JPH0535498B2 - - Google Patents
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- JPH0535498B2 JPH0535498B2 JP62070274A JP7027487A JPH0535498B2 JP H0535498 B2 JPH0535498 B2 JP H0535498B2 JP 62070274 A JP62070274 A JP 62070274A JP 7027487 A JP7027487 A JP 7027487A JP H0535498 B2 JPH0535498 B2 JP H0535498B2
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- magnetic layer
- magnetization
- magnetic
- recording
- layer
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Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気カー効果を利用して読出しするこ
とのできるキユリー点書込みタイプの光磁気記録
媒体及びそれを用いた重ね書き可能な光磁気記録
方法に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a Curie point writing type magneto-optical recording medium that can be read using the magnetic Kerr effect, and an overwritable magneto-optical recording medium using the same. Regarding the method.
消去可能な光デイスクメモリとして光磁気デイ
スクが知られている。光磁気デイスクは、従来の
磁気ヘツドを使つた磁気記録媒体と比べて高密度
記録、非接触での記録再生などが可能であるとい
う長所がある反面、記録前に一度記録部分を消去
しなければならない(一方向に着磁しなければな
らない)という欠点があつた。この欠点を補う為
に、記録再生用ヘツドと消去用ヘツドを別々に設
ける方法、あるいは、レーザーの連続ビームを照
射しつつ、同時に印加する磁場を変調しながら記
録する方法などが提案されている。
A magneto-optical disk is known as an erasable optical disk memory. Magneto-optical disks have advantages over magnetic recording media using conventional magnetic heads, such as high-density recording and non-contact recording and playback, but on the other hand, the recorded area must be erased before recording. It has the disadvantage that it cannot be magnetized in one direction (it must be magnetized in one direction). In order to compensate for this drawback, proposals have been made such as a method in which a recording/reproducing head and an erasing head are provided separately, or a method in which recording is performed while irradiating a continuous laser beam and simultaneously modulating the applied magnetic field.
しかし、これらの方法は、装置が大がかりとな
り、コスト高になる欠点あるいは高速の変調がで
きないなどの欠点を有する。
However, these methods have drawbacks such as a large-scale apparatus, high cost, and the inability to perform high-speed modulation.
上述の公知技術の欠点を除去し、従来の装置構
成に簡単な構造の磁界発生手段を付設するだけ
で、磁気記録媒体と同様な重ね書き(オーバーラ
イト)を可能とした、光磁気記録方法を本出願人
は昭和61年7月8日に特願昭61−158787号(該出
願は昭和62年2月2日の国内優先出願特願昭62−
20384号の基礎出願となる)で提案した。 We have developed a magneto-optical recording method that eliminates the drawbacks of the above-mentioned known techniques and enables overwriting similar to that of magnetic recording media by simply adding a magnetic field generating means of a simple structure to the conventional device configuration. The present applicant filed Japanese Patent Application No. 61-158787 on July 8, 1985 (this application was filed as a domestic priority application filed on February 2, 1988).
This was proposed in the basic application No. 20384).
しかし、この方法は全く新しい記録法であるが
故に、いまだ多くの研究課題が残つていた。すな
わち、再生時の光磁気効果を最適にして、しかも
良好な記録感度を得るための光磁気記録媒体の探
究等である。 However, because this method is a completely new recording method, many research questions still remain. That is, the research involves the search for a magneto-optical recording medium that optimizes the magneto-optical effect during reproduction and provides good recording sensitivity.
そこで本発明者は更に研究を進めた結果、いく
つかの成果が得られた。 As a result of further research, the present inventors obtained several results.
本発明はこうして完成されたものであり、その
目的は重ね書き可能な記録方法を提供するだけで
なく、再生時の光磁気効果を最適にして、しかも
良好な記録感度を得ることのできる光磁気記録媒
体を提供することにある。 The present invention was completed in this way, and its purpose is not only to provide a recording method that allows overwriting, but also to provide a magneto-optical method that can optimize the magneto-optical effect during reproduction and obtain good recording sensitivity. The goal is to provide recording media.
〔問題点を解決するための手段〕
上記目的達成可能な本発明は
キユリー点T1と保磁力H1とを有する第1磁性
層およびキユリー点T2と保磁力H2とを有する第
2磁性層から構成される二層構造の交換結合して
いる垂直磁化膜を、基板上に有して成る光磁気記
録媒体において、次の条件を満たしていることを
特徴とする光磁気記録媒体
H1>H2>σw/2MsL2
T1<T2、600Å<L1+L2<1000Å
200Å<L1
(Msは第2磁性層の飽和磁化、L2はその膜厚、
L1は第1磁性層の膜厚、σwは二つの磁性層間の
磁壁エネルギー)、
及びこれを使用して二値のオーバーライト可能
な記録を行なうことを特徴とする記録方法であ
る。[Means for Solving the Problems] The present invention capable of achieving the above-mentioned objects includes: a first magnetic layer having a Kyrie point T 1 and a coercive force H 1 ; and a second magnetic layer having a Kyrie point T 2 and a coercive force H 2 . A magneto-optical recording medium comprising a two-layer exchange-coupled perpendicularly magnetized film on a substrate, which satisfies the following conditions: H1 >H 2 >σw/2MsL 2 T 1 <T 2 , 600Å<L 1 +L 2 <1000Å 200Å<L 1 (Ms is the saturation magnetization of the second magnetic layer, L 2 is its thickness,
This recording method is characterized in that L 1 is the film thickness of the first magnetic layer, σw is the domain wall energy between the two magnetic layers), and that binary overwritable recording is performed using this.
以下、図面を参照して本発明を詳細に説明す
る。 Hereinafter, the present invention will be explained in detail with reference to the drawings.
第1図a,bは各々本発明の光磁気記録媒体の
一実施例を示す模式断面図である。第1図aの光
磁気記録媒体は、プリグルーブが設けられた透光
性の基板1上に、第1の磁性層2と第2の磁性層
3が積層されたものである。第1磁性層2は低い
キユリー点T1と高い保磁力H1を有し、第2磁性
層3は、高いキユリー点T2と低い保磁力H2を有
する。ここで「高い」、「低い」とは両磁性層を比
較した場合の相対的な関係を表わす(保磁力は室
温における比較)。なお、T1≒T2でもよい。通常
は第1磁性層2のT1は70〜180℃、H1は、3〜
10KOe、第2磁性層3のT2100〜400℃、H2は0.5
〜2KOe程度の範囲内から選択するとよい。 FIGS. 1a and 1b are schematic cross-sectional views each showing an embodiment of the magneto-optical recording medium of the present invention. The magneto-optical recording medium shown in FIG. 1a has a first magnetic layer 2 and a second magnetic layer 3 laminated on a transparent substrate 1 provided with pregrooves. The first magnetic layer 2 has a low Kyrie point T 1 and a high coercive force H 1 , and the second magnetic layer 3 has a high Kyrie point T 2 and a low coercive force H 2 . Here, "high" and "low" represent a relative relationship when comparing both magnetic layers (coercive force is compared at room temperature). Note that T 1 ≈T 2 may also be satisfied. Usually, T 1 of the first magnetic layer 2 is 70 to 180°C, and H 1 is 3 to 180°C.
10KOe, T 2 of second magnetic layer 3 100-400℃, H 2 0.5
It is recommended to select from within the range of ~2KOe.
各磁性層の主成分には、垂直磁気異方性を示し
且つ磁気光学効果を呈するものが利用できるが、
希土類元素と遷移金属元素との非晶質磁性合金が
好ましい。例えば、GdCo、GdFe、TbFe、
DyFe、GdTbFe、TbDyFe、GdTbFeCo、
TbFeCo、GdTbCo等が挙げられる。 The main component of each magnetic layer can be one that exhibits perpendicular magnetic anisotropy and exhibits a magneto-optical effect.
Amorphous magnetic alloys of rare earth elements and transition metal elements are preferred. For example, GdCo, GdFe, TbFe,
DyFe, GdTbFe, TbDyFe, GdTbFeCo,
Examples include TbFeCo and GdTbCo.
本発明の光磁気記録媒体は、第1磁性層2が主
に再生に関与する。即ち、第1磁性層2が呈する
磁気光学効果が主に再生に利用され、第2磁性層
3は記録に重要な役割りを果たす。 In the magneto-optical recording medium of the present invention, the first magnetic layer 2 is mainly involved in reproduction. That is, the magneto-optic effect exhibited by the first magnetic layer 2 is mainly used for reproduction, and the second magnetic layer 3 plays an important role in recording.
一方、従来の光磁気記録方法における、交換結
合二層膜では、逆に、低いキユリー点と高い保磁
力とを有する磁性層は主に記録に関与し、高いキ
ユリー点と低い保磁力とを有する磁性層が主に再
生に関与した。 On the other hand, in the exchange-coupled bilayer film in the conventional magneto-optical recording method, conversely, the magnetic layer with a low Kyrie point and high coercive force is mainly involved in recording; The magnetic layer was mainly involved in reproduction.
かかる従来の交換結合二層膜では、主に再生に
関与する磁性層の飽和磁化Msと、その膜厚Lと、
二層間の磁壁エネルギーσwの間に、次の様な関
係があるのが望ましかつた。 In such a conventional exchange-coupled two-layer film, the saturation magnetization Ms of the magnetic layer mainly involved in reproduction, its film thickness L,
It is desirable that the following relationship exists between the domain wall energy σw between the two layers.
H1>σw/2MsL>H2
しかし、本発明に使用する記録媒体の交換結合
二層膜では、第2磁性層3の飽和磁化Msとその
膜厚L2と、二磁性層間の磁壁エネルギーσwの間
に、次の関係が必要である。 H 1 > σw/2MsL > H 2 However, in the exchange-coupled double-layer film of the recording medium used in the present invention, the saturation magnetization Ms of the second magnetic layer 3, its film thickness L 2 , and the domain wall energy σw between the two magnetic layers The following relationship is required between:
H1>H2>σw/2MsL2
これは、記録によつて最終的に完成されるビツ
トの磁化状態(第2図fに示す)を、安定にする
ためである(詳しい理由は後述する)。 H 1 > H 2 > σw/2MsL 2This is to stabilize the magnetization state of the bit (shown in Figure 2 f) that is finally completed by recording (the detailed reason will be explained later). .
したがつて、両磁性層2,3(垂直磁化膜)が
上の関係式を満たすように、各層の膜厚、保磁
力、飽和磁化の大きさ、磁壁エネルギーなどを適
当に設定すればよい。 Therefore, the film thickness, coercive force, magnitude of saturation magnetization, domain wall energy, etc. of each layer may be appropriately set so that both magnetic layers 2 and 3 (perpendicularly magnetized films) satisfy the above relational expression.
本発明の光磁気光学媒体では、上記要件の他
に、再生時の光磁気効果を最適にして、しかも良
好な記録感度と再生信号とを得るため、
600Å<L1+L2<1000Å
200Å<L1
という要件も満たしている。(このように設定し
た理由も後述する)
なお、両磁性層2,3は、記録時の実効的バイ
アス磁界の大きさ、あるいは二値の記録ビツトの
安定性などを考えると、交換結合をしていること
が望ましい。 In addition to the above-mentioned requirements, the magneto-optical optical medium of the present invention has the following conditions: 600 Å<L 1 +L 2 <1000 Å 200 Å<L It also satisfies requirement 1 . (The reason for this setting will be explained later.) Note that both magnetic layers 2 and 3 do not undergo exchange coupling, considering the magnitude of the effective bias magnetic field during recording or the stability of binary recorded bits. It is desirable that
第1図bにおいて、4,5は両磁性層の耐久性
を向上させるためのあるいは光磁気効果を向上さ
せるための保護膜である。 In FIG. 1b, 4 and 5 are protective films for improving the durability of both magnetic layers or for improving the magneto-optical effect.
6は、貼り合わせ用基板7を貼り合わすための
接着層である。貼り合わせ用基板7にも、2から
5までの層を積層し、これを接着すれば両面で記
録・再生が可能となる。 6 is an adhesive layer for bonding the bonding substrate 7 together. By laminating 2 to 5 layers on the bonding substrate 7 and gluing them together, recording and reproduction can be performed on both sides.
以下、第2図〜第4図を用いて記録の過程を示
すが、記録前、両磁性層2と3の磁化の安定な向
きは平行(同じ向き)でも反平行(逆方向)でも
良い。第2図では磁化の安定な向きが平行な場合
について説明する。 The recording process will be described below with reference to FIGS. 2 to 4. Before recording, the stable magnetization directions of both magnetic layers 2 and 3 may be parallel (same direction) or antiparallel (opposite directions). In FIG. 2, a case will be explained in which the stable directions of magnetization are parallel.
第3図の35は、上述したような構成を有する
光磁気デイスクである。例えば、この磁性層のあ
る一部の磁化状態が初め第2図aのようになつて
いるとする。光磁気デイスク35はスピンドルモ
ータにより回転して、磁界発生部34を通過す
る。このとき、磁界発生部34の磁界の大きさを
両磁性層2と3の保磁力の間の値に設定すると
(磁界の向きは本実施例では上向き)、第2図bに
示す様に第2磁性層3は一様な方向に磁化され、
一方、第1磁性層2の磁化は初めのままである。 35 in FIG. 3 is a magneto-optical disk having the configuration described above. For example, suppose that the magnetization state of a certain part of this magnetic layer is initially as shown in FIG. 2a. The magneto-optical disk 35 is rotated by a spindle motor and passes through the magnetic field generating section 34 . At this time, if the magnitude of the magnetic field of the magnetic field generator 34 is set to a value between the coercive forces of both the magnetic layers 2 and 3 (the direction of the magnetic field is upward in this embodiment), the magnetic field will appear as shown in FIG. 2b. 2 The magnetic layer 3 is magnetized in a uniform direction,
On the other hand, the magnetization of the first magnetic layer 2 remains unchanged.
次に光磁気デイスク35が回転して記録・再生
ヘツド31を通過するときに、記録信号発生器3
2からの信号に従つて、2種類(第1種と第2
種)のレーザーパワー値を持つレーザービームを
デイスク面に照射する。第1種のレーザーパワー
は該デイスクを第1磁性層2のキユリー点付近ま
で昇温するだけのパワーであり、第2種のレーザ
ーパワーは該デイスクを第2磁性層3のキユリー
点付近まで昇温可能なパワーである。即ち、両磁
性層2,3の保磁力と温度との関係の概略を示し
た第4図において、第1種のレーザーパワーは
T1付近、第2種のレーザーパワーはT2付近まで
デイスクの温度を上昇できる。 Next, when the magneto-optical disk 35 rotates and passes the recording/reproducing head 31, the recording signal generator 3
According to the signal from 2, 2 types (1st type and 2nd type)
The disk surface is irradiated with a laser beam with a laser power value of (seed). The first type of laser power is enough to raise the temperature of the disk to around the Curie point of the first magnetic layer 2, and the second type of laser power is enough to raise the temperature of the disk to around the Curie point of the second magnetic layer 3. It is a power that can be heated. That is, in FIG. 4, which schematically shows the relationship between the coercive force and temperature of both magnetic layers 2 and 3, the first type laser power is
Near T 1 , the second type of laser power can raise the temperature of the disk to near T 2 .
第1種のレーザーパワーにより第1磁性層2
は、キユリー点付近まで昇温するが第2磁性層3
はこの温度でビツトが安定に存在する保磁力を有
しているので記録時のバイアス磁界を適正に設定
しておくことにより、第2図bのいづれからも第
2図cのようなビツトが形成される(第1種の予
備記録)。 The first magnetic layer 2 is
The temperature rises to near the Curie point, but the second magnetic layer 3
has a coercive force that allows bits to exist stably at this temperature, so by setting the bias magnetic field appropriately during recording, bits like those in Figure 2 c can be obtained from any of Figure 2 b. Formed (preliminary record of type 1).
ここでバイアス磁界を適正に設定するとは、次
のような意味である。即ち、第1種の予備記録で
は、第2磁性層3の磁化の向きに対して安定な向
きに(ここでは同じ方向に)第1磁性層2の磁化
が配列する力(交換力)を受けるので、従来はバ
イアス磁界は必要でない。しかし、バイアス磁界
は後述する第2種のレーザーパワーを用いた予備
記録では第2磁性層3の磁化反転を補助する向き
(すなわち、第1種の予備記録を妨げる向き)に
設定される。そして、このバイアス磁界は、第1
種、第2種どちらのレーザーパワーの予備記録で
も、大きさ、方向を同じ状態に設定しておくこと
が便宜上好ましい。 Here, setting the bias magnetic field appropriately means the following. That is, in the first type of preliminary recording, the magnetization of the first magnetic layer 2 receives a force (exchange force) that aligns it in a stable direction (here, in the same direction) as the direction of magnetization of the second magnetic layer 3. Therefore, conventionally, a bias magnetic field is not required. However, the bias magnetic field is set in a direction that assists the magnetization reversal of the second magnetic layer 3 in preliminary recording using the second type of laser power (described later) (that is, a direction that hinders the first type of preliminary recording). And this bias magnetic field is the first
For convenience, it is preferable to set the magnitude and direction to be the same in preliminary recording of both the seed and second type laser powers.
かかる観点からバイアス磁界の設定は次記に示
す原理による第2種のレーザーパワー予備記録に
必要最小限の大きさに設定しておくことが好まし
く、これを考慮した設定が前でいう適正な設定で
ある。 From this point of view, it is preferable to set the bias magnetic field to the minimum size necessary for the second type of laser power preliminary recording based on the principle shown below, and settings that take this into consideration are the appropriate settings mentioned above. It is.
次に第2種の予備記録について説明する。 Next, the second type of preliminary recording will be explained.
第2種のレーザーパワーにより、第2磁性層3
のキユリー点近くまで昇温させる(第2種の予備
記録)と、上述のように設定されたバイアス磁界
により第2磁性層3の磁化の向きが反転する。続
いて第1磁性層2の磁化も第2磁性層3に対して
安定な向きに(ここでは同じ方向に)配列する。
即ち、第2図bのいづれからも第2図dのような
ビツトが形成される。 The second magnetic layer 3 is
When the temperature is raised to near the Curie point (second type of preliminary recording), the direction of magnetization of the second magnetic layer 3 is reversed by the bias magnetic field set as described above. Subsequently, the magnetization of the first magnetic layer 2 is also aligned in a stable direction (here, in the same direction) with respect to the second magnetic layer 3.
That is, a bit as shown in FIG. 2d is formed from any of the bits shown in FIG. 2b.
このように、バイアス磁界と、信号に応じて変
わる第1種及び第2種のレーザーパワーとによつ
て、光磁気デイスクの各箇所は第2図cかdの状
態に予備記録されることになる。 In this way, each location on the magneto-optical disk is preliminarily recorded in the state shown in FIG. Become.
次に光磁気デイスク35を回転させ、予備記録
のビツトc,dが磁界発生部34を再び通過する
と、磁界発生部34の磁界の大きさは前述したよ
うに磁性層2と3の保磁力間に設定されているの
で、記録ビツトcは、変化が起こらずにeの状態
である(最終的な記録状態)。一方、記録ビツト
dは第2磁性層3が磁化反転を起こしてfの状態
になる(もう一つの最終的な記録状態)。 Next, when the magneto-optical disk 35 is rotated and the pre-recorded bits c and d pass through the magnetic field generating section 34 again, the magnitude of the magnetic field of the magnetic field generating section 34 will be between the coercive forces of the magnetic layers 2 and 3 as described above. Therefore, the recording bit c remains in the state e (final recording state) without any change. On the other hand, the recording bit d undergoes magnetization reversal in the second magnetic layer 3 and enters the state f (another final recording state).
fの記録ビツトの状態が安定に存在する為に
は、第2磁性層3の飽和磁化の大きさMs、膜厚
L2、磁性層2,3間の磁壁エネルギーσwの間に
前述したように次の様な関係があれば良い。 In order for the state of the recording bit f to exist stably, the magnitude of saturation magnetization Ms of the second magnetic layer 3, the film thickness
As described above, it is sufficient if there is the following relationship between L 2 and the domain wall energy σw between the magnetic layers 2 and 3.
σw/2MsL2<H2<H1
ここでσw/2MsL2は第2磁性層に働く交換力
の強さを示す。つまり、σw/2MsL2の大きさの
磁界で第2磁性層3の磁化の向きを、第1磁性層
2の磁化の向きに対して安定な方向へ(この場合
は同じ方向)向けようとする。そこで第2磁性層
3がこの磁界に抗して磁化が反転しないためには
第2磁性層3の保磁力をH2としてH2>σw/
2MsL2であればよい。 σw/2MsL 2 <H 2 <H 1 Here, σw/2MsL 2 represents the strength of the exchange force acting on the second magnetic layer. In other words, a magnetic field with a magnitude of σw/2MsL 2 attempts to direct the magnetization direction of the second magnetic layer 3 in a stable direction (in this case, the same direction) as the magnetization direction of the first magnetic layer 2. . Therefore, in order for the second magnetic layer 3 to resist this magnetic field and not reverse its magnetization, assuming the coercive force of the second magnetic layer 3 to be H 2 , H 2 >σw/
2MsL 2 is sufficient.
記録ビツトの状態eとfは、記録時のレーザー
のパワーで制御され、記録前の状態には依存しな
いので、重ね書き(オーバーライト)が可能であ
る。記録ビツトeとfは、再生用のレーザービー
ムを照射し、再生光を記録信号再生器33で処理
することにより、再生できる。 The states e and f of the recorded bits are controlled by the laser power during recording and do not depend on the state before recording, so overwriting is possible. Recorded bits e and f can be reproduced by irradiating a reproduction laser beam and processing the reproduction light by a recording signal regenerator 33.
次に記録ビツトeとfの再生について、さらに
述べる。 Next, the reproduction of recorded bits e and f will be further described.
従来知られている交換結合2層膜の記録ビツト
は、2種のビツトの磁化の向きは、それぞれの記
録状態により両磁性層共に反転する。本発明にお
いては、第1磁性層2(主として再生に関与す
る)の磁化の向きは、それぞれの記録に応じて反
転するが、第2磁性層3(主として記録に関す
る)の磁化の向きは常に磁界発生部34の磁化方
向であり、変わらない。(光磁気効果に寄与しな
い)磁性層の厚さが大きくなるほど、光磁気記録
媒体の感度が低下するので、磁性膜の厚さL1+
L2をなるべく小さくして、再生時の光磁気効果
を大きくするようなL1とL2との膜厚を組み合わ
せ、最適化することが必要である。実施例にデー
ターを示して説明するが、良好な感度を示し、光
磁気効果も大きい膜厚の組み合わせは、
600ÅL1+L21000Å
200ÅL1
であつた。 In the recording bits of the conventionally known exchange-coupled two-layer film, the directions of magnetization of the two types of bits are reversed in both magnetic layers depending on the respective recording state. In the present invention, the direction of magnetization of the first magnetic layer 2 (mainly involved in reproduction) is reversed depending on each recording, but the direction of magnetization of the second magnetic layer 3 (mainly involved in recording) is always changed by the magnetic field. This is the magnetization direction of the generating section 34 and does not change. As the thickness of the magnetic layer (which does not contribute to the magneto-optical effect) increases, the sensitivity of the magneto-optical recording medium decreases, so the thickness of the magnetic film L 1 +
It is necessary to combine and optimize the film thicknesses of L 1 and L 2 so as to minimize L 2 and increase the magneto-optical effect during reproduction. As will be explained with reference to data in Examples, the combination of film thicknesses that showed good sensitivity and a large magneto-optical effect was 600 Å L 1 + L 2 1000 Å 200 Å L 1 .
第2図の説明では第1磁性層2と第2磁性層3
の磁化の向きが同じときに安定な例を示したが、
磁化の向きが反平行のときに安定な磁性層につい
ても同様に考えられる。第5図に、この場合の記
録過程の磁化状態を第2図に対応させて示してお
く。 In the explanation of FIG. 2, the first magnetic layer 2 and the second magnetic layer 3 are
We showed an example of stability when the direction of magnetization is the same, but
The same can be said of a magnetic layer that is stable when the direction of magnetization is antiparallel. FIG. 5 shows the magnetization state during the recording process in this case, corresponding to FIG. 2.
実施例 1
3元のターゲツト源を備えたスパツタ装置内
に、プリグルーブ、プリフオーマツト信号の刻ま
れたポリカーボネート製のデイスク状基板を、タ
ーゲツトとの間の距離10cmの間隔にセツトし、回
転させた。
Example 1 A polycarbonate disk-shaped substrate with pregroove and preformat signals engraved thereon was set in a sputtering apparatus equipped with a three-dimensional target source at a distance of 10 cm from the target, and rotated.
アルゴン中で、第1のターゲツトより、スパツ
タ速度100Å/min、スパツタ圧5×10-3Torrで
ZnSを保護層として800Åの厚さに設けた。次に
アルゴン中で、第2のターゲツトよりスパツタ速
度100Å/min、スパツタ圧5×10-3TorrでTbFe
合金をスパツタし、膜厚300Å、T1=約140℃、
H1=約8KOeのTb19.5Fe80.5の第1磁性層を形成
した。 In argon, from the first target at a sputtering speed of 100 Å/min and a sputtering pressure of 5×10 -3 Torr.
ZnS was provided as a protective layer with a thickness of 800 Å. Next, in argon, TbFe was sputtered from a second target at a sputtering speed of 100 Å/min and a sputtering pressure of 5×10 -3 Torr.
Sputter the alloy to a film thickness of 300 Å, T 1 = approximately 140°C,
A first magnetic layer of Tb 19.5 Fe 80.5 with H 1 =about 8 KOe was formed.
次にアルゴン中でスパツタ圧5×10-3Torrで
TbFeCo合金をスパツタし、膜厚400Å、T2=約
190℃、H2=約0.8KOeのTb24.5Fe68Co7.5の第2磁
性層を形成した。 Next, under argon with a sputtering pressure of 5×10 -3 Torr.
Sputter TbFeCo alloy, film thickness 400 Å, T 2 = approx.
A second magnetic layer of Tb 24.5 Fe 68 Co 7.5 was formed at 190° C. and H 2 =about 0.8 KOe.
次にアルゴン中で第1のターゲツトよりスパツ
タ速度100Å/min、スパツタ圧5×10-3Torrで、
ZnSを保護層として3000Åの厚さに設けた。 Next, in argon, the first target was sputtered at a sputtering speed of 100 Å/min and a sputtering pressure of 5×10 -3 Torr.
ZnS was provided as a protective layer with a thickness of 3000 Å.
次に膜形成を終えた上記の基板を、ホツトメル
ト接着剤を用いて、ポリカーボネートの貼り合わ
せ用基板と貼り合わせ光磁気デイスクを作成し
た。(600Å<L1+L2=700Å<1000Å
200Å<L1=300Å)
この光磁気デイスクを記録再生装置にセツト
し、2.5KOeの磁界発生部を、線速度約8m/sec
で通過させつつ、約1μmに集光した830nmの波
長のレーザービームを50%のデユーテイで2MHz
で変調させながら、4mWと8mWの2値のレー
ザーパワーで記録を行なつた。バイアス磁界は
100Oeであつた。 Next, the above substrate on which the film had been formed was bonded to a polycarbonate bonding substrate using a hot melt adhesive to create a magneto-optical disk. (600 Å<L 1 +L 2 = 700 Å<1000 Å 200 Å<L 1 =300 Å) This magneto-optical disk was set in a recording/reproducing device, and the magnetic field generator of 2.5 KOe was applied at a linear velocity of approximately 8 m/sec.
A laser beam with a wavelength of 830 nm focused to approximately 1 μm is transmitted at 2 MHz with a duty of 50%.
Recording was carried out using binary laser powers of 4 mW and 8 mW while modulating the power. The bias magnetic field is
It was 100Oe.
その後1.5mWのレーザービームを照射して再
生を行なつたところ、2値の信号の再生ができ
た。 After that, a 1.5 mW laser beam was irradiated to perform reproduction, and a binary signal could be reproduced.
次に、上記と同様の実験を、全面記録された後
の光磁気デイスクについて行なつた。この結果前
に記録された信号成分は検出されず、オーバーラ
イトが可能であることが確認された。 Next, an experiment similar to that described above was conducted on a magneto-optical disk that had been completely recorded. As a result, previously recorded signal components were not detected, confirming that overwriting is possible.
実施例 2
第1磁性層の厚さと第2磁性層の厚さだけを変
化させた以外は実施例1と同じ方法、同じ材料を
用いて、光磁気デイスクのサンプルを作製した。Example 2 A magneto-optical disk sample was produced using the same method and the same materials as in Example 1, except that only the thickness of the first magnetic layer and the thickness of the second magnetic layer were changed.
各サンプルの再生信号を評価する目安としてサ
ンプルの830nmの波長における反射率とカー回
転角を測定した。さらに、受光素子がフオトダイ
オードの場合の再生性能指数とされている反射率
の平方値とカー回転角の積を計算した。これらの
結果を表1に示す。
As a guideline for evaluating the reproduced signal of each sample, the reflectance and Kerr rotation angle of the sample at a wavelength of 830 nm were measured. Furthermore, when the light receiving element is a photodiode, the product of the square value of the reflectance and the Kerr rotation angle, which is considered to be the reproduction performance index, was calculated. These results are shown in Table 1.
本発明により形成された記録ビツトでは第2磁
性層の磁化は記録状態と向きが変わらず、光磁気
効果には寄与しない。第1磁性層2の膜厚が小さ
い場合、第2磁性層3が無い、あるいは膜厚が小
さい場合には反射光強度が小さくなり性能指数も
小さい。 In the recording bit formed according to the present invention, the magnetization of the second magnetic layer does not change in direction from the recording state and does not contribute to the magneto-optical effect. When the thickness of the first magnetic layer 2 is small, when the second magnetic layer 3 is absent, or when the thickness is small, the reflected light intensity is small and the figure of merit is also small.
第1磁性層2と第2磁性層3の膜厚の和L1+
L2が400Åより大きくなると、反射光強度はほぼ
一定になる。 Sum of the film thicknesses of the first magnetic layer 2 and the second magnetic layer 3 L 1 +
When L 2 becomes larger than 400 Å, the reflected light intensity becomes almost constant.
第1磁性層2と第2磁性層3の膜厚の和L1+
L2が600Å以上では性能指数、カー回転角は飽和
してほぼ一定の値になるが、第1磁性層2の膜厚
L1が200Åより小さい値では第2磁性層3の膜厚
L2が大きくなつてもカー回転角は、第1磁性層
2の膜厚L1が200Å以上のときの値より小さな値
で飽和することがわかつた。この結果より600Å
<L1+L2、200Å<L1が好ましいことが明らかと
なつた。 Sum of the film thicknesses of the first magnetic layer 2 and the second magnetic layer 3 L 1 +
When L 2 is 600 Å or more, the figure of merit and Kerr rotation angle are saturated and become almost constant values, but the film thickness of the first magnetic layer 2
When L 1 is less than 200 Å, the thickness of the second magnetic layer 3
It was found that even when L 2 becomes large, the Kerr rotation angle is saturated at a value smaller than the value when the film thickness L 1 of the first magnetic layer 2 is 200 Å or more. From this result, 600Å
It has become clear that <L 1 +L 2 and 200 Å<L 1 are preferable.
また、これらのサンプルを実施例1と同様な方
法で記録再生の実験を行なつた。L1+L2が600Å
以上のサンプルについては実施例1と同様の良好
な再生信号を得た。 Furthermore, recording and reproduction experiments were conducted using these samples in the same manner as in Example 1. L 1 + L 2 is 600Å
For the above samples, good reproduced signals similar to those of Example 1 were obtained.
また、L1+L2が1000Åの場合は第1種、第2
種それぞれの記録に必要なレーザーパワーがL1
+L2600Åの場合の約2.5倍となり、L1+L2が1000
Åを越える場合は記録に必要なレーザーパワーが
急増した。即ち、L1+L2<1000Åが好ましいこ
とが明らかとなつた。 In addition, if L 1 + L 2 is 1000 Å, the first type and the second type
Laser power required to record each species is L 1
+L 2 is approximately 2.5 times that of 600Å, and L 1 +L 2 is 1000
When exceeding Å, the laser power required for recording increased rapidly. That is, it has become clear that L 1 +L 2 <1000 Å is preferable.
以上のように、第2磁性層3の磁化が、第1、
第2種両方の記録信号の再生中に、向きが変わら
ない場合(つまり光磁気効果に寄与しない)で
も、第2磁性層3が設けられていることで、見か
け上、第1磁性層2がL1+L2の膜厚であるのと
同等のカー回転角、再生性能指数を得ることがわ
かつた。 As described above, the magnetization of the second magnetic layer 3 is
Even if the direction does not change during reproduction of both type 2 recorded signals (that is, does not contribute to the magneto-optical effect), the provision of the second magnetic layer 3 makes it appear that the first magnetic layer 2 is It was found that the same Kerr rotation angle and regeneration performance index could be obtained with a film thickness of L 1 + L 2 .
次に比較のために、それぞれのサンプルに第1
磁性層2の保磁力より大きな磁界を印加し、今度
は第2磁性層3の磁化を第1磁性層2の磁化と同
様に第1種と第2種の記録状態で方向を変えるよ
うに(従来の交換結合二層膜の場合と同じ)し
て、反射率、カー回転角を測定し、同様にして、
再生性能指数も計算した。この結果を表2に示
す。 Next, for comparison, the first
A magnetic field larger than the coercive force of the magnetic layer 2 is applied, and the direction of the magnetization of the second magnetic layer 3 is changed between the first type and the second type of recording state similarly to the magnetization of the first magnetic layer 2 ( Measure the reflectance and Kerr rotation angle (same as in the case of a conventional exchange-coupled bilayer film), and measure the reflectance and Kerr rotation angle similarly.
A regeneration performance index was also calculated. The results are shown in Table 2.
この場合は第2磁性層3の光磁気効果が現れる
こと(記録状態により磁化の反転があるため)、
第2磁性層3の方がキユリー温度が高く同じ膜厚
の条件では、第1磁性層2より第2磁性層3の方
がカー回転角が大きいことなどのため、第1磁性
層の膜厚が200Åより小さくても、第2磁性層3
の膜厚が300〜400Å程度あれば、大きな回転角、
再生性能指数を示す。しかし、第1磁性層2の膜
厚が200〜250Åより大きい場合は第2磁性層3の
光磁気効果の寄与はほとんど見られない。 In this case, the magneto-optical effect of the second magnetic layer 3 appears (because there is reversal of magnetization depending on the recording state),
The second magnetic layer 3 has a higher Curie temperature, and under the same film thickness conditions, the Kerr rotation angle of the second magnetic layer 3 is larger than that of the first magnetic layer 2. Even if the second magnetic layer 3 is smaller than 200 Å,
If the film thickness is about 300 to 400 Å, a large rotation angle,
Indicates the playback performance index. However, when the thickness of the first magnetic layer 2 is greater than 200 to 250 Å, the contribution of the magneto-optical effect of the second magnetic layer 3 is hardly seen.
これは表1の第2磁性層3が設けられているこ
とで、見かけ上第1磁性層2がL1+L2の膜厚で
あるのと同等のカー回転角、性能指数を示してい
るという結果と一致する。 This is because the second magnetic layer 3 shown in Table 1 is provided, which apparently shows the same Kerr rotation angle and figure of merit as if the first magnetic layer 2 had a film thickness of L 1 + L 2 . match the result.
また、実施例1と同じ構成のサンプルにおい
て、保護膜の材料もZnSの代わりにSi3、N4SiC、
SiO、Al2O3等を用いた場合も、回転角、性能指
数が飽和するときの第1、第2磁性層の膜厚の関
係は同じであつた。Si3N4、ZnSよりも屈折率の
大きいSiCの場合は性能指数が約10%程度大きく
なつたが、同じ膜厚L1+L2で記録感度は低下し
た。また、Si3N4やZnSよりも屈折率の小さい、
SiO、Al2O3では性能指数が約10%程度低下した。 In addition, in the sample with the same configuration as in Example 1, the material of the protective film was also Si 3 , N 4 SiC,
Even when SiO, Al 2 O 3 , etc. were used, the relationship between the rotation angle and the thickness of the first and second magnetic layers when the figure of merit was saturated was the same. In the case of SiC, which has a higher refractive index than Si 3 N 4 and ZnS, the figure of merit increased by about 10%, but the recording sensitivity decreased at the same film thickness L 1 +L 2 . In addition, it has a lower refractive index than Si 3 N 4 and ZnS.
For SiO and Al 2 O 3 , the figure of merit decreased by about 10%.
さらに、第1磁性層2の材料をTbFeから
GdTbFe、TbFeCo、GdTbFeCo、DyTbFeCo等
に代えた場合も同様に第1、第2磁性層の厚さ
の、回転角、性能指数の飽和するときの値の関係
は変わらなかつた。
Furthermore, the material of the first magnetic layer 2 is changed from TbFe to
Similarly, when GdTbFe, TbFeCo, GdTbFeCo, DyTbFeCo, etc. were used instead, the relationship among the thicknesses of the first and second magnetic layers, the rotation angle, and the value at which the figure of merit reached saturation did not change.
以上詳細に説明したように、光磁気記録媒体と
して、低いキユリー点T1と高い保磁力H1を有す
る第1の磁性層と、相対的に高いキユリー点T2
と低い保磁力H2を有する第2の磁性層とを備え、
その第1磁性層の膜厚が200Å以上、第1磁性層
と第2磁性層の膜厚の和が600Åと1000Åとの間
に設定されたものを用い、記録時に、記録ヘツド
と別位置に磁界発生部を設け、2値レーザーパワ
ーで記録することによつて、良好な記録感度、再
生信号を示す重ね書き(オーバーライト)が可能
になつた。
As explained in detail above, as a magneto-optical recording medium, the first magnetic layer has a low Curie point T1 and a high coercive force H1 , and a relatively high Curie point T2.
and a second magnetic layer having a low coercive force H2 ,
The first magnetic layer has a thickness of 200 Å or more, and the sum of the thicknesses of the first and second magnetic layers is between 600 Å and 1000 Å. By providing a magnetic field generating section and recording with binary laser power, it has become possible to perform overwriting with good recording sensitivity and reproduced signals.
第1図a,bは各々本発明で使用する光磁気媒
体の一例構成を示す図、第2図は、本発明の記録
法を実施中の、磁性層2,3の磁化の向きを示す
図、第3図は、記録・再生装置の概念図、第4図
は両磁性層2と3の保磁力と温度との関係を示す
概略図である。第5図は本発明の他の実施例にお
ける磁性層の磁化状態を示す図である。
1:プリグルーブ付の透光性基板、2,3:磁
性層、4,5:保護層、6:接着層、7:貼り合
わせ用基板、31:記録・再生用ヘツド、32:
記録信号発生器、33:記録信号再生器、34:
磁界発生部、35:光磁気デイスク。
FIGS. 1a and 1b are diagrams each showing an example configuration of a magneto-optical medium used in the present invention, and FIG. 2 is a diagram showing the magnetization directions of magnetic layers 2 and 3 during implementation of the recording method of the present invention. , FIG. 3 is a conceptual diagram of the recording/reproducing apparatus, and FIG. 4 is a schematic diagram showing the relationship between coercive force and temperature of both magnetic layers 2 and 3. FIG. 5 is a diagram showing the magnetization state of the magnetic layer in another embodiment of the present invention. 1: Transparent substrate with pregroove, 2, 3: Magnetic layer, 4, 5: Protective layer, 6: Adhesive layer, 7: Bonding substrate, 31: Recording/reproducing head, 32:
Recording signal generator, 33: Recording signal regenerator, 34:
Magnetic field generation section, 35: magneto-optical disk.
Claims (1)
性層およびキユリー点T2と保磁力H2とを有する
第2磁性層から構成される二層構造の交換結合し
ている垂直磁化膜を、基板上に有して成る光磁気
記録媒体において、次の条件を満たしていること
を特徴とする光磁気記録媒体。 H1>H2>σw/2MsL2 T1<T2、600Å<L1+L2<1000Å 200Å<L1 (Msは第2磁性層の飽和磁化、L2はその膜厚、
L1は第1磁性層の膜厚、σwは二つの磁性層間の
磁壁エネルギー)。 2 キユリー点(T1)と保磁力(H1)とを有す
る第1磁性層およびキユリー点(T2)と保磁力
(H2)とを有する第2磁性層から構成される二層
構造の交換結合している垂直磁化膜を、基板上に
有して成る光磁気記録媒体において、次の条件 H1>H2>σw/2MsL2 T1<T2、600Å<L1+L2<1000Å 200Å<L1 (Msは第2磁性層の飽和磁化、そのL2は膜厚、
L1は第1磁性層の膜厚、σwは二つの磁性層間の
磁壁エネルギー) を満たしている光磁気記録媒体を使用して、次の
二値の記録を行なうことを特徴とする記録方法。 (a) 該媒体に対して、記録用ヘツドと異なる場所
で、保磁力H2の第2磁性層を一方向に磁化さ
せるのに充分で保磁力H1の第1磁性層の磁化
の向きを反転させることのない大きさの磁界B
を加え、 (b) 次に、記録ヘツドにより、バイアス磁界を印
加すると同時に低いキユリー点T1付近まで該
媒体が昇温するだけのレーザーパワーを照射す
ることにより、第2磁性層の磁化の向きを変え
ないまま第1磁性層の磁化の向きを第2磁性層
に対して安定な向きにそろえる第1種の予備記
録か、バイアス磁界を印加すると同時に高いキ
ユリー点T2付近まで該媒体が昇温するだけの
レーザーパワーを照射することにより、第2磁
性層の磁化の向きを反転させて同時に第1の磁
性層も第2磁性層に対して安定な向きに磁化す
る第2種の予備記録かを、信号に応じて実施
し、 (c) 次に、該媒体を運動させて、予備記録された
ビツトを前記磁界Bを通過させることにより、
第1種の予備記録により形成されたビツトにつ
いては第1磁性層、第2磁性層とも磁化の向き
をそのまま変化させず、 第2種の予備記録により形成されたビツトに
ついては、第2磁性層の磁化の向きを前記磁界
Bと同方向に反転させ、第1磁性層については
磁化の向きをそのまま変化させないとする、二
値の記録。[Claims] 1. Exchange coupling in a two-layer structure consisting of a first magnetic layer having a Kyrie point T 1 and a coercive force H 1 and a second magnetic layer having a Kyrie point T 2 and a coercive force H 2 1. A magneto-optical recording medium comprising a perpendicularly magnetized film on a substrate, which satisfies the following conditions. H 1 >H 2 >σw/2MsL 2 T 1 <T 2 , 600Å<L 1 +L 2 <1000Å 200Å<L 1 (Ms is the saturation magnetization of the second magnetic layer, L 2 is its thickness,
( L1 is the thickness of the first magnetic layer, and σw is the domain wall energy between the two magnetic layers). 2 A two-layer structure consisting of a first magnetic layer having a Kyrie point (T 1 ) and a coercive force (H 1 ) and a second magnetic layer having a Kyrie point (T 2 ) and a coercive force (H 2 ). In a magneto-optical recording medium having an exchange-coupled perpendicularly magnetized film on a substrate, the following conditions H 1 > H 2 > σw/2MsL 2 T 1 < T 2 , 600 Å < L 1 + L 2 < 1000 Å 200Å<L 1 (Ms is the saturation magnetization of the second magnetic layer, L 2 is the film thickness,
L1 is the film thickness of the first magnetic layer, and σw is the domain wall energy between the two magnetic layers. (a) With respect to the medium, at a location different from the recording head, change the direction of magnetization of the first magnetic layer with coercive force H 1 enough to magnetize the second magnetic layer with coercive force H 2 in one direction. Magnetic field B of a magnitude that does not cause reversal
(b) Next, the recording head applies a bias magnetic field and at the same time irradiates laser power sufficient to raise the temperature of the medium to near the low Curie point T1 , thereby changing the direction of magnetization of the second magnetic layer. Either the first type of preliminary recording, in which the direction of magnetization of the first magnetic layer is aligned in a stable direction with respect to the second magnetic layer without changing the magnetic field, or the medium is raised to near the high Curie point T 2 while applying a bias magnetic field. A second type of preliminary recording in which the direction of magnetization of the second magnetic layer is reversed by irradiation with laser power sufficient to heat the layer, and at the same time the first magnetic layer is also magnetized in a stable direction relative to the second magnetic layer. (c) then moving the medium to cause the prerecorded bits to pass through the magnetic field B;
For the bits formed by the first type of preliminary recording, the direction of magnetization of both the first magnetic layer and the second magnetic layer remains unchanged, and for the bits formed by the second type of preliminary recording, the direction of magnetization is unchanged in the second magnetic layer. Binary recording in which the direction of magnetization of the first magnetic layer is reversed in the same direction as the magnetic field B, and the direction of magnetization of the first magnetic layer is left unchanged.
Priority Applications (15)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62070274A JPS63237237A (en) | 1987-03-26 | 1987-03-26 | Magneto-optical recording medium and recording method |
| CA 541367 CA1340058C (en) | 1986-07-08 | 1987-07-06 | Magnetooptical recording medium allowing overwriting with tow or more magnetic layers and recording method utilizing the same |
| AU75306/87A AU593364C (en) | 1986-07-08 | 1987-07-07 | Magnetooptical recording medium allowing overwriting with two or more magnetic layers and recording method utilizing the same |
| KR1019870007322A KR960003420B1 (en) | 1986-07-08 | 1987-07-08 | Magneto-optical recording medium having two or more layers of magnetic film capable of double recording and recording method using the medium |
| EP98200007A EP0838815B1 (en) | 1986-07-08 | 1987-07-08 | Apparatus and system for recording on a magnetooptical recording medium |
| DE3752222T DE3752222T2 (en) | 1986-07-08 | 1987-07-08 | Magnetic optical recording medium with the possibility of overwriting with two or more magnetic layers and recording method using this medium |
| EP98200006A EP0838814B1 (en) | 1986-07-08 | 1987-07-08 | Magnetooptical recording medium allowing overwriting with two or more magnetic layers and recording method utilizing the same |
| EP87306038A EP0258978B1 (en) | 1986-07-08 | 1987-07-08 | Magnetooptical recording medium allowing overwriting with two or more magnetic layers and recording method utilizing the same |
| AT98200007T ATE216528T1 (en) | 1986-07-08 | 1987-07-08 | APPARATUS AND SYSTEM FOR RECORDING ON A MAGNETOPTICAL RECORDING MEDIUM |
| AT87306038T ATE172047T1 (en) | 1986-07-08 | 1987-07-08 | MAGNETOPTICAL RECORDING MEDIUM WITH THE POSSIBILITY OF OVERWRITING WITH TWO OR MORE MAGNETIC LAYERS AND RECORDING METHOD USING SUCH MEDIUM |
| US07/475,941 US5132945A (en) | 1986-07-08 | 1990-01-30 | Magnetooptical recording medium allowing overwriting with two or more magnetic layers and recording method utilizing the same |
| US08/296,163 US5525378A (en) | 1986-07-08 | 1994-08-26 | Method for producing a magnetooptical recording medium |
| US08/312,930 US5481410A (en) | 1986-07-08 | 1994-09-30 | Magnetooptical recording medium allowing overwriting with two or more magnetic layers and recording method utilizing the same |
| US08/613,431 US5783300A (en) | 1986-06-18 | 1996-02-29 | Magnetooptical recording medium allowing overwriting with two or more magnetic layers and recording method utilizing the same |
| US09/080,215 US6028824A (en) | 1986-07-08 | 1998-05-18 | Magnetooptical recording medium allowing overwriting with two or more magnetic layers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62070274A JPS63237237A (en) | 1987-03-26 | 1987-03-26 | Magneto-optical recording medium and recording method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63237237A JPS63237237A (en) | 1988-10-03 |
| JPH0535498B2 true JPH0535498B2 (en) | 1993-05-26 |
Family
ID=13426773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62070274A Granted JPS63237237A (en) | 1986-06-18 | 1987-03-26 | Magneto-optical recording medium and recording method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63237237A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101586176B1 (en) * | 2015-08-11 | 2016-01-15 | 이경일 | Nozzle for air dust gun |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2613885B2 (en) * | 1987-05-08 | 1997-05-28 | 株式会社日立製作所 | Magneto-optical multilayer media |
| JPH03296937A (en) * | 1990-04-17 | 1991-12-27 | Mitsubishi Electric Corp | Magneto-optical recording medium |
| WO1993013523A1 (en) * | 1991-12-27 | 1993-07-08 | Fujitsu Limited | Magneto-optical overwrite recording process by which c/n ratio is improved, and magneto-optical overwrite recording apparatus which operates in this process |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2521908B2 (en) * | 1985-06-11 | 1996-08-07 | 株式会社ニコン | Overwritable magneto-optical recording method, magneto-optical recording device and magneto-optical recording medium used therefor, modulation method, modulator and magneto-optical recording medium |
-
1987
- 1987-03-26 JP JP62070274A patent/JPS63237237A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101586176B1 (en) * | 2015-08-11 | 2016-01-15 | 이경일 | Nozzle for air dust gun |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63237237A (en) | 1988-10-03 |
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