JPH05343225A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH05343225A JPH05343225A JP14704192A JP14704192A JPH05343225A JP H05343225 A JPH05343225 A JP H05343225A JP 14704192 A JP14704192 A JP 14704192A JP 14704192 A JP14704192 A JP 14704192A JP H05343225 A JPH05343225 A JP H05343225A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- magnetic recording
- medium
- cocrta
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 23
- 239000000956 alloy Substances 0.000 claims abstract description 8
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 230000005415 magnetization Effects 0.000 abstract description 10
- 238000001755 magnetron sputter deposition Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 15
- 238000010586 diagram Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 1
- 239000010952 cobalt-chrome Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はコンピューターの記録媒
体装置に用いられるハード磁気ディスク等の磁気記録媒
体に関し、特に超高記録密度記録用の垂直磁気記録媒体
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium such as a hard magnetic disk used in a recording medium device of a computer, and more particularly to a perpendicular magnetic recording medium for ultra high recording density recording.
【０００２】[0002]
【従来の技術】磁気記録媒体は、一般に記録媒体の長手
方向に磁化させているが、この磁化方式では記録密度に
限界がある。そのため、超高記録密度に適した垂直磁気
記録の実用化を目指して研究開発が精力的に進められて
いる。垂直記録方式は、記録信号が短波長になると、つ
まり記録密度が増大すると、減磁界が小さくなり記録磁
化が安定化するという原理的な性質があるため、長手記
録方式に比べ高密度記録に有利である。2. Description of the Related Art A magnetic recording medium is generally magnetized in the longitudinal direction of the recording medium. However, this magnetization method has a limit in recording density. Therefore, research and development have been vigorously pursued with the aim of putting perpendicular magnetic recording suitable for ultra-high recording density into practical use. The perpendicular recording method has the principle property that the demagnetizing field becomes smaller and the recording magnetization stabilizes when the recording signal has a shorter wavelength, that is, when the recording density increases. Is.
【０００３】この記録方式の媒体には、スパッタあるい
は蒸着などにより形成されるＣｏＣｒおよびＣｏＣｒＴ
ａ合金等の磁性膜が優れたものとして提案されている
（日本応用磁気学会誌、Ｖｏｌ．８，Ｎｏ．１，１９８
４，１７ｐ）。The recording medium is CoCr and CoCrT formed by sputtering or vapor deposition.
Magnetic films such as a-alloy have been proposed as excellent ones (Journal of Japan Applied Magnetics, Vol. 8, No. 1, 198).
4, 17p).
【０００４】[0004]
【発明が解決しようとする課題】しかし、さらに高出
力、高記録密度の媒体を得るためには垂直保磁力および
飽和磁化を改善する必要がある。本発明の目的は、再生
出力および記録密度を向上させるために垂直保磁力およ
び飽和磁化を改善した磁気記録媒体を提供することにあ
る。However, in order to obtain a medium of higher output and higher recording density, it is necessary to improve the perpendicular coercive force and the saturation magnetization. An object of the present invention is to provide a magnetic recording medium having improved perpendicular coercive force and saturation magnetization for improving reproduction output and recording density.
【０００５】[0005]
【課題を解決するための手段】本発明の磁気記録媒体
は、スパッタ法により基板上に形成された垂直磁化膜に
おいて、ＣｏＣｒＴａ系合金に第４元素としてＢを添加
するようにして形成される。A magnetic recording medium of the present invention is formed by adding B as a fourth element to a CoCrTa-based alloy in a perpendicularly magnetized film formed on a substrate by a sputtering method.
【０００６】また、本発明の磁気記録媒体は、Ｂの添加
量が０．１ａｔ％以上８ａｔ％以下である。In the magnetic recording medium of the present invention, the added amount of B is 0.1 at% or more and 8 at% or less.
【０００７】[0007]
【作用】ＣｏＣｒＴａ膜に第４元素としてＢを含有させ
ることにより、高保磁力の磁気記録媒体を得る。また、
この時飽和磁化も多きくなり、高出力が得られる。By including B as the fourth element in the CoCrTa film, a magnetic recording medium having a high coercive force is obtained. Also,
At this time, the saturation magnetization also increases, and a high output can be obtained.
【０００８】[0008]
【実施例】以下に、本発明の実施例について説明する。EXAMPLES Examples of the present invention will be described below.
【０００９】本実施例にはＲＦマグネトロン方式のスパ
ッタ装置を用いる。また、基板はＮｉＰ／Ａｌ基板を用
いる。ターゲットは磁性膜用に８２Ｃｏ−１７Ｃｒ−１
Ｔａ（ａｔ％）合金とＢチップを組み合わせた複合ター
ゲット、保護膜用にカーボンターゲットをそれぞれ用い
る。図１に成膜条件の詳細を示す。In this embodiment, an RF magnetron type sputtering device is used. A NiP / Al substrate is used as the substrate. The target is 82Co-17Cr-1 for the magnetic film.
A composite target in which a Ta (at%) alloy and a B chip are combined and a carbon target for a protective film are used. FIG. 1 shows the details of film forming conditions.
【００１０】まず、ＣｏＣｒＴａ合金ターゲット上にの
せるＢチップの個数を変えてＢの添加量を変化させ、種
々のＣｏＣｒＴａＢ合金膜（１，５００Ａを）を形成す
る。First, various CoCrTaB alloy films (1,500 A) are formed by changing the number of B chips placed on the CoCrTa alloy target to change the amount of B added.
【００１１】図２はＢの添加量に対する垂直保磁力の変
化を示す。なお、組成はＥＰＭＡにより分析し、磁気特
性はＶＳＭにより測定した。その結果、図２よりＢ添加
量が０．１ａｔ％以上８ａｔ％以下で、ＣｏＣｒＴａ膜
に比べて高保磁力となることがわかる。FIG. 2 shows the change in perpendicular coercive force with respect to the amount of B added. The composition was analyzed by EPMA, and the magnetic characteristics were measured by VSM. As a result, it can be seen from FIG. 2 that when the amount of B added is 0.1 at% or more and 8 at% or less, the coercive force is higher than that of the CoCrTa film.
【００１２】図３はＢの添加量に対する飽和磁化の変化
を示す。これより、Ｂ添加量が０．１ａｔ％以上８ａｔ
％以下で、ＣｏＣｒＴａ膜に比べて飽和磁化が大きくな
る。FIG. 3 shows the change of the saturation magnetization with the addition amount of B. From this, the amount of B added is 0.1 at% or more and 8 at
%, The saturation magnetization becomes larger than that of the CoCrTa film.
【００１３】次に、本発明媒体の記録再生特性について
述べる。ここで用いた媒体は、０．６ａｔ％Ｂ添加のＣ
ｏＣｒＴａＢ膜（１，５００Ａ）で、保護膜としてカー
ボン（２００Ａ）を成膜している。また、比較のため同
じ基板でＣｏＣｒＴａ合金膜（１，５００Ａ）の従来媒
体も作製した。Next, the recording / reproducing characteristics of the medium of the present invention will be described. The medium used here is C containing 0.6 at% B.
The oCrTaB film (1,500A) is formed of carbon (200A) as a protective film. For comparison, a conventional medium of CoCrTa alloy film (1,500 A) was also manufactured on the same substrate.
【００１４】図４にこれらの媒体の磁気特性を示す。FIG. 4 shows the magnetic characteristics of these media.
【００１５】図５は本発明の媒体Ａと従来媒体Ｂについ
て、薄膜磁気ヘッドによる記録再生特性の結果を示す。
これから本発明の媒体は従来媒体に比べて再生出力およ
び記録密度が改善されることがわかる。（媒体Ａ：記録
密度Ｄ50＝８２ｋＦＲＰＩ，媒体Ｂ：Ｄ50＝６８ｋＦＲ
ＰＩ）。FIG. 5 shows the results of recording / reproducing characteristics of the medium A of the present invention and the conventional medium B by the thin film magnetic head.
From this, it is understood that the medium of the present invention has improved reproduction output and recording density as compared with the conventional medium. (Medium A: recording density D 50 = 82 kFRPI, medium B: D 50 = 68 kFR
PI).
【００１６】[0016]
【発明の効果】本発明により媒体の垂直保磁力および飽
和磁化が高められ、再生出力および記録密度等が改善さ
れる。According to the present invention, the perpendicular coercive force and saturation magnetization of the medium are increased, and the reproduction output and recording density are improved.
【図１】本発明による磁気記録媒体の成膜条件を示す説
明図。FIG. 1 is an explanatory view showing film forming conditions of a magnetic recording medium according to the present invention.
【図２】垂直保磁力のＣｏＣｒＴａ膜へのＢ添加量依存
性を示す特性図。FIG. 2 is a characteristic diagram showing the dependency of perpendicular coercive force on the amount of B added to the CoCrTa film.
【図３】飽和磁化のＣｏＣｒＴａ膜へのＢ添加量依存性
を示す特性図。FIG. 3 is a characteristic diagram showing the dependency of saturation magnetization on the amount of B added to the CoCrTa film.
【図４】本発明による磁気記録媒体の磁気特性を示す説
明図。FIG. 4 is an explanatory diagram showing magnetic characteristics of a magnetic recording medium according to the present invention.
【図５】本発明による磁気記録媒体の記録密度特性を示
す特性図。FIG. 5 is a characteristic diagram showing recording density characteristics of a magnetic recording medium according to the present invention.
Ａ 媒体（本発明による） Ｂ 媒体（従来例による） A medium (according to the present invention) B medium (according to the conventional example)
Claims (2)
直磁化膜において、ＣｏＣｒＴａ系合金に第４元素とし
てＢを添加することを特徴とする磁気記録媒体。1. A magnetic recording medium, wherein B is added as a fourth element to a CoCrTa-based alloy in a perpendicularly magnetized film formed on a substrate by a sputtering method.
以下であることを特徴とする請求項１記載の磁気記録媒
体。2. The amount of B added is 0.1 at% or more and 8 at%.
The magnetic recording medium according to claim 1, wherein:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14704192A JPH05343225A (en) | 1992-06-08 | 1992-06-08 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14704192A JPH05343225A (en) | 1992-06-08 | 1992-06-08 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05343225A true JPH05343225A (en) | 1993-12-24 |
Family
ID=15421182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14704192A Pending JPH05343225A (en) | 1992-06-08 | 1992-06-08 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05343225A (en) |
-
1992
- 1992-06-08 JP JP14704192A patent/JPH05343225A/en active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 19990406 |