JPH0544610B2 - - Google Patents
Info
- Publication number
- JPH0544610B2 JPH0544610B2 JP10473083A JP10473083A JPH0544610B2 JP H0544610 B2 JPH0544610 B2 JP H0544610B2 JP 10473083 A JP10473083 A JP 10473083A JP 10473083 A JP10473083 A JP 10473083A JP H0544610 B2 JPH0544610 B2 JP H0544610B2
- Authority
- JP
- Japan
- Prior art keywords
- balance
- permanent magnet
- electromagnetic
- current
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005291 magnetic effect Effects 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 12
- 230000003068 static effect Effects 0.000 claims description 11
- 239000003302 ferromagnetic material Substances 0.000 claims description 7
- 238000005303 weighing Methods 0.000 claims description 5
- 230000005415 magnetization Effects 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 230000000694 effects Effects 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000009529 body temperature measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 230000005347 demagnetization Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G7/00—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups
- G01G7/02—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electromagnetic action
- G01G7/04—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electromagnetic action with means for regulating the current to solenoids
- G01G7/045—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electromagnetic action with means for regulating the current to solenoids having a PID control system
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】 (イ) 産業上の利用分野 本発明は電磁力平衡型の天びんに関する。[Detailed description of the invention] (b) Industrial application fields The present invention relates to an electromagnetic balance type balance.
(ロ) 従来技術
電磁力平衡型の天びんにおいては、永久磁石に
よつて作られた静磁場内に、フオースコイルを可
動的に設けるとともに秤量皿に係合せしめ、秤量
皿上の荷重とつり合う電磁力を発生するようフオ
ースコイルに流れる電流を制御し、その電流値か
ら秤量皿上の荷重値が検出される。このような天
びんでは、一般に永久磁石はその作る磁場の強さ
に関して−200〜−400×10-6/℃の温度係数を有
している為、検出荷重値の温度依存性を解消する
為には温度センサによつて永久磁石の温度を検出
し、電流値の荷重値への変換率をその温度によつ
て補正する必要がある。天びんの精度が2万分の
1程度であれば、温度補正の精度は0.1℃程度で
充分であるから、大した問題はない。しかし、20
万分の1ないし200万分の1の精度を有する天び
んの場合、0.01℃ないし0.001℃の精度で温度補
正を行う必要があるが、静磁場内に置かれている
フオースコイルには電磁力発生の為の電流が流れ
ており、その電流によつてフオースコイルは僅か
ではあるが発熱し、その熱が静磁気回路のポール
ピースを加熱し、更に永久磁石を経てヨークへと
伝わり、他の構成部品に伝達される。ここで永久
磁石用材料は、他のヨーク等の構成材料に比して
熱伝導度が悪く(例えば鉄の1/5)、その為、永久
磁石には例えば0.1℃/cmという大きな温度勾配
が生じ、この値は上述の温度補正の精度から見て
非常に大きな値であつて、欲する精度で温度補正
を行うことが極めて困難であつた。(b) Prior art In an electromagnetic balance type balance, a force coil is movably provided in a static magnetic field created by a permanent magnet and is engaged with a weighing pan to generate an electromagnetic force that balances the load on the weighing pan. The current flowing through the force coil is controlled to generate , and the load value on the weighing pan is detected from the current value. In such balances, permanent magnets generally have a temperature coefficient of -200 to -400 x 10 -6 /℃ in relation to the strength of the magnetic field they create, so in order to eliminate the temperature dependence of the detected load value, It is necessary to detect the temperature of the permanent magnet with a temperature sensor and correct the conversion rate of the current value to the load value based on the temperature. If the accuracy of the balance is about 1/20,000, then the temperature correction accuracy of about 0.1°C is sufficient, so there is no major problem. But 20
In the case of a balance with an accuracy of 1/20,000 to 1/2 million, it is necessary to perform temperature correction with an accuracy of 0.01°C to 0.001°C, but the force coil placed in a static magnetic field has a A current is flowing, and the force coil generates a small amount of heat, which heats the pole piece of the magnetostatic circuit, which is then transmitted to the yoke via the permanent magnet, and then to other components. Ru. Here, the material for permanent magnets has poor thermal conductivity (for example, 1/5 of iron) compared to other constituent materials such as yokes, so permanent magnets have a large temperature gradient of, for example, 0.1°C/cm. This value is extremely large in terms of the accuracy of temperature correction described above, and it has been extremely difficult to perform temperature correction with the desired accuracy.
(ハ) 目的
本発明の目的は、上述の永久磁石内の温度勾配
を小さくして検出荷重値の温度依存性を精度よく
補正し、もつて高精度の電磁力平衡天びんを得る
ことにある。(c) Purpose An object of the present invention is to reduce the temperature gradient in the permanent magnet described above, accurately correct the temperature dependence of the detected load value, and thereby obtain a highly accurate electromagnetic force balance balance.
(ニ) 構成
本発明の特徴とするところは、永久磁石の磁化
方向に直交する両端面の一方にポールピースを接
合し、他方に底付筒形状のヨークの内部底面を接
合し、上記ポールピース外周面と上記ヨーク内周
面とによつて筒形の静磁場が形成されるよう構成
し、永久磁石の略中心部には温度センサを設けて
その出力を永久磁石の温度変化に起因する上記静
磁場の強度変化の補正に供するとともに、その永
久磁石の上記両端面を結ぶ外周面を強磁性体以外
の材料で、かつ、熱伝導度が良好な材料で覆つた
ことにある。(D) Structure The present invention is characterized in that a pole piece is joined to one of both end faces perpendicular to the magnetization direction of the permanent magnet, and an inner bottom face of a cylindrical yoke with a bottom is joined to the other end face, and the above-mentioned pole piece A cylindrical static magnetic field is formed by the outer circumferential surface and the inner circumferential surface of the yoke, and a temperature sensor is provided approximately at the center of the permanent magnet, and its output is measured according to the temperature change caused by the temperature change of the permanent magnet. In addition to correcting changes in the strength of the static magnetic field, the outer circumferential surface connecting the above-mentioned both end surfaces of the permanent magnet is covered with a material other than ferromagnetic material and with a material having good thermal conductivity.
(ホ) 実施例
以下、図面に基づいて本発明実施例を説明す
る。(e) Examples Examples of the present invention will be described below based on the drawings.
第1図は本発明実施例の構成図である。 FIG. 1 is a block diagram of an embodiment of the present invention.
永久磁石1の磁化方向に直交する両端面の一方
にはポールピース2が接合され、他方は底付筒形
状のヨーク3の内部底面に接合され、これらが静
磁気回路を形成している。その静磁気回路の、ポ
ールピース2外周とヨーク3上部内周との間に作
られた筒状の静磁場内に、その磁場の方向と直交
する方向に電流が流れるよう巻回されたフオース
コイル4が設けられ、このフオースコイル4は、
上下方向に可動で、かつ、図示しない秤量皿上の
荷重が作用する巻枠5に支持されている。その荷
重による巻枠5の変位は変位センサ6によつて検
出され、その検出信号はプリアンプ7、PID制御
器8を介してパワーアンプ9に供給され、変位の
大きさに応じた直流電流をフオースコイル4に流
して、巻枠5の変位が0となるような電磁力を発
生せしめる。このとき、フオースコイル4に流れ
る電流は、抵抗10によつて電圧に変換された
後、A−D変換器11でデジタル化され、演算回
路12によつて荷重値に変換されて表示器13に
表示されるよう構成されている。なお、補正コイ
ル20はフオースコイル4によつて発生される磁
場の静磁場への影響を除去する為のものである。 A pole piece 2 is bonded to one of both end surfaces of the permanent magnet 1 perpendicular to the magnetization direction, and the other is bonded to the inner bottom surface of a bottomed cylindrical yoke 3, forming a magnetostatic circuit. A force coil 4 is wound so that a current flows in a direction perpendicular to the direction of the magnetic field within a cylindrical static magnetic field created between the outer periphery of the pole piece 2 and the upper inner periphery of the yoke 3 in the static magnetic circuit. is provided, and this force coil 4 is
It is movable in the vertical direction and is supported by a winding frame 5 on which a load on a weighing pan (not shown) acts. The displacement of the winding frame 5 due to the load is detected by a displacement sensor 6, and the detection signal is supplied to a power amplifier 9 via a preamplifier 7 and a PID controller 8, and a direct current corresponding to the magnitude of the displacement is sent to the force coil. 4 to generate an electromagnetic force that causes the displacement of the winding frame 5 to be zero. At this time, the current flowing through the force coil 4 is converted into voltage by a resistor 10, then digitized by an A-D converter 11, converted into a load value by an arithmetic circuit 12, and displayed on a display 13. It is configured to be Note that the correction coil 20 is for eliminating the influence of the magnetic field generated by the force coil 4 on the static magnetic field.
永久磁石1の中心部には温度センサ14が設け
られており、その出力は温度計測アンプ15に導
入されている。温度計測アンプ15は温度センサ
14による永久磁石1の温度に応じてA−D変換
器11に供給する基準電圧を変化させ、永久磁石
1の温度変化に起因する磁場の強さの変化による
荷重検出誤差を補正するよう構成されている。ま
た、永久磁石1の、ポールピース2とヨークとに
接合された両端面を結ぶ外周面には、銅、銅合金
又はアルミニウム、アルミニウム合金等の強磁性
材料以外の材料で、かつ、熱伝導度が良好な材料
で形成された伝熱リング16が嵌め込まれてい
る。 A temperature sensor 14 is provided at the center of the permanent magnet 1, and its output is introduced into a temperature measurement amplifier 15. The temperature measurement amplifier 15 changes the reference voltage supplied to the A-D converter 11 according to the temperature of the permanent magnet 1 detected by the temperature sensor 14, and detects the load by changing the strength of the magnetic field caused by the temperature change of the permanent magnet 1. It is configured to correct the error. In addition, the outer peripheral surface of the permanent magnet 1 connecting both end surfaces joined to the pole piece 2 and the yoke is made of a material other than a ferromagnetic material such as copper, copper alloy, aluminum, or aluminum alloy, and has a high thermal conductivity. A heat transfer ring 16 made of a material with good properties is fitted therein.
以上の本発明実施例によれば、フオースコイル
4の電流による発熱量は、ポールピース2から主
として伝熱リング16を通つてヨーク3の底部に
伝達される為、ポールピース2からヨーク3底部
への熱抵抗が、伝熱リング16を有さない従来の
ものに比して数分の1に減少し、永久磁石1の温
度上昇量並びに温度勾配が大巾に減少する。その
為、温度センサ14および温度計測アンプ15に
よる荷重検出値の温度補正精度が従来に比して大
巾に向上する。 According to the above-described embodiment of the present invention, the amount of heat generated by the current in the force coil 4 is transmitted from the pole piece 2 to the bottom of the yoke 3 mainly through the heat transfer ring 16. Thermal resistance is reduced to a fraction of that of the conventional one without the heat transfer ring 16, and the temperature rise and temperature gradient of the permanent magnet 1 are greatly reduced. Therefore, the temperature correction accuracy of the load detection value by the temperature sensor 14 and the temperature measurement amplifier 15 is greatly improved compared to the conventional technology.
なお、上述の伝熱リング16の厚さは、約1〜
5mm程度であればよいことが判明している。 Note that the thickness of the heat transfer ring 16 described above is approximately 1 to 1.
It has been found that a thickness of about 5 mm is sufficient.
また、第2図に本発明の他の実施例の要部構成
図を示す如く、永久磁石1′を筒形として、ポー
ルピース2とヨーク3に接合された両端面を結ぶ
内周面にも、外周面に嵌め込まれた伝熱リング1
6と同様の第2の伝熱リング16′を挿入すると、
その効果はより一層向上する。 In addition, as shown in FIG. 2, which shows the configuration of main parts of another embodiment of the present invention, the permanent magnet 1' is cylindrical, and the inner circumferential surface connecting both end surfaces joined to the pole piece 2 and the yoke 3 is also , heat transfer ring 1 fitted on the outer peripheral surface
When a second heat transfer ring 16' similar to 6 is inserted,
The effect will be further improved.
なお、以上の実施例ではフオースコイルに流す
電流が直流電流である場合について記したが、正
負にわたるパルス電流をフオースコイル4に流し
て電磁力を発生させて荷重とつり合わせ、その平
均電流値を荷重値に変換する方式の天びんにも適
用することができる。この場合、伝熱リング16
は上述のような温度勾配を減少させる等の作用に
加え、パルス電流をフオースコイル4に流すこと
によつて発生する交流磁界による静磁場の磁束変
化が、交流磁界が電熱リング16で短絡される為
抑制され、減磁作用が抑えられる結果、磁場の時
間に対応する安定度も向上するという利点を有す
る。第3図はその減磁作用の伝熱リングの有無に
よる相異を示すグラフで、1000Hzのパルス電流を
用いる場合には約1/3程度に抑えられている。 In addition, in the above embodiment, the case where the current flowing through the force coil is a direct current is described, but a positive and negative pulsed current is passed through the force coil 4 to generate an electromagnetic force, which is balanced against the load, and the average current value is determined as the load value. It can also be applied to balances that convert to In this case, the heat transfer ring 16
In addition to the effect of reducing the temperature gradient as described above, the change in magnetic flux of the static magnetic field due to the alternating magnetic field generated by passing a pulsed current through the force coil 4 causes the alternating magnetic field to be short-circuited by the electric heating ring 16. As a result of suppressing the demagnetizing effect, the stability of the magnetic field over time also improves. Figure 3 is a graph showing the difference in the demagnetization effect depending on the presence or absence of a heat transfer ring.When using a 1000Hz pulse current, the demagnetization effect is suppressed to about 1/3.
(ヘ) 効果
以上説明したように、本発明によれば、フオー
スコイルの発熱が、主として、強磁性材料以外の
材料で、かつ、熱伝導度が良好な材料によつて形
成された伝熱リングを通つてヨーク下部に伝達さ
れるので、永久磁石内の温度上昇量および温度勾
配が小さくなり、温度センサによる温度補正が高
精度となつて、20万分の1ないし200万分の1の
精度の電磁力平衡天びんを容易に得ることができ
るとともに、伝熱リングによつて通電後すみやか
に永久磁石の温度が安定状態となるから、ウオー
ミングアツプ時間も短縮することができる。(F) Effect As explained above, according to the present invention, the heat generated by the force coil is mainly caused by the heat transfer ring formed of a material other than a ferromagnetic material and having good thermal conductivity. Since the temperature rise and temperature gradient inside the permanent magnet are small, the temperature correction by the temperature sensor becomes highly accurate, and the electromagnetic force has an accuracy of 1/200,000 to 1/2 million. A balanced balance can be easily obtained, and since the temperature of the permanent magnet is brought to a stable state immediately after energization by the heat transfer ring, warming-up time can also be shortened.
第1図は本発明実施例の構成図、第2図は本発
明の他の実施例の要部構成図、第3図はフオース
コイルに流す電流をパルス電流としたときの伝熱
リングによる減磁作用に及ぼす効果の作用説明図
である。
1……永久磁石、2……ポールピース、3……
ヨーク、4……フオースコイル、5……巻枠、6
……変位センサ、8……PID制御器、9……パワ
ーアンプ、11……A−D変換器、12……演算
部、14……温度センサ、15……温度計測アン
プ、16,16′……伝熱リング。
Fig. 1 is a block diagram of an embodiment of the present invention, Fig. 2 is a block diagram of main parts of another embodiment of the present invention, and Fig. 3 is demagnetization by a heat transfer ring when the current flowing through the force coil is a pulse current. FIG. 3 is a diagram illustrating the effect on the action. 1... Permanent magnet, 2... Pole piece, 3...
Yoke, 4... Force coil, 5... Winding frame, 6
... Displacement sensor, 8 ... PID controller, 9 ... Power amplifier, 11 ... A-D converter, 12 ... Arithmetic unit, 14 ... Temperature sensor, 15 ... Temperature measurement amplifier, 16, 16' ...Heat transfer ring.
Claims (1)
磁石の作る静磁場内に置かれたフオースコイルに
電流を流して発生する電磁力とをつり合わせ、そ
の電磁力を発生させるに要する電流から当該荷重
を検出する天びんにおいて、永久磁石の磁化方向
に直交する両端面の一方にポールピースを接合
し、他方に底付筒形状のヨークの内部底面を接合
し、上記ポールピース外周面と上記ヨーク内周面
とによつて筒形の上記静磁場が形成されるよう構
成し、上記永久磁石の略中心部に温度センサを設
けてその出力を上記永久磁石の温度変化に起因す
る上記静磁場の強度変化の補正に供するととも
に、上記永久磁石の上記両端面を結ぶ外周面を、
強磁性体以外の材料で、かつ、熱伝導度が良好な
材料で覆つたことを特徴とする電磁力平衡天び
ん。 2 上記フオースコイルに流す電流がパルス電流
であつて、そのパルス電流の平均電流値を荷重値
に変換するよう構成した天びんを有することを特
徴とする特許請求の範囲第1項記載の電磁力平衡
天びん。 3 上記永久磁石を、その磁化方向に沿う筒形状
に形成し、上記ポールピースと上記ヨークに接合
された両端面を結ぶ内周面をも、強磁性体以外の
材料で、かつ、熱伝導度が良好な材料で覆つたこ
とを特徴とする特許請求の範囲第1項又は第2項
記載の電磁力平衡天びん。 4 上記強磁性体以外の材料で、かつ、熱伝導度
が良好な材料が、銅あるいは銅系合金であること
を特徴とする特許請求の範囲第1項、第2項又は
第3項記載の電磁力平衡天びん。 5 上記強磁性体以外の材料で、かつ、熱伝導度
が良好な材料が、アルミニウムあるいはアルミニ
ウム系合金であることを特徴とする特許請求の範
囲第1項、第2項又は第3項記載の電磁力平衡天
びん。[Claims] 1. The electromagnetic force is generated by balancing the force due to the load placed on the weighing pan and the electromagnetic force generated by passing a current through a force coil placed in a static magnetic field created by a permanent magnet. In a balance that detects the load from the current required to carry out the load, a pole piece is bonded to one of both end surfaces perpendicular to the magnetization direction of the permanent magnet, and the inner bottom surface of a cylindrical yoke with a bottom is bonded to the other. The cylindrical static magnetic field is formed by the outer circumferential surface and the inner circumferential surface of the yoke, and a temperature sensor is provided approximately at the center of the permanent magnet, and the output thereof is caused by temperature changes of the permanent magnet. In addition to correcting changes in the strength of the static magnetic field, the outer circumferential surface connecting the both end surfaces of the permanent magnet is
An electromagnetic balance balance characterized by being covered with a material other than ferromagnetic material and having good thermal conductivity. 2. An electromagnetic force balance balance according to claim 1, characterized in that the current flowing through the force coil is a pulsed current, and the balance is configured to convert the average current value of the pulsed current into a load value. . 3. The permanent magnet is formed into a cylindrical shape along its magnetization direction, and the inner peripheral surface connecting the pole piece and both end surfaces joined to the yoke is also made of a material other than ferromagnetic material and has a high thermal conductivity. An electromagnetic force balance balance according to claim 1 or 2, characterized in that the balance is covered with a good material. 4. The method according to claim 1, 2, or 3, wherein the material other than the ferromagnetic material and having good thermal conductivity is copper or a copper-based alloy. Electromagnetic balance balance. 5. The method according to claim 1, 2, or 3, wherein the material other than the ferromagnetic material and having good thermal conductivity is aluminum or an aluminum-based alloy. Electromagnetic balance balance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10473083A JPS59230118A (en) | 1983-06-10 | 1983-06-10 | Electromagnetic force balance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10473083A JPS59230118A (en) | 1983-06-10 | 1983-06-10 | Electromagnetic force balance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59230118A JPS59230118A (en) | 1984-12-24 |
| JPH0544610B2 true JPH0544610B2 (en) | 1993-07-06 |
Family
ID=14388611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10473083A Granted JPS59230118A (en) | 1983-06-10 | 1983-06-10 | Electromagnetic force balance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59230118A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62249024A (en) * | 1986-04-21 | 1987-10-30 | Yamato Scale Co Ltd | Force measuring device |
| JP2518001B2 (en) * | 1987-12-25 | 1996-07-24 | 株式会社島津製作所 | Magnetic circuit for electromagnetic balance |
-
1983
- 1983-06-10 JP JP10473083A patent/JPS59230118A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59230118A (en) | 1984-12-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0544610B2 (en) | ||
| JPH0544609B2 (en) | ||
| JPS59120803A (en) | Measuring probe for gear | |
| JP4716030B2 (en) | Current sensor | |
| JPS63297545A (en) | Axis to be measured for torque sensor | |
| JP2020204582A (en) | Device for measuring bh-curve of amorphous wire | |
| JP2518001B2 (en) | Magnetic circuit for electromagnetic balance | |
| JP4035773B2 (en) | Current sensor | |
| JP2615661B2 (en) | Torque sensor | |
| JPS63229037A (en) | nuclear magnetic resonance apparatus | |
| JP2948000B2 (en) | Electromagnetic balance type weighing device | |
| JP2000266786A (en) | Current sensor | |
| JPH031781Y2 (en) | ||
| JP3359157B2 (en) | Positioning device | |
| JPS6161602B2 (en) | ||
| JPS5851208B2 (en) | electromagnetic balance device | |
| JPS60138430A (en) | Temperature measuring method of metallic plate by electromagnetic induction | |
| JP6101102B2 (en) | Magnetostrictive torque sensor and electric power steering apparatus | |
| JPS62276454A (en) | Method for detecting foreign matter in ferromagnetic body | |
| JP2514550B2 (en) | Magnetic force type stress measurement method for non-ferrous metal materials | |
| SU1000797A1 (en) | Magnetoelastic torque pickup | |
| JPH07218323A (en) | Electromagnetic balance or force measuring device | |
| JP2751152B2 (en) | Electromagnetic flow meter | |
| JPS63165777A (en) | Apparatus for detecting magnetic polarity | |
| JPS594241Y2 (en) | Jisei Soukensouchi |