JPH0538526Y2 - - Google Patents

Description

[Detailed description of the invention] (a) Industrial application field This invention relates to an electron beam irradiation device, and particularly to an electron beam irradiation device equipped with a window flange maintenance mechanism when replacing the metal foil forming the irradiation window.

(b) Prior Art Conventionally, as shown in FIG. 4, an electron beam irradiation device includes a vacuum chamber 20 that houses an accelerating section that generates and accelerates electrons, and a metal foil that forms an irradiation window for extracting electrons. Window flange 21 for installing
, an irradiation chamber 22, and a beam catcher 23 disposed at a position facing the irradiation window.
The window flange 21 is removably attached to the vacuum chamber 20 by an attachment mechanism such as a jack provided on the side thereof.

In the electron beam irradiation device with the above configuration, when replacing the deteriorated metal foil, the window flange 21 is removed from the vacuum chamber 20 by operating the mounting mechanism, and the window flange 21 is removed manually by the operator or placed inside the irradiation chamber 22. The pedestal portion 24a is placed on the cart 24 for removal or the like that has been carried in, and is taken out of the irradiation chamber 22. Further, the window flange 21 after the metal foil has been replaced is carried into the irradiation chamber 22 manually or on the take-out trolley 24 as described above, and is attached to the vacuum chamber 20 by the attachment mechanism.

(c) Problems to be solved by the invention However, since the window flange 21 is attached to the vacuum chamber 20 by an attachment mechanism, there is a drawback that the irradiation chamber inevitably becomes larger. Furthermore, in consideration of the use of the take-out cart 24, it was necessary to increase the distance between the beam catcher 23 and the irradiation window. This resulted in disadvantages such as an increase in the temperature of the irradiation chamber and an increase in the amount of cooling gas such as inert gas.

This invention was made in view of the above circumstances, and is intended to provide an electron beam irradiation device that is equipped with a mechanism for maintenance of metal foil and that allows the irradiation chamber to be made smaller.

(d) Means for solving the problem This invention consists of a connecting member that connects the window flange and the beam catcher at a predetermined interval, and an electronic system that connects the beam catcher when attaching and detaching the window flange to and from the vacuum chamber. The present invention is characterized by comprising a first moving mechanism that reciprocates in the same direction as the radiation irradiation direction, and a second moving mechanism that moves the window flange removed from the vacuum chamber into and out of the irradiation chamber.

(e) Action When removing the window flange from the vacuum chamber,
When operated, the first moving mechanism moves the beam catcher in the same direction as the electron beam irradiation direction and removes the window flange connected to the beam catcher by the connecting member from the vacuum chamber. The removed window flange is carried out of the irradiation chamber by moving the beam catcher by the second moving mechanism.

Furthermore, when attaching the window flange to the vacuum chamber, the window flange can be attached to the vacuum chamber by carrying the beam catcher into the irradiation chamber using the second moving mechanism and moving it toward the vacuum chamber using the first moving mechanism. .

(F) Example The example of this invention will be described below in detail with drawings.
This invention is not limited to the following examples.

The electron beam irradiation apparatus shown in FIG. 1 is an area beam type electron beam irradiation apparatus that does not operate on accelerated electrons.

In FIG. 1, reference numeral 1 denotes a vacuum chamber, which is a cylinder made of stainless steel, and is equipped with a cathode filament 2 that generates electrons in the center of the chamber, and a cathode shield 3 that is disposed to surround the cathode filament 2. A window flange 4 is removably attached to the opening. The window flange 4 includes an irradiation window frame 4a that is tightly attached to the opening of the vacuum chamber 1, and a metal foil 5a that forms an irradiation window 5 for taking out electrons accelerated within the vacuum chamber 1, which is removably attached to the irradiation window frame 4a. It is composed of a metal foil press frame 4b that is stretched by a metal foil presser frame 4b. The irradiation window frame 4a and the metal foil press frame 4b are integrally connected, for example, with bolts and nuts (not shown), with the metal foil 5a sandwiched therebetween. A connecting member 6 is fixed to the metal foil press frame 4b of the window flange 4 and the beam catcher 7 at a predetermined distance by, for example, welding, thereby connecting them. The length of the connecting member 6 may be appropriately determined depending on the thickness of the object to be irradiated with the electron beam, such as a magnetic tape. The beam catcher 7 is provided at a position facing the irradiation window 5 in the irradiation chamber 8, that is, below the irradiation window 5,
Absorbs unused electrons that have passed through the irradiated object. Reference numeral 9 denotes a first moving mechanism, which includes a female screw member 9a rotatably provided on the front end side surface of the beam catcher 7, and a male screw member 9 screwed into the female screw member 9a.
b, a flat bar 10b erected on the upper surface of the truck 10a constituting the second moving mechanism 10, and a flat bar 7a erected on the lower surface of the beam catcher 7.
The beam catcher 7 and the carriage 10 are rotatably attached at both ends by pins 11, respectively.
a, and a plurality of support members 9c that connect the trolley 10.
A holding member 9d is provided on the front end side surface of the externally threaded member 9b and rotatably holds the lower end of the male threaded member 9b. The second moving mechanism 10 includes a truck 10a and a plurality of (four in this embodiment) provided on the bottom surface of the truck.
and a caster 10c. FIG. 2 is a side view of each moving mechanism 9, 10.

In the above configuration, when removing the window flange 4 from the vacuum chamber 1, for example, if each of the threaded members 9a and 9b is a right-handed thread, the male threaded member 9b is rotated counterclockwise. By this,
The distance between the female screw member 9a and the holding member 9d is shortened, and each support member 9c is tilted forward, so that the distance between the beam catcher 7 and the carriage 10a is shortened.
Therefore, the window flange 4 is lowered by an amount corresponding to the shortening of the distance, and is removed from the vacuum chamber 1. By moving the cart 10a in this state, the window flange 4 is carried out of the irradiation chamber 8 together with the beam catcher 7.

Next, when attaching the window flange 4 to the vacuum chamber 1, the carriage 10a is first moved toward the irradiation chamber 8, and the window flange 4 is carried into the irradiation chamber 8.
Then, when the window flange 4 is carried almost below the window flange 4 mounting position of the vacuum chamber 1, the trolley 1
Stop the movement of 0a. Next, by rotating the male threaded member 9b clockwise, the female threaded member 9a
The distance between the beam catcher 7 and the holding member 9d becomes longer, which causes the beam catcher 7 to rise and move into the vacuum chamber 1.
It is tightly fixed to the

FIG. 3 is a diagram showing the configuration of the main part of another embodiment of this invention.

In other embodiments, the first moving mechanism 12
is fixed to the floor of the irradiation chamber 8. The first moving mechanism 12 includes an upper plate member 12b provided with a sliding member 12a on the upper surface of which the beam catcher 7 can be slid.
A female screw member 12c rotatably provided on the front end side surface of the upper plate member 12b, a male screw member 12d screwed into the female screw member 12c, and a base 12e fixed to the floor of the irradiation chamber 8 with bolts, for example. The upper plate has both ends rotatably attached to each of a flat bar (not shown) erected on the lower surface of the upper plate member 12b and a flat bar 13 erected on the upper surface of the base 12e. Member 12
A plurality of support members 12 connecting b and the base 12e
f, and a holding member 12g that is provided on the front end side surface of the base 12e and rotatably holds the lower end of the male threaded member 12d. Further, the second moving mechanism 15 is composed of a plurality of wheels attached to the lower surface of the beam catcher 7.

In this other embodiment, as in the above embodiment, by rotating the male screw member 12d clockwise or counterclockwise, the beam catcher 7 placed on the upper plate member 12b and the window flange 4 are rotated.
can be raised or lowered. Furthermore, if the wheels of the second moving mechanism 15 have a wheel diameter larger than the minimum height dimension of the first moving mechanism 12, the window flange 4 can be moved together with the beam catcher 7, as in the above embodiment. can.
Further, when using wheels having a smaller diameter than the minimum height dimension, the beam catcher 7 may be made movable by placing the wheels on a rail, for example.

In addition to the above-mentioned embodiments, the first moving mechanism may be constructed by using a plurality of screw jacks or hydraulic jacks that are linked with one handle, or a link such as a pantograph. It may also be a mechanism.

Further, in the above embodiments, an area beam type electron beam irradiation device has been described, but a scanning beam type electron beam irradiation device may be used.

(g) Effects of the invention According to this invention, each moving mechanism is provided using the space such as the window flange at the bottom of the beam catcher and the beam catcher water cooling pipe, so maintenance work for installing and removing the window flange is reduced. An electron beam irradiation device is obtained in which the irradiation chamber can be designed to be smaller than that of conventional devices.

[Brief explanation of the drawing]

Fig. 1 is a partially longitudinal sectional front view showing the structure of an embodiment of this invention, Fig. 2 is a side view showing the structure of the main part of the embodiment, and Fig. 3 is a main part of another embodiment of this invention. FIG. 4 is a front view showing the structure of the conventional example, and FIG. 4 is a partially longitudinal sectional side view showing the structure of the conventional example. 1... Vacuum chamber, 4... Window flange, 5...
...Irradiation window, 5a...Metal foil, 6...Connection member, 7
...Beam catcher, 8...Irradiation chamber, 9,12
...First moving mechanism, 10,15... Second moving mechanism.

Claims (1)

[Scope of utility model registration request] A beam catcher installed at a position facing the irradiation window in the irradiation chamber receives the electrons accelerated in the vacuum chamber through a metal foil that is stretched by a window flange that is removably installed in the vacuum chamber and forms an irradiation window. In an electron beam irradiation device for irradiating an object to be irradiated in an irradiation chamber space between an irradiation window and an irradiation chamber, a connecting member connects a window flange and a beam catcher at a predetermined interval, and a connecting member for attaching and detaching the window flange to and from a vacuum chamber. A first moving mechanism that reciprocates the beam catcher in the same direction as the electron beam irradiation direction and a second moving mechanism that moves the window flange removed from the vacuum chamber into and out of the irradiation chamber. Electron beam irradiation equipment.