JPH05330654A - Airslide device - Google Patents

Abstract

PURPOSE:To shorten the setting time at the stop time of a slider and increase rigidity and load capacity in the stop state of the slider in a simplified airslide device with a driving part sealed completely. CONSTITUTION:An airslide device is provided with a hollow guide member 1, a slider 2 disposed at the outer face of the guide member 1, and an internal moving body 3 driven to advance/retreat inside the guide member 1. The slider 2 and the internal moving body 3 are provided with mutually attracting magnets or magnetic bodies 4, 5, and an air port 6 is provided at the lower face of the slider 2. In such basic structure, a synchronous control means 33 is provided to open/close the solenoid valve 32 of the air supply path 34 of the air port 6 synchronously with the rotation-stop of the driving motor 17 of the internal moving body 3. The synchronous control means 33 is formed in such a way that the control current circuit of the valve 32 is turned on/off in association with the changeover of a normal/reverse changeover switch SW, using power supply in common for the solenoid valve 32 and a motor circuit, for instance.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air slide device used for transportation in a clean room, equipment for which oil stain is not desired, and the like.

[0002]

2. Description of the Related Art Conventionally, when a part is transported in a clean room or when food, chemicals, etc. are sanitarily transported, a non-contact air slide device, a magnetic levitation slide device, or a belt conveyor or a ball screw is contacted. Type transport devices are mainly used. Although the contact type transfer device has a simple structure and is inexpensive, dust generation is unavoidable and there is a problem of contamination by lubricating oil. Therefore, a non-contact type transfer device is preferable in the above-mentioned use place.

A general air slide device used as a non-contact type conveying device is provided with a rectangular cylindrical slider surrounding a rail-shaped guide member and compressed in a bearing gap between the slider and the guide member. Air is ejected to obtain load capacity by static pressure. However, in the air slide device of the above type, the slider has a rectangular tube shape surrounding the periphery of the guide member, so that the structure is complicated and very high accuracy is required.

As an air slide device which solves such a problem, the applicant of the present invention proposes a simple air slide device which is non-contact and completely seals a driving part by using a magnetic coupling and a belt drive together. (Patent application 4-7
8705).

[0005]

However, since the proposed apparatus stops the slider in a floating state due to air jetting, the slider settling time during positioning and
It is not completely satisfactory in terms of rigidity in the traveling direction after settling.

An object of the present invention is to reduce the settling time when the slider is stopped and to increase the rigidity and the load capacity when the slider is stopped in a simple type air slide device in which the drive portion is completely sealed. is there.

[0007]

The structure of the present invention will be described with reference to FIG. 1 corresponding to an embodiment. The basic structure of this air slide device is a hollow guide member (1), a slider (2) arranged on the outer surface of the hollow guide member (1), and an internal moving body (3) that is driven forward and backward inside the guide member (1). Composed.
The slider (2) and the internal moving body (3) are provided with magnets or magnetic bodies (4) and (5) that attract each other, and an air outlet (6) is provided on the guide member facing surface of the slider (2). Set up. In such a basic structure, the air supply path (34) of the air outlet (6) is synchronized with the rotation and stop of the drive motor (17) of the internal moving body (3).
A synchronous control means (33) for opening and closing the valve (32) is provided.

[0008]

The slider (2) balances the static pressure of the air ejected from the air outlet (6) with the magnetic attraction force acting between the slider (2) and the internal moving body (3).
It is floated from the guide member (1) and supported. When the internal moving body (3) is moved, the slider (2) moves along with the movement of the internal moving body (3) due to the magnetic attraction force. In this case, under the control of the synchronous control means (33), air is supplied only when the drive motor (17) of the internal moving body (3) is rotating, and when the motor (17) is stopped, the air supply is also stopped. Therefore, the slider (2) comes into contact with the guide member (1) and stops, which shortens the settling time during stop and increases the rigidity and load capacity in the stopped state. Since the slider (2) is in contact with the guide member (1) only at the time of stop and is completely non-contact at the time of movement,
Almost no dust is generated by contact.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 4, this air slide device includes a guide member 1 in which a guide wall 1b is provided on one side edge of an upper surface of a hollow guide member main body 1a, and a slider arranged on the guide member 1 along the guide wall 1b. 2 and. The guide member main body 1a is made by cutting a nonmagnetic square pipe material such as aluminum into a required length. The guide wall 1b is formed by cutting a plate material of a magnetic material into the same length as the guide member main body 1a and fixing it to the side surface of the guide member main body 1a with a bolt or the like.

A rail 10 is mounted at the center of the bottom surface inside the guide member 1 via a drive unit mounting plate 23, on which an internal moving body 3 is moved by a rolling type linear bearing 11 as shown in FIG. It is installed freely. A magnet 4 is attached to the upper surface of the internal moving body 3, and a magnet 5 that attracts the magnet 4 and a magnet 24 that attracts the guide wall 1b are provided on the lower surface and the side surface of the slider 2. Further, the slider 2 is provided with air outlets 6 and 7 which are opened on the lower surface and the side surface on the guide wall 1b side. Each of the air outlets 6 and 7 is provided with a throttle such as a self-made throttle in order to increase the support rigidity of the slider 2 by the air pressure.

FIG. 2 is a bottom view of the slider 2. A large number of air outlets 6 on the lower surface of the slider 2 are provided one by one in a row in the traveling direction with the magnet 5 interposed therebetween, and the air outlets 7 on the side surface are arranged in one row. The air outlets 6 and 7 of each row are provided with two air supply holes 1 formed in the slider 2.
2, and both air supply holes 12 are connected to each other at one end by a connecting tube 13. The air inlet 12a provided in one of the air supply holes 12 is provided with an air supply tube 14 (FIG. 4).
Connected to a source of compressed air.

As shown in FIGS. 3A and 5, a plurality of magnets 4 and 5 of the internal moving body 3 and the slider 2 are attached to the yokes 8 and 9 made of a magnetic material. These magnets 4 and 5 are arranged at a predetermined interval in the traveling direction and face each other, whereby rigidity of the slider 2 in the traveling direction is obtained. Magnet 24 on the side of slider 2 (FIG. 1)
Are provided at appropriate intervals in the traveling direction of the slider 2 or are formed as one long magnet and are directly fixed to the slider 2.

In FIG. 3, the internal moving body 3 is connected to the timing belt 15 by connecting pieces 16, and the timing belt 15 is provided at both ends of the guide member 1 and the motor 1 is provided.
7 and toothed pulleys 19a, 19 of the pulley support 18
It is hung between b. Both ends of the guide member 1 are closed by a motor-side sealing box 20 and a support-side sealing box 21, respectively, and the motor 17 and the timing belt 1 are closed.
The entire drive unit 22 formed of the internal moving body 3 and 5 is sealed inside the guide member 1.

Next, the control system will be described with reference to FIG. The motor 17 for driving the internal moving body 3 is a single-phase AC motor capable of reversible operation, and has a common terminal 17 a and a forward rotation terminal 17
b, and a reverse rotation terminal 17c. A capacitor 31 is connected between the normal rotation and reverse rotation terminals 17b and 17c to obtain a phase-shifted power supply required to generate a rotating magnetic field of the single-phase induction motor. The common terminal 17a is the wiring 30
a is connected to a single-phase 100V AC power source, and the forward and reverse terminals 17b and 17c are respectively connected to the switching contacts a and c of the forward / reverse changeover switch SW, and the common contact point d is connected to the power source by a wire 30b. It Forward / reverse selector switch SW
Is a three-contact switch having a forward contact a, a stop contact b, and a reverse contact c.

The solenoid valve 32 is provided in the air supply path 34 connected to the air supply tube 14 of the slider 2 and is of a closed type when energized and operated at 100 V AC. The control current terminals of the solenoid valve 32 are connected to the power supply wiring 30a of the motor 17 and the forward / reverse changeover switch SW.
Is connected in parallel to the wiring SWb of the stop contact b. Therefore, the solenoid valve 32 is opened only when the power is turned on by the forward / reverse changeover switch SW (when the motor 17 is rotating normally or reversely), and when the power is off, the solenoid valve 32 is energized to be closed (see FIG. 6). .. The forward / reverse changeover switch SW and the electric wiring system of the motor 17 and the solenoid valve 32 constitute a synchronous control means 33.

The operation of the above configuration will be described. Slider 2
Are floated from the guide member 1 and supported by the static pressure of the compressed air ejected from the air outlet 6 on the lower surface. The flying height is determined by the static pressure of the jetted air and the suction force acting between the magnets 4 and 5. Further, the static pressure of the compressed air ejected from the air outlet 7 on the side surface of the slider 2 toward the guide wall 1b and the suction force acting between the magnet 24 and the guide wall 1b determine the bearing gap on the side surface. The runout and contact are prevented. When the internal moving body 3 is moved by driving the timing belt 15 in the state where the slider 2 is thus floated, the slider 2 moves inside due to the magnetic attraction force acting between the internal moving body 3 and the slider 2. It moves in conjunction with the moving body 3.

In this case, the solenoid valve 32 in the air supply path 34 of the slider 2 has the forward / reverse changeover switch SW.
Is opened only while the power of the motor 17 is on. That is, the compressed air is ejected from the air outlets 6 and 7 only while the internal moving body 3 is moved in the forward direction or the reverse direction by the drive of the motor 17, and the air ejection is stopped when the motor power supply is turned off. Therefore, the slider 2 comes into contact with the guide member 1 and stops. In this way, the slider 2 is stopped in the contact state.
The settling time at the time of stop is shortened, and the rigidity and load capacity in the stopped state are increased.

The slider 2 comes into contact with the guide member 1 as described above when stopped, but is completely non-contact when moved, so that dust is hardly generated due to contact with the guide member 1. Further, since the drive unit 22 including the internal moving body 3, the timing belt 15, the motor 17, etc. is sealed in the guide member 1, the slider 2 can be completely isolated from the dust generating place of the drive unit 22 and the like. Therefore, it can be used in a clean room where a high degree of cleanliness is required, or in a place where oil stains are unfavorable, such as a food or chemical transfer device.

Further, since the slider 2 is suspended and supported by the balance between the air pressure and the magnetic attraction force, the guide member 1
Although it has a simple structure in which it is guided only by the upper surface and the guide wall 1b, relatively rigid guidance can be performed even during movement.

In the above embodiment, the power supply for the motor 17 and the power supply for the solenoid valve 32 are provided in parallel, and the power supply for the solenoid valve 32 is directly turned on / off by the forward / reverse changeover switch SW. 33
Alternatively, the solenoid valve 32 may be provided with a power supply system separately from the motor 17, and the solenoid valve 32 may be opened and closed in synchronization with the on / off switching of the motor 17 via an electronic control device.

Further, in the above embodiment, the guide member 1 is formed in the shape of a square pipe and the guide wall 1b is provided, but the cross-sectional shape of the guide member 1 and the shape of the slider 2 may be various other shapes. Further, the means for guiding and driving the internal moving body 3 is not limited to the means by the linear bearing 11 and the timing belt 15, but feed screws and various other structures can be used. In addition, the guide member 1
Both ends of the guide member 1 do not necessarily have to be hermetically sealed, for example, the guide member 1 is penetrated through a clean room in which the slider 2 is arranged.
May be provided and both ends thereof may be opened to the outside.

[0022]

According to the air slide apparatus of the present invention, the air is supplied only when the drive motor of the internal moving body is rotated by the control of the synchronous control means, and the air supply is stopped when the motor is stopped. It contacts the guide member and stops. Therefore, the settling time at the time of stop is shortened, and the rigidity and load capacity in the stopped state are increased. Also, while supporting the slider with air pressure,
Since the basic structure moves the slider by the magnetic attraction force by the internal moving body that moves in the hollow guide member, the slider is completely supported in a non-contact state during the movement, and the drive unit is completely connected to the slider installation space. Can be isolated. Therefore, no dust is generated around the installation portion of the slider, and the slider can be used in a clean room where a high degree of cleanliness is required or a place where oil stains are not desired.

[Brief description of drawings]

FIG. 1 is an explanatory view in which a cross-sectional view and an electric circuit diagram of an air slide device according to an embodiment of the present invention are combined.

FIG. 2 is a bottom view of the slider.

FIG. 3A is a reduced cutaway side view of the air slide device, and FIG. 3B is a reduced cutaway plan view thereof.

FIG. 4 is a perspective view of the outer appearance of the air slide device.

FIG. 5 is an explanatory view of the arrangement state of the magnets.

FIG. 6 is a timing chart showing the air supply state of the same.

[Explanation of symbols]

1 ... Guide member, 1b ... Guide wall, 2 ... Slider, 3 ...
Internal moving body, 4, 5 ... Magnet, 6, 7 ... Air outlet, 1
0 ... Rail, 15 ... Timing belt, 17 ... Motor,
22 ... Drive part, 24 ... Magnet, 32 ... Solenoid valve,
33 ... Synchronous control means, 34 ... Air supply path, SW ... Forward / reverse changeover switch

Claims (1)

[Claims] 1. A hollow guide member, a slider arranged on the outer surface of the hollow guide member, an internal moving body that is driven to move back and forth inside the guide member, and a magnet or magnetism provided to the slider and the internal moving body so as to be attracted to each other. A body, an air outlet provided on a surface of the slider facing the guide member, and a synchronous control means for opening and closing a valve in an air supply path of the air outlet in synchronization with rotation and stop of a drive motor of the internal moving body. Air slide device provided with.