JPH05503361A - 流体の物理的性質を測定するための装置 - Google Patents

流体の物理的性質を測定するための装置

Info

Publication number: JPH05503361A
Authority: JP; Japan
Prior art keywords: sensor; resistor; cleaning; heating; temperature
Prior art date: 1990-11-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP3517100A

Other languages

English (en)

Japanese (ja)

Inventor

ファーブル　ピエール

Original Assignee

コソネ　メテオロロジー　システムズ　ソシエテ　アノニム

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-11-13

Filing date

1991-11-05

Publication date

1993-06-03

1991-11-05 Application filed by コソネ　メテオロロジー　システムズ　ソシエテ　アノニム filed Critical コソネ　メテオロロジー　システムズ　ソシエテ　アノニム

1993-06-03 Publication of JPH05503361A publication Critical patent/JPH05503361A/ja

Status Pending legal-status Critical Current

Links

239000012530 fluid Substances 0.000 title claims description 16
230000000704 physical effect Effects 0.000 title claims description 6
238000004140 cleaning Methods 0.000 claims description 15
238000010438 heat treatment Methods 0.000 claims description 14
239000000356 contaminant Substances 0.000 claims description 8
238000004380 ashing Methods 0.000 claims description 7
230000008859 change Effects 0.000 claims description 7
238000011109 contamination Methods 0.000 claims description 7
238000000034 method Methods 0.000 claims description 7
230000008569 process Effects 0.000 claims description 5
239000000523 sample Substances 0.000 claims description 5
239000000463 material Substances 0.000 claims description 4
238000005485 electric heating Methods 0.000 claims 1
238000010586 diagram Methods 0.000 description 5
238000005259 measurement Methods 0.000 description 5
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
230000003321 amplification Effects 0.000 description 3
239000003344 environmental pollutant Substances 0.000 description 3
238000003199 nucleic acid amplification method Methods 0.000 description 3
231100000719 pollutant Toxicity 0.000 description 3
230000009471 action Effects 0.000 description 2
230000003993 interaction Effects 0.000 description 2
239000010410 layer Substances 0.000 description 2
229910052697 platinum Inorganic materials 0.000 description 2
230000004044 response Effects 0.000 description 2
230000035945 sensitivity Effects 0.000 description 2
238000011144 upstream manufacturing Methods 0.000 description 2
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
241000209140 Triticum Species 0.000 description 1
235000021307 Triticum Nutrition 0.000 description 1
230000003213 activating effect Effects 0.000 description 1
230000004913 activation Effects 0.000 description 1
239000002131 composite material Substances 0.000 description 1
238000001816 cooling Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
239000005350 fused silica glass Substances 0.000 description 1
229930195733 hydrocarbon Natural products 0.000 description 1
150000002430 hydrocarbons Chemical class 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
239000005416 organic matter Substances 0.000 description 1
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
239000011241 protective layer Substances 0.000 description 1
239000000779 smoke Substances 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/6983—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters adapted for burning-off deposits
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0029—Cleaning of the detector
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
Engineering & Computer Science (AREA)
Chemical & Material Sciences (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Analytical Chemistry (AREA)
Medicinal Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
Food Science & Technology (AREA)
Immunology (AREA)
Pathology (AREA)
Combustion & Propulsion (AREA)
Aviation & Aerospace Engineering (AREA)
Investigating Or Analyzing Materials Using Thermal Means (AREA)
Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

JP3517100A 1990-11-13 1991-11-05 流体の物理的性質を測定するための装置 Pending JPH05503361A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
CH3594/90A CH683800A5 (fr)	1990-11-13	1990-11-13	Appareil pour la mesure de propriétés physiques de fluides.
CH3594/90-0		1990-11-13

Publications (1)

Publication Number	Publication Date
JPH05503361A true JPH05503361A (ja)	1993-06-03

Family

ID=4259357

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP3517100A Pending JPH05503361A (ja)	1990-11-13	1991-11-05	流体の物理的性質を測定するための装置

Country Status (5)

Country	Link
EP (1)	EP0510143A1 (fr)
JP (1)	JPH05503361A (fr)
CA (1)	CA2073688A1 (fr)
CH (1)	CH683800A5 (fr)
WO (1)	WO1992008956A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2006502392A (ja) *	2002-10-07	2006-01-19	ワグナーアラーム− ウントジッヒャルンクスシャテムゲゼルシャフトミットベシュレンクテルハフツング	流体のフローパラメータ決定装置およびその動作方法
EP2187182B1 (fr) *	2008-11-12	2015-08-05	Sensirion AG	Procédé de fonctionnement d'un capteur de flux qui est répétitivement sujet à des traitements de nettoyage thermiques et/ou chimiques, et appareil de mesure de débit

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2900690A1 (de) *	1979-01-10	1980-07-24	Bosch Gmbh Robert	Einrichtung zur temperatursteuerung eines messzwecken dienenden widerstandes, insbesondere bei brennkraftmaschinen
US4279147A (en) *	1980-01-10	1981-07-21	Djorup Robert Sonny	Directional heat loss anemometer transducer
US4794795A (en) *	1986-05-23	1989-01-03	Djorup Robert Sonny	Directional thermal anemometer transducer
DE3835235A1 (de) *	1988-10-15	1990-04-19	Bosch Gmbh Robert	Einrichtung zur temperatursteuerung eines widerstands

1990
- 1990-11-13 CH CH3594/90A patent/CH683800A5/fr not_active IP Right Cessation
1991
- 1991-11-05 EP EP91918894A patent/EP0510143A1/fr not_active Withdrawn
- 1991-11-05 CA CA002073688A patent/CA2073688A1/fr not_active Abandoned
- 1991-11-05 WO PCT/CH1991/000227 patent/WO1992008956A1/fr not_active Ceased
- 1991-11-05 JP JP3517100A patent/JPH05503361A/ja active Pending

Also Published As

Publication number	Publication date
CH683800A5 (fr)	1994-05-13
EP0510143A1 (fr)	1992-10-28
WO1992008956A1 (fr)	1992-05-29
CA2073688A1 (fr)	1992-05-14

Publication	Publication Date	Title
CA1336621C (fr)	1995-08-08	Mesure de la conductibilite thermique et de la chaleur massique
US4956793A (en)	1990-09-11	Method and apparatus for measuring the density of fluids
US5463899A (en)	1995-11-07	Simultaneous measurement of gas thermal conductivity and mass flow
US5069066A (en)	1991-12-03	Constant temperature anemometer
CN103091354B (zh)	2015-04-08	一种测试薄膜热导率的方法
US5186051A (en)	1993-02-16	Device for measuring a flowing air quantity
US5111692A (en)	1992-05-12	Temperature compensated liquid level and fluid flow sensor
JPH08184576A (ja)	1996-07-16	湿度センサ
US4843881A (en)	1989-07-04	Fluid flow sensor system
JPS59174719A (ja)	1984-10-03	流体の流量測定方法及び装置
EP1686354A2 (fr)	2006-08-02	Appareil pour mesure de débit massique thermique
JPH05503361A (ja)	1993-06-03	流体の物理的性質を測定するための装置
JP3527657B2 (ja)	2004-05-17	フローセンサ故障判定装置及びその方法
JPH09318412A (ja)	1997-12-12	熱式流速センサ
JP3267513B2 (ja)	2002-03-18	流速検出装置
JPH08184575A (ja)	1996-07-16	湿度センサ
JP3153787B2 (ja)	2001-04-09	抵抗体による熱伝導パラメータセンシング方法及びセンサ回路
JP2964186B2 (ja)	1999-10-18	熱式流量計
US3514998A (en)	1970-06-02	D.c. circuit for operating asymmetric thermopile
JPH02653Y2 (fr)	1990-01-09
JPS61105422A (ja)	1986-05-23	流量測定装置
KR100244902B1 (ko)	2000-02-15	공기유속 센서소자 및 그 측정회로
JPH0516730B2 (fr)	1993-03-05
JP3563982B2 (ja)	2004-09-08	流量測定装置および方法
Hodorowicz et al.	1999	Novel intelligent hybrid thick-film sensors of temperature and flow