF
CoCr FILMS:A NEW ANALYTICAL
TECHNIQUE”IEEE Trans., VOL, MAG−
20, No. 5, SEPTEMBER 1984, P812-P814).

本発明者は上記観点に注目しCo−Cr合金を基
とし、またこれに第三元素を添加した金属を各種
スパツタリングし、形成される小粒径の結晶層と
その上部に形成された大粒径の結晶層との物理的
性質を測定した結果、第三元素としてNbまたは
Taを添加した場合、小粒径結晶層の抗磁力が大
粒径結晶層よりも非常に小でありかつ垂直方向と
面内方向の抗磁力には極端な差が生じてないこと
がわかつた。本発明ではこの低抗磁力を有すると
共に垂直方向及び面内方向の抗磁力差の少ない小
粒径結晶層を等方性層として用い、この小粒径結
晶層上にNb及びTaの添加量の少ない高い飽和磁
化Msを有すると共に磁化容易軸が強く垂直方向
へ配向したCo−Cr−Nb薄膜またはCo−Cr−Ta
薄膜を形成し、これを垂直磁性層として用いるこ
とを特徴とする。
The present inventor focused on the above viewpoint and sputtered various metals based on a Co-Cr alloy and added with a third element, thereby forming a crystal layer with a small grain size and a large grain crystal layer formed on top of the crystal layer. As a result of measuring the physical properties of the diameter crystal layer, we found that Nb or
It was found that when Ta was added, the coercive force of the small-grain crystal layer was much smaller than that of the large-grain crystal layer, and there was no extreme difference in the coercive force in the vertical and in-plane directions. . In the present invention, a small-grain crystal layer having low coercive force and a small difference in coercive force in the perpendicular direction and in-plane direction is used as an isotropic layer, and the added amount of Nb and Ta is applied on this small-grain crystal layer. Co-Cr-Nb thin film or Co-Cr-Ta that has a low and high saturation magnetization Ms and has a strong axis of easy magnetization oriented in the perpendicular direction.
It is characterized by forming a thin film and using this as a perpendicular magnetic layer.

以下本発明者が行なつたスパツタリングにより
形成されたCo、Cr、Nb及びTaのうち少なくと
も一方を添加してなる磁性材の小粒径結晶層と、
大粒径結晶層の抗磁力を測定した実験結果を詳述
する。Co−Cr薄膜、Co−Cr−Nb薄膜及びCo−
Cr−Ta薄膜をスパツタリングするに際し、スパ
ツタリング条件は下記の如く設定した(Nbまた
はTaを添加した各場合においてスパツタリング
条件は共に等しく設定した)。
A small-grain crystal layer of a magnetic material containing at least one of Co, Cr, Nb, and Ta formed by sputtering performed by the present inventor;
The experimental results of measuring the coercive force of a large-grain crystal layer will be described in detail. Co-Cr thin film, Co-Cr-Nb thin film and Co-
When sputtering the Cr--Ta thin film, the sputtering conditions were set as follows (the sputtering conditions were set equally in each case where Nb or Ta was added).

*スパツタ装置 RFマグネトロンスパツタ装置 *スパツタリング方法 連続スパツタリング。予め予備排気圧1×
×10-6Torrまで排気した後Arガスを導入
し1×10-3Torrとした *ベース ポリイミド(厚さ20μm) *ターゲツト Co−Cr合金を使用し、Nb及びTaの添加
は正方形状のNb板及びTa板を所要枚数
Co−Cr合金上に配置することにより行な
つた *ターゲツト基板間距離 110mm なお薄膜の磁気特性は振動試料型磁力計(理研
電子製、以下VSMと略称する)にて、薄膜の組
成はエネルギー分散型マイクロアナライザ
(KEVEX社製、以下EDXと略称する)にて、ま
た結晶配向性はX線回折装置(理学電機製)にて
夫々測定した。
*Sputtering equipment RF magnetron sputtering equipment *Sputtering method Continuous sputtering. Preliminary exhaust pressure 1×
After exhausting to ×10 -6 Torr, Ar gas was introduced to bring the temperature to 1 ×10 -3 Torr. *Base polyimide (thickness 20 μm) *Target Co-Cr alloy was used, and Nb and Ta were added in square Nb Required number of boards and Ta boards
The magnetic properties of the thin film were measured using a vibrating sample magnetometer (manufactured by Riken Electronics, hereinafter referred to as VSM).The composition of the thin film was determined by dispersion of energy. The crystal orientation was measured using a type microanalyzer (manufactured by KEVEX, hereinafter referred to as EDX) and an X-ray diffractometer (manufactured by Rigaku Denki).

Co−Crに第三元素としてNbを添加(2〜10at
%添加範囲において同一現象が生ずる)し、ポリ
イミドベースに0.2μmの膜厚でスパツタリングし
た記録媒体に15KOeの磁界を印加した場合の面
内方向のヒステリシス曲線を第1図に示す。同図
より面内方向の磁界がゼロ近傍部分でヒステリシ
ス曲線は急激に変則的に立ち上がり(図中矢印A
で示す)、いわゆる磁化ジヤンプが生じているこ
とがわかる。スパツタリングされたCo−Cr−Nb
薄膜がスパツタリング時に常に均一の結晶成長を
行なつたと仮定した場合、第1図に示された磁化
ジヤンプは生ずるはずはなく、これよりCo−Cr
−Nb薄膜内に磁気的性質の異なる複数の結晶層
が存在することが推測される。
Adding Nb as a third element to Co-Cr (2 to 10at
Figure 1 shows the in-plane hysteresis curve when a magnetic field of 15 KOe is applied to a recording medium sputtered with a film thickness of 0.2 μm on a polyimide base. The figure shows that the hysteresis curve rises abruptly and irregularly in the area where the magnetic field in the in-plane direction is near zero (arrow A in the figure).
), it can be seen that a so-called magnetization jump occurs. Sputtered Co−Cr−Nb
If we assume that the thin film always undergoes uniform crystal growth during sputtering, the magnetization jump shown in Figure 1 should not occur;
It is inferred that multiple crystal layers with different magnetic properties exist within the −Nb thin film.

続いて第1図で示した実験条件と同一条件にて
Co−Cr−Nbをポリイミドベースに0.05μmの膜厚
でスパツタリングした記録媒体に15KOeの磁界
を印加した場合の面内方向のヒステリシス曲線を
第2図に示す。同図においては第1図に見られた
ようなヒステリシス曲線の磁化ジヤンプは生じて
おらず0.05μm程度の膜厚におけるCo−Cr−Nb薄
膜は略均一な結晶となつていることが理解され
る。これに加えて同図より0.05μm程度の膜厚に
おける抗磁力Hcに注目するに、抗磁力Hcは
極めて小なる値となつており面内方向に対する透
磁率が大であることが理解される。上記結果より
スパツタリングによりベース近傍位置にはじめに
成長する初期値は抗磁力Hcが小であり、この
初期層は走査型電子顕微鏡写真で確かめられてい
る(前記資料参照)ベース近傍位置に成長する小
粒径の結晶層であると考えられる。また初期層の
上方に成長する層は、初期層の抗磁力Hcより
大なる抗磁力Hcを有し、この層は同じく走査
型電子顕微鏡写真で確かめられている大粒径の結
晶層であると考えられる。
Next, under the same experimental conditions as shown in Figure 1.
FIG. 2 shows the hysteresis curve in the in-plane direction when a magnetic field of 15 KOe is applied to a recording medium made of Co-Cr-Nb sputtered to a thickness of 0.05 μm on a polyimide base. In the same figure, there is no magnetization jump in the hysteresis curve as seen in Figure 1, and it is understood that the Co-Cr-Nb thin film with a film thickness of about 0.05 μm is a substantially uniform crystal. . In addition, when looking at the coercive force Hc at a film thickness of about 0.05 μm from the same figure, it is understood that the coercive force Hc has an extremely small value and the magnetic permeability in the in-plane direction is large. From the above results, the initial value of the coercive force Hc that first grows in the vicinity of the base by sputtering is small, and this initial layer is confirmed by scanning electron micrographs (see the above document). It is thought to be a crystalline layer of diameter. Furthermore, the layer that grows above the initial layer has a coercive force Hc that is larger than the coercive force Hc of the initial layer, and this layer is also a large-grain crystal layer confirmed by scanning electron micrographs. Conceivable.

小粒径結晶層と大粒径結晶層が併存するCo−
Cr−Nb薄膜において磁化ジヤンプが生ずる理由
を第3図から第5図を用いて以下述べる。なお後
述する如く、磁化ジヤンプは組成比率及びスパツ
タリング条件に関し全てのCo−Cr−Nb薄膜に対
して発生するものではない。所定の条件下におい
てCo−Cr−Nb薄膜をスパツタリングにより形成
しこの薄膜のヒステリシス曲線を測定により描く
と第3図に示す如く磁化ジヤンプが現われたヒス
テリシス曲線となる。また小粒径結晶層のみから
なるヒステリシス曲線は膜厚寸法を小としたスパ
ツタリング(約0.075μm以下、これについては後
述する)を行ない、これを測定することにより得
ることができる(第4図に示す)。また大粒径結
晶層は均一結晶構造を有していると考えられ、か
つ第3図に示すヒステリシス曲線は小粒径結晶層
のヒステリシス曲線と大粒径結晶層のヒステリシ
ス曲線を合成したものと考えられるため第5図に
示す如く抗磁力Hcが小粒径結晶層よりも大で
あり、磁化ジヤンプのない滑らかなヒステリシス
曲線を形成すると考えられる。すなわち第3図に
おて示されている磁化ジヤンプの存在は、磁気特
性の異なる二層が同一の薄膜内に形成されている
ことを示しており、従つて第1図に示されたCo
−Cr−Nb薄膜にも磁気特性の異なる二層が形成
されていることが理解できる。なお大粒径結晶層
の抗磁力は、小粒径結晶層と大粒径結晶層が併存
するCo−Cr−Nb薄膜のヒステリシス曲線から小
粒径結晶層のみのCo−Cr−Nb薄膜のヒステリシ
ス曲線を差引いて得られるヒステリシス曲線より
求めることができる。上記各実験結果によりCo
−Cr−Nb薄膜のヒステリシス曲線の磁化ジヤン
プが生じている時、磁気特性の異なる二層が形成
されていることが証明されたことになる。
Co− where small grain size crystal layer and large grain size crystal layer coexist
The reason why a magnetization jump occurs in a Cr--Nb thin film will be described below using FIGS. 3 to 5. As will be described later, magnetization jumps do not occur in all Co--Cr--Nb thin films due to the composition ratio and sputtering conditions. When a Co--Cr--Nb thin film is formed by sputtering under predetermined conditions and the hysteresis curve of this thin film is drawn by measurement, a hysteresis curve in which a magnetization jump appears as shown in FIG. 3 is obtained. In addition, a hysteresis curve consisting only of a small-grain crystal layer can be obtained by performing sputtering with a small film thickness (approximately 0.075 μm or less, which will be explained later) and measuring it (see Figure 4). show). Furthermore, the large-grain crystal layer is considered to have a uniform crystal structure, and the hysteresis curve shown in Figure 3 is a composite of the hysteresis curve of the small-grain crystal layer and the hysteresis curve of the large-grain crystal layer. Therefore, as shown in FIG. 5, the coercive force Hc is larger than that of the small-grain crystal layer, and it is thought that a smooth hysteresis curve with no magnetization jump is formed. In other words, the existence of the magnetization jump shown in FIG. 3 indicates that two layers with different magnetic properties are formed within the same thin film, and therefore the Co
It can be seen that the -Cr-Nb thin film also has two layers with different magnetic properties. The coercive force of a large-grain crystal layer can be calculated from the hysteresis curve of a Co-Cr-Nb thin film with a small-grain crystal layer and a large-grain crystal layer coexisting. It can be determined from the hysteresis curve obtained by subtracting the curves. Based on the above experimental results, Co
This proves that when a magnetization jump occurs in the hysteresis curve of the -Cr-Nb thin film, two layers with different magnetic properties are formed.

続いてCo−Cr−Nb薄膜のベース上へのスパツ
タリングの際形成される上記二層の夫々の磁気的
性質をCo−Cr−Nb薄膜の厚さ寸法に関連させつ
つ第6図を用いて以下説明する。第6図はCo−
Cr−Nb薄膜の膜厚寸法をスパツタリング時間を
変えることにより制御し、各膜厚寸法における面
内方向の抗磁力Hc、垂直方向の抗磁力Hc⊥、
磁化ジヤンプ量σjを夫々描いたものである。
Next, the magnetic properties of each of the above two layers formed during sputtering on the base of the Co-Cr-Nb thin film will be explained below using Fig. 6 in relation to the thickness dimension of the Co-Cr-Nb thin film. explain. Figure 6 shows Co-
The film thickness of the Cr-Nb thin film is controlled by changing the sputtering time, and the in-plane coercive force Hc, the vertical coercive force Hc⊥,
The magnetization jump amounts σj are respectively depicted.

まず面内方向の抗磁力Hcに注目するに、膜
厚寸法が0.08μm以下においては極めて小なる値
(150Oe以下)となつており、面内方向に対する
透磁率は高いと考えられる。これに加え垂直方向
の抗磁力Hc⊥と面内方向の抗磁力Hcの値を比
較するに相方とも150Oe以下となつておりその差
は小で、いわゆる等方性を有した層となつてい
る。また膜厚寸法が大となつても抗磁力Hcは
大きく変化するようなことはない。また磁化ジヤ
ンプ量σjに注目すると、磁化ジヤンプ量は膜厚寸
法が0.075μmにて急激に立ち上がり0.075μm以上
の膜厚においては滑らかな下に凸の放物線形状を
描く。更に垂直方向の抗磁力Hc⊥に注目すると、
抗磁力Hc⊥は膜厚寸法0.05μm〜0.1μmで急激に
立ち上がり0.1μm以上の膜厚寸法では900Oe以上
の高い抗磁力を示す。これらの結果より小粒径結
晶層と大粒径結晶層の境は略0.075μmの膜厚寸法
のところにあり、膜厚寸法が0.075μm以下の小粒
径結晶層は面内方向及び垂直方向に対する抗磁力
Hc、Hc⊥が低い、いわゆる低抗磁力層となつ
ており、また膜厚寸法が0.075μm以上の大粒径結
晶層は面内方向の抗磁力Hcは低いものの垂直
方向に対する抗磁力Hc⊥は非常に高い値を有す
る、いわゆる高抗磁力層となつており垂直磁気記
録に適した層となつている。更に磁化ジヤンプが
生じない膜厚寸法(0.075μm以下)においては、
面内方向及び垂直方向に対する抗磁力Hc、Hc
⊥は低く、これより大なる膜厚寸法(0.075μm以
上)においては垂直方向に対する抗磁力Hc⊥が
急増する。これによつても磁化ジヤンプが生じて
いる場合、Co−Cr−Nb薄膜に磁気特性の異なる
二層が形成されていることが推測される。
First, focusing on the coercive force Hc in the in-plane direction, it is an extremely small value (150 Oe or less) when the film thickness is 0.08 μm or less, and it is considered that the magnetic permeability in the in-plane direction is high. In addition, when comparing the values of the coercive force Hc⊥ in the vertical direction and the coercive force Hc in the in-plane direction, both of them are less than 150 Oe, and the difference is small, making the layer so-called isotropic. . Furthermore, even if the film thickness increases, the coercive force Hc does not change significantly. Also, when paying attention to the magnetization jump amount σj, the magnetization jump amount rises rapidly when the film thickness dimension is 0.075 μm and draws a smooth downward convex parabolic shape for film thicknesses of 0.075 μm or more. Furthermore, if we pay attention to the vertical coercive force Hc⊥,
The coercive force Hc⊥ rises rapidly at a film thickness of 0.05 μm to 0.1 μm, and exhibits a high coercive force of 900 Oe or more at a film thickness of 0.1 μm or more. These results show that the boundary between the small-grain crystal layer and the large-grain crystal layer is at a film thickness of approximately 0.075 μm, and that the small-grain crystal layer with a film thickness of 0.075 μm or less exists in the in-plane direction and vertical direction. coercive force against
It is a so-called low coercive force layer with low Hc and Hc⊥, and a large grain crystal layer with a film thickness of 0.075 μm or more has a low coercive force Hc in the in-plane direction, but a low coercive force Hc⊥ in the perpendicular direction. It is a so-called high coercive force layer having a very high value, and is suitable for perpendicular magnetic recording. Furthermore, in the film thickness dimension (0.075 μm or less) where no magnetization jump occurs,
Coercive force Hc, Hc in in-plane direction and perpendicular direction
⊥ is low, and when the film thickness is larger than this (0.075 μm or more), the coercive force Hc⊥ in the vertical direction increases rapidly. If a magnetization jump still occurs due to this, it is presumed that two layers with different magnetic properties are formed in the Co--Cr--Nb thin film.

次にCo−Crに第三元素としてTaを添加(1〜
10at%添加範囲において同一現象が生ずる)し、
上記したNbを添加した場合と同一の実験を行な
つた結果を第7図に示す。第7図はCo−Cr−Ta
薄膜の膜厚寸法をスパツタリング時間を変えるこ
とにより制御し、各膜厚寸法における面内方向の
抗磁力Hc、垂直方向の抗磁力Hc⊥、磁化ジヤ
ンプ量σjを夫々描いたものである。同図よりCo
−CrにTaを添加した場合も、Co−CrにNbを添
加した場合と略同様な結果が得られ、小粒径結晶
層と大粒径結晶層の境は略0.075μmの膜厚寸法の
ところにあり、膜厚寸法が0.075μm以下の小粒径
結晶層は面内方向及び垂直方向に対する抗磁力
Hc、Hc⊥が低い(Hc、Hc⊥共に170Oe以
下)、いわゆる低抗磁力層となつている。これに
加えて垂直方向及び面内方向抗磁力Hc⊥、Hc
の値の差は小でいわゆる等方性を有した層とな
つている。また膜厚寸法が0.075μm以上の大粒径
結晶層は面内方向の抗磁力Hcは低いものの垂
直方向に対する抗磁力Hc⊥は非常に高い値
(750Oe以上)となつている。
Next, Ta is added as a third element to Co-Cr (1~
The same phenomenon occurs in the 10at% addition range),
FIG. 7 shows the results of the same experiment as in the case of adding Nb described above. Figure 7 shows Co-Cr-Ta
The film thickness of the thin film is controlled by changing the sputtering time, and the in-plane coercive force Hc, perpendicular coercive force Hc⊥, and magnetization jump amount σj are plotted for each film thickness. From the same figure, Co
When Ta is added to -Cr, almost the same results as when Nb is added to Co-Cr are obtained, and the boundary between the small-grain crystal layer and the large-grain crystal layer is approximately 0.075 μm thick. However, the small-grain crystal layer with a film thickness of 0.075 μm or less has a coercive force in the in-plane direction and the perpendicular direction.
It is a so-called low coercive force layer with low Hc and Hc⊥ (both Hc and Hc⊥ below 170 Oe). In addition to this, the vertical and in-plane coercive forces Hc⊥, Hc
The difference in the values of is small and the layer is so-called isotropic. In addition, although the large-grain crystal layer with a film thickness of 0.075 μm or more has a low coercive force Hc in the in-plane direction, the coercive force Hc⊥ in the perpendicular direction has a very high value (750 Oe or more).

なお上記実験で注意すべきことは、スパツタリ
ング条件及びNb、Taの添加量を前記した値
(Nb:2〜10at%、Ta:1〜10at%)より変え
た場合磁化ジヤンプは生じないが、しかるに磁化
ジヤンプが生じないCo−Cr−Nb薄膜、Co−Cr
−Ta薄膜及びCo−Cr薄膜においても小粒径結晶
層及び大粒径結晶層が形成されていることである
(前記資料参照)。磁化ジヤンプが生じないCo−
Cr−Nb薄膜のヒステリシス曲線の一例を第8図
に示す。第8図Aは小粒径結晶層及び大粒径結晶
層を含む面内方向のヒステリシス曲線であり、第
8図Bは小粒径結晶層のみの面内方向のヒステリ
シス曲線、第8図Cは大粒径結晶層のみの面内方
向のヒステリシス曲線である。各図より小粒径結
晶層の面内方向の残留磁化MrBは大粒径結晶層
の残留磁化MrCよりも大であるため、両結晶層
を含む残留磁化MrAは大粒径結晶層の残留磁化
MrCのみの時よりも不利となり異方性磁界Hk
が小さくなる。また小粒径結晶層は配向が悪いこ
と(△θ50が大)が知られており、また面内方向
の抗磁力Hcも大で垂直磁気記録には適さない。
What should be noted in the above experiment is that if the sputtering conditions and the added amounts of Nb and Ta are changed from the above values (Nb: 2 to 10 at%, Ta: 1 to 10 at%), no magnetization jump occurs; Co-Cr-Nb thin film, Co-Cr without magnetization jump
-A small grain size crystal layer and a large grain size crystal layer are formed also in the Ta thin film and the Co-Cr thin film (see the above-mentioned document). Co− that does not cause magnetization jump
An example of the hysteresis curve of a Cr-Nb thin film is shown in FIG. Figure 8A is an in-plane hysteresis curve including a small-grain crystal layer and a large-grain crystal layer, Figure 8B is an in-plane hysteresis curve of only a small-grain crystal layer, and Figure 8C is the in-plane hysteresis curve of only the large-grain crystal layer. From each figure, the residual magnetization Mr B in the in-plane direction of the small-grain crystal layer is larger than the residual magnetization Mr C of the large-grain crystal layer, so the residual magnetization Mr A including both crystal layers is larger than that of the large-grain crystal layer. residual magnetization of
It is more disadvantageous than when only Mr C is used, and the anisotropic magnetic field Hk
becomes smaller. Furthermore, it is known that the small-grain crystal layer has poor orientation (large Δθ50), and has a large coercive force Hc in the in-plane direction, making it unsuitable for perpendicular magnetic recording.

ここで上記の如く小粒径結晶層と大粒径結晶層
を有するCo−Cr−Nb薄膜及びCo−Cr−Ta薄膜
を垂直磁気記録媒体として考えた場合、Co−Cr
−Nb薄膜及びCo−Cr−Ta薄膜にその膜面に対
し垂直方向に膜厚の全てに亘つて垂直磁化を行な
おうとした場合、小粒径結晶層の存在は垂直磁化
に対し極めて不利な要因となると従来考えられて
いた(磁化ジヤンプが生じている場合及び磁化ジ
ヤンプが生じていない場合の相方において不利な
要因となる)。すなわち磁化ジヤンプが生じてい
る場合の小粒径結晶層は、面内方向及び垂直方向
に対する抗磁力Hc、Hc⊥が共に極めて低く
(170Oe以下)、この層においては垂直磁化はほと
んどされないと考えられる。また磁化ジヤンプが
生じていない場合の小粒径結晶層においても、面
内方向の抗磁力Hcは磁化ジヤンプの生じてい
る場合の抗磁力Hcよりは大であるが垂直方向
の抗磁力Hc⊥は垂直磁気記録を実現し得る程の
抗磁力はなくやはり良好な垂直磁化は行なわれな
いと考えられる。従つて膜面に対して垂直方向に
磁化を行なつても小粒径結晶層における垂直磁化
はほとんど行なわれず、磁性膜全体としての垂直
磁化効率が低下してしまう。この影響はリングコ
アヘツドのように磁束の面内成分を多く含む磁気
ヘツドにおいては顕著である。
As mentioned above, when considering a Co-Cr-Nb thin film and a Co-Cr-Ta thin film having a small-grain crystal layer and a large-grain crystal layer as a perpendicular magnetic recording medium, the Co-Cr
- When attempting to create perpendicular magnetization in a Nb thin film or a Co-Cr-Ta thin film over the entire film thickness in a direction perpendicular to the film surface, the existence of a small-grain crystal layer is extremely disadvantageous for perpendicular magnetization. It was conventionally thought that this would be a factor (it would be a disadvantageous factor in the case where a magnetization jump occurs and in the case where a magnetization jump does not occur). In other words, in a small-grain crystal layer where a magnetization jump occurs, the coercive forces Hc and Hc⊥ in the in-plane and perpendicular directions are both extremely low (170 Oe or less), and it is thought that there is almost no perpendicular magnetization in this layer. . Furthermore, even in a small-grain crystal layer when no magnetization jump occurs, the in-plane coercive force Hc is larger than the coercive force Hc when a magnetization jump occurs, but the perpendicular coercive force Hc⊥ is There is no coercive force sufficient to realize perpendicular magnetic recording, and it is thought that good perpendicular magnetization cannot be achieved. Therefore, even if magnetization is performed in a direction perpendicular to the film surface, perpendicular magnetization in the small-grain crystal layer is hardly achieved, and the perpendicular magnetization efficiency of the magnetic film as a whole decreases. This effect is remarkable in a magnetic head such as a ring core head that contains a large amount of in-plane magnetic flux component.

しかるに本発明における小粒径結晶層の磁気特
性は、面内方向に対する抗磁力Hcが小であり
比較的高い透磁率及び磁気的な等方性を有してお
り、これは従来Co−Cr薄膜とベース間に配設し
た裏打ち層と似た特性を有している。つまりCo
−Cr−Nb薄膜及びCo−Cr−Ta薄膜において、
低抗磁力Hcを有する小粒径結晶層をいわゆる
裏打ち層である高透磁率層として用いることが可
能であると考えられる。
However, the magnetic properties of the small-grain crystal layer in the present invention are that the coercive force Hc in the in-plane direction is small, and it has relatively high magnetic permeability and magnetic isotropy, which is different from that of the conventional Co-Cr thin film. It has similar characteristics to the backing layer disposed between the base and the base. In other words, Co
-In Cr-Nb thin film and Co-Cr-Ta thin film,
It is considered possible to use a small-grain crystal layer having a low coercive force Hc as a high magnetic permeability layer, which is a so-called underlayer.

従つてCo−Cr−Nb薄膜及びCo−Cr−Ta薄膜
の単一膜がスパツタリングされる際形成される小
粒径結晶層を裏打ち層として機能させ、また大粒
径結晶層を垂直磁化層として機能させることが考
えられる。しかるにCo−Cr−Nb薄膜及びCo−
Cr−Ta薄膜の単一膜では、Co−Crに添加される
Nb、Taの添加量は磁化ジヤンプが発生する所定
量に規制されてしまう。また強磁性材であるCo
に非磁性材であるNb、Taを添加することにより
飽和磁化Msが低下してしまい高出力の垂直磁気
記録が行なえない。
Therefore, when a single film of Co-Cr-Nb thin film or Co-Cr-Ta thin film is sputtered, the small-grain crystal layer formed will function as a backing layer, and the large-grain crystal layer will function as a perpendicular magnetization layer. It is possible to make it work. However, Co-Cr-Nb thin film and Co-
In a single Cr-Ta thin film, the addition of Co-Cr
The amounts of Nb and Ta added are limited to a predetermined amount at which a magnetization jump occurs. Also, the ferromagnetic material Co
By adding Nb and Ta, which are nonmagnetic materials, to the material, the saturation magnetization Ms decreases, making it impossible to perform high-output perpendicular magnetic recording.

この点に鑑み本発明では上記磁化ジヤンプが生
ずる条件下で、まずベース上にCo−Cr−Nb薄膜
またはCo−Cr−Ta薄膜の小粒径結晶層を形成さ
せ(約0.1μm以下)、その上にNb及びTaの添加
量を磁化ジヤンプの生ずる条件値より小として飽
和磁化Msを大としたCo−Cr−Nb薄膜またはCo
−Cr−Ta薄膜をスパツタリングし垂直磁気記録
に直接寄与する大粒径結晶層を形成した。上記構
成の垂直磁気記録媒体において小粒径結晶層とし
てCo−Cr−Nb薄膜を用いた場合の各種磁気特性
をNbの添加量を小としたCo−Cr−Nb単層薄膜
及び磁化ジヤンプの生じているCo−Cr−Nb単層
薄膜と比較して第9図に、この垂直磁気記録媒体
にセンダスト(登録商標)よりなるリングコアヘ
ツドで磁気記録再生した時の各薄膜の記録波長と
再生出力の関係を第10図に、また小粒径結晶層
としてCo−Cr−Ta薄膜を用いた場合の各種磁気
特性をTaの添加量を小としたCo−Cr−Ta単層
薄膜及び磁化ジヤンプの生じているCo−Cr−Ta
単層薄膜と比較して第11図に夫々示す。第9図
及び第11図より磁化ジヤンプの生ずる条件下で
形成したCo−Cr−Nb及びCo−Cr−Ta(以下Co
−Cr−NbとCo−Cr−Taを総称する場合Co−Cr
−Nb(Ta)と示す)の小粒径結晶層上に磁化ジ
ヤンプの生ずる条件値より小なる量のNbまたTa
を添加したCo−Cr−Nb(Ta)の大粒径結晶層を
形成させた垂直磁気記録媒体(以下二層媒体とい
う)は、磁化ジヤンプの生じているCo−Cr−Nb
(Ta)薄膜の各単層垂直磁気記録媒体よりも飽和
磁化Msが大となつており、かつ垂直方向の抗磁
力Hc⊥も十分に高い値となつており垂直磁化に
適した特性を有している。一方、第10図に示さ
れる如く、再生出力と記録波長特性は磁化ジヤン
プの生じているCo−Cr−Nb薄膜の垂直磁気記録
媒体(以下磁化ジヤンプ単層媒体という)及び
Nbの添加量を小としたCo−Cr−Nb薄膜の垂直
磁気記録媒体(以下低添加単層媒体と略称する)
に比較して二層媒体は全ての記録波長領域で高い
値を示しており強い再生出力が得られる。
In view of this, in the present invention, under the conditions where the magnetization jump occurs, a small crystal layer of Co-Cr-Nb thin film or Co-Cr-Ta thin film is formed on the base (approximately 0.1 μm or less). Co-Cr-Nb thin film or Co in which the saturation magnetization Ms is increased by adding Nb and Ta in an amount smaller than the condition value that causes a magnetization jump.
-By sputtering a Cr-Ta thin film, we formed a large-grain crystal layer that directly contributes to perpendicular magnetic recording. Various magnetic properties when a Co-Cr-Nb thin film is used as a small-grain crystal layer in a perpendicular magnetic recording medium with the above configuration are compared with a Co-Cr-Nb single-layer thin film with a small addition amount of Nb and the occurrence of a magnetization jump. Figure 9 shows the recording wavelength and reproduction output of each thin film when magnetic recording and reproduction are performed on this perpendicular magnetic recording medium using a ring core head made of Sendust (registered trademark). The relationship is shown in Figure 10, and various magnetic properties when a Co-Cr-Ta thin film is used as a small-grain crystal layer are shown in Figure 10. Co−Cr−Ta
A comparison with a single-layer thin film is shown in FIG. 9 and 11, Co-Cr-Nb and Co-Cr-Ta (hereinafter Co
−Cr−Nb and Co−Cr−Ta are collectively referred to as Co−Cr
−Nb(Ta)) on a small-grain crystal layer of Nb or Ta that is smaller than the condition value that causes a magnetization jump.
A perpendicular magnetic recording medium (hereinafter referred to as a dual-layer medium) in which a large-grain crystal layer of Co-Cr-Nb (Ta) doped with Co-Cr-Nb (Ta) has a magnetization jump.
(Ta) The saturation magnetization Ms is larger than each single-layer perpendicular magnetic recording medium of thin film, and the perpendicular coercive force Hc⊥ is also a sufficiently high value, so it has characteristics suitable for perpendicular magnetization. ing. On the other hand, as shown in FIG. 10, the reproduction output and recording wavelength characteristics are different for the Co-Cr-Nb thin film perpendicular magnetic recording medium (hereinafter referred to as magnetization jump single layer medium) in which magnetization jump occurs.
Co-Cr-Nb thin film perpendicular magnetic recording medium with a small amount of added Nb (hereinafter abbreviated as low-addition single layer medium)
Compared to , the dual-layer medium shows high values in all recording wavelength regions and can obtain strong reproduction output.

特に短波長領域(記録波長が1μm〜0.2μmの領
域)においては、磁化ジヤンプ単層媒体及び低添
加単層媒体もその再生出力を増大させているもの
の二層媒体は更に高い効率で再生出力が増大して
いる。従つて二層媒体は特に短波長領域での垂直
磁気記録再生に適しているといえる。なおCo−
Cr−Taの二層媒体でも第13図に示す如く同様
の結果が得られた。
Particularly in the short wavelength region (recording wavelength region of 1 μm to 0.2 μm), although magnetization jump single-layer media and low-doping single-layer media increase their reproduction output, dual-layer media can increase reproduction output with even higher efficiency. It is increasing. Therefore, it can be said that the dual-layer medium is particularly suitable for perpendicular magnetic recording and reproduction in the short wavelength region. Furthermore, Co-
Similar results were obtained with the Cr--Ta two-layer medium as shown in FIG.

上記現象の生ずる理由を第12図を用いて以下
推論する。ポリイミド等のベース1上に磁化ジヤ
ンプの生ずる条件を満足させてCo−Cr−Nb
(Ta)磁性材を約0.1μmの膜厚寸法でスパツタリ
ングすると、前述の如く被膜されたCo−Cr−Nb
(Ta)薄膜は略その全体において小粒径結晶層2
が形成されているものと考えられる。この小粒径
結晶層2は面内方向の抗磁力Hcが小で、かつ
垂直方向の抗磁力Hc⊥との差が少ない等方性を
有した層となつている。従つて小粒径結晶層2に
いわゆる裏打ち層と略同様な機能を行なわせるこ
とができる。
The reason why the above phenomenon occurs will be deduced below using FIG. 12. Co-Cr-Nb is applied to the base 1 made of polyimide etc. by satisfying the conditions for generating a magnetization jump.
When (Ta) magnetic material is sputtered to a film thickness of approximately 0.1 μm, a Co-Cr-Nb film is formed as described above.
(Ta) The thin film has a small-grain crystal layer 2 in almost its entirety.
is thought to be formed. This small-grain crystal layer 2 is an isotropic layer with a small coercive force Hc in the in-plane direction and a small difference from the coercive force Hc⊥ in the perpendicular direction. Therefore, the small grain size crystal layer 2 can perform substantially the same function as a so-called backing layer.

小粒径結晶層2の上部には、Nb及びTaの添加
量を磁化ジヤンプの生ずる条件値より小とした
Co−Cr−Nb(Ta)磁性材が約0.1μmの膜厚寸法
でスパツタリングされる。小粒径結晶層2より
Nb及びTaの添加量の小なるCo−Cr−Nb(Ta)
磁性材が小粒径結晶層2上にスパツタリングされ
る際、両者は結晶構造及び組成において似た特性
を有しているため両磁性材の境界部分において
Nb及びTaの添加量の小なるCo−Cr−Nb(Ta)
磁性材の小粒径結晶層はほとんど発生せず(発生
したとしても垂直磁気記録特性に影響を与える厚
さまで到らないと考えられる)、高い飽和磁化Ms
を有すると共に垂直方向に強い抗磁力を有し、垂
直磁化に直接寄与する大粒径結晶層3が直ちに成
長すると考えられる。また大粒径結晶層3を形成
するCo−Cr−Nb(Ta)薄膜において、Nb及び
Taの添加量は小粒径結晶層2の如く磁化ジヤン
プが生ずる条件値に規制されることなく任意に選
定することができる。前述の如くNb及びTaの添
加によりCoの飽和磁化Msは低下するものの、Co
の磁化容易軸は垂直方向に強く配向する。従つて
Nb及びTaの添加量を適宜選定することにより、
Coの磁化容易軸を強く垂直方向に配向させつつ
高飽和磁化Msを維持することができる。小粒径
結晶層2上に形成されるCo−Cr−Nb(Ta)薄膜
のNb及びTaの添加量は上記適宜量に選定されて
いる。よつて二層媒体4に摺接してリングコア状
の磁気ヘツド5から放たれた磁束線は大粒径結晶
層3を貫通して小粒径結晶層2に到り、低抗磁力
でかつ等方性を有する小粒径結晶層2内で磁束は
面内方向に進行し、磁気ヘツド5の磁極部分で急
激に磁束が吸い込まれることにより大粒径結晶層
3に垂直磁化がされると考えられる。よつて磁束
が形成する磁気ループは第12図に矢印で示す如
く、馬蹄形状となり所定垂直磁気記録位置におい
て高い飽和磁化Msを有する大粒径結晶層3に磁
束が集中して鋭く貫通するため、大粒径結晶層3
には残留磁化の大なる垂直磁化が行なわれる。こ
れに加え、Nb及びTaを添加することにより記録
媒体の熱膨張率を調整できることが知られてお
り、よつてNb及びTaの添加量を適宜選定するこ
とが可能となることにより熱膨張率を調整し得、
カールの少ない記録媒体を容易に製造することが
できる。また小粒径結晶層2の面内方向の抗磁力
Hcは第6図、第7図より10Oe〜50Oe程度であ
り大粒径結晶層3の抗磁力Hc⊥に対して極端に
小なる値ではないため衝撃性のバルクハウゼンノ
イズが発生することなく良好な垂直磁気記録再生
を行ない得る。
In the upper part of the small-grain crystal layer 2, the amount of Nb and Ta added was set to be smaller than the condition value that causes a magnetization jump.
Co-Cr-Nb (Ta) magnetic material is sputtered to a film thickness of approximately 0.1 μm. From small grain crystal layer 2
Co-Cr-Nb(Ta) with small amounts of Nb and Ta added
When the magnetic material is sputtered onto the small-grain crystal layer 2, the boundary between the two magnetic materials is
Co-Cr-Nb(Ta) with small amounts of Nb and Ta added
A small-grain crystal layer of magnetic material hardly occurs (even if it occurs, it is thought that it will not reach a thickness that affects perpendicular magnetic recording characteristics), and a high saturation magnetization Ms
It is thought that the large-grain crystal layer 3, which has a strong coercive force in the perpendicular direction and directly contributes to perpendicular magnetization, grows immediately. In addition, in the Co-Cr-Nb (Ta) thin film forming the large-grain crystal layer 3, Nb and
The amount of Ta added can be arbitrarily selected without being restricted by the condition value that causes a magnetization jump as in the case of the small-grain crystal layer 2. As mentioned above, although the addition of Nb and Ta reduces the saturation magnetization Ms of Co,
The easy axis of magnetization of is strongly oriented in the vertical direction. accordingly
By appropriately selecting the amount of Nb and Ta added,
High saturation magnetization Ms can be maintained while the easy axis of magnetization of Co is strongly oriented in the perpendicular direction. The amounts of Nb and Ta added to the Co--Cr--Nb (Ta) thin film formed on the small-grain crystal layer 2 are selected to be the above-mentioned appropriate amounts. Therefore, the magnetic flux lines emitted from the ring core-shaped magnetic head 5 in sliding contact with the two-layer medium 4 penetrate the large-grain crystal layer 3 and reach the small-grain crystal layer 2, resulting in a low coercive force and an isotropic structure. It is thought that the magnetic flux advances in the in-plane direction within the small-grain crystal layer 2, which has a magnetic field, and that the magnetic flux is suddenly absorbed by the magnetic pole portion of the magnetic head 5, causing perpendicular magnetization in the large-grain crystal layer 3. . Therefore, the magnetic loop formed by the magnetic flux becomes a horseshoe shape as shown by the arrow in FIG. 12, and the magnetic flux concentrates and sharply penetrates the large-grain crystal layer 3 having a high saturation magnetization Ms at a predetermined perpendicular magnetic recording position. Large grain crystal layer 3
Perpendicular magnetization with large residual magnetization occurs. In addition, it is known that the thermal expansion coefficient of a recording medium can be adjusted by adding Nb and Ta, and it is therefore possible to adjust the thermal expansion coefficient by appropriately selecting the amounts of Nb and Ta added. can be adjusted,
A recording medium with less curl can be easily manufactured. In addition, the coercive force in the in-plane direction of the small-grain crystal layer 2
As shown in Figures 6 and 7, Hc is approximately 10 Oe to 50 Oe, which is not an extremely small value with respect to the coercive force Hc⊥ of the large-grain crystal layer 3, so it is good without causing impact Barkhausen noise. perpendicular magnetic recording and reproduction can be performed.

発明の効果 上述の如く本発明になる垂直磁気記録媒体によ
れば、コバルト及びクロムに、ニオブ及びタンタ
ルのうち少なくとも一方を添加してなる磁性材に
よりベース上に低抗磁力の、原点近傍で急激に立
ち上がる曲線で表わされる面内M−Hヒステリシ
ス特性である磁化ジヤンプを有する層を形成する
と共に、該層上に、該層のニオブ又はタンタルの
添加量より小なる量で、該磁化ジヤンプを生じな
い量のニオブ及びタンタルのうち少なくとも一方
をコバルト及びクロムに添加した磁性材よりなる
垂直磁化層を形成することにより、垂直磁気記録
媒体はベース上に面内方向の抗磁力が小さく、か
つ、磁化ジヤンプを有する層と、高い飽和磁化を
有しかつ磁化ジヤンプを生じず、垂直方向の抗磁
力が大である垂直磁性層との二層を形成された構
成となるため、磁気ヘツドより放たれた磁束は容
易に低抗磁力を有すると共に磁化ジヤンプを有す
る層に進入し水平方向へ進行した後磁気ヘツドの
磁極にて高い飽和磁化を有すると共に高抗磁力を
有する垂直磁性層を貫通して磁気ヘツドの磁極に
急激にかつ鋭く吸い込まれるため、垂直磁化層に
は強い残留磁化が生じ高い再生出力を実現し得る
垂直磁気記録再生を行なうことができ、これに加
え特に短い記録波長に対しすぐれた垂直磁化が行
なわれ良好な再生出力を得ることができ、また磁
化ジヤンプを有する層は裏打ち層として確実に機
能すると共にその抗磁力は垂直磁化層の抗磁力に
対して不要に小なる値ではないため衝撃性のバル
クハウゼンノイズが発生することもなく良好な垂
直磁気記録再生が行なうことができ、更に磁化ジ
ヤンプを有する層上に形成される垂直磁化層の
Nb及びTaの添加量は任意に選定することが可能
で、その添加量をCoの磁化容易軸を強く垂直方
向に配向させつつ高飽和磁化を維持し得る適宜量
に選定することにより再生出力の大なる良好な垂
直磁気記録再生を実現でき、かつ熱膨張率を調整
できるのでカールの少ない垂直磁気記録媒体を容
易に製造することができる等の特長を有する。
Effects of the Invention As described above, according to the perpendicular magnetic recording medium according to the present invention, a magnetic material made of cobalt and chromium with at least one of niobium and tantalum added to the base has a low coercive force and an abrupt magnetic field near the origin. Forming a layer having a magnetization jump, which is an in-plane M-H hysteresis characteristic represented by a rising curve, and producing the magnetization jump on the layer in an amount smaller than the amount of niobium or tantalum added to the layer. By forming a perpendicular magnetization layer made of a magnetic material in which at least one of cobalt and chromium is added to cobalt and chromium in an amount of at least one of niobium and tantalum, the perpendicular magnetic recording medium has a small coercive force in the in-plane direction on the base and a high magnetization. The structure consists of two layers: a layer with a jump, and a perpendicular magnetic layer that has high saturation magnetization, does not produce a magnetization jump, and has a large coercive force in the perpendicular direction. The magnetic flux easily enters a layer with a low coercive force and a magnetization jump, propagates in the horizontal direction, and then passes through a perpendicular magnetic layer with a high saturation magnetization and a high coercive force at the magnetic pole of the magnetic head to reach the magnetic head. Because the perpendicular magnetization layer is suddenly and sharply attracted to the magnetic pole of Magnetization is performed and good reproduction output can be obtained, and the layer having a magnetization jump functions reliably as a backing layer, and its coercive force is not unnecessarily small compared to the coercive force of the perpendicularly magnetized layer. Good perpendicular magnetic recording and reproduction can be performed without generating impulsive Barkhausen noise, and furthermore, the perpendicular magnetic layer formed on the layer having a magnetization jump can be used.
The amount of Nb and Ta added can be arbitrarily selected, and by selecting an appropriate amount that can maintain high saturation magnetization while strongly orienting the axis of easy magnetization of Co in the perpendicular direction, the playback output can be improved. It has the advantage of being able to realize very good perpendicular magnetic recording and reproduction, and because the coefficient of thermal expansion can be adjusted, a perpendicular magnetic recording medium with little curl can be easily manufactured.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明になる垂直磁気記録媒体の一実
施例の磁性膜であるCo−Cr−Nb薄膜のヒステリ
シス曲線を示す図、第2図は小粒径結晶層のヒス
テリシス曲線を示す図、第3図から第5図は磁化
ジヤンプが生ずる理由を説明するための図、第6
図はCo−Cr−Nb薄膜が二層構造となつているこ
と及び各層の磁気特性を示す図、第7図はCo−
Cr−Ta薄膜が二層構造となつていること及び各
層の磁気特性を示す図、第8図は磁化ジヤンプが
生じていないCo−Cr−Nb薄膜のヒステリシス曲
線の一例を示す図、第9図は小粒径結晶層として
Co−Cr−Nb薄膜を用いた場合の各種磁気特性を
Nbの添加量を小としたCo−Co−Cr−Nb単層薄
膜及び磁化ジヤンプの生じているCo−Cr−Nb単
層薄膜と比較して示す図、第10図は第9図に示
した各薄膜の記録波長と再生出力の関係を示す
図、第11図は小粒径結晶層としてCo−Cr−Ta
薄膜を用いた場合の各種磁気記録特性をTaの添
加量を小としたCo−Cr−Ta単層薄膜及び磁化ジ
ヤンプの生じているCo−Cr−Ta単層薄膜と比較
して示す図、第12図は本発明記録媒体の結晶成
長状態を概略的に示すと共に磁束が形成する磁気
ループを示す図、第13図は第11図で示した各
薄膜の記録波長と再生出力の関係を示す図であ
る。 1……ベース、2……小粒径結晶層、3……大
粒径結晶層、4……二層媒体、5……磁気ヘツ
ド。
FIG. 1 is a diagram showing a hysteresis curve of a Co-Cr-Nb thin film, which is a magnetic film of an embodiment of a perpendicular magnetic recording medium according to the present invention, and FIG. 2 is a diagram showing a hysteresis curve of a small-grain crystal layer. Figures 3 to 5 are diagrams for explaining the reasons why magnetization jumps occur, and Figure 6
The figure shows the two-layer structure of the Co-Cr-Nb thin film and the magnetic properties of each layer. Figure 7 shows the Co-Cr-Nb thin film.
Figure 8 shows the two-layer structure of the Cr-Ta thin film and the magnetic properties of each layer. Figure 8 shows an example of the hysteresis curve of a Co-Cr-Nb thin film with no magnetization jump. Figure 9. as a small-grain crystal layer
Various magnetic properties when using Co-Cr-Nb thin film
Figure 10 shows a comparison between a Co-Co-Cr-Nb single-layer thin film with a small amount of added Nb and a Co-Cr-Nb single-layer thin film with a magnetization jump. A diagram showing the relationship between recording wavelength and reproduction output of each thin film, Figure 11 shows Co-Cr-Ta as a small grain crystal layer.
Figure 1 shows various magnetic recording properties when using thin films in comparison with a Co-Cr-Ta single-layer thin film with a small amount of Ta added and a Co-Cr-Ta single-layer thin film with a magnetization jump. FIG. 12 schematically shows the crystal growth state of the recording medium of the present invention and shows the magnetic loop formed by the magnetic flux, and FIG. 13 shows the relationship between the recording wavelength and reproduction output of each thin film shown in FIG. 11. It is. DESCRIPTION OF SYMBOLS 1...Base, 2...Small grain size crystal layer, 3...Large grain size crystal layer, 4...Two layer medium, 5...Magnetic head.

Claims (1)

【特許請求の範囲】[Claims] 1 コバルト及びクロムに、ニオブ及びタンタル
のうち少なくとも一方を添加してなる磁性材によ
りベース上に低抗磁力の、原点近傍で急激に立ち
上がる曲線で表わされる面内M−Hヒステリシス
特性である磁化ジヤンプを有する層を形成すると
共に、該層上に、該層のニオブ又はタンタルの添
加量より小なる量で、該磁化ジヤンプを生じない
量のニオブ及びタンタルのうち少なくとも一方を
コバルト及びクロムに添加した磁性材よりなる垂
直磁化層を形成してなることを特徴とする垂直磁
気記録媒体。
1 Magnetization jump, which is an in-plane M-H hysteresis characteristic expressed by a curve that rapidly rises near the origin, has a low coercive force on a base using a magnetic material made by adding at least one of niobium and tantalum to cobalt and chromium. and at the same time, on the layer, at least one of niobium and tantalum is added to cobalt and chromium in an amount smaller than the amount of niobium or tantalum added in the layer and in an amount that does not cause the magnetization jump. A perpendicular magnetic recording medium characterized by forming a perpendicular magnetic layer made of a magnetic material.
JP6463085A 1985-03-28 1985-03-28 Vertical magnetic recording medium Granted JPS61222023A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP6463085A JPS61222023A (en) 1985-03-28 1985-03-28 Vertical magnetic recording medium
US06/843,757 US4798765A (en) 1985-03-28 1986-03-25 Perpendicular magnetic recording medium
DE19863610432 DE3610432A1 (en) 1985-03-28 1986-03-27 CROSS-MAGNETIZATION RECORDING MEDIUM
GB8607871A GB2175014B (en) 1985-03-28 1986-04-01 Perpendicular magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6463085A JPS61222023A (en) 1985-03-28 1985-03-28 Vertical magnetic recording medium

Related Child Applications (4)

Application Number Title Priority Date Filing Date
JP15790985A Division JPS61224132A (en) 1985-03-28 1985-07-17 Vertical magnetic recording medium
JP15790885A Division JPS61224131A (en) 1985-03-28 1985-07-17 Vertical magnetic recording medium
JP60291563A Division JPH0642282B2 (en) 1985-12-24 1985-12-24 Perpendicular magnetic recording / reproducing method
JP29156285A Division JPS61224135A (en) 1985-12-24 1985-12-24 Vertical magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS61222023A JPS61222023A (en) 1986-10-02
JPH0532809B2 true JPH0532809B2 (en) 1993-05-18

Family

ID=13263773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6463085A Granted JPS61222023A (en) 1985-03-28 1985-03-28 Vertical magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS61222023A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2552546B2 (en) * 1989-06-09 1996-11-13 株式会社クボタ Metal thin film magnetic recording medium
JP3919047B2 (en) 1998-09-30 2007-05-23 日本ビクター株式会社 Perpendicular magnetic recording medium
KR101506760B1 (en) * 2011-08-31 2015-03-30 삼성전기주식회사 Magnetic substrate and method for manufacturing magnetic substrate

Also Published As

Publication number Publication date
JPS61222023A (en) 1986-10-02

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