JPH0534559U - Liquid particle analyzer - Google Patents

Abstract

(57) [Summary] [Object] The present invention aims to improve the heat dissipation effect in order to suppress the temperature rise of each part of the apparatus that occurs when a high temperature liquid sample is introduced for particle detection. [Structure] An upper surface of a housing 3 is formed of a base plate 2 made of aluminum, and a child detection unit 1 including an optical system and a fluid system is attached to the base plate 2. With this configuration, since the base plate 2 is in direct contact with the outside air, the particle detector 1 can effectively dissipate heat.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an in-liquid particle meter, and more particularly to an in-liquid particle meter with a heat dissipation measure that can mitigate the temperature rise inside the device even when a high-temperature liquid sample is introduced.

[0002]

[Prior Art]

 In industrial fields such as the semiconductor and electronics industries, high-temperature cleaning water and cleaning chemicals are used for cleaning. This is because the solubility of the medium liquid is increased by increasing the temperature and the cleaning effect is increased. Freon has recently been regulated due to the problem of ozone depletion, and interest in hot pure water as an alternative is increasing. From the above background, the potential market for fine particle analyzers in liquids capable of measuring high-temperature liquid samples is expected to be high. However, in the past, no microparticle analyzer in liquid has been commercially available that guarantees the measurement of a high-temperature liquid sample.

FIG. 3 shows a conventional submerged particle counter for a room temperature liquid sample, which includes an optical system including a light emitting element, a light receiving element, a lens, a mirror, a cell, and a fluid system including a joint and a cell. The particle detecting means 1 is attached to an aluminum base plate 2 and housed in a housing 3. Here, the emphasis is placed on suppressing the distortion of the housing 3 and the influence of external vibrations on the positional accuracy of the optical system, and the base plate 2 is mounted on the housing via a buffer member 4 made of resin. It is fixed to the bottom of 3. Further, rubber feet 5 are provided on the lower surface of the housing 3.

With the above configuration, the liquid sample is introduced into the particle detecting means 1 through the in-joint 6, and after passing through the particle detecting means 1, is discharged from the out-joint 7 to the outside. In this case, when a high-temperature liquid sample is introduced, heat is transferred from the fluid system to the base plate 2, but heat is transferred between solids to be released to the outside, but the resin has a small cross-sectional area and a low heat transfer coefficient. Finally, the manufactured cushioning member 4 will have to be interposed. For this reason, the heat that cannot be dissipated by the heat transfer between the solids is accumulated in the base plate 2 and the like, and finally reaches the surface of the housing through the inner space of the housing by convection. As a result, the temperature of each part of the device is considerably increased.

[0005]

[Problems to be solved by the device]

 In the conventional fine particle analyzer in liquid as described above, the following three problems can be cited as problems associated with the rise in temperature of each part of the apparatus due to the introduction of a high temperature liquid sample. (1) Thermal expansion, temperature cycle and temperature gradient stress adversely affect the positional accuracy of optical system components. (2) Fluctuations of convection generated in the space inside the housing affect the optical system and increase noise. (3) When a laser diode is used as the light emitting element, it is necessary to control the temperature of the laser diode at a constant level for stable operation, but if the housing temperature rises excessively, Temperature control becomes difficult.

On the other hand, as a heat radiation measure adopted in the conventional liquid particle meter, there is one in which a fan is attached to the housing so that the heat accumulated inside is discharged to the outside. However, this method sometimes caused dew condensation on the surface of the optical system component due to the balance between the humidity of the ambient air and the temperature of the optical system component. Since the particle environment in a liquid is often used in a severe environment, there is a problem that the above condensation shortens the life of the device especially when corrosive vapor such as hydrochloric acid flows into the device. there were.

The present invention was made in order to solve the above problems, and alleviates the temperature rise in each part of the apparatus when a high temperature liquid sample is introduced, and prevents dew condensation on optical system parts. The purpose is to obtain a fine particle analyzer in liquid.

[0008]

[Means for Solving the Problems]

 In the in-liquid particle meter according to the present invention, the base plate to which the particle detecting means is attached forms a part of the housing.

Further, a flexible heat insulating member is interposed between the base plate and another housing member.

At least one of a radiation fin, a fan, a cooling pipe for water cooling, and a Peltier element is arranged on the outer surface of the base plate.

[0011]

[Action]

 In the present invention, the metal base plate directly contacts the outside air, so that the heat radiation effect is increased. If heat radiation fins, cooling pipes, etc. are arranged on the surface of the base plate, the heat radiation effect will be further increased.

Further, since the flexible thermal insulator is interposed between the base plate and the other part of the housing, the heat transfer from the base plate to the other part is suppressed, and the housing Mitigates the effects of strain and external vibrations on the base plate.

[0013]

【Example】

 Embodiment 1 FIG. 1 shows an embodiment, in which an aluminum base plate 2 to which a particle detecting means 1 is attached forms an upper surface of a housing 3. In addition, the same symbols as in FIG. 3 indicate the same parts.

With the above structure, since the base plate 2 is in direct contact with the outside air, the heat radiation effect is increased. Here, when the base plate 2 is used as a part of the housing 3, there are three possible positions, namely, the top surface, the side surface, and the bottom surface of the housing. In this embodiment, the heat dissipation effect is the highest. The base plate 2 was placed on the large upper surface. This is because heat is radiated from the housing 3 to the outside air by convection from the bottom to the top, but if the base plate 2 is placed on the side surface or the bottom surface, the housing 3 is placed above the base plate. The other parts are located and interfere with heat dissipation. At this point, when the base plate 2 is the upper surface, there is nothing other than a free space above the base plate 2, and heat is radiated most effectively.

Another advantage of using the base plate 2 on the upper surface of the housing 3 is that convective fluctuations are less likely to occur because the temperature distribution in the internal space of the housing becomes higher toward the top. And the stability of the optical system is maintained.

However, even when the base plate 2 is used as the side surface or the bottom surface of the housing 3, the heat dissipation effect is remarkably improved as compared with the conventional device by the direct contact of the base plate 2 with the outside air. Obviously, these are also included in this invention.

Embodiment 2 FIG. 2 shows another embodiment, in which heat radiating fins 8 and fans 9 are arranged on the upper surface of the base plate 2 so as to radiate heat more positively. Further, as the arrangement on the base plate 2, a cooling pipe for water cooling, a Peltier element, or a combination thereof can be considered.

Further, a heat insulating member 10 is interposed between the base plate 2 and other portions of the housing 3 to transfer heat from the base plate 2 to other parts of the apparatus other than the upper space. Suppressed. Another effect of arranging the heat insulating member 10 is that, by using the heat insulating member 10 having flexibility, such as rubber, as in the cushioning member 4 in FIG. The purpose is to mitigate the influence of the strain and external vibrations on the base plate 2.

[0019]

[Effect of the device]

 As described above, according to the present invention, the heat dissipation effect when a high temperature liquid sample is introduced can be increased by forming the base plate as a part of the housing. The heat radiation effect can be further improved by arranging heat radiation fins and cooling pipes on the. Further, it is possible to prevent dew condensation on the optical components.

Further, by interposing a flexible heat insulating member between the base plate and the other part of the housing, heat transfer to the device part is prevented, and the influence of vibration etc. is prevented. Can be mitigated.

[Brief description of drawings]

FIG. 1 is a sectional view showing a first embodiment of the present invention.

FIG. 2 is a sectional view showing a second embodiment of the present invention.

FIG. 3 is a cross-sectional view showing a conventional submerged particle meter.

[Explanation of symbols]

(1) ... Particle detection means, (2) ... Base plate, (3)
…… Case, (8) …… Radiation fin, (9) …… Fan,
(10) …… Heat insulation member

Claims (3)

[Scope of utility model registration request] 1. A particle detecting means comprising an optical system and a fluid system, a housing for accommodating the particle detecting means, and a metal part which is a part of the housing and to which the particle detecting means is attached. An in-liquid particle meter comprising a base plate. 2. The submerged fine particle meter according to claim 1, further comprising a flexible heat insulating member disposed between the base plate and another casing. 3. The submerged fine particle meter according to claim 1, wherein at least one of the radiation fin, the fan, the cooling pipe for water cooling, and the Peltier element is arranged on the outer surface of the base plate.