JPH0541309A - Manufacturing method of potential nonlinear resistor - Google Patents

Manufacturing method of potential nonlinear resistor

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Publication number
JPH0541309A
JPH0541309A JP3219363A JP21936391A JPH0541309A JP H0541309 A JPH0541309 A JP H0541309A JP 3219363 A JP3219363 A JP 3219363A JP 21936391 A JP21936391 A JP 21936391A JP H0541309 A JPH0541309 A JP H0541309A
Authority
JP
Japan
Prior art keywords
sintered body
polished surface
oxide sintered
resistor
layer electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP3219363A
Other languages
Japanese (ja)
Inventor
Ritsu Sato
立 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP3219363A priority Critical patent/JPH0541309A/en
Publication of JPH0541309A publication Critical patent/JPH0541309A/en
Withdrawn legal-status Critical Current

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  • Thermistors And Varistors (AREA)

Abstract

PURPOSE:To provide the title manufacturing method of potential nonlinear resistor wherein the no-contact region mainly in the interface of a metallic oxide sintered body mainly comprising zinc oxide and layer electrodes is reduced while enhancing the discharge breakdown strength and reliability of said resistor as well as the bond properties of said layer electrodes making the formation of the layer electrodes easy in high productivity. CONSTITUTION:A mixed particles mainly comrising zinc oxide and containing at least a bismuth compound and silicon compound as additive components is molded and then this molded body is baked to make a metallic oxide sintered body 1 further forming layer electrodes 2 on the polished surface 1a of this metallatic oxide sintered body 1. At this time, the polished surface 1a is coated with a noble metal paste such as a silver paste, etc., so as to make the noble metal paste seize up on this polished surface 1a in a pressure-reduced atmosphere.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、主としてギャップレス
避雷器等に用いられる電圧非直線抵抗体の製造方法に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a voltage non-linear resistor mainly used in a gapless lightning arrester or the like.

【0002】[0002]

【従来の技術】酸化亜鉛を主成分として含有し、小量の
SiO2, Sb2O3, Bi2O3, Co2O3, MnO2等の添加物を含有す
る金属酸化物焼結体は、優れた電圧非直線性を示すこと
から、避雷器等に利用されている。
2. Description of the Related Art A small amount of zinc oxide is contained as a main component.
Metal oxide sintered body containing SiO 2, Sb 2 O 3, Bi 2 O 3, Co 2 O 3, additive such as MnO 2, since the show excellent voltage non-linearity, use the lightning arrester, etc. Has been done.

【0003】即ち、上記の金属酸化物焼結体の研磨面に
電極を付け、避雷器として使用すると、落雷等によって
瞬間的に過大な電流が流れても、金属酸化物焼結体が過
大な電圧に対応して低抵抗となり、この金属酸化物焼結
体を通してアースされる。これにより、落雷による事故
を防止する。
That is, when an electrode is attached to the polished surface of the above metal oxide sintered body and used as a lightning arrester, even if an excessively large current flows instantaneously due to a lightning strike or the like, the metal oxide sintered body has an excessive voltage. Correspondingly, the resistance becomes low and it is grounded through this metal oxide sintered body. This prevents accidents due to lightning strikes.

【0004】こうした電圧非直線抵抗体を作製するに
は、金属酸化物焼結体の研磨面に層状電極を付け、電圧
を印加できるようにする必要がある。こうした方法とし
て最も一般的なのは、円盤状の金属酸化物焼結体の相対
向する一対の研磨面に、金属溶射法によってアルミニウ
ムメタリコン等からなる電極を形成することである。そ
して、円盤状の金属酸化物焼結体を積み重ね、層状電極
同士を接触させる。これにより、電圧非直線抵抗体を積
み重ねる際の抵抗体間の接触抵抗を小さくすると共に、
各抵抗体の内部を流れる電流が均一に分布するようにす
る。
In order to produce such a voltage non-linear resistor, it is necessary to attach a layered electrode to the polished surface of the metal oxide sintered body so that a voltage can be applied. The most common method as such is to form electrodes made of aluminum metallikon or the like by a metal spraying method on a pair of opposed polishing surfaces of a disk-shaped metal oxide sintered body. Then, the disc-shaped metal oxide sintered bodies are stacked and the layered electrodes are brought into contact with each other. This reduces the contact resistance between the resistors when stacking the voltage non-linear resistors, and
The current flowing inside each resistor is distributed uniformly.

【0005】[0005]

【発明が解決しようとする課題】しかし、上記したよう
な抵抗体では、粒子の大きい金属溶射電極を用いている
ので、焼結体表面の微小な凹凸に電極が接触していない
部分が生じることがあった。その結果、雷インパルス電
流などの大電流サージにより避雷器が動作したときに、
部分的な放電が生じるとともに焼結体内に均一に電流が
流れないため、電圧非直線抵抗体本来の特性を充分に発
揮できず、低いサージ電流で破壊が生じる欠点があっ
た。
However, in the above-mentioned resistor, since the metal sprayed electrode having large particles is used, a portion where the electrode is not in contact with minute irregularities on the surface of the sintered body is generated. was there. As a result, when the surge arrester operates due to a large current surge such as lightning impulse current,
Since partial discharge occurs and the current does not flow evenly in the sintered body, the original characteristics of the voltage non-linear resistor cannot be fully exerted, and there is a drawback that breakdown occurs at a low surge current.

【0006】また、微粒子金属電極を蒸着法により均一
に焼結体表面に形成する方法も特開昭61−17110
2号公報において開示されているが、焼結体表面の電極
は5〜10μm 以上のある一定以上の厚さがないとサージ
電流で破れ安定的な効果を発揮しない一方、蒸着法のみ
で5〜10μm 以上の厚みを達成することは経済性から困
難である。即ち、例えば蒸着法によって貴金属の膜を形
成するのには、取扱いの不便な大規模な装置が必要であ
るだけでなく、膜の堆積速度も遅く、処理面積が小さ
く、処理速度も遅くなる。
A method for uniformly forming fine particle metal electrodes on the surface of a sintered body by a vapor deposition method is also disclosed in Japanese Patent Laid-Open No. 61-17110.
As disclosed in Japanese Patent Laid-Open No. 2-5, the electrode on the surface of the sintered body is broken by a surge current and does not exhibit a stable effect unless the electrode has a certain thickness of 5 to 10 μm or more. It is economically difficult to achieve a thickness of 10 μm or more. That is, in order to form a noble metal film by, for example, a vapor deposition method, not only a large-scale apparatus that is inconvenient to handle is required, but also the film deposition rate is slow, the processing area is small, and the processing rate is slow.

【0007】また、上記焼結体の研磨面に銀ペーストを
塗布し、これを焼きつけて電極を形成する方法がある。
しかし、銀ペースト中の銀は主としてAg2Oの形で存在し
ており、銀ペーストの焼付け中に次の反応をする。 Ag2O→2Ag +1/2O2 即ち、銀ペーストの焼付け時に酸素が発生することか
ら、焼き付け後の電極中に気孔が発生する。特に重要な
のは、この層状電極と焼結体との界面に生ずる気孔であ
り、この気孔部分では層状電極と焼結体とが接触しない
ことになる。このため、層状電極と焼結体との密着性が
低下するだけでなく、部分的に放電することから放電耐
量が低下する。特に、バリスタ電圧(V1mA ) が300 V
/mm以上である、ギャップレス避雷器用の電圧非直線抵
抗体において、この問題が深刻であり、解決を迫られて
いる。
There is also a method in which a silver paste is applied to the polished surface of the sintered body and baked to form an electrode.
However, silver in the silver paste is mainly present in the form of Ag 2 O, and the following reactions occur during baking of the silver paste. Ag 2 O → 2Ag + 1 / 2O 2, that is, oxygen is generated during baking of the silver paste, and thus pores are generated in the electrode after baking. Particularly important are pores generated at the interface between the layered electrode and the sintered body, and the layered electrode and the sintered body do not come into contact with each other in this pore portion. For this reason, not only the adhesion between the layered electrode and the sintered body is lowered, but also the discharge withstand capability is lowered due to partial discharge. Especially, the varistor voltage (V 1mA ) is 300 V
In a voltage non-linear resistor for a gapless lightning arrestor having a value of / mm or more, this problem is serious, and there is a need to solve it.

【0008】本発明の課題は、酸化亜鉛を主成分とする
金属酸化物焼結体と層状電極との主として界面における
非接触領域を少なくして電圧非直線抵抗体の放電耐量、
信頼性及び層状電極の密着性を向上させると共に、層状
電極の形成が容易で生産性の高い製造方法を提供するこ
とである。
An object of the present invention is to reduce the non-contact area mainly at the interface between the metal oxide sintered body containing zinc oxide as a main component and the layered electrode to reduce the discharge withstand voltage of the voltage non-linear resistor.
It is an object of the present invention to provide a manufacturing method that improves reliability and adhesion of a layered electrode, facilitates formation of the layered electrode, and has high productivity.

【0009】[0009]

【課題を解決するための手段】本発明は酸化亜鉛を主成
分とし、添加成分として少なくともビスマス化合物及び
珪素化合物を含む混合粉末を成形し、この成形体を焼成
して金属酸化物焼結体を作製し、この金属酸化物焼結体
の研磨面に層状電極を形成するのに際し、貴金属ペース
トを前記研磨面に塗布し、この研磨面へと貴金属ペース
トを減圧雰囲気下に焼き付けて前記層状電極を形成する
ことを特徴とする、電圧非直線抵抗体の製造方法に係る
ものである。
According to the present invention, a mixed powder containing zinc oxide as a main component and at least a bismuth compound and a silicon compound as an additive component is molded, and the molded product is fired to obtain a metal oxide sintered product. Produced, when forming a layered electrode on the polished surface of the metal oxide sintered body, a precious metal paste is applied to the polished surface, the precious metal paste is baked onto the polished surface under a reduced pressure atmosphere to form the layered electrode. The present invention relates to a method for manufacturing a voltage non-linear resistor, which is characterized by being formed.

【0010】[0010]

【作用】本発明の製造方法の特徴について、図1の模式
図を参照しながら説明する。まず、上記混合粉末を成形
し、この成形体を焼成して金属酸化物焼結体1を作製す
る。この工程についての好ましい態様は後述する。そし
て、金属酸化物焼結体1の研磨面1aに層状電極2を形成
する。
The features of the manufacturing method of the present invention will be described with reference to the schematic view of FIG. First, the mixed powder is molded, and the molded body is fired to produce the metal oxide sintered body 1. A preferred embodiment of this step will be described later. Then, the layered electrode 2 is formed on the polished surface 1a of the metal oxide sintered body 1.

【0011】この段階で、本発明においては、貴金属ペ
ーストを研磨面1aに塗布し、この研磨面1aへと貴金属ペ
ーストを焼き付けて層状電極2を形成する。そして、貴
金属ペーストを焼き付ける際に、焼成雰囲気を減圧にす
る。これにより、貴金属ペースト中に含まれる酸素が、
減圧雰囲気下における加熱に伴なってペースト層から雰
囲気中へと抜けていく。
At this stage, in the present invention, the noble metal paste is applied to the polishing surface 1a, and the noble metal paste is baked onto the polishing surface 1a to form the layered electrode 2. Then, when baking the precious metal paste, the firing atmosphere is depressurized. As a result, the oxygen contained in the precious metal paste is
With heating in a reduced pressure atmosphere, the paste layer escapes into the atmosphere.

【0012】この結果、図2に模式的に示すように、焼
き付け後の層状電極2中には気泡2aがあまり残留しな
い。これに対し、従来技術に従い、研磨面1aに貴金属ペ
ーストを塗布し、焼き付けたとすると、貴金属酸化物の
分解により生じた酸素ガスがすべて気泡生成の原因とな
る。即ち、図3に模式的に示すように、層状電極12中に
は多数の不定形の気泡12a が形成される。
As a result, as schematically shown in FIG. 2, the bubbles 2a do not remain much in the layered electrode 2 after baking. On the other hand, if the noble metal paste is applied to the polished surface 1a and baked according to the conventional technique, all oxygen gas generated by the decomposition of the noble metal oxide causes bubbles. That is, as shown schematically in FIG. 3, a large number of amorphous bubbles 12a are formed in the layered electrode 12.

【0013】このように、本発明の製造方法によれば、
層状電極2の内部における気泡ないし空洞の生成を抑制
できるので、特に層状電極2と金属酸化物焼結体1の界
面における非接触部分が少なく、両者が密に連続的に接
触する。従って、両者の界面における局部的な放電や電
位集中を防止できるので抵抗体の放電耐量が向上し、信
頼性も高まる。かつ、層状電極2と金属酸化物焼結体1
との密着性も向上するこうした効果は、特にバリスタ電
圧(V1mA ) が 300V/mm以上である、ギャップレス避
雷器用の電圧非直線抵抗体において顕著である。
Thus, according to the manufacturing method of the present invention,
Since it is possible to suppress the formation of bubbles or cavities inside the layered electrode 2, there are few non-contact portions at the interface between the layered electrode 2 and the metal oxide sintered body 1, and the two are in close contact with each other. Therefore, it is possible to prevent local discharge and potential concentration at the interface between the two, so that the discharge withstand capability of the resistor is improved and the reliability is also increased. And the layered electrode 2 and the metal oxide sintered body 1
Such an effect of improving the adhesion with is particularly remarkable in the voltage nonlinear resistor for the gapless arrester, which has the varistor voltage (V 1mA ) of 300 V / mm or more.

【0014】しかも、貴金属ペーストの塗布と焼き付け
とによって層状電極を形成しているので、蒸着法等と異
なり、生産設備の取り扱いが容易であり、生産速度が大
きく、コストも低く抑えることができる。
Moreover, since the layered electrode is formed by applying and baking the noble metal paste, the production facility is easy to handle, the production rate is high, and the cost can be kept low unlike the vapor deposition method and the like.

【0015】貴金属ペーストとしては、銀ペーストが特
に好ましい。貴金属ペーストを焼き付ける際の雰囲気圧
力は、0.01 Torr 以上、500Torr未満とすることが好ま
しく、1.0 Torr以上、100 Torr以下とすると更に好まし
い。これが 0.01 Torr未満であると抵抗体のバリスタ特
性が低下する傾向があり、500 Torrを越えると、減圧に
よる効果が乏しい。
Silver paste is particularly preferable as the noble metal paste. The atmosphere pressure when baking the noble metal paste is preferably 0.01 Torr or more and less than 500 Torr, and more preferably 1.0 Torr or more and 100 Torr or less. If it is less than 0.01 Torr, the varistor characteristic of the resistor tends to deteriorate, and if it exceeds 500 Torr, the effect of decompression is poor.

【0016】また、貴金属ペーストを焼き付けるのは、
500 〜850℃で行うことができるが、通常は500 〜550
℃で行うことが多い。この温度が550 ℃を超えると、抵
抗体の側面にある高抵抗層 (ガラス層) が溶解すること
がある。この焼き付けを行う際、350 ℃未満の低温の段
階で雰囲気を減圧しても、本発明による上記効果が乏し
く、放電耐量はそれほどは改善されない。このため少な
くとも焼き付け温度が350 ℃となった段階で雰囲気を減
圧にすることが好ましい。400 ℃以上の温度で雰囲気を
減圧にすると、本発明の効果が更に大きい。
The baking of the noble metal paste is
Can be performed at 500-850 ° C, but usually 500-550
Often done at ° C. If this temperature exceeds 550 ° C., the high resistance layer (glass layer) on the side surface of the resistor may melt. When this baking is performed, even if the atmosphere is depressurized at a low temperature of less than 350 ° C., the above effect of the present invention is poor, and the discharge withstand capability is not so improved. Therefore, it is preferable to reduce the pressure of the atmosphere at least when the baking temperature reaches 350 ° C. The effect of the present invention is further enhanced by reducing the pressure of the atmosphere at a temperature of 400 ° C. or higher.

【0017】前述したように、本発明の製造方法は、バ
リスタ電圧(V1mA ) が 300V/mm以上である電圧非直
線抵抗体において特に有用である。この意味で、金属酸
化物焼結体中におけるシリカの含有量は4.0 mol %以上
とすることが好ましく、これを下回ると高いバリスタ電
圧を得ることが難しい。この一方、上記のシリカ含有量
が10.0 mol%を越えると、抵抗体の電気特性が劣化す
る。
As described above, the manufacturing method of the present invention is particularly useful for a voltage non-linear resistor having a varistor voltage (V 1mA ) of 300 V / mm or more. In this sense, the content of silica in the metal oxide sintered body is preferably 4.0 mol% or more, and if it is less than this, it is difficult to obtain a high varistor voltage. On the other hand, when the silica content exceeds 10.0 mol%, the electrical characteristics of the resistor deteriorate.

【0018】[0018]

【実施例】酸化亜鉛を主成分とする電圧非直線抵抗体を
得るには、まず所定の粒度に調整した酸化亜鉛原料と所
定の粒度に調整した酸化ビスマス、酸化コバルト、酸化
マンガン、酸化アンチモン、酸化クロム、好ましくは非
晶質の酸化ケイ素、酸化ニッケル、酸化ホウ素、酸化銀
等よりなる添加物の所定量を混合する。なお、この場合
酸化銀、酸化ホウ素の代わりに硝酸銀、ホウ酸を用いて
もよい。好ましくは銀を含むホウケイ酸ビスマスガラス
を用いるとよい。また、添加物を800 〜1000℃で仮焼し
た後粉砕し、所定粒度に調整したものと酸化亜鉛原料を
混合してもよい。この際、これらの原料粉末に対して所
定量のポリビニルアルコール水溶液等を加える。また好
ましくは硝酸アルミニウム溶液を加える。
EXAMPLE To obtain a voltage nonlinear resistor containing zinc oxide as a main component, first, a zinc oxide raw material adjusted to a predetermined particle size and bismuth oxide, cobalt oxide, manganese oxide, antimony oxide adjusted to a predetermined particle size, A predetermined amount of an additive made of chromium oxide, preferably amorphous silicon oxide, nickel oxide, boron oxide, silver oxide or the like is mixed. In this case, silver nitrate or boric acid may be used instead of silver oxide or boron oxide. Bismuth borosilicate glass containing silver is preferably used. Alternatively, the additive may be calcined at 800 to 1000 ° C. and then pulverized to adjust the particle size to a predetermined value, and the zinc oxide raw material may be mixed. At this time, a predetermined amount of polyvinyl alcohol aqueous solution or the like is added to these raw material powders. Also preferably an aluminum nitrate solution is added.

【0019】次に好ましくは200 mmHg以下の真空度で減
圧脱気を行い、混合泥漿の水分量は30〜35wt%程度に、
またその混合泥漿の粘度は100 ±50cpとするのが好まし
い。次に得られた混合泥漿を噴霧乾燥装置に供給して平
均粒径50〜150 μm 、好ましくは80〜120 μm で、水分
量が0.5 〜2.0 wt%、より好ましくは0.9 〜1.5 wt%の
造粒粉を造粒する。次に得られた造粒粉を、成形工程に
おいて、成形圧力800〜1000Kg/cm2 の下で所定の形状
に成形する。
Next, vacuum deaeration is performed preferably at a vacuum degree of 200 mmHg or less, and the water content of the mixed slurry is adjusted to about 30 to 35 wt%.
The viscosity of the mixed sludge is preferably 100 ± 50 cp. Next, the obtained mixed sludge is supplied to a spray dryer to produce a powder having an average particle size of 50 to 150 μm, preferably 80 to 120 μm, and a water content of 0.5 to 2.0 wt%, more preferably 0.9 to 1.5 wt%. Granulate granules. Next, the obtained granulated powder is molded into a predetermined shape under a molding pressure of 800 to 1000 Kg / cm 2 in a molding step.

【0020】次に、その成形体を昇降温速度10〜100 ℃
/hr、温度400 〜700 ℃で有機成分を飛散除去し脱脂体
を得る。次に、脱脂体を昇温速度50〜70℃/hrで800 〜
1000℃、保持時間1〜5時間で焼成し、仮焼体を得る。
次に、仮焼体の側面に高抵抗層を形成する。本例では B
i2O3, Sb2O3, ZnO,SiO2等の所定量に有機結合剤として
エチルセルロース、ブチルカルビトール、酢酸nブチル
等を加えた絶縁被覆用混合物ペーストを、30〜300 μm
の厚さに仮焼体の側面に塗布する。
Then, the molded body is heated and lowered at a temperature of 10 to 100 ° C.
/ Hr at a temperature of 400 to 700 ° C to scatter and remove organic components to obtain a degreased body. Next, the degreased body is heated to 800 ~ at a heating rate of 50 ~ 70 ° C / hr.
Baking is performed at 1000 ° C. for a holding time of 1 to 5 hours to obtain a calcined body.
Next, a high resistance layer is formed on the side surface of the calcined body. In this example B
A mixture paste for insulation coating containing 30 to 300 μm of a mixture of insulating materials such as ethyl cellulose, butyl carbitol, and n-butyl acetate as an organic binder in a predetermined amount of i 2 O 3 , Sb 2 O 3 , ZnO, SiO 2, etc.
To the side of the calcined body.

【0021】次に、これを、昇降温速度20〜100 ℃/h
r、最高保持温度1000〜1300℃、好ましは1050〜1250
℃、3〜7時間という条件で本焼成する。その後、ガラ
ス粉末に有機結合剤としてエチルセルロース、ブチルカ
ルビトール、酢酸nブチル等を加えたガラスペーストを
前記側面の高抵抗層上に50〜300μm の厚さに塗布し、
空気中で昇降温速度50〜200 ℃/hr、400 〜800 ℃、保
持時間0.5 〜4時間という条件で熱処理することにより
ガラス層を形成すると好ましい。
Next, this is heated and cooled at a rate of 20 to 100 ° C / h.
r, maximum holding temperature 1000 ~ 1300 ℃, preferably 1050 ~ 1250
The main calcination is performed under the condition of 3 ° C. for 3 to 7 hours. Then, a glass paste prepared by adding ethyl cellulose, butyl carbitol, n-butyl acetate as an organic binder to glass powder is applied on the high resistance layer on the side surface to a thickness of 50 to 300 μm,
It is preferable to form the glass layer by heat treatment in the air at a temperature rising / falling rate of 50 to 200 ° C / hr, 400 to 800 ° C, and a holding time of 0.5 to 4 hours.

【0022】その後、得られた電圧非直線抵抗体の両端
面をダイヤモンド砥石等で研磨する。そして、この研磨
面を洗浄した後、本発明に従い、研摩面に貴金属ペース
トを塗布し、減圧雰囲気下で焼き付ける。
Thereafter, both end faces of the obtained voltage non-linear resistor are polished with a diamond grindstone or the like. Then, after cleaning the polished surface, according to the present invention, a noble metal paste is applied to the polished surface and baked under a reduced pressure atmosphere.

【0023】以下、実際に本発明範囲内および範囲外の
電圧非直線抵抗体について各種特性を測定した結果につ
いて説明する。 (実施例1)貴金属ペーストとして銀ペーストを使用
し、銀ペーストを焼き付ける際の雰囲気圧力を変更して
その効果を確認した。まず、上述の方法に従って、直径
40mm、厚さ20mmの円盤状の金属酸化物焼結体を作製し
た。この組成は、 Bi2O3:1.0 モル%、Sb2O3 :1.0 モ
ル%、Cr2O3 :0.5 モル%、 MnO2 :0.5 モル%、Co3O
4 :0.6 モル%、SiO2:1.0 モル%、NiO :1.0 モル
%、Al3+:50ppm 、残部が ZnOである。そして、上記の
組成を100 重量部としたとき、0.02重量部のAg2Oと、0.
02重量部のB2O3とを更に添加してある。
The results of actually measuring various characteristics of voltage nonlinear resistors within and outside the range of the present invention will be described below. Example 1 A silver paste was used as the noble metal paste, and the effect was confirmed by changing the atmospheric pressure when baking the silver paste. First, according to the method described above, the diameter
A disc-shaped metal oxide sintered body having a thickness of 40 mm and a thickness of 20 mm was produced. This composition is Bi 2 O 3 : 1.0 mol%, Sb 2 O 3 : 1.0 mol%, Cr 2 O 3 : 0.5 mol%, MnO 2 : 0.5 mol%, Co 3 O
4 : 0.6 mol%, SiO 2 : 1.0 mol%, NiO: 1.0 mol%, Al 3+ : 50 ppm, balance ZnO. When the above composition is 100 parts by weight, 0.02 parts by weight of Ag 2 O and
02 parts by weight of B 2 O 3 are further added.

【0024】そして、銀ペーストを、前記したように金
属酸化物焼結体の研摩面へと塗布し、550 ℃で焼き付け
て層状電極を形成した。この焼き付け工程の全体を通し
て、下記表に示す雰囲気圧力を維持した。こうして得た
各電圧非直線抵抗体につき、制限電圧V1mA /mm及びそ
の標準偏差σn-1(n=50)、開閉サージ耐量、ΔV1mA
変化率、電極−素子界面状態を測定した。
Then, the silver paste was applied to the polished surface of the metal oxide sintered body as described above and baked at 550 ° C. to form a layered electrode. The atmosphere pressures shown in the table below were maintained throughout this baking process. For each voltage nonlinear resistor thus obtained, the limiting voltage V 1mA / mm and its standard deviation σ n-1 (n = 50), switching surge resistance, ΔV 1mA
The rate of change and the electrode-device interface state were measured.

【0025】ここで開閉サージ耐量については、500 A
の開閉サージを加えて破壊するまでのサージの回数を示
した。ΔV1mA 変化率については、4/10μs の電流波
形で100KA の電流を印加した後のバリスタ電圧
(V1mA ) の変化率(%)を求めた。電極−素子界面状
態については、評価試料をダイヤモンドカッター等で切
断し、その断面を研磨した後、走査形電子顕微鏡(SEM)
で電子−素子界面の気泡分布状態を観察した結果、気泡
が認められないものを気泡無、50μm 以上の気泡のない
ものを気泡小、50μm を越える気泡が存在するものを気
泡大とした。これらの測定結果を表1に示す。
The switching surge resistance is 500 A
The number of surges before the destruction by adding the switching surge of was shown. Regarding the ΔV 1mA change rate, the change rate (%) of the varistor voltage (V 1mA ) after applying a current of 100 KA with a current waveform of 4/10 μs was obtained. Regarding the electrode-element interface state, the evaluation sample was cut with a diamond cutter, etc., and its cross section was polished, after which it was scanned with a scanning electron microscope (SEM).
As a result of observing the bubble distribution state at the electron-device interface in Table 1, those without bubbles were considered as no bubbles, those without bubbles of 50 μm or more were considered as small bubbles, and those with bubbles exceeding 50 μm were considered as large bubbles. The results of these measurements are shown in Table 1.

【0026】[0026]

【表1】 [Table 1]

【0027】表1から解るように、銀ペーストを焼き付
ける際に雰囲気を減圧状態とすることにより、電極−素
子界面状態、サージ耐量、ΔV1mA変化率が改善されてい
る。また雰囲気圧力は、0.01〜500 Torrとするのが好ま
しく、1.0 〜100 Torrとすると更に好ましいといえる。
As can be seen from Table 1, the electrode-element interface state, the surge resistance and the ΔV 1 mA change rate are improved by reducing the atmosphere when baking the silver paste. The atmospheric pressure is preferably 0.01 to 500 Torr, and more preferably 1.0 to 100 Torr.

【0028】(実施例2)実施例1と同様にして金属酸
化物焼結体を作製した。そして、この研摩面に対し、実
施例1と同様にして銀ペーストを500 ℃で焼き付けた。
また、雰囲気圧力は、実施例1において最も特性の良好
であった1.0 Torrを選択した。
Example 2 A metal oxide sintered body was produced in the same manner as in Example 1. Then, a silver paste was baked on this polished surface in the same manner as in Example 1 at 500 ° C.
Further, as the atmospheric pressure, 1.0 Torr, which had the best characteristics in Example 1, was selected.

【0029】そして、室温から表2に示す各温度に至る
までの間、即ち、表2に示す各温度以下の間、雰囲気圧
力を1Torrに保ち、表2に示す各温度を超えると雰囲気
圧力を760 Torrに戻した。こうして各電圧非直線抵抗体
を作製し、それぞれについて実施例1と同様の測定を行
った。測定結果を表2に示す。
Then, the atmospheric pressure is kept at 1 Torr from room temperature to each temperature shown in Table 2, that is, below each temperature shown in Table 2, and when the temperature shown in Table 2 is exceeded, the atmospheric pressure is changed. Returned to 760 Torr. Thus, each voltage non-linear resistor was produced, and the same measurement as in Example 1 was performed for each. The measurement results are shown in Table 2.

【0030】[0030]

【表2】 [Table 2]

【0031】表2から解るように、特に350 ℃以上の温
度で雰囲気圧力を1Torrにすると効果が大きく、400 ℃
以上の温度で雰囲気圧力を1Torrにすると一層効果が大
きい。
As can be seen from Table 2, when the atmospheric pressure is set to 1 Torr particularly at a temperature of 350 ° C. or higher, the effect is large,
If the atmosphere pressure is set to 1 Torr at the above temperature, the effect is further enhanced.

【0032】[0032]

【発明の効果】以上述べてきたように、本発明によれ
ば、特に層状電極と金属酸化物焼結体との界面における
気泡を少なくでき、両者を密に接触させることができ
る。これにより、電圧非直線抵抗体の放電耐量、信頼性
及び層状電極の密着性を向上させることができた。
As described above, according to the present invention, bubbles can be reduced particularly at the interface between the layered electrode and the metal oxide sintered body, and both can be brought into close contact with each other. As a result, the discharge resistance of the voltage nonlinear resistor, the reliability, and the adhesion of the layered electrode could be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】金属酸化物焼結体1の研磨面1aに層状電極2を
設けた状態を示す概略断面図である。
FIG. 1 is a schematic cross-sectional view showing a state where a layered electrode 2 is provided on a polished surface 1a of a metal oxide sintered body 1.

【図2】層状電極2の微構造を説明するための模式断面
図である。
FIG. 2 is a schematic cross-sectional view for explaining the fine structure of the layered electrode 2.

【図3】従来の製法による層状電極12の微構造を説明す
るための模式断面図である。
FIG. 3 is a schematic cross-sectional view for explaining a fine structure of a layered electrode 12 according to a conventional manufacturing method.

【符号の説明】[Explanation of symbols]

1 金属酸化物焼結体 1a 研磨面 2,12 層状電極 2a, 12a 気泡 1 Metal oxide sintered body 1a Polished surface 2,12 Layered electrode 2a, 12a Bubble

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 酸化亜鉛を主成分とし、添加成分として
少なくともビスマス化合物及び珪素化合物を含む混合粉
末を成形し、この成形体を焼成して金属酸化物焼結体を
作製し、この金属酸化物焼結体の研磨面に層状電極を形
成するのに際し、貴金属ペーストを前記研磨面に塗布
し、この研磨面へと貴金属ペーストを減圧雰囲気下に焼
き付けて前記層状電極を形成することを特徴とする、電
圧非直線抵抗体の製造方法。
1. A metal oxide sintered body is produced by molding a mixed powder containing zinc oxide as a main component and at least a bismuth compound and a silicon compound as additive components, and firing the molded body. In forming the layered electrode on the polished surface of the sintered body, a precious metal paste is applied to the polished surface, and the precious metal paste is baked onto the polished surface under a reduced pressure atmosphere to form the layered electrode. , A method for manufacturing a voltage non-linear resistor.
JP3219363A 1991-08-06 1991-08-06 Manufacturing method of potential nonlinear resistor Withdrawn JPH0541309A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3219363A JPH0541309A (en) 1991-08-06 1991-08-06 Manufacturing method of potential nonlinear resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3219363A JPH0541309A (en) 1991-08-06 1991-08-06 Manufacturing method of potential nonlinear resistor

Publications (1)

Publication Number Publication Date
JPH0541309A true JPH0541309A (en) 1993-02-19

Family

ID=16734259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3219363A Withdrawn JPH0541309A (en) 1991-08-06 1991-08-06 Manufacturing method of potential nonlinear resistor

Country Status (1)

Country Link
JP (1) JPH0541309A (en)

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