JPH0536209B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to highly hard and brittle materials such as semiconductor materials,
The present invention relates to a supply device that supplies a material to be cut (hereinafter referred to as an ingot member) such as a magnetic material or ceramics to a cutting device that cuts (including cutting off and notching) a material to be cut (hereinafter referred to as an ingot member).

[Prior art and its problems]

The cutting device for cutting the above-mentioned ingot members into wafer shapes is usually equipped with a feeding mechanism that sequentially feeds the ingot members (for example, the method of
No. 18789). However, for example, ingot members such as silicone can now be manufactured in large diameter and long lengths, and ingots weighing close to 100 kg or more are being manufactured.

Therefore, attaching it directly to the cutting device requires a considerable amount of labor and time, and is likely to cause damage, and the wasted time causes problems such as a decrease in the working efficiency of the cutting device.

In view of this, the present invention places an ingot member on a supply mechanism that is detachably attached to a cutting device, and this supply mechanism is provided with a feeding mechanism for the ingot member, thereby making it easy to attach the ingot member to the cutting device. The purpose is to make it possible to adjust the feed and finely adjust the feed.

[Means for solving problems]

That is, the ingot member feeding device of the present invention includes a feeding mechanism for placing the ingot member, and a mounting base provided on the ingot member cutting device, and the feeding mechanism includes a feeding mechanism for moving the ingot member in the axial direction. In addition, the supply mechanism and the mounting base include support means for removably attaching the supply mechanism to the mounting base.

〔Example〕

FIG. 1 is a side view showing the ingot member feeding device of the present invention attached to a cutting device, and FIG. 2 is a front view thereof.

The supply device 1 includes a supply mechanism 2 to which an ingot member W is attached, and a mounting base 3 attached to an ingot member support base 6 of a cutting device 5.

The cutting device 5 is a wire-type cutting machine as an example, and the wire 7 is cut by three rollers 8a, 8b, 8.
Wrap it around the lower roller 8 with a specified pitch.
The wire row between b and 8c is used as a cutting blade 7a, and while the wire 7 is running at high speed, the ingot member W supported by the support stand 6 is gradually raised to form a large number of wafers at the same time.

The ingot member W is made of an electronic material such as silicon, for example, and an auxiliary piece 10 made of ceramics or the like is adhered to the lower side over almost the entire length, and a slide base 11 is fixed to this auxiliary piece 10 with an adhesive or the like. ing. The slide base 11 has a substantially trapezoidal cross section, and a rack 12 is attached to the lower surface thereof over its entire length. (See Figures 5 and 6) The supply mechanism 2 is shown in Figures 3 and 4. However, the figure shows a state in which the supply mechanism 2 is mounted on a carrier 13 for convenience of transportation.

The supply mechanism 2 includes a pedestal 15 that supports the ingot member W, that is, the slide base 11, and a pedestal 16 that supports the pedestal 15. cradle 15
has a slide base 11 on the top surface as shown in FIG.
A fitting groove 17 for inserting the rack 12 and a long groove 18 for housing the rack 12 are formed. The fitting groove 17 has a contact plate 1 that comes into contact with one side of the slide base 11.
9, and on one side of the pedestal 15 is a fixing means 2 for pressing this contact plate 19 and fixing the slide base 11.
Provides 0. This fixing means 20 can have any suitable structure, but this example shows a structure using a plurality of cylinders. However, instead of this cylinder, it may be fixed with screws or the like, but a cylinder or electromagnetic type is convenient for remote control.

A block-shaped mounting board 21 is protruded from the lower part of one side of the pedestal 15, and this mounting board 21 is provided with a driving member 23 that engages with the rack 12.
2 and the driving member 23 form an ingot member feeding mechanism 22. This drive member 23 includes a pinion 24 that meshes with the rack 12, and a pinion shaft 25.
A worm gear 26 is attached to the worm gear 26, and a worm 27 is meshed with the worm gear 26 and driven by a drive motor 28. Drive motor 2
For example, a stepping motor or the like is applied to 8.
To enable minute feeding and continuous feeding of an ingot member W at a fixed pitch. This drive member 23 may be manually fed depending on the case. However, in this case, it is preferable to provide a length measuring device that electrically detects the delivery dimension.

The support base 16 of this example is provided with a means 30 for adjusting the mounting angle of the ingot member W. This support stand 16 is made up of a rotating stand 35 that supports the pedestal 15 so as to be rotatable in the vertical direction, and a base 36 that supports the rotating stand 35 so as to be rotatable in the horizontal direction.

The mounting angle adjustment means 30 includes vertical movement means 3
1 and a horizontal rotation means 32. The vertical movement means 31 includes a shaft support 37 that pivotally supports the mounting board 21 of the pedestal 15, a push-up member 38 such as a jack provided at the rear end of the rotation table 35, and a fixing part 39 that fixes it at a predetermined angle. It becomes more. The pivot support 37 is a rotating table 35
It consists of a support yoke 40 that protrudes from the front end of the support yoke 40 and holds the mounting board 21 therebetween, and a horizontal pin 41 that passes through them. The fixed part 39 includes an adjustment arm 42 that is provided at a suitable position at the rear of the pedestal 15 and projects downward, and a rotating pedestal 35.
It consists of a fixed yoke 43 that protrudes from and fixes the adjustment arm 42. The fixed yoke 43 has a long hole 44 bored in the vertical direction, and a screw rod 45 is fixed to the adjustment arm 42 in the horizontal direction. The rod 45 is passed through the elongated hole 44 and fixed with a tightening nut 46.

The horizontal rotation means 32 includes a rotation table 35 and a base 36.
It consists of a shaft support 50 provided at each tip, and an adjustment part 51 and a fixing part 52 provided at the rear. The pivot support 50 is formed by fitting a support shaft 53 implanted at the tip of the base 36 into a through hole 54 provided at the front end of the rotating base 35 , and the adjusting portion 51
A screw rod 55 is swingably supported on one rear side of the base 36, and a support plate 56 is provided on one side of the base 36, into which the screw rod 55 is inserted.
5 moves back and forth, and the rotating table 35 is horizontally rotated about the pivot support 50.

The fixing part 52 is a screw rod 6 implanted in the base 36.
0,60, and a long hole 61 drilled in the rotating table 35,
61, and is fastened with tightening nuts 62, 62. Although the illustrated example shows an example in which two sets of screw rods 60 and long holes 61 are provided, it is of course possible to provide one set depending on the case.

The lower part of the base 36 and the mounting base 3 include the base 36
That is, a support means 65 for removably attaching the supply mechanism 2 onto the mounting base 3 is formed. This support means 65 is composed of, for example, a dovetail groove 66 formed on the lower surface of the base 36 and a dovetail member 67 formed on the upper surface of the mounting base 3. The dovetail groove 66 is formed in the longitudinal direction of the base 36, and the dovetail member 67 is provided at right angles to the cutting blade 7a. The support base 6 that supports the mounting base 3 includes an elevating base 69 that is raised and lowered by an elevating means 68, and the mounting base 3 is mounted on the elevating base 69.

Further, a dovetail member 70 is formed on the upper part of the conveyance vehicle 13 in the same manner as the mounting base 3, and a dovetail member 70 is formed in the dovetail groove 66 of the base 36.
A guide roller 71 is attached to the lower part of the carriage 13. As a result, transport vehicle 1
3 along a guide rail 72 attached to the cutting device 5, the feeding mechanism 2 placed on the trolley 13 is guided to the support stand 6 side, and the feeding mechanism 2
3 and the respective dovetail members 70, 67 of the mount 3, the feeding mechanism 2 can be moved onto the mount 3.

[Effect]

The ingot member W placed on the supply mechanism 2 is
If necessary, the axial center is adjusted by the mounting angle adjustment means 30 and set to a predetermined angle. The reference in this case is preferably the center line of the dovetail groove 66.

When transferring the feeding mechanism 2 onto the mounting base 3 of the cutting device 5, the operator may use both hands to carry it, but if the weight is large as mentioned above, the feeding mechanism 2 may be moved onto the mounting base 3 of the cutting device 5.
It is preferable to use 3. In this case, the carriage 13 is moved along the guide rail 72 as described above, and the mount 3 is raised and lowered by the lifting means 68 of the support 6, and the dovetail groove 66 of the supply mechanism 2 and the dovetail member 67 of the mount 3 are moved up and down. The supply mechanism 2 is connected to the transport vehicle 1.
3 onto the mounting base 3, and use appropriate means (not shown).
The supply mechanism 2 is fixed by.

Next, the lifting means 68 brings the ingot member W close to the cutting blade 7a having the wire row, the fixing means 20 is slightly loosened, and the feeding mechanism 22 advances the ingot member W back and forth to determine the cutting position, and then the fixing means 20 fixes the ingot. Fix the member W,
Cutting is performed by known means.

After the cutting is completed, the mount 3 is lowered, the fixing means is loosened, the ingot member is advanced by a predetermined amount by the feeding mechanism 22, and cutting is then carried out in the same manner as described above.

In addition, in the above-mentioned cutting, the ingot member W is not completely separated, but is usually cut halfway into the auxiliary piece 10, and the ingot member W that has been cut is still attached to the supply mechanism 2. The wafer is transferred again to the carrier 13, transported to a predetermined position, and separated into individual wafers.

〔Effect of the invention〕

According to the present invention, the ingot member is attached to the supply mechanism, and during cutting, the supply mechanism is positioned with respect to the mounting base of the cutting device by the support means, so that the ingot member can be attached to the cutting device very easily. I can do it. Moreover, since the feeding mechanism includes a feeding mechanism, when cutting a long ingot, it is possible to sequentially feed the ingot and adjust the feeding amount. Furthermore, when using a wire cutting device to form a large number of wafers at the same time, first making cuts and then separating the wafers into individual wafers, the ingot member can be taken out together with the supply mechanism, so there is no risk of damaging the wafers during unloading. It has the effect of not having any effect.

[Brief explanation of the drawing]

Fig. 1 is a side view showing the ingot member feeding device of the present invention attached to a cutting device, Fig. 2 is a front view thereof, and Figs. 3 and 4 show the feeding mechanism mounted on a conveying cart. Figure 3 is its front view;
Figure 4 is a right side view, Figures 5 and 6 are related to the slide base, Figure 5 is a front view, Figure 6 is a right side view, Figures 7 to 9 are related to the pedestal, and Figure 7 is related to the pedestal. is a front view, Fig. 8 is a bottom view, Fig. 9 is a right side view, Fig.
Figures 0 to 12 relate to the rotating table, with Figure 10 being a front view, Figure 11 being a plan view, and Figure 12 being a right side view.
Figures 13 to 15 relate to the base; Figure 13 is a partially cutaway front view, Figure 14 is a plan view, and Figure 15 is a partially cutaway front view.
The figure is a right side view. 1 is a supply device, 2 is a supply mechanism, 3 is a mounting base, 5
22 is a cutting device, 22 is a feeding mechanism, 65 is a supporting means,
W is an ingot member.

Claims (1)

[Claims] 1 Consists of a supply mechanism for placing the ingot member and a mounting base provided on the cutting device for the ingot member, the supply mechanism is provided with a feeding mechanism for moving the ingot member in the axial direction, and the supply mechanism and the mounting base are provided. An apparatus for supplying an ingot member, characterized in that the base has support means for removably attaching the supply mechanism to the mounting base.