JPH05329221A - Fire extinguisher for semiconductor clean room - Google Patents

Abstract

(57) [Summary] [Purpose] To provide a fire extinguisher which does not contaminate or corrode a semiconductor clean room and whose fire extinguishing effect is not reduced by air flow. [Structure] When in use, the safety pin 11 is removed, the safety stopper 9 is rotated to remove it from between the lever 10 and the grip portion 8, and the lever 10 is firmly gripped together with the grip portion 8. The sealing plate 5 is broken, and carbon dioxide gas is ejected from the carbon dioxide gas cylinder 7 into the pure water container 1 and melts into the pure water 2 and simultaneously pressurizes the pure water 2. The pressurized pure water 2 is extinguished by ejecting from the discharge nozzle 18 of the hose 17 from the siphon pipe 16 through the seal valve 15.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fire extinguisher for a semiconductor clean room which can be used in a semiconductor manufacturing clean room and is clean and in which a fire extinguisher is not blown by a clean room clean air stream.

[0002]

2. Description of the Related Art Conventionally, as a fire extinguisher such as a fire extinguisher installed in a semiconductor clean room, there are an ABC powder fire extinguisher, a foam fire extinguisher, a halon fire extinguisher and a carbon dioxide gas fire extinguisher. The ABC powder fire extinguisher and the foam fire extinguisher extinguish the fire by adhering to the combustible substance and cutting off the supply of oxygen in the air necessary for the combustion reaction. Therefore, the fire extinguishing effect is hardly affected even when used in a place where there is an air flow such as a semiconductor clean room. However, fine powder and splashes of fire extinguishing agent will scatter and enter everywhere in the clean room to become a pollution source, which may be difficult to remove easily.Therefore, it may not be possible to use it as a semiconductor clean room. Was difficult to use.

The halon fire extinguisher is a fire extinguisher using halon gas and can extinguish at a low concentration of about 6%, so that it can be extinguished without being significantly affected by the air flow in a clean room, and the halon gas itself is a harmless and clean gas. Therefore, it has been considered that there is no concern of contamination such as ABC powder fire extinguisher and foam fire extinguisher, and that there is no problem in using it in a clean room. However, halon is similar to chlorofluorocarbon, and it is necessary to develop alternatives because it has been approved by the United Nations Environment Council to reduce production and not use it. In addition, the extinguishing mechanism of halon is based on the fact that the bromine radicals that are generated when halon is thermally decomposed by the heat of a combustion product act as a negative catalyst that inhibits the oxidation reaction, which is a combustion reaction. Then, besides bromine, strong corrosive gases such as hydrofluoric acid and hydrobromic acid are generated. For this reason, these machines are corroded in a clean room in which precision machines are installed, so that a special measure is required when used in a semiconductor clean room, which is a problem.

The carbon dioxide gas fire extinguisher is a fire extinguisher which covers the combusted material with carbon dioxide gas and physically shuts off oxygen in the air to extinguish the fire. Since this fire extinguisher does not generate corrosive gas or contaminants, there is no problem in terms of cleanliness. However, extinguishing requires a concentration of 50% or more, and since it is a gas heavier than air, carbon dioxide gas, which is an extinguishing agent, is blown under the floor in a vertical laminar clean room, and the extinguishing effect is extremely high. Therefore, there is a problem that it cannot be used as a fire extinguisher in a semiconductor clean room.

[0005]

As can be seen from the above description, the fire extinguishers such as the fire extinguisher provided by the prior art are all contaminated or corroded when used in a semiconductor clean room. There is a serious problem that the fire extinguishing effect as a fire extinguisher cannot be expected. Therefore, there has been a strong demand for the development of a clean and powerful fire extinguisher for semiconductor clean rooms.

The present invention provides a fire extinguisher for a semiconductor clean room, which uses pure water that does not contaminate or corrode the semiconductor clean room and carbon dioxide gas and is effective even in a place where there is an air flow such as in the semiconductor clean room. The purpose is to

[0007]

A fire extinguisher for a semiconductor clean room according to the present invention is a carbon dioxide gas cylinder in which carbon dioxide gas is pressurized and sealed, a pure water container in which pure water is sealed, and a pure water container from a gas cylinder when extinguishing a fire. A gas introduction valve device for introducing carbon dioxide gas, a pure water jet valve device for opening a part of the pure water container to jet pure water at the pressure of carbon dioxide gas, and a pure water jet valve device for jetting The deionized water container is made of a material that does not contaminate the deionized water, at least a portion in contact with the deionized water.

Further, a pure water introduction valve device for introducing pure water into the pure water container, an overflow control valve device for controlling the amount of pure water overflowing from the pure water container, a fire detector, and this fire detector. It is provided with a control device for actuating each valve device by a signal from.

[0009]

In the present invention, since carbon dioxide gas is used after being dissolved in pure water, both the fire extinguishing action by pure water and the fire extinguishing action by carbon dioxide gas act simultaneously. Moreover,
Carbon dioxide gas continues to be generated until the carbon dioxide gas disappears from the pure water in which it is dissolved, so carbon dioxide is blown away even in a place with an air flow such as in a clean room, and the fire extinguishing effect disappears instantly. There is no such thing. Furthermore, the fire extinguishing materials are pure water and carbon dioxide gas,
In both cases, it is easy to obtain a high-purity material containing almost no alkali metals such as sodium and heavy metals such as iron and chromium, which are problems in semiconductor manufacturing. In addition, the portion of the container that stores pure water for a long period of time is made of a material that does not contaminate the pure water. Therefore, since the fire extinguishing agent does not contaminate the clean room, there is no problem as a fire extinguisher such as a fire extinguisher installed and used in the semiconductor clean room.

Further, since the control device operates each valve device when receiving a signal from the fire detector, extinguishing can be automated.

[0011]

1 is a sectional view of an embodiment of the present invention. A pure water container 1 is filled with pure water 2. Inside the pure water container 1, a material that does not dissolve in the pure water 2 and becomes a source of heavy metal contamination, such as polyether ether ketone (PEEK) or anodized aluminum is used.

A carbon dioxide gas cylinder holder 3 is fixed on the pure water container 1 by O-ring sealing with a screw. Below the carbon dioxide gas cylinder holder 3, a thin sealing plate 5 is fixed and sealed with a sealing plate fixing screw 4. A gas introduction valve device 6 such as a needle tube is provided on the sealing plate 5.
There is a carbon dioxide gas cylinder 7 on it.

When not in use, a safety stopper 9 is fixed between the grip portion 8 and the lever 10 so that the lever 10 cannot inadvertently push down the carbon dioxide gas cylinder 7. When using, the safety pin 11 is pulled out upward, the safety stopper 9 is rotated around the valve opening / closing rod 13, and is removed from between the grip portion 8 and the lever 10, and the lever 10 and the grip portion 8 are firmly gripped together. And lever pin 12
The carbon dioxide gas cylinder 7 is pushed down with the fulcrum as a fulcrum, and both the seal plate (not shown) and the sealing plate 5 of the carbon dioxide gas cylinder 7 are pierced and the inside of the gas introduction valve device 6 such as a thin needle tube such as an injection needle is penetrated. Carbon dioxide gas in the carbon dioxide gas cylinder 7 is discharged through the inside of the pure water container 1,
It is dissolved in pure water 2 and the pure water container 1 is pressurized.

Further, when the lever 10 is firmly gripped, the valve opening / closing rod 13 which is held downward by the spring 14 with the carbon dioxide gas cylinder 7 as a fulcrum is pulled up, and the deionized water jet valve device, the seal valve 15, is opened. The pressurized pure water 2 passes through the siphon pipe 16 and the hose 17 and is emitted from the emission noise 18. At this time, if the discharge nozzle 18 is separated from the nozzle fixing portion 19 and directed toward the fire extinguishing target, the pure water 2 containing carbon dioxide gas can be sprinkled on the fire extinguishing target to extinguish the fire.

FIG. 2 shows an example of a clean bench using the organic solvent according to the present invention. In FIG. 2, reference numeral 20 is a pure water supply port, and a pure water container 2 is provided via a pure water introduction valve device 21.
Pure 2 is fed into 2. Reference numeral 23 is an overflow control valve device for restricting the overflow of the pure water 2, and 24 is a flow meter, 2
Reference numeral 5 is a pure water return port. A carbon dioxide gas cylinder 26 sends carbon dioxide gas into the pure water container 22 via the pressure reducing valve 27, the gas valve 28, the gas pipe 29, and the gas introduction valve device 30. Further, the pure water 2 under pressure of the pure water container 22 is jetted from the discharge nozzle 32 via the discharge pipe 31. 33 is a cleaning tank, 34 is a fire detector such as a flame sensor, 35 is a clean bench, 36 is a funnel, 37 is a collection container, 38 is a waste water pipe, 39 is a waste water container, 40 is a valve, 41 is a waste water pipe, 42 Is a high water level sensor, 42 'is a high water level sensor for forecasting, 43 is a low water level sensor, and 44 is a control device, which receives signals from the flow meter 24 and the fire detector 34 and receives the pure water introduction valve via the control wiring 45. Device 21, gas introduction valve device 30, valve 40, overflow control valve device 23, gas valve 2
Control eight. In this embodiment, the pure water introduction valve device 21 also serves as a pure water jet valve device.

Next, the operation will be described. Pure water container 2
2, pure water 2 is constantly supplied from a pure water supply port 20 connected to a pure water supply facility of a semiconductor factory through a pure water introduction valve device 21 such as a three-way valve to be filled.
The overflowed pure water 2 is returned from the pure water return port 25 to the pure water supply facility through the overflow control valve device 23 and the flow meter 24. The amount of water supplied to the pure water container 22 is measured by the flow meter 2
4, the measured value is sent to the control device 44, and when the measured value is less than or equal to the set value, the control device 44 causes the overflow control valve device
Further, the pure water introducing valve device 21 is closed to keep the pure water container 22 filled with the pure water 2.

Consider a case where the pure water container 22 is filled with the pure water 2 as described above, and the cleaning tank 33 filled with the organic solvent in the clean bench 35 is ignited.

The ignition of the cleaning tank 33 immediately causes a fire detector 34.
Is detected by the control device 44 and transmitted to the control device 44,
4, the opening operation of the gas valve 28 and the gas introduction valve device 30 is executed, and the carbon dioxide gas in the carbon dioxide gas cylinder 26 is blown into the pure water container 22 at the pressure set by the pressure reducing valve 27 and melts into the pure water 2. , Pure water container 22
Pressurize. At this time, the control device 44 closes the overflow control valve device 23, and the pure water introduction valve device 21 sets the pure water container 2
Since the pure water 2 in 2 is opened in the direction of being discharged from the discharge nozzle 32 through the discharge pipe 31, the pure water 2 containing carbon dioxide is radiated from the discharge nozzle 32 to the cleaning tank 33 to extinguish the fire.

The problem with this fire extinguishing method is the leakage of the pure water 2 used for extinguishing the fire, but in this embodiment, the pure water 2 used for extinguishing is guided to the waste water container 39 by the waste water pipe 38 and stored. Be done. The capacity of the waste water container 39 is set to be sufficiently larger than that of the pure water container 22, so that the pure water 2
Never overflows.

In the clean bench 35 using the organic solvent, the used organic solvent is collected by using the funnel 36.
The method of recovering in 7 is widely used, but the funnel 36
By arranging the position of 3 above the position of the waste water pipe 38, it is possible to prevent the pure water 2 used for extinguishing the fire from flowing from the funnel 36 into the recovery container 37.

In the case of the embodiment shown in FIG. 2, the pure water container 2 is also used.
The inner surface of 2 is preferably made of a material that does not contaminate the pure water 2.

[0022]

As described above, according to the present invention,
In a fire extinguisher installed in a semiconductor manufacturing clean room, a carbon dioxide gas cylinder pressurized with carbon dioxide gas, a pure water container filled with pure water, and a gas for introducing carbon dioxide gas from the carbon dioxide gas cylinder into the pure water container during fire extinguishing Introducing valve device, pure water jet valve device that opens a part of the pure water container and jets pure water by the pressure of carbon dioxide gas, carbon dioxide gas and pure water jetted from this pure water jet valve device Since it is composed of a discharge nozzle for discharging in one direction, it is possible to provide a fire extinguisher for a semiconductor clean room, which can effectively extinguish a fire without impairing the cleanliness of the semiconductor clean room.

A pure water introduction valve device for introducing pure water,
A device equipped with an overflow control valve device that controls the amount of deionized water that overflows from the pure water container, a fire detector, and a control device that activates each valve device with a signal from this fire detector will There are advantages that can be done.

[Brief description of drawings]

FIG. 1 is a front view showing a part in section for explaining an embodiment of the present invention.

FIG. 2 is a configuration and wiring diagram for explaining another embodiment of the present invention.

[Explanation of symbols]

 1 Pure water container 2 Pure water 3 Carbon dioxide gas cylinder holder 4 Sealing plate fixing screw 5 Sealing plate 6 Gas introduction valve device 7 Carbon dioxide gas cylinder 8 Grip part 9 Safety stopper 10 Lever 11 Safety pin 12 Lever pin 13 Valve opening / closing rod 14 Spring 15 seal valve 16 siphon tube 17 hose 18 discharge nozzle 19 nozzle fixture 20 pure water supply port 21 pure water introduction valve device 22 pure water container 23 overflow control valve device 24 flow meter 25 pure water return port 26 carbon dioxide gas cylinder 27 decompression Valve 28 Gas valve 29 Gas pipe 30 Gas introduction valve device 31 Discharge pipe 32 Discharge nozzle 33 Cleaning tank 34 Fire detector 35 Clean bench 36 Funnel 37 Recovery container 38 Waste water pipe 39 Waste water container 40 Valve 41 Waste water pipe 42 High water level sensor 43 Low water level Sensor 44 Control device 45 Control Line

Claims (2)

[Claims] 1. A fire extinguisher to be installed in a semiconductor manufacturing clean room, wherein a carbon dioxide gas cylinder pressurized and filled with carbon dioxide gas, a pure water container filled with pure water, and the carbon dioxide gas cylinder to the pure water container when extinguishing a fire. A gas introduction valve device for introducing the carbon dioxide gas, a pure water ejection valve device for ejecting the pure water at a pressure of carbon dioxide gas by opening a part of the pure water container, and the pure water ejection valve device. It is composed of a jetting carbon dioxide gas and a discharge nozzle for discharging pure water in one direction, and the pure water container is made of a material that does not contaminate the pure water at least in a portion in contact with the pure water. Fire extinguishing equipment for semiconductor clean rooms. 2. A fire extinguisher to be installed in a semiconductor manufacturing clean room, wherein a carbon dioxide gas cylinder pressurized and filled with carbon dioxide gas, a pure water container filled with pure water, and the carbon dioxide gas cylinder to the pure water container when extinguishing a fire. A gas introduction valve device for introducing the carbon dioxide gas, a pure water ejection valve device for ejecting the pure water at a pressure of carbon dioxide gas by opening a part of the pure water container, and the pure water ejection valve device. A discharge nozzle for discharging the jetted carbon dioxide gas and pure water in one direction, a pure water introduction valve device for introducing pure water into the pure water container, and a pure water introduced from the pure water introduction valve device. An overflow control valve device for controlling the amount of water overflowing from the pure water container, a fire detector, and each of the valve devices controlled by a signal from the fire detector to control carbon dioxide gas and pure water from the discharge nozzle. Emit A fire extinguisher for a semiconductor clean room, characterized in that the deionized water container is made of a material that does not contaminate the deionized water, at least a portion in contact with the deionized water.