JPH0541695B2 - - Google Patents

Info

Publication number
JPH0541695B2
JPH0541695B2 JP1070593A JP7059389A JPH0541695B2 JP H0541695 B2 JPH0541695 B2 JP H0541695B2 JP 1070593 A JP1070593 A JP 1070593A JP 7059389 A JP7059389 A JP 7059389A JP H0541695 B2 JPH0541695 B2 JP H0541695B2
Authority
JP
Japan
Prior art keywords
thin film
substrate
ion
layer
implanted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1070593A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02250952A (ja
Inventor
Yoshinori Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
Ishikawajima Harima Heavy Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawajima Harima Heavy Industries Co Ltd filed Critical Ishikawajima Harima Heavy Industries Co Ltd
Priority to JP7059389A priority Critical patent/JPH02250952A/ja
Publication of JPH02250952A publication Critical patent/JPH02250952A/ja
Publication of JPH0541695B2 publication Critical patent/JPH0541695B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thermistors And Varistors (AREA)
JP7059389A 1989-03-24 1989-03-24 温度センサ用薄膜形成方法 Granted JPH02250952A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7059389A JPH02250952A (ja) 1989-03-24 1989-03-24 温度センサ用薄膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7059389A JPH02250952A (ja) 1989-03-24 1989-03-24 温度センサ用薄膜形成方法

Publications (2)

Publication Number Publication Date
JPH02250952A JPH02250952A (ja) 1990-10-08
JPH0541695B2 true JPH0541695B2 (fr) 1993-06-24

Family

ID=13436011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7059389A Granted JPH02250952A (ja) 1989-03-24 1989-03-24 温度センサ用薄膜形成方法

Country Status (1)

Country Link
JP (1) JPH02250952A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08102360A (ja) * 1994-09-29 1996-04-16 Toyota Central Res & Dev Lab Inc 有機無機複合薄膜型電界発光素子
EP1548139A4 (fr) * 2002-07-31 2005-08-31 Nat Inst Of Advanced Ind Scien Acier inoxydable a teneur ultrafaible en carbone
ATE433200T1 (de) 2003-12-16 2009-06-15 Panasonic Corp Organisches elektrolumineszenzbauelement und herstellungsverfahren dafür
KR101844575B1 (ko) * 2016-12-23 2018-04-03 주식회사 포스코 골드 컬러 강판 및 그 제조방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH064909B2 (ja) * 1985-05-28 1994-01-19 理化学研究所 金 型

Also Published As

Publication number Publication date
JPH02250952A (ja) 1990-10-08

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