JPH0552667B2 - - Google Patents

Info

Publication number
JPH0552667B2
JPH0552667B2 JP60026968A JP2696885A JPH0552667B2 JP H0552667 B2 JPH0552667 B2 JP H0552667B2 JP 60026968 A JP60026968 A JP 60026968A JP 2696885 A JP2696885 A JP 2696885A JP H0552667 B2 JPH0552667 B2 JP H0552667B2
Authority
JP
Japan
Prior art keywords
high frequency
coaxial line
chip
transistor
characteristic impedance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60026968A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61187244A (ja
Inventor
Junichi Takahashi
Yasuhisa Yamashita
Toshimitsu Konno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP60026968A priority Critical patent/JPS61187244A/ja
Publication of JPS61187244A publication Critical patent/JPS61187244A/ja
Publication of JPH0552667B2 publication Critical patent/JPH0552667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60026968A 1985-02-14 1985-02-14 半導体評価装置 Granted JPS61187244A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60026968A JPS61187244A (ja) 1985-02-14 1985-02-14 半導体評価装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60026968A JPS61187244A (ja) 1985-02-14 1985-02-14 半導体評価装置

Publications (2)

Publication Number Publication Date
JPS61187244A JPS61187244A (ja) 1986-08-20
JPH0552667B2 true JPH0552667B2 (2) 1993-08-06

Family

ID=12207955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60026968A Granted JPS61187244A (ja) 1985-02-14 1985-02-14 半導体評価装置

Country Status (1)

Country Link
JP (1) JPS61187244A (2)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6367884U (2) * 1986-06-20 1988-05-07
JPH0652748B2 (ja) * 1987-05-12 1994-07-06 東京エレクトロン株式会社 プロ−ブカ−ド
JP2944677B2 (ja) * 1989-03-03 1999-09-06 日本発条株式会社 導電性接触子
JP2000121666A (ja) * 1998-10-15 2000-04-28 Micronics Japan Co Ltd プローブ及びプローブカード
JP3944196B2 (ja) * 2004-06-28 2007-07-11 日本電産リード株式会社 プローブ装置及び基板検査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54153B2 (2) * 1974-05-21 1979-01-06
JPS5124851U (2) * 1974-08-12 1976-02-24
JPS5941314A (ja) * 1982-08-31 1984-03-07 Mitsui Petrochem Ind Ltd 変性４―メチル―１―ペンテン重合体の製造方法
JPS5997469U (ja) * 1982-12-20 1984-07-02 株式会社東芝 半導体チツプ測定用探針

Also Published As

Publication number Publication date
JPS61187244A (ja) 1986-08-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees