JPH0558729A - Piezoelectric ceramic composition - Google Patents
Piezoelectric ceramic compositionInfo
- Publication number
- JPH0558729A JPH0558729A JP3244298A JP24429891A JPH0558729A JP H0558729 A JPH0558729 A JP H0558729A JP 3244298 A JP3244298 A JP 3244298A JP 24429891 A JP24429891 A JP 24429891A JP H0558729 A JPH0558729 A JP H0558729A
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- Prior art keywords
- composition
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- piezoelectric
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は圧電磁器、より詳しくは
アクチュエ−タ−材料として好適な圧電磁器組成物に関
するものである。FIELD OF THE INVENTION The present invention relates to a piezoelectric ceramic, and more particularly to a piezoelectric ceramic composition suitable as an actuator material.
【0002】[0002]
【従来の技術】近年、圧電磁器の圧電効果を利用した圧
電アクチュエ−タ−は、精密位置決め、リレ−、ファン
等、様々な分野で実用化されつつある。圧電アクチュエ
−タ−の圧電効果による機械的変位の大きさは、圧電磁
器の圧電定数dの大きさに依存し、dの値が大きいほど
変位量は大きくなる。2. Description of the Related Art In recent years, piezoelectric actuators utilizing the piezoelectric effect of piezoelectric ceramics have been put to practical use in various fields such as precision positioning, relays and fans. The magnitude of mechanical displacement due to the piezoelectric effect of the piezoelectric actuator depends on the magnitude of the piezoelectric constant d of the piezoelectric ceramic, and the larger the value of d, the greater the amount of displacement.
【0003】dの大きな圧電磁器組成物として、PbT
iO3−PbZrO3−Pb(Ni1/3Nb2/3)
O3−Pb(Zn1/3Nb2/3)O3系組成物が用
いられており(例えば、特公昭49−4280号公報
等)、各種の用途に合わせて改良がなされている。また
特開平2−258662号公報には、組成の検討により
比較的キュリ−温度が高く、dの大きな圧電磁器組成物
が開示されている。As a piezoelectric ceramic composition having a large d, PbT
iO 3 -PbZrO 3 -Pb (Ni 1/3 Nb 2/3 )
O 3 -Pb (Zn 1/3 Nb 2/3 ) O 3 composition is used (for example, Japanese Patent Publication No. 49-4280), and has been improved according to various uses. Further, JP-A-2-258662 discloses a piezoelectric ceramic composition having a relatively high Curie temperature and a large d by studying the composition.
【0004】[0004]
【発明が解決しようとする課題】圧電磁器をアクチュエ
−タ−に用いる場合、その変位量を大きくするため圧電
定数dが大きいという特性が要求される。また同時に温
度変化に対する変位量の安定性が重要である。一般に圧
電磁器の圧電定数、比誘電率等の圧電諸定数は温度の上
昇に伴い増大し、キュリ−温度で極大値を示す。このた
め、圧電アクチュエ−タ−として使用するために常温付
近での温度特性を平坦なものにするには、圧電磁器のキ
ュリ−温度をより高くすることが重要である。従って、
圧電アクチュエ−タ−材料としてより大きなd定数を有
し、かつキュリ−温度が高い圧電磁器組成物が望まれて
いる。When a piezoelectric ceramic is used as an actuator, it is required that the piezoelectric constant d be large in order to increase the displacement amount. At the same time, the stability of the displacement amount against temperature changes is important. Generally, piezoelectric constants such as piezoelectric constants and relative permittivities of piezoelectric ceramics increase with increasing temperature, and show maximum values at the Curie temperature. Therefore, it is important to raise the Curie temperature of the piezoelectric ceramic in order to make the temperature characteristics flat near room temperature for use as a piezoelectric actuator. Therefore,
As a piezoelectric actuator material, a piezoelectric ceramic composition having a larger d constant and a higher Curie temperature is desired.
【0005】[0005]
【課題を解決するための手段】本発明者らはPbTiO
3−PbZrO3−Pb(Ni1/3Nb2/3)O3
−Pb(Zn1/3Nb2/3)O3系圧電磁器に加え
る添加物について種々の検討を行った結果、その組成、
添加物の種類、添加量により前記の課題が解決されるこ
とを見出だした。The present inventors have found that PbTiO 3
3 -PbZrO 3 -Pb (Ni 1/3 Nb 2/3) O 3
-Pb (Zn 1/3 Nb 2/3 ) O 3 As a result of various studies on additives to be added to the piezoelectric ceramic, the composition,
It has been found that the above problems can be solved by the kind and the amount of the additive.
【0006】即ち、本発明は、チタン酸鉛[PbTiO
3]、ジルコン酸鉛[PbZrO3]、ニッケル・ニオ
ブ酸鉛[Pb(Ni1/3Nb2/3)O3]、および
亜鉛・ニオブ酸鉛[Pb(Zn1/3Nb2/3)
O3]からなる組成物を、aPbTiO3−bPbZr
O3−cPb[(Ni1−XZnX)1/3N
b2/3]O3(但し、a,b,cはモル分率を示し、
a+b+c=1である)で表したとき、その三成分系組
成図において、組成が (i)0.15≦X≦0.50のとき 以下の各点を結ぶ線上、及びこの3点に囲まれる範囲
内、 A(a=0.275,b=0.275,c=0.450) B(a=0.416,b=0.384,c=0.200) C(a=0.374,b=0.176,c=0.450) (ii)0.50<X≦0.85のとき 以下の各点を結ぶ線上、及びこの4点に囲まれる範囲
内、 D(a=0.275,b=0.275,c=0.450) E(a=0.416,b=0.384,c=0.200) F(a=0.374,b=0.176,c=0.450) G(a=0.286,b=0.134,c=0.580) にある組成物に、NiO、CuO、Bi2O3、W
O3、SnO2、およびCoOからなる群から選ばれた
一種類以上の金属酸化物を0.01−3mol%含有し
てなる圧電磁器組成物を提供するものである。That is, the present invention relates to lead titanate [PbTiO 3
3 ], lead zirconate [PbZrO 3 ], nickel lead niobate [Pb (Ni 1/3 Nb 2/3 ) O 3 ], and zinc lead niobate [Pb (Zn 1/3 Nb 2/3 ).
O 3 ], a composition of aPbTiO 3 -bPbZr
O 3 -cPb [(Ni 1- X Zn X) 1/3 N
b 2/3 ] O 3 (where a, b, and c are mole fractions,
a + b + c = 1), the composition is (i) 0.13 ≦ X ≦ 0.50 in the three-component composition diagram. It is surrounded by the line connecting the following points and these three points. Within the range, A (a = 0.275, b = 0.275, c = 0.450) B (a = 0.416, b = 0.384, c = 0.200) C (a = 0.374) , B = 0.176, c = 0.450) (ii) When 0.50 <X ≦ 0.85 On the line connecting the following points and within the range surrounded by these four points, D (a = 0 .275, b = 0.275, c = 0.450) E (a = 0.416, b = 0.384, c = 0.200) F (a = 0.374, b = 0.176, c = 0.450) G (a = 0.286 , b = 0.134, the composition in the c = 0.580), NiO, CuO , Bi 2 O 3, W
A piezoelectric ceramic composition containing 0.01-3 mol% of one or more kinds of metal oxides selected from the group consisting of O 3 , SnO 2 , and CoO.
【0007】以下、本発明を詳細に説明する。The present invention will be described in detail below.
【0008】本発明における添加物としてはNiO、C
uO、Bi2O3、WO3、SnO2、CoOからなる
金属酸化物であり、これらは上記した組成物に対して、
0.01−3mol%添加される。添加量が0.01m
ol%未満と少ない場合は特性の向上に対する効果が顕
著でなく、3mol%を越える場合はさらなる特性の向
上が認められずキュリ−点が低下して有用性が失われる
ためである。これら添加物は単独で添加しても良く、二
種以上混合して用いても良い。The additives in the present invention include NiO and C.
uO, a Bi 2 O 3, WO 3, a metal oxide comprising SnO 2, CoO, the composition thereof is as described above,
0.01-3 mol% is added. Addition amount is 0.01m
If it is less than ol%, the effect of improving the properties is not remarkable, and if it exceeds 3 mol%, further improvement of the properties is not observed and the Curie point is lowered to lose the usefulness. These additives may be added alone or in combination of two or more.
【0009】本発明の圧電磁器組成物を製造する際に用
いる原料粉末としては、得られる組成物を構成する各金
属元素を含む化合物、例えば酸化物、炭酸塩等を用いれ
ばよい。これらの化合物を目的の組成となるよう調製
し、例えば、ボ−ルミル等を用いて混合し、混合物を加
熱処理する。この際の加熱処理は仮焼成を行わず比較的
高い温度で焼結処理することもできるが、仮焼成した
後、より高い温度で焼結処理することが、より特性の高
い組成物を得る上で望ましい。ここで行う仮焼成は例え
ば600〜900℃で1〜6時間程度であり、得られた
仮焼成物は粉砕、整粒して粉末とする。このようにして
得られた粉末を、金型プレス、ラバ−プレス等により所
望の形に成形して焼結させることにより圧電磁器とす
る。この際の焼結は例えば1000〜1400℃で1〜
10時間程度保持して行えば良い。この際の雰囲気は特
に制限されないが大気中で行うことができる。As the raw material powder used for producing the piezoelectric ceramic composition of the present invention, a compound containing each metal element constituting the obtained composition, such as an oxide or a carbonate, may be used. These compounds are prepared so as to have a desired composition, mixed with, for example, a ball mill, and the mixture is heat treated. The heat treatment at this time can be performed at a relatively high temperature without performing calcination, but it is preferable to perform the calcination at a higher temperature after calcination in order to obtain a composition having higher properties. Is desirable. The calcination performed here is, for example, at 600 to 900 ° C. for about 1 to 6 hours, and the obtained calcinated product is pulverized and sized to obtain powder. The powder thus obtained is formed into a desired shape by a die press, a rubber press, or the like and sintered to obtain a piezoelectric ceramic. The sintering at this time is, for example, 1 to 1000 to 1400 ° C.
It may be held for about 10 hours. The atmosphere at this time is not particularly limited, but the atmosphere can be performed.
【0010】なお、本発明の圧電磁器組成物中の添加物
は、上述のように最初から添加してもよく、又、仮焼成
し、粉砕、整粒したチタン酸鉛−ジルコン酸鉛−ニッケ
ル・ニオブ酸鉛−亜鉛・ニオブ酸鉛組成物粉末に混合添
加してもよい。The additives in the piezoelectric ceramic composition of the present invention may be added from the beginning as described above, or may be calcined, pulverized and sized to obtain lead titanate-lead zirconate-nickel. -Lead niobate-zinc-lead niobate composition powder may be mixed and added.
【0011】[0011]
【発明の効果】本発明の圧電磁器組成物は、圧電定数d
が大きく、高いキュリ−温度を有しているため、大きな
変位量と、温度安定性が要求されるアクチュエ−タ−の
材料として極めて有用である。The piezoelectric ceramic composition of the present invention has a piezoelectric constant d.
Since it has a large Curie temperature and a high Curie temperature, it is extremely useful as a material for an actuator that requires a large amount of displacement and temperature stability.
【0012】[0012]
【実施例】以下、本発明を実施例をもって更に説明する
が、本発明は、これらに限定されるものではない。EXAMPLES The present invention will be further described below with reference to examples, but the present invention is not limited thereto.
【0013】実施例1−14,比較例1−2 出発原料としてPbO,TiO2,ZrO2,NiO,
ZnO,Nb2O5および添加物を表1に示した組成に
なるよう秤量し、ボ−ルミルで湿式混合した後、乾燥
し、大気中900℃で2時間仮焼した。そして得られた
仮焼物を再度ボ−ルミルで湿式粉砕し、目的組成粉体を
得た。この粉体をペレット状に成形し、1200℃で2
時間焼結を行った。Example 1-14, Comparative Example 1-2 As starting materials, PbO, TiO 2 , ZrO 2 , NiO,
ZnO, Nb 2 O 5 and additives were weighed so as to have the composition shown in Table 1, wet-mixed with a ball mill, dried, and calcined in the air at 900 ° C. for 2 hours. The obtained calcined product was again wet-milled with a ball mill to obtain a target composition powder. This powder is molded into pellets and
Time sintering was performed.
【0014】得られた焼結体を直径20mm,厚さ1
mmの円板状、長さ12mm,幅3mm,厚さ1mm
の短冊状に切り出し、厚さ方向の両面に銀電極を焼き付
けた。この測定用試料に120℃のシリコンオイル中で
2kv/mmの直流電圧を5分間印加して分極処理し
た。24時間80℃の大気中に放置した後、ベクトルイ
ンピ−ダンスメ−タ−を用いて圧電定数d31、電気機
械結合係数Kp、1KHzにおける比誘電率εT 33/
ε0、およびキュリ−温度Tcを測定した。その結果を
表2に示した。The obtained sintered body has a diameter of 20 mm and a thickness of 1
mm disk shape, length 12 mm, width 3 mm, thickness 1 mm
Was cut into strips, and silver electrodes were baked on both sides in the thickness direction. A polarization voltage was applied to the measurement sample by applying a DC voltage of 2 kv / mm for 5 minutes in silicon oil at 120 ° C. After being left in the air at 80 ° C. for 24 hours, the piezoelectric constant d 31 , the electromechanical coupling coefficient Kp, and the relative dielectric constant ε T 33 / KHz at 1 KHz were measured using a vector impedance meter.
ε 0 and Curie temperature Tc were measured. The results are shown in Table 2.
【0015】表2から明らかなように、実施例のd31
の値は、その絶対値がいずれも比較例と比べて大きく、
又、Tcの値は比較例とほぼ同等で良好な値を示してい
ることがわかる。As is apparent from Table 2, d 31 of the example
The absolute value of each is larger than that of the comparative example,
Further, it can be seen that the value of Tc is almost the same as that of the comparative example and shows a good value.
【0016】[0016]
【表1】 [Table 1]
【0017】[0017]
【表2】 [Table 2]
【図1】 本発明の組成物の一成分であるaPbTiO
3−bPbZrO3−cPb[(Ni1−XZnX)
1/3Nb2/3]O3において、Xが0.15≦X≦
0.50の場合の組成範囲を示す図である。FIG. 1 aPbTiO which is one component of the composition of the present invention
3 -bPbZrO 3 -cPb [(Ni 1 -X Zn X)
In 1/3 Nb 2/3 ] O 3 , X is 0.15 ≦ X ≦
It is a figure which shows the composition range in case of 0.50.
【図2】 本発明の組成物の一成分であるaPbTiO
3−bPbZrO3−cPb[(Ni1−XZnX)
1/3Nb2/3]O3において、Xが0.50<X≦
0.85の場合の組成範囲を示す図である。FIG. 2 aPbTiO, a component of the composition of the present invention
3 -bPbZrO 3 -cPb [(Ni 1 -X Zn X)
In 1/3 Nb 2/3 ] O 3 , X is 0.50 <X ≦
It is a figure which shows the composition range in case of 0.85.
Claims (1)
酸鉛[PbZrO3]、ニッケル・ニオブ酸鉛[Pb
(Ni1/3Nb2/3)O3]、および亜鉛・ニオブ
酸鉛[Pb(Zn1/3Nb2/3)O3]からなる組
成物を、aPbTiO3−bPbZrO3−cPb
[(Ni1−XZnX)1/3Nb2/3]O3(但
し、a,b,cはモル分率を示し、a+b+c=1であ
る)で表したとき、その三成分系組成図において、組成
が (i)0.15≦X≦0.50のとき 以下の各点を結ぶ線上、及びこの3点に囲まれる範囲
内、 A(a=0.275,b=0.275,c=0.450) B(a=0.416,b=0.384,c=0.200) C(a=0.374,b=0.176,c=0.450) (ii)0.50<X≦0.85のとき 以下の各点を結ぶ線上、及びこの4点に囲まれる範囲
内、 D(a=0.275,b=0.275,c=0.450) E(a=0.416,b=0.384,c=0.200) F(a=0.374,b=0.176,c=0.450) G(a=0.286,b=0.134,c=0.580) にある組成物に、NiO、CuO、Bi2O3、W
O3、SnO2、およびCoOからなる群から選ばれた
一種類以上の金属酸化物を0.01−3mol%含有し
てなる圧電磁器組成物。1. Lead titanate [PbTiO 3 ], lead zirconate [PbZrO 3 ], nickel lead niobate [Pb
(Ni 1/3 Nb 2/3 ) O 3 ], and lead zinc niobate [Pb (Zn 1/3 Nb 2/3 ) O 3 ], aPbTiO 3 -bPbZrO 3 -cPb
When expressed as [(Ni 1-X Zn X ) ⅓ Nb 2/3 ] O 3 (where a, b, and c are molar fractions, and a + b + c = 1), the three-component system composition In the figure, when the composition is (i) 0.15 ≦ X ≦ 0.50, on the line connecting the following points and within the range surrounded by these three points, A (a = 0.275, b = 0.275) , C = 0.450) B (a = 0.416, b = 0.384, c = 0.200) C (a = 0.374, b = 0.176, c = 0.450) (ii) When 0.50 <X ≦ 0.85 On the line connecting the following points and within the range surrounded by these four points, D (a = 0.275, b = 0.275, c = 0.450) E (A = 0.416, b = 0.384, c = 0.200) F (a = 0.374, b = 0.176, c = 0.450) G (a = 0.28 , B = 0.134, the composition in the c = 0.580), NiO, CuO , Bi 2 O 3, W
A piezoelectric ceramic composition containing 0.01-3 mol% of one or more kinds of metal oxides selected from the group consisting of O 3 , SnO 2 , and CoO.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3244298A JPH0558729A (en) | 1991-08-30 | 1991-08-30 | Piezoelectric ceramic composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3244298A JPH0558729A (en) | 1991-08-30 | 1991-08-30 | Piezoelectric ceramic composition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0558729A true JPH0558729A (en) | 1993-03-09 |
Family
ID=17116660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3244298A Pending JPH0558729A (en) | 1991-08-30 | 1991-08-30 | Piezoelectric ceramic composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0558729A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5500142A (en) * | 1993-11-04 | 1996-03-19 | Mitsui Petrochemical Industries, Ltd. | Piezoelectric ceramics |
| KR100498886B1 (en) * | 2002-11-27 | 2005-07-04 | 한국전기연구원 | Piezoelectric ceramic composite for application to multilayer actuator and manufacturing method thereof |
| US7344654B2 (en) | 2004-12-22 | 2008-03-18 | Murata Manufacturing Co., Ltd. | Piezoelectric ceramic composition and piezoelectric actuator |
| US7595006B2 (en) | 2005-01-14 | 2009-09-29 | Atsushi Yamamoto | Piezoelectric ceramic composition and piezoelectric actuator |
| US7965020B2 (en) | 2007-02-07 | 2011-06-21 | Murata Manufacturing Co., Ltd. | Piezoelectric ceramic and piezoelectric element |
| KR101471001B1 (en) * | 2013-06-27 | 2014-12-09 | 주식회사 이노칩테크놀로지 | Piezoelectric material and it`s fabrication method for multi-layer enerty harvester device |
| CN109824357A (en) * | 2018-12-21 | 2019-05-31 | 贵州振华红云电子有限公司 | High-voltage electricity and the low temperature co-fired piezoelectric ceramics of high dielectric and preparation method thereof |
-
1991
- 1991-08-30 JP JP3244298A patent/JPH0558729A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5500142A (en) * | 1993-11-04 | 1996-03-19 | Mitsui Petrochemical Industries, Ltd. | Piezoelectric ceramics |
| KR100498886B1 (en) * | 2002-11-27 | 2005-07-04 | 한국전기연구원 | Piezoelectric ceramic composite for application to multilayer actuator and manufacturing method thereof |
| US7344654B2 (en) | 2004-12-22 | 2008-03-18 | Murata Manufacturing Co., Ltd. | Piezoelectric ceramic composition and piezoelectric actuator |
| US7595006B2 (en) | 2005-01-14 | 2009-09-29 | Atsushi Yamamoto | Piezoelectric ceramic composition and piezoelectric actuator |
| EP1840106A4 (en) * | 2005-01-14 | 2011-03-02 | Murata Manufacturing Co | PIEZOELECTRIC CERAMIC COMPOSITION AND PIEZOELECTRIC ACTUATOR |
| US7965020B2 (en) | 2007-02-07 | 2011-06-21 | Murata Manufacturing Co., Ltd. | Piezoelectric ceramic and piezoelectric element |
| KR101471001B1 (en) * | 2013-06-27 | 2014-12-09 | 주식회사 이노칩테크놀로지 | Piezoelectric material and it`s fabrication method for multi-layer enerty harvester device |
| CN109824357A (en) * | 2018-12-21 | 2019-05-31 | 贵州振华红云电子有限公司 | High-voltage electricity and the low temperature co-fired piezoelectric ceramics of high dielectric and preparation method thereof |
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