JPH0556376U - Adsorption device - Google Patents

Adsorption device

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Publication number
JPH0556376U
JPH0556376U JP533892U JP533892U JPH0556376U JP H0556376 U JPH0556376 U JP H0556376U JP 533892 U JP533892 U JP 533892U JP 533892 U JP533892 U JP 533892U JP H0556376 U JPH0556376 U JP H0556376U
Authority
JP
Japan
Prior art keywords
suction
valve
hole
communication hole
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP533892U
Other languages
Japanese (ja)
Other versions
JP2548137Y2 (en
Inventor
茂男 広瀬
寿夫 小島
良成 外山
研吾 小林
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Individual
Original Assignee
Individual
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Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP1992005338U priority Critical patent/JP2548137Y2/en
Publication of JPH0556376U publication Critical patent/JPH0556376U/en
Application granted granted Critical
Publication of JP2548137Y2 publication Critical patent/JP2548137Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

(57)【要約】 【目的】 弁の取付けを一括して容易に行えるようにす
ると共に、強度的にも強く製作時或いは使用時における
変形や破損を抑制できるようにする。 【構成】 吸盤プレート2の外形形状と略一致させた一
枚の薄板の各吸盤孔1対応位置に、プレス等により打抜
き孔9を一括して穿設し、支持片10により可動に支持
される弁体11を形成し、該一枚の薄板を、吸盤プレー
ト2とマニホールドとの間に介在せしめることにより、
連通孔の空気の流れにより連通孔を閉じる方向に付勢さ
れると共に連通孔閉止時に若干の空気の洩れを生じ弾性
力により開方向に付勢される弁6を構成する。
(57) [Summary] [Purpose] To make it easy to mount valves in a lump and to suppress deformation and damage during manufacture or during use as well as strength. [Structure] A punching hole 9 is collectively punched by a press or the like at a position corresponding to each sucker hole 1 of one thin plate that is substantially matched with the outer shape of the sucker plate 2, and is movably supported by a support piece 10. By forming the valve body 11 and interposing the thin plate between the suction plate 2 and the manifold,
A valve 6 that is urged in the direction of closing the communication hole by the flow of air in the communication hole and causes a slight amount of air leakage when the communication hole is closed and is urged in the opening direction by the elastic force.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial application]

本考案は、壁面歩行ロボットの壁面吸着用、或いは建築ボード等のハンドリン グ用として利用される吸着装置に関するものである。 The present invention relates to a suction device used for suctioning a wall of a wall-walking robot or for handling a building board or the like.

【0002】[0002]

【従来の技術】[Prior Art]

この種の吸着装置としては、従来、図6、図7に示される如く、複数の吸盤孔 1が穿設された吸盤プレート2に、負圧発生装置3に接続され且つ前記各吸盤孔 1と連通孔4を介して連通するマニホールド5を取付け、前記各吸盤孔1内に、 連通孔4の空気の流れにより連通孔4を閉じる方向に付勢されると共に連通孔4 の閉止時に若干の空気の洩れを生じ弾性力により開方向に付勢される弁6を配設 したものが考えられていた。 As a suction device of this type, conventionally, as shown in FIGS. 6 and 7, a suction plate 2 having a plurality of suction holes 1 is connected to a negative pressure generating device 3 and the suction holes 1 and A manifold 5 communicating through the communication hole 4 is attached, and the suction holes 1 are urged by the flow of air in the communication hole 4 in a direction to close the communication hole 4 and some air flows when the communication hole 4 is closed. It has been considered that the valve 6 is provided, which causes leakage of air and is biased in the opening direction by the elastic force.

【0003】 前記吸着装置を壁面や建築ボード等の被吸着面7に対し吸着させる際には、吸 盤プレート2を被吸着面7に押付けた状態で、負圧発生装置3を作動させると、 各吸盤孔1内の空気が各連通孔4を介してマニホールド5から外部へ排気され、 各吸盤孔1内が負圧となってマニホールド5内と同圧となるため、弁6は開状態 を維持し、吸盤プレート2が被吸着面7に吸着する。When the suction device is sucked onto the suction surface 7 such as a wall surface or a construction board, when the suction plate 2 is pressed against the suction surface 7, the negative pressure generating device 3 is operated. The air in each sucker hole 1 is exhausted to the outside from the manifold 5 through each communicating hole 4, and the inside of each sucker hole 1 becomes a negative pressure and becomes the same pressure as the inside of the manifold 5, so that the valve 6 is opened. The sucker plate 2 is held, and the sucked surface 7 sucks the sucked surface 7.

【0004】 この時、被吸着面7の一部に凹凸等があり、前記吸盤プレート2の一部が被吸 着面7に密着せず一部の吸盤孔1内が負圧にならない場合は、連通孔4を通過す る空気の流れが多くなり、吸盤孔1内とマニホールド5内の差圧により弁6が閉 止状態となって連通孔4を塞ぐため、他の吸盤孔1の負圧発生作用の低下が防止 され、吸着装置として充分な吸着力を発揮するようになっており、又、前記弁6 は閉止状態になっても連通孔4を完全に塞いでおらず吸盤孔1からマニホールド 5側へ空気が僅かに洩れているため、前記吸盤プレート2を前記被吸着面7から 引離し凹凸のない他の被吸着面7に移動させた際、吸盤プレート2は該被吸着面 7に密着し、吸盤孔1内の空気が弁6と連通孔4との僅かな隙間からマニホール ド5を経て排気され、吸盤孔1内とマニホールド5内が同圧となり、吸盤孔1内 の弁6が弾性力により開いて吸盤孔1内が負圧に保持され、吸着が行われるよう になっている。At this time, if there is unevenness in a part of the sucked surface 7 and a part of the suction plate 2 does not come into close contact with the sucked surface 7 and some of the suction holes 1 do not have a negative pressure. Since the flow of air passing through the communication hole 4 increases, the valve 6 is closed due to the pressure difference between the suction hole 1 and the manifold 5, and the communication hole 4 is closed. The pressure generating action is prevented from being lowered, and a sufficient suction force is exerted as an adsorption device. Further, even when the valve 6 is in the closed state, the communication hole 4 is not completely blocked and the suction hole 1 Since air is slightly leaking from the suction surface to the manifold 5 side, when the suction plate 2 is separated from the suction surface 7 and moved to another suction surface 7 having no unevenness, the suction plate 2 will 7, so that the air in the sucker hole 1 can be easily removed from the manifold 6 through the slight gap between the valve 6 and the communication hole 4. After being exhausted through 5, the inside of the suction cup hole 1 and the inside of the manifold 5 have the same pressure, the valve 6 inside the suction cup hole 1 is opened by the elastic force, and the inside of the suction cup hole 1 is kept at a negative pressure, so that adsorption is performed. ing.

【0005】[0005]

【考案が解決しようとする課題】[Problems to be solved by the device]

しかしながら、前述の如き吸着装置では、吸盤孔1の数だけ弁6が必要であっ て、しかも、製作時には各弁6を一個ずつ取付けなければならず、非常に手間が かかると共に、弁6は夫々外部からの力に弱く、その製作時或いは使用時におい て曲がったり折れたりしてしまうことも多かった。 However, the adsorption device as described above requires as many valves 6 as the number of suction cup holes 1, and each valve 6 must be attached one by one at the time of manufacture, which is very time-consuming and each valve 6 has to be installed. It was weak against external forces, and it was often bent or broken during its manufacture or use.

【0006】 本考案は、斯かる実情に鑑み、弁の取付けを一括して容易に行い得ると共に、 強度的にも強く製作時或いは使用時における変形や破損の起こりにくい吸着装置 を提供しようとするものである。In view of the above situation, the present invention intends to provide an adsorption device that allows the valves to be easily attached in a lump and is also strong in strength and is unlikely to be deformed or damaged during manufacture or during use. It is a thing.

【0007】[0007]

【課題を解決するための手段】[Means for Solving the Problems]

本考案は、複数の吸盤孔が穿設された吸盤プレートに、負圧発生装置に接続さ れ且つ前記各吸盤孔と連通孔を介して連通するマニホールドを取付け、前記各吸 盤孔内に、連通孔の空気の流れにより連通孔を閉じる方向に付勢されると共に連 通孔閉止時に若干の空気の洩れを生じ弾性力により開方向に付勢される弁を配設 した吸着装置において、吸盤プレートと略等しい外形形状を有し且つ各吸盤孔対 応位置に支持片により可動に支持される弁体が形成されるよう打抜き孔を穿設し てなる一枚の薄板を、吸盤プレートとマニホールドとの間に介在せしめて前記弁 を構成したことを特徴とするものである。 According to the present invention, a suction plate having a plurality of suction holes is provided with a manifold which is connected to a negative pressure generator and communicates with the suction holes through communication holes. In a suction device equipped with a valve that is urged in the direction of closing the communication hole by the flow of air in the communication hole and causes a slight air leakage when the communication hole is closed and is urged in the opening direction by the elastic force. The suction plate and the manifold are a single thin plate having an outer shape substantially equal to that of the plate and having punched holes formed at the corresponding positions of the suction cup holes so that a valve element movably supported by the support pieces is formed. It is characterized in that the valve is constituted by being interposed between the valve and the valve.

【0008】[0008]

【作用】[Action]

従って、吸盤プレートと略等しい外形形状を有し且つ各吸盤孔対応位置に支持 片により可動に支持される弁体が形成されるよう打抜き孔を穿設してなる一枚の 薄板を、吸盤プレートとマニホールドとの間に介在せしめて弁を構成するように しているため、弁の取付けが一括して容易に行われると共に、弁体が支持片に支 持されていることにより、外部からの力に強くなり、その製作時或いは使用時に おいて曲がったり折れたりしてしまうことが少なくなる。 Therefore, a single thin plate having an outer shape substantially equal to that of the suction plate and punching holes formed at the positions corresponding to the suction holes so that a valve element movably supported by the support piece is formed, Since the valve is constructed by interposing it between the valve and the manifold, the valves can be easily mounted all at once, and the valve element is supported by the support piece, so It is stronger and less likely to bend or break during its manufacture or use.

【0009】[0009]

【実施例】【Example】

以下、図面に基づいて本考案の実施例を説明する。 An embodiment of the present invention will be described below with reference to the drawings.

【0010】 図1〜図5は本考案の一実施例であって、図中、図6、図7と同一の符号を付 した部分は同一物を表わしており、基本的な構成は図6、図7に示す従来のもの と同様であるが、本実施例の特徴とするところは、図1〜図5に示す如く、吸盤 プレート2の外形形状と略一致させた一枚の薄板8の各吸盤孔1対応位置に、プ レス等により打抜き孔9を一括して穿設し、支持片10により可動に支持される 弁体11を形成し、該一枚の薄板8を、吸盤プレート2とマニホールド5との間 に介在せしめることにより、連通孔4の空気の流れにより連通孔4を閉じる方向 に付勢されると共に連通孔4閉止時に若干の空気の洩れを生じ弾性力により開方 向に付勢される弁6を構成した点にある。1 to 5 show an embodiment of the present invention. In the drawings, the parts denoted by the same reference numerals as those in FIGS. 6 and 7 represent the same things, and the basic configuration is shown in FIG. Although it is similar to the conventional one shown in FIG. 7, the feature of the present embodiment is that, as shown in FIGS. 1 to 5, one thin plate 8 is made to substantially match the outer shape of the suction plate 2. A punching hole 9 is collectively formed at a position corresponding to each sucker hole 1 by a press or the like, and a valve element 11 movably supported by a support piece 10 is formed. The one thin plate 8 is attached to the sucker plate 2 And the manifold 5 are urged in the direction of closing the communication hole 4 by the air flow of the communication hole 4 and at the time of closing the communication hole 4, some air leaks and the elastic force causes the opening direction. The point is that the valve 6 that is biased to is configured.

【0011】 尚、図4中、12は各弁体11のマニホールド5側に付着せしめたゴム等のシ ール部材、13は各弁体11に空気による力が作用していない通常の状態におい て連通孔4が開かれた状態に保持されるよう該連通孔4の弁体11側に形成した 大径部である。In FIG. 4, 12 is a seal member made of rubber or the like attached to the manifold 5 side of each valve body 11, and 13 is a normal state in which no air force acts on each valve body 11. Is a large diameter portion formed on the valve body 11 side of the communication hole 4 so that the communication hole 4 is held in an open state.

【0012】 本実施例においては、吸着装置を壁面や建築ボード等の被吸着面7に対し吸着 させる際には、吸盤プレート2を被吸着面7に押付けた状態で、負圧発生装置3 を作動させると、各吸盤孔1内の空気が各連通孔4を介してマニホールド5から 外部へ排気され、各吸盤孔1内が負圧となってマニホールド5内と同圧となるた め、弁6の支持片10によって支持された弁体11は開状態を維持し、吸盤プレ ート2が被吸着面7に吸着し、この時、被吸着面7の一部に凹凸等があり、前記 吸盤プレート2の一部が被吸着面7に密着せず一部の吸盤孔1内が負圧にならな い場合は、連通孔4を通過する空気の流れが多くなり、吸盤孔1内とマニホール ド5内の差圧により前記弁体11が連通孔4側に吸引され弁6が閉止状態となっ て連通孔4を塞ぐため、他の吸盤孔1の負圧発生作用の低下が防止され、吸着装 置として充分な吸着力を発揮し、又、前記弁6は閉止状態になっても連通孔4を 完全に塞いでおらず吸盤孔1からマニホールド5側へ空気が僅かに洩れているた め、前記吸盤プレート2を前記被吸着面7から引離し凹凸のない他の被吸着面7 に移動させた際、吸盤プレート2は該被吸着面7に密着し、吸盤孔1内の空気が 弁6と連通孔4との僅かな隙間からマニホールド5を経て排気され、吸盤孔1内 とマニホールド5内が同圧となり、吸盤孔1内の弁6が弾性力により開いて吸盤 孔1内が負圧に保持され、吸着が行われる。In this embodiment, when the suction device is sucked onto the suction surface 7 such as a wall surface or a building board, the negative pressure generating device 3 is pressed while the suction plate 2 is pressed against the suction surface 7. When operated, the air in each suction cup hole 1 is exhausted to the outside from the manifold 5 through each communication hole 4, and the inside of each suction cup hole 1 becomes a negative pressure and becomes the same pressure as the inside of the manifold 5, so that the valve The valve element 11 supported by the support piece 10 of 6 maintains the open state, and the suction plate 2 is adsorbed to the adsorbed surface 7, and at this time, the adsorbed surface 7 has irregularities on a part thereof. If a part of the suction plate 2 does not come into close contact with the attracted surface 7 and a part of the suction holes 1 does not have a negative pressure, the air flow through the communication holes 4 increases and the suction holes 1 and Due to the differential pressure in the manifold 5, the valve body 11 is sucked toward the communication hole 4 side and the valve 6 is closed. Since the communication hole 4 is closed, the negative pressure generating action of the other suction cup holes 1 is prevented from decreasing, and a sufficient suction force is exhibited as the suction device. Further, even if the valve 6 is closed, the communication hole 4 is closed. Since air is slightly leaked from the suction cup hole 1 to the manifold 5 side without completely closing the suction cup plate 2, the suction cup plate 2 is separated from the suction surface 7 and moved to another suction surface 7 having no unevenness. At this time, the sucker plate 2 comes into close contact with the attracted surface 7, and the air in the sucker hole 1 is exhausted through the manifold 5 from the slight gap between the valve 6 and the communication hole 4, and the sucker hole 1 and the manifold 5 Becomes the same pressure, the valve 6 in the suction cup hole 1 is opened by the elastic force, the inside of the suction cup hole 1 is held at a negative pressure, and adsorption is performed.

【0013】 更に、本実施例の場合、吸盤プレート2と略等しい外形形状を有し且つ各吸盤 孔1対応位置に支持片10により可動に支持される弁体11が形成されるよう打 抜き孔9を穿設してなる一枚の薄板8を、吸盤プレート2とマニホールド5との 間に介在せしめて弁6を構成するようにしているため、弁6の取付けが一括して 容易に行われると共に、弁体11が支持片10に支持されていることにより、外 部からの力に強くなり、その製作時或いは使用時において曲がったり折れたりし てしまうことが少なくなる。Further, in the case of this embodiment, a punching hole is formed so that a valve body 11 having an outer shape substantially equal to that of the suction plate 2 and movably supported by the support piece 10 is formed at a position corresponding to each suction hole 1. Since a single thin plate 8 formed by drilling 9 is interposed between the suction plate 2 and the manifold 5 to form the valve 6, the valves 6 can be easily mounted collectively. At the same time, since the valve element 11 is supported by the support piece 10, the valve element 11 is strong against the force from the outside and is less likely to bend or break during its manufacture or use.

【0014】 尚、本考案の吸着装置は、上述の実施例にのみ限定されるものではなく、本考 案の要旨を逸脱しない範囲内において種々変更を加え得ることは勿論である。It should be noted that the adsorption device of the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications can be made without departing from the scope of the present invention.

【0015】[0015]

【考案の効果】[Effect of the device]

以上説明したように、本考案の吸着装置によれば、弁の取付けを一括して容易 に行い得ると共に、強度的にも強く製作時或いは使用時における変形や破損を抑 制し得るという優れた効果を奏し得る。 As described above, according to the adsorption device of the present invention, it is possible to easily mount the valves in a lump and also to suppress deformation and damage during manufacture or during use while also being strong in strength. It can be effective.

【図面の簡単な説明】[Brief description of drawings]

【図1】本考案の一実施例の側断面図である。FIG. 1 is a side sectional view of an embodiment of the present invention.

【図2】図1のII−II矢視図である。2 is a view taken along the line II-II of FIG.

【図3】図1のIII−III矢視図である。FIG. 3 is a view on arrow III-III in FIG.

【図4】図1のIV部拡大図である。FIG. 4 is an enlarged view of section IV in FIG.

【図5】図4のV−V矢視図である。5 is a view on arrow VV in FIG. 4. FIG.

【図6】従来例の側断面図である。FIG. 6 is a side sectional view of a conventional example.

【図7】図6のVII−VII矢視図である。7 is a view taken along the line VII-VII in FIG.

【符号の説明】[Explanation of symbols]

1 吸盤孔 2 吸盤プレート 3 負圧発生装置 4 連通孔 5 マニホールド 6 弁 8 薄板 9 打抜き孔 10 支持片 11 弁体 1 Sucker hole 2 Sucker plate 3 Negative pressure generating device 4 Communication hole 5 Manifold 6 Valve 8 Thin plate 9 Punching hole 10 Support piece 11 Valve body

───────────────────────────────────────────────────── フロントページの続き (72)考案者 外山 良成 東京都江東区豊洲三丁目1番15号 石川島 播磨重工業株式会社東二テクニカルセンタ ー内 (72)考案者 小林 研吾 東京都江東区豊洲三丁目1番15号 石川島 播磨重工業株式会社東二テクニカルセンタ ー内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Ryosei Toyama 1-3-15 Toyosu, Koto-ku, Tokyo Ishikawajima Harima Heavy Industries Co., Ltd. Toni Technical Center (72) Kengo Kobayashi 3-chome, Toyosu, Koto-ku, Tokyo No. 1-15 Ishikawajima Harima Heavy Industries Co., Ltd. Toji Technical Center

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 複数の吸盤孔が穿設された吸盤プレート
に、負圧発生装置に接続され且つ前記各吸盤孔と連通孔
を介して連通するマニホールドを取付け、前記各吸盤孔
内に、連通孔の空気の流れにより連通孔を閉じる方向に
付勢されると共に連通孔閉止時に若干の空気の洩れを生
じ弾性力により開方向に付勢される弁を配設した吸着装
置において、吸盤プレートと略等しい外形形状を有し且
つ各吸盤孔対応位置に支持片により可動に支持される弁
体が形成されるよう打抜き孔を穿設してなる一枚の薄板
を、吸盤プレートとマニホールドとの間に介在せしめて
前記弁を構成したことを特徴とする吸着装置。
1. A suction plate having a plurality of suction holes formed therein is provided with a manifold connected to the negative pressure generator and communicating with the suction holes through the communication holes. In the adsorption device provided with a valve that is urged in the direction of closing the communication hole by the flow of air in the hole and causes a slight air leakage when the communication hole is closed and is urged in the opening direction by the elastic force, Between the sucker plate and the manifold, one thin plate having substantially the same outer shape and punching holes so that a valve body movably supported by the support piece is formed at a position corresponding to each sucker hole is formed. An adsorbing device, characterized in that the valve is formed by interposing a valve.
JP1992005338U 1992-01-16 1992-01-16 Suction device Expired - Fee Related JP2548137Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1992005338U JP2548137Y2 (en) 1992-01-16 1992-01-16 Suction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1992005338U JP2548137Y2 (en) 1992-01-16 1992-01-16 Suction device

Publications (2)

Publication Number Publication Date
JPH0556376U true JPH0556376U (en) 1993-07-27
JP2548137Y2 JP2548137Y2 (en) 1997-09-17

Family

ID=11608444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1992005338U Expired - Fee Related JP2548137Y2 (en) 1992-01-16 1992-01-16 Suction device

Country Status (1)

Country Link
JP (1) JP2548137Y2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009057207A (en) * 2007-08-07 2009-03-19 Seiko Epson Corp Sheet adsorbing device, conveying device, and image forming apparatus
JP2010089857A (en) * 2008-10-03 2010-04-22 Riso Kagaku Corp Recording medium carrying mechanism of printer
JP5878269B1 (en) * 2015-03-31 2016-03-08 株式会社メイコー Substrate adsorption apparatus and substrate adsorption method
JP2016539019A (en) * 2013-11-04 2016-12-15 イョット. シュマルツ ゲゼルシャフト ミット ベシュレンクテル ハフツング Suction gripping device
JP2017159411A (en) * 2016-03-10 2017-09-14 住友重機械工業株式会社 Suction device
CN109674569A (en) * 2018-12-24 2019-04-26 王秋华 Fixed colostomy bag bottom plate
JP2022106009A (en) * 2021-01-06 2022-07-19 学校法人 名城大学 Adsorption device
CN118009210A (en) * 2024-04-08 2024-05-10 哈尔滨学院 Computer projector hanger

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58120485A (en) * 1982-01-12 1983-07-18 日本電気株式会社 Robot hand for differential diameter cylindrical flexible work constant pressure chuck
JPH0373289A (en) * 1989-08-12 1991-03-28 Sanee Giken Kk Suction holding device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58120485A (en) * 1982-01-12 1983-07-18 日本電気株式会社 Robot hand for differential diameter cylindrical flexible work constant pressure chuck
JPH0373289A (en) * 1989-08-12 1991-03-28 Sanee Giken Kk Suction holding device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009057207A (en) * 2007-08-07 2009-03-19 Seiko Epson Corp Sheet adsorbing device, conveying device, and image forming apparatus
JP2010089857A (en) * 2008-10-03 2010-04-22 Riso Kagaku Corp Recording medium carrying mechanism of printer
JP2016539019A (en) * 2013-11-04 2016-12-15 イョット. シュマルツ ゲゼルシャフト ミット ベシュレンクテル ハフツング Suction gripping device
JP2020019138A (en) * 2013-11-04 2020-02-06 イョット.シュマルツ ゲゼルシャフト ミット ベシュレンクテル ハフツング Suction gripping device
JP5878269B1 (en) * 2015-03-31 2016-03-08 株式会社メイコー Substrate adsorption apparatus and substrate adsorption method
WO2016157422A1 (en) * 2015-03-31 2016-10-06 株式会社メイコー Substrate suctioning device and substrate suctioning method
WO2016158301A1 (en) * 2015-03-31 2016-10-06 株式会社メイコー Substrate suctioning device and substrate suctioning method
TWI672203B (en) * 2015-03-31 2019-09-21 日商名幸電子股份有限公司 Substrate adsorption device and substrate adsorption method
JP2017159411A (en) * 2016-03-10 2017-09-14 住友重機械工業株式会社 Suction device
CN109674569A (en) * 2018-12-24 2019-04-26 王秋华 Fixed colostomy bag bottom plate
JP2022106009A (en) * 2021-01-06 2022-07-19 学校法人 名城大学 Adsorption device
CN118009210A (en) * 2024-04-08 2024-05-10 哈尔滨学院 Computer projector hanger

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