JPH05332994A - Mass spectrometry - Google Patents

Mass spectrometry

Info

Publication number
JPH05332994A
JPH05332994A JP4158688A JP15868892A JPH05332994A JP H05332994 A JPH05332994 A JP H05332994A JP 4158688 A JP4158688 A JP 4158688A JP 15868892 A JP15868892 A JP 15868892A JP H05332994 A JPH05332994 A JP H05332994A
Authority
JP
Japan
Prior art keywords
mass
scanning
speed
quadrupole
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4158688A
Other languages
Japanese (ja)
Other versions
JP2616637B2 (en
Inventor
Kozo Miishi
浩三 御石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4158688A priority Critical patent/JP2616637B2/en
Publication of JPH05332994A publication Critical patent/JPH05332994A/en
Application granted granted Critical
Publication of JP2616637B2 publication Critical patent/JP2616637B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/42Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/426Methods for controlling ions
    • H01J49/427Ejection and selection methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

(57)【要約】 【目的】 四重極型質量分析計では四重極印加電圧で質
量を表しているが高速走査を行うと、イオンが検出され
る迄に電極印加電圧が変わり、表示質量に誤差が生じ
る。この誤差を補正する。 【構成】 走査速度をパラメータとして質量較正テーブ
ルを実測により作成しておき、分析時このデーブを用
い、走査速度に応じて補正を行う。
(57) [Summary] [Purpose] In a quadrupole mass spectrometer, the mass is represented by the quadrupole applied voltage, but when high-speed scanning is performed, the electrode applied voltage changes until ions are detected, and the displayed mass Error occurs. This error is corrected. [Structure] A mass calibration table is created by actual measurement using the scanning speed as a parameter, and correction is performed according to the scanning speed using this dave during analysis.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は高速質量走査を行うのに
適した四重極型質量分析計に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quadrupole mass spectrometer suitable for performing high speed mass scanning.

【0002】[0002]

【従来の技術】四重極型質量分析計では検出されるイオ
ンの質量数が四重極電極に印加する高周波の電圧に比例
しているので、標準試料を用いて較正実験を行い、高周
波電圧を設定しているD/A変換器の入力ディジタルデ
ータと検出されるイオンの質量との関係を規定する変換
式を決定して、検出されるイオンの質量を求めている。
2. Description of the Related Art In a quadrupole mass spectrometer, the mass number of detected ions is proportional to the high-frequency voltage applied to the quadrupole electrode. The conversion formula that defines the relationship between the input digital data of the D / A converter that is set to and the mass of the detected ion is determined to obtain the mass of the detected ion.

【0003】四重極質量分析計では上述したように、四
重極電極に印加する高周波電圧で質量数を決めている
が、質量走査速度が比較的遅くて、イオンが四重極間に
入射してから検出される迄の間の高周波圧の変化が無視
できる間は正確な質量値を知ることができるが、走査速
度が高くなると質量の表示はイオンがすでに四重極間を
通過して検出されているときの高周波電圧に応じて行わ
れる結果、実際の質量と異なった質量が表示されること
になる。
As described above, in the quadrupole mass spectrometer, the mass number is determined by the high-frequency voltage applied to the quadrupole electrode, but the mass scanning speed is relatively slow, and the ions enter between the quadrupoles. Although the accurate mass value can be known as long as the change in the high-frequency pressure between the detection and the detection is negligible, when the scanning speed becomes high, the mass display shows that the ions have already passed between the quadrupoles. As a result of being performed according to the high frequency voltage at the time of being detected, a mass different from the actual mass is displayed.

【0004】[0004]

【発明が解決しようとする課題】本発明は、四重極型質
量分析計で高速質量走査を行っても正しい質量数の表示
が得られるようにすることを目的としている。
SUMMARY OF THE INVENTION It is an object of the present invention to make it possible to obtain a correct mass number display even when high speed mass scanning is performed with a quadrupole mass spectrometer.

【0005】[0005]

【課題を解決するための手段】標準試料を用い、異なる
走査速度で質量分析を行って、表示質量と実質量との差
即ち質量補正値と走査速度の関係を求めておき、その関
係を用いて、実分析時の走査速度と表示質量から正しい
質量を求めるようにした。
[Means for Solving the Problem] Using a standard sample, mass spectrometry is performed at different scanning speeds to obtain the difference between the displayed mass and the actual amount, that is, the relationship between the mass correction value and the scanning speed, and use the relationship. Then, the correct mass was determined from the scanning speed and the displayed mass during actual analysis.

【0006】[0006]

【作用】質量分析計に入射するイオンは一定加速電圧で
加速されているので、質量に関せず運動のエネルギーが
一定である。従ってイオンの速度は質量mの平方根に反
比例して遅くなる。検出されるイオンの表示質量と実質
量との差は、イオンが四重極電極に入射してから検出さ
れる迄の間の高周波電圧の変化に比例しており、この変
化はイオン速度が遅い程大きいから、例えば質量走査速
度をS(質量数/時間)、検出されたイオンの表示質量
をm、表示質量と実質量との差即ち補正値をΔMとする
と、 ΔM=KS√m で与えられ、比例定数Kを実測的に決めることで、走査
速度Sのときの表示質量に対する補正値を知ることがで
きる。
[Function] Since the ions incident on the mass spectrometer are accelerated by a constant acceleration voltage, the kinetic energy is constant regardless of the mass. Therefore, the velocity of the ions slows in inverse proportion to the square root of the mass m. The difference between the displayed mass and the actual amount of detected ions is proportional to the change in the high-frequency voltage between the time when the ions are incident on the quadrupole electrode and the time when they are detected. This change has a slow ion velocity. Assuming that the mass scanning speed is S (mass number / time), the displayed mass of detected ions is m, and the difference between the displayed mass and the actual amount, that is, the correction value is ΔM, ΔM = KS√m Therefore, the correction value for the displayed mass at the scanning speed S can be known by actually determining the proportional constant K.

【0007】[0007]

【実施例】図1は本発明方法を実行した四重極型質量分
析計による分析動作のフローチャートである。図2は上
の実施例で用いた四重極型質量分析計の構成を示す。図
2で1は四重極質量分析部、2は試料イオン化部、3は
イオン検出部で、4は装置を制御しているコンピュー
タ、5は四重極電極に印加する高周波電圧Vを設定する
D/A変換器、6は同じく直流電圧V設定するD/A変
換器、7はイオン検出信号をA/D変換するA/D変換
器で、8は高周波電圧質量変換表及び補正データ表を格
納しておくメモリである。コンピュータ4は二つのD/
A変換器に高周波電圧V及び直流電圧Vを指定するディ
ジタルデータを出力して質量走査を行うと共に、イオン
検出部の検出信号を取込み、他方イオン検出時のVを指
定しているディジタルデータから、メモリ8に格納して
ある表を用いて検出されたイオンの質量を決定し、イオ
ン検出信号と共にデータメモリ9に格納して行く。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a flow chart of an analysis operation by a quadrupole mass spectrometer which carries out the method of the present invention. FIG. 2 shows the configuration of the quadrupole mass spectrometer used in the above example. In FIG. 2, 1 is a quadrupole mass analysis unit, 2 is a sample ionization unit, 3 is an ion detection unit, 4 is a computer controlling the apparatus, and 5 is a high frequency voltage V applied to the quadrupole electrode. D / A converter, 6 is also a D / A converter for setting the DC voltage V, 7 is an A / D converter for A / D converting the ion detection signal, and 8 is a high frequency voltage mass conversion table and a correction data table. It is a memory for storing. Computer 4 has two D /
The digital data designating the high-frequency voltage V and the direct-current voltage V is output to the A converter, mass scanning is performed, the detection signal of the ion detector is taken in, and on the other hand, from the digital data designating V at the time of ion detection, The mass of the detected ion is determined using the table stored in the memory 8 and stored in the data memory 9 together with the ion detection signal.

【0008】上述した装置を用いて質量分析を行う場合
の動作を図1のフローチャートを用いて説明する。まず
標準試料を用い低速質量走査を行って、質量M1,M
2,…Mnのイオンを検出し、各イオンのピーク中心検
出時の高周波電圧設定ディジタルデータD1,D2,…
Dnを求めて、高周波電圧質量変換表を作成し、メモリ
8に格納する(イ)。次に同じ標準試料を用いて走査速
度Soで、高速走査を行い、質量M1,M2,…Mnの
各イオンを検出し、各イオンのピーク中心検出時の高周
波電圧設定ディジタルデータD1’,D2’,…Dn’
を求める(ロ)。次に上記Di’(i=1,2,…n)
から(イ)のステップで作成された変換表を用いて決ま
る質量Mi’を求め(ハ)、補正値ΔMi=Mi−M
i’を算出し(ニ)、ΔM=KSo√(Mi’)に上記
So,ΔMi’およびMi’を代入してKを決定し、高
周波電圧質量変換表から求まる質量Mi’と補正値ΔM
i走査速度Soにおける関係表を作成してメモリ8に格
納する(ホ)。最後に実試料につき、走査速度Sで高速
走査を行い、高周波電圧質量変換表によって求めた質量
M’に質量M’と補正値ΔMとの関係表から求まる補正
値ΔM’にS/Soを掛けて補正値ΔMを算出し、実質
量M=M’+ΔMを求めてメモリ9に格納(ヘ)する。
The operation when mass spectrometry is performed using the above apparatus will be described with reference to the flowchart of FIG. First, low-speed mass scanning is performed using a standard sample, and the masses M1 and M
2, ... Mn ions are detected, and high-frequency voltage setting digital data D1, D2, ... When the peak center of each ion is detected
Dn is obtained, a high-frequency voltage-mass conversion table is created, and stored in the memory 8 (a). Next, high-speed scanning is performed at the scanning speed So using the same standard sample to detect each ion of the masses M1, M2, ... Mn, and high-frequency voltage setting digital data D1 ′, D2 ′ at the time of detecting the peak center of each ion. , ... Dn '
Ask for (b). Next, the above Di ′ (i = 1, 2, ... N)
From (a) to (c), the mass Mi ′ determined using the conversion table created in the step (b) is calculated, and the correction value ΔMi = Mi−M
i ′ is calculated (d), ΔM = KSo√ (Mi ′) is substituted for the above So, ΔMi ′ and Mi ′ to determine K, the mass Mi ′ obtained from the high frequency voltage mass conversion table and the correction value ΔM
A relationship table at the i-scan speed So is created and stored in the memory 8 (e). Finally, the actual sample is subjected to high-speed scanning at a scanning speed S, and the mass value M ′ obtained by the high-frequency voltage mass conversion table is multiplied by the correction value ΔM ′ obtained from the relationship table between the mass M ′ and the correction value ΔM, and S / So. Then, the correction value ΔM is calculated, and the actual amount M = M ′ + ΔM is calculated and stored (F) in the memory 9.

【0009】[0009]

【発明の効果】四重極型質量分析計は磁場型質量分析計
で磁場強度を変えて質量走査を行うのに比し、高速走査
ができる利点があるが、本発明によれば高速走査時の表
示質量の誤差が補正されるので、高速走査で正確な質量
分析ができる。高速走査時の質量誤差は質量が大きい程
大きくなるから、高速走査で高質量側の分析を行った
り、広い質量範囲の分析を行う場合に本発明の効果は特
に大きい。
The quadrupole mass spectrometer has an advantage that it can perform high speed scanning as compared with mass scanning by changing magnetic field strength in a magnetic field type mass spectrometer. However, according to the present invention, high speed scanning is performed. Since the error in the displayed mass of is corrected, accurate mass analysis can be performed by high-speed scanning. Since the mass error during high-speed scanning increases as the mass increases, the effect of the present invention is particularly great when performing high-speed analysis on a high-mass side or performing analysis over a wide mass range.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明方法を実行する装置の一例のブロック図FIG. 1 is a block diagram of an example of an apparatus for executing the method of the present invention.

【図2】上記装置の動作のフローチャートFIG. 2 is a flowchart of the operation of the above device.

【符号の説明】[Explanation of symbols]

1 質量分析部 2 試料イオン化部 3 イオン検出部 4 制御用コンピュータ 5,6 D/A変換器 7 A/D変換器 8 変換表等を格納しておくメモリ 9 データメモリ 1 mass spectrometric section 2 sample ionization section 3 ion detection section 4 control computer 5, 6 D / A converter 7 A / D converter 8 memory for storing conversion table 9 data memory

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 四重極電極に印加する電圧から求められ
た質量値に対する質量走査速度Sにおける補正質量値を
標準試料を用いて求めておき、実試料分析時、四重極電
極印加電圧から求めた質量に上記補正値を用いて補正を
行うことを特徴とする質量分析計方法。
1. A corrected mass value at a mass scanning speed S with respect to a mass value obtained from a voltage applied to a quadrupole electrode is obtained by using a standard sample, and is analyzed from a voltage applied to the quadrupole electrode at the time of actual sample analysis. A mass spectrometer method, characterized in that the obtained mass is corrected using the above correction value.
JP4158688A 1992-05-26 1992-05-26 Mass spectrometry Expired - Lifetime JP2616637B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4158688A JP2616637B2 (en) 1992-05-26 1992-05-26 Mass spectrometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4158688A JP2616637B2 (en) 1992-05-26 1992-05-26 Mass spectrometry

Publications (2)

Publication Number Publication Date
JPH05332994A true JPH05332994A (en) 1993-12-17
JP2616637B2 JP2616637B2 (en) 1997-06-04

Family

ID=15677185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4158688A Expired - Lifetime JP2616637B2 (en) 1992-05-26 1992-05-26 Mass spectrometry

Country Status (1)

Country Link
JP (1) JP2616637B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002025498A (en) * 2000-07-13 2002-01-25 Shimadzu Corp Quadrupole mass spectrometer
JP2006040890A (en) * 2004-07-23 2006-02-09 Agilent Technol Inc Apparatus and method for electronically driving a quadrupole mass spectrometer to improve signal performance at high scan speeds
JP2006339087A (en) * 2005-06-06 2006-12-14 Hitachi High-Technologies Corp Mass spectrometer
WO2012017548A1 (en) * 2010-08-06 2012-02-09 株式会社島津製作所 Quadrupole-type mass spectrometer apparatus
JP2012043721A (en) * 2010-08-23 2012-03-01 Shimadzu Corp Mass spectroscope
WO2012105087A1 (en) * 2011-01-31 2012-08-09 株式会社 島津製作所 Triple quadrupole mass spectrometer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61207962A (en) * 1985-03-12 1986-09-16 Jeol Ltd Mass calibrating method for mass spectrometer
JPH0294242A (en) * 1988-09-28 1990-04-05 Shimadzu Corp quadrupole mass spectrometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61207962A (en) * 1985-03-12 1986-09-16 Jeol Ltd Mass calibrating method for mass spectrometer
JPH0294242A (en) * 1988-09-28 1990-04-05 Shimadzu Corp quadrupole mass spectrometer

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002025498A (en) * 2000-07-13 2002-01-25 Shimadzu Corp Quadrupole mass spectrometer
JP2006040890A (en) * 2004-07-23 2006-02-09 Agilent Technol Inc Apparatus and method for electronically driving a quadrupole mass spectrometer to improve signal performance at high scan speeds
JP2006339087A (en) * 2005-06-06 2006-12-14 Hitachi High-Technologies Corp Mass spectrometer
WO2012017548A1 (en) * 2010-08-06 2012-02-09 株式会社島津製作所 Quadrupole-type mass spectrometer apparatus
US8772707B2 (en) 2010-08-06 2014-07-08 Shimadzu Corporation Quadrupole mass spectrometer
JP5556890B2 (en) * 2010-08-06 2014-07-23 株式会社島津製作所 Quadrupole mass spectrometer
JP2012043721A (en) * 2010-08-23 2012-03-01 Shimadzu Corp Mass spectroscope
WO2012105087A1 (en) * 2011-01-31 2012-08-09 株式会社 島津製作所 Triple quadrupole mass spectrometer
US8698072B2 (en) 2011-01-31 2014-04-15 Shimadzu Corporation Triple quadrupole mass spectrometer
EP2672506A4 (en) * 2011-01-31 2017-05-03 Shimadzu Corporation Triple quadrupole mass spectrometer

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