JPH0543096Y2 - - Google Patents

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Publication number
JPH0543096Y2
JPH0543096Y2 JP1987186370U JP18637087U JPH0543096Y2 JP H0543096 Y2 JPH0543096 Y2 JP H0543096Y2 JP 1987186370 U JP1987186370 U JP 1987186370U JP 18637087 U JP18637087 U JP 18637087U JP H0543096 Y2 JPH0543096 Y2 JP H0543096Y2
Authority
JP
Japan
Prior art keywords
gas
plate
shower electrode
distribution chamber
rectifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987186370U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0189957U (pt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987186370U priority Critical patent/JPH0543096Y2/ja
Publication of JPH0189957U publication Critical patent/JPH0189957U/ja
Application granted granted Critical
Publication of JPH0543096Y2 publication Critical patent/JPH0543096Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)
JP1987186370U 1987-12-09 1987-12-09 Expired - Lifetime JPH0543096Y2 (pt)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987186370U JPH0543096Y2 (pt) 1987-12-09 1987-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987186370U JPH0543096Y2 (pt) 1987-12-09 1987-12-09

Publications (2)

Publication Number Publication Date
JPH0189957U JPH0189957U (pt) 1989-06-13
JPH0543096Y2 true JPH0543096Y2 (pt) 1993-10-29

Family

ID=31477600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987186370U Expired - Lifetime JPH0543096Y2 (pt) 1987-12-09 1987-12-09

Country Status (1)

Country Link
JP (1) JPH0543096Y2 (pt)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6060242B2 (ja) * 2010-11-30 2017-01-11 株式会社日立国際電気 基板処理装置、半導体装置の製造方法及びバッフル構造

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6137969A (ja) * 1984-07-31 1986-02-22 Canon Inc プラズマｃｖｄ薄膜製造装置
JPS6187319A (ja) * 1984-10-05 1986-05-02 Hitachi Ltd プラズマを用いた化学気相成膜装置
JPS6187872A (ja) * 1984-10-05 1986-05-06 Hitachi Ltd 平行平板型プラズマｃｖｄ装置のアノ−ド電極

Also Published As

Publication number Publication date
JPH0189957U (pt) 1989-06-13

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