JPH0558061B2 - - Google Patents

Info

Publication number
JPH0558061B2
JPH0558061B2 JP61123081A JP12308186A JPH0558061B2 JP H0558061 B2 JPH0558061 B2 JP H0558061B2 JP 61123081 A JP61123081 A JP 61123081A JP 12308186 A JP12308186 A JP 12308186A JP H0558061 B2 JPH0558061 B2 JP H0558061B2
Authority
JP
Japan
Prior art keywords
electron
electron impact
sensor
evaporated
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61123081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62280360A (ja
Inventor
Bunzo Kyonaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP61123081A priority Critical patent/JPS62280360A/ja
Publication of JPS62280360A publication Critical patent/JPS62280360A/ja
Publication of JPH0558061B2 publication Critical patent/JPH0558061B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP61123081A 1986-05-28 1986-05-28 真空蒸着のモニタリング用センサ− Granted JPS62280360A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61123081A JPS62280360A (ja) 1986-05-28 1986-05-28 真空蒸着のモニタリング用センサ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61123081A JPS62280360A (ja) 1986-05-28 1986-05-28 真空蒸着のモニタリング用センサ−

Publications (2)

Publication Number Publication Date
JPS62280360A JPS62280360A (ja) 1987-12-05
JPH0558061B2 true JPH0558061B2 (de) 1993-08-25

Family

ID=14851723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61123081A Granted JPS62280360A (ja) 1986-05-28 1986-05-28 真空蒸着のモニタリング用センサ−

Country Status (1)

Country Link
JP (1) JPS62280360A (de)

Also Published As

Publication number Publication date
JPS62280360A (ja) 1987-12-05

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