JPH0555258B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a table in a processing device. In detail, place the processing tool or workpiece,
The present invention relates to a composite table capable of performing linear indexing feed and cutting feed.

BACKGROUND ART In recent years, very strict processing accuracy has been required for processing equipment.

For example, in ultra-precision processing equipment such as dicers and slicers that are used for dicing semiconductor wafers and grooving magnetic heads, by performing index positioning with high precision to determine the position where the grooves are to be processed, There is a particular demand for improving machining accuracy.

Conventionally, indexing and positioning in dicers, slicers, and the like has been performed by providing an indexing and positioning device on a table on which a processing tool or a workpiece is placed.

In recent years, indexing and positioning devices have been developed that are equipped with a closed loop feedback control device that uses an incremental linear scale with a high resolution of 0.1 μm as a detection means. By employing the indexing and positioning device, the indexing and positioning of tables in dicers, slicers, etc. can be performed with high precision.

For example, a description will be given of a processing table shown in FIG. 4 on which a workpiece is placed.

The processing table shown in FIG. 4 is a composite table consisting of an indexing table 1 having a linear indexing function and a cutting feed table 2 provided on the indexing table 1 and having a cutting feed function. It is equipped with an indexing and positioning device 3 that performs positioning control.

That is, the index table 1 has a sliding guide bearing 1 on a first sliding guide shaft 12 provided on the body 4.
The indexing table main body 10, which is slidably provided through the indexing table 1, is configured to be linearly indexable by an indexing drive device consisting of a feed screw 14 screwed into a female screw member 15 and an indexing motor 13. be.

The cutting feed table 2 has a cutting feed table main body 20 which is slidably provided on a second sliding guide shaft 22 provided on the indexing table 1 via a sliding guide bearing 21, and is screwed into a female screw member 25. It is constructed so that cutting can be fed by a cutting feed drive device comprising a matching feed screw 24 and a cutting feed motor 23.

The indexing and positioning device 3 is equipped with a closed loop feedback control device 33 that uses incremental linear scales 31 and 32 with a high resolution of 0.1 μm as detection means, and the scale portion 31 of the linear scales 31 and 32 is connected to the first Indexing table 1 along the top surface of sliding guide shaft 12
The linear scale detector 32 is provided on the sliding guide bearing 11 of the machine body 4.

The machining table is constructed as described above, and when performing machining work, the indexing motor 13 is started by the program control device 6, and the indexing motor 13 is started via the feed screw 14 and the female screw member 15. The table main body 10 is moved. When the index table main body 10 is moved, the scale part 31 of the linear scale is also moved together. When the scale section 31 moves, the amount of movement of the scale section 31 is detected by the detection section 32 of the linear scale. When the detected movement amount of the scale section 31 reaches the set value, the indexing motor 13 is stopped by a signal from the closed loop feedback control device 33, and the indexing and positioning of the indexing table body 10 is completed. After that,
The cutting feed motor 23 is started by the program control device 6, and the cutting feed table main body 20 is fed for cutting via the feed screw 24 and the female screw member 25. At that time, the cutting feed table main body 20
The workpiece placed thereon is grooved by the rotary cutter 5. Thereafter, the above steps are repeated by the program control device 6, and a predetermined number of grooves are sequentially formed.

In the above, the index table main body 10 is
Since the processing table is indexed and positioned by the indexing and positioning device 3 equipped with incremental linear scales 31 and 32 having high resolution, the processing table is indexed and positioned with high precision.
As a result, the dicer equipped with the processing table can process and form grooves on the workpiece with high precision.

However, in the processing table, there is a problem in that the indexing positioning accuracy of the indexing table main body 10 is difficult to reproduce with the indexing positioning accuracy of the groove formed in the workpiece. especially,
If the accuracy of indexing and positioning the groove formed in the workpiece is very strict, the above-mentioned problem will have a large effect.

Purpose of the Invention As a result of intensive research to solve the above-mentioned problems, the present inventor found that the pitting on the upper surface of the first sliding guide shaft 12 of the indexing table main body 10 is magnified and appears on the upper surface of the cutting feed table main body 20. However, by making the upper surface of the first sliding guide shaft 12 of the indexing table body 10 and the upper surface of the cutting feed table body 20 close in height, the cutting feed table body 20
It has been found that the expansion width of the pitching appearing on the upper surface of the invention can be reduced.

That is, in the processing table shown in FIG. 4, the upper surface of the first sliding guide shaft 12 has very high straightness, but the straightness is not necessarily perfect. Therefore, the indexing table 1 causes pitching when determining the indexing position.

The pitching is performed on the first pitch of the indexing table 1.
This causes a difference between the actual index movement amount on the upper surface of the sliding guide shaft 12 and the amount measured by the linear scales 31 and 32. The difference is
This is an error in index positioning, that is, a pitching error, which affects the accuracy of index positioning.

On the other hand, the upper surface of the cutting feed table main body 20 is spaced a distance H from the upper surface of the first sliding guide shaft 12, and the indexing table main body 20 generated when the indexing table main body 10 is indexed and positioned.
The pitting on the upper surface of the first sliding guide shaft 12 of No. 0 appears enlarged on the upper surface of the cutting feed table main body 20.

That is, the difference between the measured amount by the linear scales 31 and 32 and the actual indexing movement amount of the upper surface of the cutting feed table main body 20, that is, the pitching error on the upper surface of the cutting feed table main body 20, The pitching error appears larger than the pitching error on the upper surface of the sliding guide shaft 12.

The pitching error on the upper surface of the cutting feed table main body 20 is as follows: When the tolerance range of indexing positioning accuracy is set wide, the pitching error on the upper surface of the first sliding guide shaft 12 of the indexing table main body 10 is as follows. From the tolerance!?
If it is small, it will not go out of the range of the above-mentioned tolerance and no special problem will occur. However, if the tolerance range is set extremely narrow, even if the pitching error on the upper surface of the first sliding guide shaft 12 of the indexing table body 10 is much smaller than the tolerance, the cutting feed The pitching error on the upper surface of the table body 20 often falls outside the range of the above-mentioned tolerance. As a result, the index positioning accuracy cannot be obtained on the upper surface of the cutting feed table main body 20,
This poses a practical problem.

As a result of examining the cause of the above problem, the present inventor found that
This is due to the fact that the top surface of the cutting feed table main body 20 is separated from the top surface of the first sliding guide shaft 12 of the indexing table main body 10 by a distance H in height position, and the pitching error on the top surface of the cutting feed table main body 20 occurs. However, it has become clear that the larger the distance H is, the larger the distance H is, and the smaller the distance H is, the smaller the distance H is. That is, the pitching error on the top surface of the cutting feed table main body 20 can be reduced by bringing the top surface of the cutting feed table main body 20 and the top surface of the first sliding guide shaft 12 of the indexing table main body 10 close to each other. It has been found that the pitching errors on the upper surface of the first sliding guide shaft 12 can be approximated, and in particular, by making the height positions of the respective upper surfaces coincide, the respective pitching errors can be almost matched.

The present invention was completed based on the above findings, and its purpose is to provide a composite table that can index and position with high precision.

Structure of the Invention In order to achieve the above object, in the present invention, an indexing feed table and a cutting feed table are disposed one above the other, the lower table is movably guided and supported, and the upper table is movably guided and supported. A composite table in which a table is movably guided and supported on a table disposed below, an article is placed on the upper surface of the table disposed above, and the article is indexed, fed, and cut. The upper surface of the indexing movement guide member that guides and supports the indexing table is disposed at the same height as the upper surface of the table disposed above.

The indexing table may be arranged above the cutting feed table. Moreover, it is preferable to include an indexing feed mechanism having an indexing feed screw extending along the centerline thereof.

Example The present invention will be explained in detail by way of examples.

The embodiment is a processing table in which the present invention is applied to a processing table of an ultra-precision processing device, and is characterized in that a cutting feed table for placing a workpiece on an indexing table is arranged. .

This embodiment will be explained based on the drawings.

FIG. 1 is a schematic front view of this embodiment, and FIG. 2 is a plan view of FIG. 1.

As shown in the figure, the index table 1
a pair of first sliding guide shafts 12 supported by the first sliding guide shafts 12;
A sliding bearing member 11 slidably supported on a sliding guide shaft 12, a cross-sectional indexing table body 10 supported by the sliding bearing member 11, and the main body 10.
a female threaded member 15 provided at the lower part of the body, an indexing feed screw 14 screwed into the female threaded member 15, and an indexing motor 1 that drives the indexing feed screw 14.
Consists of 3.

The cutting feed table 2 includes a second sliding guide shaft 22 supported by the index table main body 10, a sliding bearing member 21 slidably supported by the second sliding guide shaft 22, and the sliding bearing member 21. A cutting feed table main body 20 supported by the main body 20, a female screw member 25 provided at the lower part of the sliding bearing member 21, and the female screw member 2
5, and a cutting feed motor 23 that drives the cutting feed screw 24.

Note that the first sliding guide shaft 12 of the indexing table 1
The upper surface and the upper surface of the cutting feed table main body 20 are arranged at the same height position. Reference numeral 5 is a rotating cutter.

The indexing and positioning device 3 also includes a closed loop feedback control device 33 that uses incremental linear scales 31 and 32 with a high resolution of 0.1 μm as detection means, so that the scale portions 31 of the linear scales 31 and 32 perform indexing. A detection section 32 of a linear scale is provided on the sliding bearing member 11 of the indexing table 1 along the upper surface of the first sliding guide shaft 12 of the table 1.
It is set in. The closed loop feedback control device 33 controls the operation of the indexing motor 13 in response to a signal from the detection section 32 of the linear scale in accordance with a command from the program control device 6.

The present embodiment is constructed as described above, and the operation of the machining table during machining work is similar to that of the conventional one, but the upper surface of the first sliding guide shaft 12 of the indexing table 1 and the cutting Since the top surface of the feed table main body 20 is arranged at the same height position, the pitching error on the top surface of the first sliding guide shaft 12 of the indexing table 1 appears magnified on the top surface of the cutting feed table main body 20. Never.

Therefore, this embodiment can reproduce the indexing positioning accuracy on the upper surface of the first sliding guide shaft of the indexing table on the upper surface of the cutting feed table main body.

In this embodiment, the height of the top surface of the first sliding guide shaft 12 of the indexing table 1 and the top surface of the cutting feed table body 20 are the same, so that the overall height of the processing table is This makes it easier to attach and detach workpieces, etc.

In addition, in the previous embodiment, the linear scale 31,
32 is the cutting feed table main body 2 as shown in FIG.
It is preferable to dispose it at the same height as the upper surface of the rotary cutter, parallel to and directly below the spindle axis A-A of the rotary cutter, and further disposed directly above the indexing feed screw 14. With this configuration, the adverse effect of yawing of the indexing table 1 on the indexing accuracy of the cutting feed table can be minimized. In FIG. 3, the same reference numerals as in FIGS. 1 and 2 indicate the same members. Reference numeral 16 denotes a support plate that supports the scale portion 31 of the linear scale, and is provided with the table body 10 of the indexing table 1. The detection unit 32 of the linear scale is provided in the aircraft body.

The present invention is not limited to the above-mentioned embodiments. For example, the processing tool may be disposed on the upper surface of the cutting feed table, and the first sliding guide shaft may be rolled on the upper surface of the indexing movement guide member. It can also be used as a guide surface.

Furthermore, although the indexing table is disposed below the cutting feed table in the above embodiment, it may be disposed above it. At this time, an article such as a workpiece or a processing tool will be placed on the top surface of the indexing table.

Effects of the Invention According to the present invention, since the upper surface of the indexing movement guide member is disposed at the same height as the upper surface of the table disposed above, the upper surface of the indexing movement guide member is This prevents the pitching error that occurs from being magnified and appearing on the upper surface of the table disposed above. This results in
It has become possible to index and position the articles placed on the table disposed above with much higher precision than before.

[Brief explanation of drawings]

Fig. 1 is a front view of an embodiment of the present invention, Fig. 2 is a plan view of Fig. 1, Fig. 3 is a plan view showing a modification of the embodiment of the invention, and Fig. 4 is a conventional example. It is. DESCRIPTION OF SYMBOLS 1... Indexing table, 10... Indexing table main body, 12... First sliding guide shaft, 2... Cutting feed table, 20... Cutting feed table main body, 22... Second sliding guide shaft, 3... ...Linear scale, 31...Scale section, 32...Detection section.

Claims (1)

[Claims] 1. An index table and a cutting feed table are arranged above and below, the lower table is movably guided and supported, and the upper table is arranged below. A composite table that is movably guided and supported on a table arranged above, places an article on the upper surface of the table disposed above, and indexes and feeds the article as well as cuts and feeds the article, and guides and supports the indexing table. A composite table characterized in that the upper surface of the indexing movement guide member is disposed at the same height as the upper surface of the table disposed above. 2. The composite table according to claim 1, wherein the indexing table is disposed below the cutting feed table. 3. The index table is provided with an index feed mechanism having an index feed screw extending along its center line.
Composite table described in section.