JPH05332841A - Cooling temperature compensation circuit of infrared ray detection element - Google Patents
Cooling temperature compensation circuit of infrared ray detection elementInfo
- Publication number
- JPH05332841A JPH05332841A JP4135202A JP13520292A JPH05332841A JP H05332841 A JPH05332841 A JP H05332841A JP 4135202 A JP4135202 A JP 4135202A JP 13520292 A JP13520292 A JP 13520292A JP H05332841 A JPH05332841 A JP H05332841A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- infrared
- detection element
- output
- infrared detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Radiation Pyrometers (AREA)
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Abstract
(57)【要約】
【目的】 本発明は赤外線検知素子の冷却温度補正回路
に関し、温度変動による赤外線検知素子の出力の変動を
予め補正データとして求め、この補正データを参照しな
がら迅速な冷却温度補正を行うことを目的とする。
【構成】 赤外線検知素子４に近接した熱的に等価な位
置に配置され、検知素子の温度を検知する温度検出素子
６と、赤外線検知素子の定格動作温度付近において２種
類の冷却剤による温度検出素子の出力と赤外線検知素子
の出力を測定する試験調整治具手段17と、定格動作温度
付近における赤外線検知素子の出力の変化を温度検出素
子の出力に対する１次方程式により近似したときの傾き
を算出する算出手段13〜17と、算出結果を記憶する記憶
手段15とを備え、赤外線検知素子に温度変動が生じたと
き、赤外線検知素子の出力から、温度検出素子により得
られる定格動作温度からの偏差に傾きを乗じた結果を差
し引くことにより補正するように構成する。
(57) [Abstract] [Object] The present invention relates to a cooling temperature correction circuit for an infrared detection element, wherein fluctuations in the output of the infrared detection element due to temperature fluctuations are previously obtained as correction data, and a quick cooling temperature is determined by referring to the correction data. The purpose is to make corrections. [Structure] A temperature detection element 6 arranged at a thermally equivalent position close to the infrared detection element 4 for detecting the temperature of the detection element, and temperature detection by two kinds of coolant near the rated operating temperature of the infrared detection element A test adjusting jig means 17 for measuring the output of the element and the output of the infrared detecting element, and a slope when the change of the output of the infrared detecting element near the rated operating temperature is approximated by a linear equation with respect to the output of the temperature detecting element. Comprising calculation means 13 to 17 and a storage means 15 for storing the calculation result, when a temperature fluctuation occurs in the infrared detection element, the deviation from the rated operating temperature obtained by the temperature detection element from the output of the infrared detection element It is configured to correct by subtracting the result of multiplying by.
Description
【０００１】[0001]
【産業上の利用分野】本発明は冷却温度補正回路に関
し、特に、赤外線検知素子の電気的出力を輝度に変換し
赤外線画像を得る赤外線撮像装置において、赤外線検知
素子を冷却する温度の不安定に起因する輝度の変動を補
正する冷却温度補正回路に関する。本発明の冷却温度補
正回路を搭載した赤外線撮像装置は、量子効果によるフ
ォトン検出を利用している。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling temperature correction circuit, and more particularly to an infrared image pickup device for converting an electric output of an infrared detection element into a luminance to obtain an infrared image. The present invention relates to a cooling temperature correction circuit that corrects the resulting variation in brightness. The infrared imaging device equipped with the cooling temperature correction circuit of the present invention utilizes photon detection by the quantum effect.
【０００２】[0002]
【従来の技術】一般に、赤外線検知素子は液体窒素（Ｎ
2 ）温度付近の極低温（通常、７０〜８０ケルビン）に
冷却して動作させる。そして、赤外線検知素子の冷却手
段としては、通常、気体の熱サイクルの一つである逆ス
ターリング・サイクルを利用した循環冷却器や、高圧ガ
スをノズルから噴出させる断熱膨張に伴うジュール・ト
ムソン効果を利用したＪ−Ｔクーラーが用いられてい
る。そして、例えば、Ｊ−Ｔクーラーの場合では、高圧
ガスの節約の見地から、目標の極低温付近まで急速に冷
却すると、一旦、ガスの噴出を停止し、以下に説明する
ように、温度変動に伴う赤外線検知素子出力の変動を防
止するために、フィルターや温度制御等により極低温の
定常化を図っている。2. Description of the Related Art Generally, an infrared detecting element is a liquid nitrogen (N
2 ) Cool to a very low temperature (usually 70-80 Kelvin) and operate. And, as the cooling means of the infrared detection element, normally, a circulation cooler utilizing the reverse Stirling cycle which is one of the thermal cycles of gas, or the Joule-Thomson effect accompanying adiabatic expansion in which high-pressure gas is ejected from a nozzle is used. The used JT cooler is used. Then, for example, in the case of a J-T cooler, from the viewpoint of saving high-pressure gas, when it is rapidly cooled to near the target cryogenic temperature, the ejection of gas is temporarily stopped, and as described below, there is a temperature fluctuation. In order to prevent the fluctuation of the output of the infrared detection element accompanying it, the cryogenic temperature is stabilized by a filter and temperature control.
【０００３】ところで、赤外線検知素子の出力特性はこ
の冷却温度に敏感に左右され、冷却温度が変動するとそ
の出力が変化し、その結果、安定な赤外線画像が得られ
なくなる。しかも、周辺回路が高精度で低ノイズとな
り、相対的に冷却温度の不安定性に起因する画像の不安
定が目立つ様になってきた。従って、赤外線検知素子を
動作させる場合、極低温に冷却することと、この極低温
の温度変動を最小限に抑える必要がある。By the way, the output characteristic of the infrared detecting element is sensitively affected by this cooling temperature, and when the cooling temperature fluctuates, its output changes, and as a result, a stable infrared image cannot be obtained. In addition, the peripheral circuit has high accuracy and low noise, and the instability of the image due to the instability of the cooling temperature becomes relatively conspicuous. Therefore, when operating the infrared detection element, it is necessary to cool to an extremely low temperature and to minimize the temperature fluctuation at this extremely low temperature.
【０００４】近年、このような温度変動に起因する赤外
線画像の不安定を防止するために、以下に説明するよう
に、冷却器と赤外線検知素子の間に、大きな熱抵抗と
熱容量により構成した高周波温度変動カット・フィルタ
を挿入する方法や、赤外線検知素子の付近にヒーター
を配置して温度制御する方法、が採用されてきた。図５
は従来の高周波温度変動カット・フィルタの例であり、
図６は従来の赤外線検知素子の近傍にヒーターを配置し
た温度制御の例であり、図７は図６のヒーターの温度制
御の回路図である。In recent years, in order to prevent the infrared image from becoming unstable due to such temperature fluctuations, as described below, a high frequency wave having a large heat resistance and heat capacity is provided between the cooler and the infrared detecting element. A method of inserting a temperature fluctuation cut filter and a method of arranging a heater near the infrared detection element to control the temperature have been adopted. Figure 5
Is an example of a conventional high frequency temperature fluctuation cut filter,
FIG. 6 is an example of temperature control in which a heater is arranged in the vicinity of a conventional infrared detecting element, and FIG. 7 is a circuit diagram of temperature control of the heater in FIG.
【０００５】図５において、１は検知器の容器であり、
通常、内部が真空のデュワ・ビンを使用し、２は高圧ガ
スを用いた冷却器であり、３はデュワ・ビンに設けられ
た赤外線窓であり、４は赤外線検知素子であり、５は断
熱材としてのコットン・ウールである。さらに、図６に
おいて、６は温度検出素子であり、７はヒーターであ
る。図示のように、冷却器２と赤外線検知素子４の間
に、コットン・ウールのような大きな熱抵抗と熱容量に
より構成した高周波温度変動カット・フィルタを挿入し
たときには、赤外線検知素子４に伝達される冷却器２の
温度変動は、コットン・ウール５により緩やかな低周波
成分だけにすることができる。In FIG. 5, reference numeral 1 is a detector container,
Usually, a dewar with a vacuum inside is used, 2 is a cooler using high-pressure gas, 3 is an infrared window provided in the dewar, 4 is an infrared detection element, and 5 is heat insulation. Cotton wool as a material. Further, in FIG. 6, 6 is a temperature detecting element, and 7 is a heater. As shown in the figure, when a high-frequency temperature fluctuation cut filter composed of a large thermal resistance and heat capacity, such as cotton wool, is inserted between the cooler 2 and the infrared detecting element 4, it is transmitted to the infrared detecting element 4. The temperature fluctuation of the cooler 2 can be limited to the gentle low frequency component by the cotton wool 5.
【０００６】また、図６に示すように赤外線検知素子４
の付近にヒーター７を配置した場合には、絶対温度の監
視も行うために、冷却器２が達成すべき目標温度より若
干低い温度まで冷却し、次にこの温度を、目標温度であ
る「基準動作温度」までヒーター７により温めて動作さ
せ、冷却器２の動作不安定等により温度が上昇しそうに
なったら、ヒーター７による加熱を停止して基準動作温
度の維持に努めるようになっている。Further, as shown in FIG. 6, the infrared detecting element 4
In the case where the heater 7 is arranged in the vicinity of, the temperature is cooled to a temperature slightly lower than the target temperature to be achieved by the cooler 2 in order to monitor the absolute temperature, and this temperature is then set to the target temperature "reference temperature". When the temperature is about to rise due to instability of the operation of the cooler 2 and the like, the heater 7 is stopped until the operating temperature is reached, and the heating by the heater 7 is stopped to maintain the reference operating temperature.
【０００７】図７において、温度検出素子６の検出電圧
Ｖ２をアンプＡ１により増幅し、基準動作温度電圧Ｖ１
と共にオペアンプＯＰ１に入力し、冷却器の温度変動に
よる偏差電圧ＶD を比例、微分、積分等のいわゆるＰＩ
Ｄ制御を行い、アンプＡ２により増幅してヒーターの温
度制御、即ち、ヒーター７の駆動電力の制御を行う。In FIG. 7, the detected voltage V2 of the temperature detecting element 6 is amplified by an amplifier A1 to obtain a reference operating temperature voltage V1.
Together with the input to the operational amplifier OP1, the deviation voltage V D due to the temperature fluctuation of the cooler is called PI such as proportional, differential and integral.
The D control is performed, and the temperature of the heater is controlled by amplification by the amplifier A2, that is, the driving power of the heater 7 is controlled.
【０００８】[0008]
【発明が解決しようとする課題】上述の従来技術におい
て、図５の高周波温度変動カット・フィルタの場合では
冷却の時定数が増大するため目標冷却温度に達成するま
での時間が増大する。一方、図６のように赤外線検知素
子の付近にヒーターを配置した場合では、ヒーターの加
熱特性からして急激な温度変化に対応することが難しく
迅速な温度制御が困難である。In the above-mentioned prior art, in the case of the high frequency temperature fluctuation cut filter of FIG. 5, the time constant for cooling increases, so the time to reach the target cooling temperature increases. On the other hand, when the heater is arranged near the infrared detecting element as shown in FIG. 6, it is difficult to cope with a rapid temperature change due to the heating characteristics of the heater, and it is difficult to control the temperature quickly.
【０００９】そのため、前者の場合では、赤外線画像に
影響を与える温度変動をカットするために過大な熱抵抗
を必要とし、冷却達成温度が不充分であったり、流量調
整のための温度プローブを有するＪ−Ｔクーラーの温度
制御と干渉しあってかえって温度変動を増大させること
があった。また、後者の場合では、冷却器の温度変動の
時定数がヒーターによる温度制御の時定数（１秒程度）
より充分長くなければ、発振状態となって逆に大きな温
度変動を生じさせることになる。さらに、共に余計な熱
流入を生じさせるため、循環冷却器の場合の冷却器の消
費電力や、Ｊ−Ｔクーラーの場合のガス流量が増大して
しまうことになる。Therefore, in the former case, an excessive heat resistance is required to cut the temperature fluctuation that affects the infrared image, the cooling achievement temperature is insufficient, and a temperature probe for adjusting the flow rate is provided. There was a case where the temperature variation of the JT cooler was increased by interfering with the temperature control of the JT cooler. In the latter case, the time constant of the temperature fluctuation of the cooler is the time constant of the temperature control by the heater (about 1 second).
If it is not sufficiently long, it will be in an oscillating state and will cause large temperature fluctuations. Furthermore, since both generate extra heat, the power consumption of the cooler in the case of the circulation cooler and the gas flow rate in the case of the JT cooler increase.
【００１０】本発明の目的は、温度変動による赤外線検
知素子の出力の変動を予め補正データとして求めてお
き、この補正データを参照しながら迅速な冷却温度補正
を行うことにある。An object of the present invention is to obtain a change in the output of the infrared detecting element due to a temperature change as correction data in advance, and to perform a quick cooling temperature correction with reference to the correction data.
【００１１】[0011]
【課題を解決するための手段及び作用】本発明は、赤外
線検知素子の冷却温度補正回路であって、冷却される赤
外線検知素子４に近接した熱的に等価な位置に、該赤外
線検知素子の温度を検知する温度検出素子６を配置し、
試験調整治具手段１７により該赤外線検知素子の定格動
作温度付近において、２種類の冷却剤（液体窒素及び液
体酸素）による該温度検出素子の出力と該赤外線検知素
子の出力を測定し、該赤外線検知素子の定格動作温度付
近における該赤外線検知素子の出力の変化を、該温度検
出素子の出力に対する１次方程式により近似したときの
傾きを算出し、該算出手段による算出結果を記憶し、こ
れにより、冷却器の不安定動作により該赤外線検知素子
に温度変動が生じたとき、該赤外線検知素子の出力か
ら、該温度検出素子により得られる定格動作温度からの
偏差に、前記１次方程式の傾きを乗じた結果を差し引く
ことにより補正することを特徴とする。SUMMARY OF THE INVENTION The present invention is a cooling temperature correction circuit for an infrared detecting element, wherein the infrared detecting element is placed at a thermally equivalent position close to the infrared detecting element 4 to be cooled. The temperature detecting element 6 for detecting the temperature is arranged,
The output of the temperature detecting element and the output of the infrared detecting element by two kinds of coolants (liquid nitrogen and liquid oxygen) are measured by the test adjusting jig means 17 near the rated operating temperature of the infrared detecting element, and the infrared ray is measured. A slope when a change in the output of the infrared detection element near the rated operating temperature of the detection element is approximated by a linear equation with respect to the output of the temperature detection element is calculated, and the calculation result by the calculation means is stored. When the temperature of the infrared sensing element fluctuates due to unstable operation of the cooler, the slope of the linear equation is calculated from the output of the infrared sensing element to the deviation from the rated operating temperature obtained by the temperature sensing element. It is characterized in that it is corrected by subtracting the result of multiplication.
【００１２】該試験調整治具手段は、温度が一様な黒体
８に該赤外線検知容器１を載置し、該赤外線検知素子が
該黒体を見ている状態とし、該赤外線検知容器内に液体
窒素を注入して該赤外線検知素子を定格動作温度付近に
冷却し、該赤外線検知素子が該黒体からの赤外線入射パ
ワーを検知するようにした構造を有する。In the test adjusting jig means, the infrared detecting container 1 is placed on a black body 8 having a uniform temperature, and the infrared detecting element is in a state of looking at the black body. Liquid nitrogen is injected into the device to cool the infrared detecting element to near the rated operating temperature, and the infrared detecting element detects the infrared incident power from the black body.
【００１３】[0013]
【実施例】図１は本発明の基本構造図であり、図２は本
発明の基本回路図であり、図３は本発明に用いる試験調
整治具である。本発明では、図１に示すように温度検出
素子６は赤外線検知素子４と熱的に可能な限り等価な位
置、即ち、接近して配置され、赤外線検知素子４の温度
変化を忠実に検出するようになっている（但し、定常的
な偏差は許容する）。従って、従来のヒーター７は配置
されておらず、加熱による温度制御は行わない。また、
従来のようにコットン・ウール等の緩衝材を用いて、高
周波成分を落とすような処置も行わず、後述するように
積極的に温度補正を行う。1 is a basic structural diagram of the present invention, FIG. 2 is a basic circuit diagram of the present invention, and FIG. 3 is a test adjusting jig used in the present invention. In the present invention, as shown in FIG. 1, the temperature detecting element 6 is arranged at a position that is thermally equivalent to the infrared detecting element 4 as much as possible, that is, arranged as close to the infrared detecting element 4, and faithfully detects the temperature change of the infrared detecting element 4. (However, steady deviation is allowed). Therefore, the conventional heater 7 is not provided and the temperature control by heating is not performed. Also,
A conventional cushioning material such as cotton or wool is not used to remove the high-frequency component, but the temperature is positively corrected as described later.
【００１４】図２において、１１はバッファ・アンプ、
１２はＡ／Ｄ変換器、１３，１６は加減算器、１４は乗
算器、１５は補正値を格納するメモリ、そして、１７は
試験調整治具回路である。図１に示す赤外線検知素子４
の出力は、後述するように有意成分をサンプル・ホール
ド等により抽出した後、Ａ／Ｄ変換され、入射赤外線パ
ワーに対応する赤外線検知素子の出力データＯ（ｉ，
Ｔ）となる。ここで、ｉは画素番号、Ｔは赤外線検知素
子４の温度である。赤外線検知素子データＯ（ｉ，Ｔ）
は、試験調整治具回路１７に入力されるとともに、加減
算器１６に入力される。In FIG. 2, 11 is a buffer amplifier,
12 is an A / D converter, 13 and 16 are adders / subtractors, 14 is a multiplier, 15 is a memory for storing correction values, and 17 is a test adjustment jig circuit. Infrared detector element 4 shown in FIG.
As described below, the significant component is extracted by sampling and holding, etc., as described later, and then A / D converted to output data O (i,
T). Here, i is the pixel number, and T is the temperature of the infrared detection element 4. Infrared detection element data O (i, T)
Is input to the test adjustment jig circuit 17 and also to the adder / subtractor 16.
【００１５】一方、温度検出素子６の検出電圧Ｖ（Ｔ）
は、バッファ・アンプ１１で増幅された後、Ａ／Ｄ変換
器１２によりディジタル値に変換されて温度検出データ
Ｄ（Ｔ）となる。このデータは赤外線検知素子４の温度
変化分だけを忠実に反映するものであればよい。即ち、
温度検出素子６の温度は、Ｔ＋ΔＴでも、ΔＴが一定で
あれば問題ない。On the other hand, the detection voltage V (T) of the temperature detecting element 6
Is amplified by the buffer amplifier 11 and then converted into a digital value by the A / D converter 12 to become the temperature detection data D (T). This data only needs to faithfully reflect only the temperature change of the infrared detection element 4. That is,
Even if the temperature of the temperature detecting element 6 is T + ΔT, there is no problem as long as ΔT is constant.
【００１６】温度検出データＤ（Ｔ）は試験調整治具回
路１７に入力されるとともに、加減算器１３に入力さ
れ、定格動作温度検出データＤ（Ｔ0 ）との加減算を行
い、温度変動データΔＤ（Ｔ）を得る。メモリ１５（Ｅ
ＥＰＲＯＭ）から読み出した補正データ（後述する式
（１）により算出した値ａ（ｉ））と、加減算器１３か
らの温度変動データΔＤ（Ｔ）は乗算器１４に入力さ
れ、乗算の結果は検知素子データＯ（ｉ，Ｔ）と加減算
器１６にて加減算され、その結果、冷却温度変動を補正
したデータＤを得る。さらに、試験調整治具回路１７か
らのデータは、各画素に対する出力温度変化の勾配デー
タとしてメモリ１５に送られ、補正データとして格納さ
れる。なお、ＡＤＤはメモリ１５への各画素のアドレス
である。The temperature detection data D (T) is input to the test adjustment jig circuit 17 and also to the adder / subtractor 13 for addition and subtraction with the rated operating temperature detection data D (T 0 ) to obtain the temperature fluctuation data ΔD. Get (T). Memory 15 (E
The correction data (value a (i) calculated by the equation (1) described later) read from the EPROM) and the temperature variation data ΔD (T) from the adder / subtractor 13 are input to the multiplier 14, and the result of the multiplication is detected. The element data O (i, T) is added / subtracted by the adder / subtractor 16, and as a result, data D in which the cooling temperature fluctuation is corrected is obtained. Further, the data from the test adjustment jig circuit 17 is sent to the memory 15 as the gradient data of the output temperature change for each pixel and stored as the correction data. Note that ADD is an address of each pixel to the memory 15.
【００１７】図３に示す試験調整治具において、８は表
面温度が一様な黒体であり、この黒体８の温度は常温と
する。デュワ・ビン１の内筒には冷却剤が充足される。
このような構成において、まず、試験調整治具回路１７
を接続し、赤外線検知素子４を均一に常温の黒体上に配
置して、赤外線検知素子４が一様な常温黒体８を対象物
として見ている状態を作成する。次に、定格動作温度付
近の温度を有する冷却剤（本例では液体窒素）を赤外線
容器１の内筒に注ぐ。その結果、赤外線検知素子４は液
体窒素温度に冷却された常温での入射赤外線パワーに対
応する出力を赤外線検知素子４から得る。In the test adjustment jig shown in FIG. 3, 8 is a black body having a uniform surface temperature, and the temperature of this black body 8 is room temperature. The inner cylinder of the Dewar Bin 1 is filled with a coolant.
In such a configuration, first, the test adjustment jig circuit 17
, And the infrared detection element 4 is uniformly arranged on a black body at room temperature to create a state in which the infrared detection element 4 looks at the uniform room temperature black body 8 as an object. Next, a coolant (liquid nitrogen in this example) having a temperature near the rated operating temperature is poured into the inner cylinder of the infrared container 1. As a result, the infrared detecting element 4 obtains an output corresponding to the incident infrared power at room temperature cooled to the liquid nitrogen temperature from the infrared detecting element 4.
【００１８】試験試験治具回路１７ではこの時の温度検
出データＤ（ＴN2）と各画素の赤外線検知素子４の出力
データＯ（ｉ，ＴN2）を計測する。ここで、ＴN2は液体
窒素（Ｎ2 ）を使用したときの温度であることを意味し
ている。次に、定格動作温度付近の他の冷却剤（本例で
は液体酸素Ｏ2 ）を、同様に、図３に示す赤外線検知器
１の内筒に注ぎ、液体窒素と同様の計測を行う。この場
合、黒体８の温度（常温）は変化させない。その結果、
液体酸素によるデータが得られる。即ち、温度検出デー
タはＤ（Ｔ02）となり、各画素の赤外線検知素子４の出
力データはＯ（ｉ，Ｔ02）となる。ここで、Ｔ02は液体
酸素Ｏ2 を使用したときの温度であることを意味してい
る。The test test jig circuit 17 measures the temperature detection data D (T N2 ) at this time and the output data O (i, T N2 ) of the infrared detecting element 4 of each pixel. Here, T N2 means the temperature when liquid nitrogen (N 2 ) is used. Next, another coolant near the rated operating temperature (liquid oxygen O 2 in this example) is similarly poured into the inner cylinder of the infrared detector 1 shown in FIG. 3, and the same measurement as for liquid nitrogen is performed. In this case, the temperature (normal temperature) of the black body 8 is not changed. as a result,
Data from liquid oxygen are obtained. That is, the temperature detection data becomes D (T 02 ) and the output data of the infrared detecting element 4 of each pixel becomes O (i, T 02 ). Here, T 02 means the temperature when liquid oxygen O 2 is used.
【００１９】そして、以下に示す式（１）を各画素毎に
算出しメモリ１５に格納する。この値は画素毎に異なっ
た値となる。 ａ（ｉ）＝〔Ｏ（ｉ，Ｔ02）−Ｏ（ｉ，ＴN2）〕 ÷〔Ｄ（Ｔ02）−Ｄ（ＴN2）〕 ・・・（１） その後、図１に示すような冷却器１を挿入し通常動作を
させる。冷却器１が安定に動作しているときの温度検出
データＤ（Ｔ0 ）を回路内にセットする。冷却器１の動
作が不安定になり赤外線検知素子４の温度がＴになる
と、温度Ｔに対する温度データＤ（Ｔ）は、加減算器１
３にてＤ（Ｔ0 ）との差がとられ、すなわち −ΔＤ（Ｔ）＝−Ｄ（Ｔ）＋Ｄ（Ｔ0 ） この差に式（１）で得られたａ（ｉ）を乗算器１４にて
乗じ、乗算結果は赤外線検知素子４の出力データＯ
（ｉ，Ｔ）に加算される。即ち、 Ｏ（ｉ，Ｔ）＋ ａ（ｉ）×〔Ｄ（Ｔ0 ）−Ｄ（Ｔ）〕 ≒ Ｏ（ｉ，Ｔ）＋〔Ｏ（ｉ，Ｔ0 ）−Ｏ（ｉ，Ｔ）〕 ＝ Ｏ（ｉ，Ｔ0 ） ・・・（２） となり、定格動作温度における赤外線検知素子の出力に
換算されたデータが得られる。Then, the following expression (1) is calculated for each pixel and stored in the memory 15. This value is different for each pixel. a (i) = [O (i, T02 ) -O (i, TN2 )] / [D ( T02 ) -D ( TN2 )] (1) Then, as shown in FIG. The cooler 1 is inserted and normal operation is performed. The temperature detection data D (T 0 ) when the cooler 1 is operating stably is set in the circuit. When the operation of the cooler 1 becomes unstable and the temperature of the infrared detection element 4 becomes T, the temperature data D (T) with respect to the temperature T is added / subtracted by the adder / subtractor 1
3, the difference from D (T 0 ) is obtained, that is, −ΔD (T) = − D (T) + D (T 0 ) This difference is multiplied by a (i) obtained by the equation (1). The multiplication result is multiplied by 14 and the multiplication result is the output data O of the infrared detecting element 4.
It is added to (i, T). That is, O (i, T) + a (i) × [D (T 0 ) −D (T)] ≈O (i, T) + [O (i, T 0 ) −O (i, T)] = O (i, T 0 ) ... (2), and the data converted into the output of the infrared detection element at the rated operating temperature is obtained.
【００２０】このようにして、冷却器の不安定動作等に
より赤外線検知素子の温度が変動しても、定格動作温度
の赤外線検知素子から得られる赤外線検知素子の出力デ
ータが得られる。図４は本発明の一実施例回路構成であ
る。図中、Ｄｉは温度検出素子であり、使用前に温度較
正されている。２１は定電圧を出力するボルテージ・レ
ギュレータであり、その出力は温度検出素子Ｄｉに供給
される。この場合、温度検出素子Ｄｉと赤外線検知素子
４との間は、図１に示すように極めて接近して配置され
ており、赤外線検知素子４の温度を忠実に検出できるよ
うになっている。２２は赤外線検知素子出力の有意成分
をサンプル・ホールド等により抽出する出力処理回路で
あり、その出力はＡ／Ｄ変換され、入射赤外線パワーに
対応する赤外線検知素子の出力データＯ（ｉ，Ｔ）とな
り、試験調整回路１７に入力される。In this way, even if the temperature of the infrared detecting element fluctuates due to unstable operation of the cooler or the like, output data of the infrared detecting element obtained from the infrared detecting element having the rated operating temperature can be obtained. FIG. 4 shows the circuit configuration of an embodiment of the present invention. In the figure, Di is a temperature detecting element, and the temperature is calibrated before use. Reference numeral 21 is a voltage regulator that outputs a constant voltage, and its output is supplied to the temperature detection element Di. In this case, the temperature detecting element Di and the infrared detecting element 4 are arranged extremely close to each other as shown in FIG. 1, so that the temperature of the infrared detecting element 4 can be faithfully detected. Reference numeral 22 is an output processing circuit for extracting a significant component of the output of the infrared detection element by sample and hold, etc. The output is A / D converted, and the output data O (i, T) of the infrared detection element corresponding to the incident infrared power. And is input to the test adjustment circuit 17.
【００２１】入力段のＩは定電流制御回路であり、基準
電圧Ｖref と電流検出電圧Ｖi とにより温度検出素子Ｄ
ｉに流れる電流の安定化を図る。また、IIはハイ・イン
ピーダンス差動入力回路であり、温度検出素子Ｄｉの両
端の電圧を差動増幅した後、Ａ／Ｄ変換して温度検出デ
ータＤ（Ｔ）を得る。２３は加減算器であり、図２の加
減算器１３に対応する。２４は乗算器であり、図２の乗
算器１４に対応する。２５は図２のＥＥＰＲＯＭに相当
し、２６はアドレス発生回路、２７は加減算器であり、
図２の加減算器１６に対応する。図２で説明したよう
に、温度変動データ−ΔＤ（Ｔ）と補正値ａ（ｉ）とを
乗算器２４により乗じ、その出力と、検知素子出力デー
タＯ（ｉ，Ｔ）とを加減算器２７において加算し、その
結果として冷却温度変動を補正した出力データを得る。I of the input stage is a constant current control circuit, which detects the temperature detecting element D by the reference voltage V ref and the current detection voltage V i.
Stabilize the current flowing through i. II is a high impedance differential input circuit, which differentially amplifies the voltage across the temperature detection element Di and then A / D converts it to obtain temperature detection data D (T). An adder / subtractor 23 corresponds to the adder / subtractor 13 in FIG. A multiplier 24 corresponds to the multiplier 14 in FIG. 25 corresponds to the EEPROM of FIG. 2, 26 is an address generation circuit, 27 is an adder / subtractor,
It corresponds to the adder / subtractor 16 of FIG. As described with reference to FIG. 2, the temperature fluctuation data −ΔD (T) and the correction value a (i) are multiplied by the multiplier 24, and the output and the sensing element output data O (i, T) are added / subtracted by the adder / subtractor 27. And the output data is obtained by correcting the cooling temperature fluctuation.
【００２２】[0022]
【発明の効果】以上説明したように、本発明によれば、
ヒーターの消費電力又は冷却ガス流量の増大を伴うこ
となく、冷却器の流量調整機構と、高周波カット・フ
ィルタのような熱伝達遅延要素との干渉や、温度センサ
及びヒーター加熱の遅延時間に起因する発振等を惹起す
る恐れなく、冷却器の動作不安定等に起因する冷却温度
変動による赤外線検知素子の出力変動を防止することが
でき、赤外線撮像装置の画像安定性に寄与するところが
大きい。As described above, according to the present invention,
Due to interference between the flow rate adjustment mechanism of the cooler and a heat transfer delay element such as a high frequency cut filter without increasing the power consumption of the heater or the cooling gas flow rate, and the delay time of the temperature sensor and heater heating. It is possible to prevent fluctuations in the output of the infrared detection element due to fluctuations in the cooling temperature due to unstable operation of the cooler, etc. without fear of causing oscillations, and this greatly contributes to the image stability of the infrared imaging device.
【図１】本発明の基本構造図である。FIG. 1 is a basic structural diagram of the present invention.
【図２】本発明の基本回路図である。FIG. 2 is a basic circuit diagram of the present invention.
【図３】本発明に用いる試験調整治具の構成図である。FIG. 3 is a configuration diagram of a test adjustment jig used in the present invention.
【図４】本発明の一実施例回路図である。FIG. 4 is a circuit diagram of an embodiment of the present invention.
【図５】従来の高周波温度変動カット・フィルタの例で
ある。FIG. 5 is an example of a conventional high frequency temperature fluctuation cut filter.
【図６】従来のヒーターを配置した温度制御の例であ
る。FIG. 6 is an example of temperature control in which a conventional heater is arranged.
【図７】図６のヒーターの温度制御の回路図である。7 is a circuit diagram of temperature control of the heater of FIG.
１…赤外線検知容器 ２…冷却器 ３…赤外線窓 ４…赤外線検知素子 ５…コットン・ウール ６…温度検出素子 ７…ヒーター ８…黒体 1 ... Infrared detecting container 2 ... Cooler 3 ... Infrared window 4 ... Infrared detecting element 5 ... Cotton / Wool 6 ... Temperature detecting element 7 ... Heater 8 ... Black body
───────────────────────────────────────────────────── フロントページの続き (72)発明者 竹本 勝和 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Katsukazu Takemoto 1015 Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Fujitsu Limited
Claims (3)
いて、 冷却される赤外線検知素子（４）に近接した熱的に等価
な位置に配置され、該赤外線検知素子の温度を検知する
温度検出素子（６）と、 該赤外線検知素子の定格動作温度付近において、２種類
の冷却剤による該温度検出素子の出力と該赤外線検知素
子の出力を測定する試験調整治具手段（１７）と、 該赤外線検知素子の定格動作温度付近における該赤外線
検知素子の出力の変化を、該温度検出素子の出力に対す
る１次方程式により近似したときの傾きを算出する算出
手段（１３，１４，１６，１７）と、 該算出手段による算出結果を記憶する記憶手段（１５）
とを備え、 冷却器の不安定動作等により該赤外線検知素子に温度変
動が生じたとき、該赤外線検知素子の出力から、該温度
検出素子により得られる定格動作温度からの偏差に、前
記１次方程式の傾きを乗じた結果を差し引くことにより
補正することを特徴とする赤外線検知素子の冷却温度補
正回路。1. A cooling temperature correction circuit for an infrared detection element, which is arranged at a thermally equivalent position close to an infrared detection element (4) to be cooled and detects a temperature of the infrared detection element ( 6), a test adjusting jig means (17) for measuring the output of the temperature detecting element and the output of the infrared detecting element by two kinds of coolants in the vicinity of the rated operating temperature of the infrared detecting element, and the infrared detecting Calculation means (13, 14, 16, 17) for calculating a slope when a change in the output of the infrared detection element near the rated operating temperature of the element is approximated by a linear equation with respect to the output of the temperature detection element; Storage means (15) for storing the calculation result by the calculation means
When a temperature change occurs in the infrared detecting element due to an unstable operation of a cooler or the like, a deviation from an output of the infrared detecting element from a rated operating temperature obtained by the temperature detecting element is set to the primary A cooling temperature correction circuit for an infrared detection element, characterized in that the correction is performed by subtracting the result of multiplying the slope of the equation.
である請求項１に記載の冷却温度補正回路。2. The cooling temperature correction circuit according to claim 1, wherein the two kinds of coolants are liquid nitrogen and liquid oxygen.
温の黒体（８）に該赤外線検知容器（１）を載置し、該
赤外線検知素子が該黒体を見ている状態とし、該赤外線
検知容器内に液体窒素を注入して該赤外線検知素子を定
格動作温度付近に冷却し、該赤外線検知素子が該黒体か
らの赤外線入射パワーを検知する、構造を有する請求項
１に記載の冷却温度補正回路。3. The test adjusting jig means mounts the infrared detection container (1) on a black body (8) having a uniform surface at room temperature, and the infrared detection element looks at the black body. A state in which liquid nitrogen is injected into the infrared detection container to cool the infrared detection element to near the rated operating temperature, and the infrared detection element detects infrared incident power from the black body. The cooling temperature correction circuit according to 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4135202A JPH05332841A (en) | 1992-05-27 | 1992-05-27 | Cooling temperature compensation circuit of infrared ray detection element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4135202A JPH05332841A (en) | 1992-05-27 | 1992-05-27 | Cooling temperature compensation circuit of infrared ray detection element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05332841A true JPH05332841A (en) | 1993-12-17 |
Family
ID=15146244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4135202A Withdrawn JPH05332841A (en) | 1992-05-27 | 1992-05-27 | Cooling temperature compensation circuit of infrared ray detection element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05332841A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002033366A1 (en) * | 2000-10-16 | 2002-04-25 | Mitsubishi Denki Kabushiki Kaisha | Infrared camera |
| JP2008524621A (en) * | 2004-12-21 | 2008-07-10 | ユリス | Components that specifically detect infrared electromagnetic radiation |
| JP2008187254A (en) * | 2007-01-26 | 2008-08-14 | Sumitomo Electric Ind Ltd | Infrared imaging device and output value calculation method of imaging device |
-
1992
- 1992-05-27 JP JP4135202A patent/JPH05332841A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002033366A1 (en) * | 2000-10-16 | 2002-04-25 | Mitsubishi Denki Kabushiki Kaisha | Infrared camera |
| US6894280B2 (en) | 2000-10-16 | 2005-05-17 | Mitsubishi Denki Kabushiki Kaisha | Infrared camera |
| JP2008524621A (en) * | 2004-12-21 | 2008-07-10 | ユリス | Components that specifically detect infrared electromagnetic radiation |
| JP4854676B2 (en) * | 2004-12-21 | 2012-01-18 | ユリス | Components that specifically detect infrared electromagnetic radiation |
| JP2008187254A (en) * | 2007-01-26 | 2008-08-14 | Sumitomo Electric Ind Ltd | Infrared imaging device and output value calculation method of imaging device |
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